WO2008004306A1 - Unité de guidage linéaire hydrostatique - Google Patents

Unité de guidage linéaire hydrostatique Download PDF

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Publication number
WO2008004306A1
WO2008004306A1 PCT/JP2006/313584 JP2006313584W WO2008004306A1 WO 2008004306 A1 WO2008004306 A1 WO 2008004306A1 JP 2006313584 W JP2006313584 W JP 2006313584W WO 2008004306 A1 WO2008004306 A1 WO 2008004306A1
Authority
WO
WIPO (PCT)
Prior art keywords
shaft
slider
pressure fluid
linear motion
guide unit
Prior art date
Application number
PCT/JP2006/313584
Other languages
English (en)
Japanese (ja)
Inventor
Tetsunori Otaguro
Original Assignee
Hirata Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corporation filed Critical Hirata Corporation
Priority to PCT/JP2006/313584 priority Critical patent/WO2008004306A1/fr
Priority to JP2008523583A priority patent/JPWO2008004306A1/ja
Publication of WO2008004306A1 publication Critical patent/WO2008004306A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings

Definitions

  • the invention of the present application relates to a hydrostatic linear motion guide unit, and is particularly used when positioning a slider that moves linearly (straightly moves) along an axis with very fine accuracy of several microns or nano units. And a suitable hydrostatic linear motion guide unit.
  • Patent Document 1 describes several examples of such a static pressure linear motion guide unit.
  • high pressure air is supplied from the slider side, so a hose or the like for supplying high pressure air must be provided on the moving side.
  • a risk of affecting the positioning with accuracy and the structure is complicated, which inevitably increases costs.
  • symmetry is not maintained with respect to the axial center, there is a risk of lack of stability.
  • Patent Document 2 describes a hydrostatic rotation guide unit. In this device, the high-pressure air is supplied from the shaft side. This is a static pressure type rotary guide unit, not a static pressure type linear motion guide unit.
  • Patent Document 1 Japanese Unexamined Patent Publication No. 2006-29412
  • Patent Document 2 Japanese Patent Laid-Open No. 11-190336
  • the invention of the present application solves the above-mentioned problems of the conventional hydrostatic linear motion guide unit, and by providing a hose or the like for supplying high-pressure fluid such as high-pressure air on the fixed side,
  • the objective is to provide a static pressure linear motion guide unit that eliminates the possibility of impact on positioning with micro-precision, and has a simple structure, excellent stability, and reduced manufacturing costs. .
  • the hydrostatic linear motion guide unit includes a shaft that guides linear motion, and a slider that is fitted to the shaft leaving a small sliding gap and moves linearly along the shaft.
  • the static pressure linear motion is configured such that the high-pressure fluid supplied to the sliding gap holds the shaft and the slider in a non-contact state so that the slider moves linearly along the shaft.
  • a high-pressure fluid supply path is formed inside the shaft, and the high-pressure fluid supplied from a high-pressure fluid supply source is guided to the sliding gap through the high-pressure fluid supply path.
  • the hydrostatic linear motion guide unit is characterized by the above.
  • the high-pressure fluid supply path for guiding the high-pressure fluid to the sliding gap between the shaft and the slider and keeping them in a non-contact state is fixed. Since it is formed inside the shaft on the side, the linear movement of the slider on the moving side can be performed without hindrance, and the slider can be positioned with high accuracy with micro precision. In addition, the structure can be simplified and the manufacturing cost can be reduced.
  • the high-pressure fluid supply path is formed so as to be branched from the supply hole formed along the axial direction of the shaft and open to the sliding gap. It consists of a number of jet holes.
  • the sliding gap has a substantially polygonal cross-sectional shape, and the sliding gap includes a ridge line passing through each vertex of the substantially polygonal cross-sectional shape.
  • a plurality of fluid discharge paths are formed adjacent to each other, and a plurality of high-pressure fluids ejected from a plurality of ejection hole forces are combined to be discharged to the outside through the plurality of fluid discharge paths.
  • This configuration makes it possible to regulate the relative and macroscopic degree of freedom of rotation around the axis of the shaft and slider, and has a high degree of stability with only one axis.
  • a linear motion guide unit can be easily manufactured.
  • the pressure inside each of them is maintained at a substantially uniform atmospheric pressure, and the high-pressure fluids ejected from the plurality of ejection holes are respectively
  • the plurality of ejection holes are also uniformly ejected into the corresponding fluid discharge passages via the sliding gap, and the pressures of the fluid existing in the fluid discharge passage and the sliding gap are substantially uniform in the axial direction.
  • the holding of the slider in the non-contact state with respect to the shaft is not biased in the axial direction, the slider can be smoothly moved and positioned, and the slider can be positioned with a high degree of accuracy. You can.
  • the plurality of ejection holes are formed so as to open perpendicularly to the sliding gap.
  • the plurality of ejection holes are arranged so that the high-pressure fluid ejected from each ejection hole passes through each of the substantially polygonal planar flow paths having a cross-sectional shape of the sliding gap. Each is formed so as to flow the same length in the direction orthogonal to the direction and join the fluid discharge path.
  • the high-pressure fluid ejected from each of the plurality of ejection holes is divided into two directions in the direction of two adjacent fluid discharge channels in each planar flow channel of the sliding gap, and flows through the same flow channel length.
  • the plurality of ejection holes are respectively formed inside the shafts in a range in which a slider that moves linearly along the shaft always covers the shaft.
  • the hydrostatic linear motion guide unit of the invention of the present application the high pressure fluid is guided to the sliding gap between the shaft and the slider and is held in a non-contact state. Since the fluid supply path is formed inside the shaft on the fixed side, the slider on the moving side can be moved straight without any obstacles, and the slider can be positioned with a high degree of precision. be able to. Further, the structure is simplified, and the manufacturing cost can be reduced.
  • the high-pressure fluid supply path includes a supply hole formed along the axial direction of the shaft, and a plurality of ejection holes formed so as to branch from the supply hole and open into the sliding gap. Therefore, it is possible to simplify the structure of the high-pressure fluid supply path that guides the high-pressure fluid to the sliding gap between the shaft and the slider through the inside of the shaft, and easily form this in the shaft. it can.
  • the sliding gap has a substantially polygonal cross-sectional shape
  • the sliding gap has a plurality of fluid discharge paths along ridge lines passing through the respective apexes of the substantially polygonal shape of the cross-sectional shape.
  • the high pressure fluids formed adjacent to each other and ejected from each of the plurality of ejection hole forces merge and are discharged to the outside through the fluid discharge paths, respectively. It is possible to regulate the relative and macroscopic degree of freedom of rotation, and to easily produce a highly stable hydrostatic linear motion guide unit that has freedom only in one axis direction. I can do it.
  • a plurality of fluid discharge passages are formed as described above, and these fluid discharge passages are spaces that are relatively larger than the sliding gap, so that the pressure inside each of them is substantially equal.
  • the high-pressure fluid that is maintained at the same atmospheric pressure and is ejected from each of the plurality of ejection holes is uniformly ejected into the corresponding fluid discharge path via the plurality of ejection hole force sliding gaps.
  • Each pressure of the fluid existing in the fluid discharge path and the sliding gap is kept substantially uniform in the axial direction.
  • the non-contact holding of the slider in the non-contact state is not biased in the axial direction, the slider can be moved and positioned smoothly, and the slider can be positioned with a high degree of accuracy with micro precision. Can do.
  • the plurality of ejection holes are formed so as to open perpendicularly to the sliding gap, the dynamic pressure of the high-pressure fluid ejected from each of the plurality of ejection hole forces faces the sliding gap. There is no longer any extra rotation or propulsion force generated by the slider acting on the inner peripheral surface from an oblique direction.
  • the multiple ejection holes have the same length in the direction perpendicular to the axial direction of the shaft through the high-pressure fluid ejected from each of the ejection holes in the substantially polygonal planar flow path having a cross-sectional shape of the sliding gap.
  • the high-pressure fluids that have also been ejected from the plurality of ejection holes are two fluids adjacent to each other in each planar flow path of the sliding gap. Dividing into two directions in the direction of the discharge path, the same flow path length will flow, the pressure in the direction facing the axial cross section passing through the center of the ejection hole will be equal, and the polygonal cylinder on the inner peripheral surface of the slider Or, unnecessary rotational force is not applied to the adjacent corners of the polygonal cylinder. As a result, the linear movement and positioning of the slider can be performed more smoothly and stably, and the positioning of the slider with micro precision can be performed with higher accuracy.
  • the slider since the plurality of ejection holes are respectively formed inside the shaft in a range in which the slider that moves linearly along the shaft always covers the shaft, the slider with micro precision in a narrow region is formed. During positioning, etc., while the slider is moving, none of the multiple injection holes will appear outside! / Will fall within the range, and high-pressure fluid leaks through the multiple injection holes and is consumed. Can be minimized.
  • FIG. 1 is a schematic perspective view of a static pressure linear motion guide unit according to an embodiment (embodiment 1) of the present invention.
  • FIG. 2 is a side view of the same.
  • FIG. 3 is a side view of a modification of the first embodiment.
  • FIG. 4 is a side view of a static pressure linear motion guide unit according to another embodiment (Embodiment 2) of the present invention.
  • FIG. 5 is a side view of a modification of the second embodiment.
  • FIG. 6 is a side view of another modified example of the second embodiment.
  • FIG. 7 is a side view of a composite hydrostatic linear motion guide unit configured by combining two modifications of FIG. 1 (FIG. 3) upside down.
  • the shaft includes a shaft that guides linear motion and a slider that is fitted to the shaft leaving a small sliding gap and moves linearly along the shaft, and is supplied to the sliding gap.
  • a high-pressure fluid is introduced into the shaft.
  • a fluid supply path is formed, and the high-pressure fluid supplied from the high-pressure fluid supply source is guided to the sliding gap through the high-pressure fluid supply path.
  • the high-pressure fluid supply path includes a supply hole formed along the axial direction of the shaft, and a plurality of ejection holes formed so as to branch from the supply hole and open to the sliding gap. Shall be defined.
  • the sliding gap has a substantially polygonal cross-sectional shape, and the sliding gap forms a plurality of fluid discharge passages along a ridge line passing through each vertex of the substantially polygonal shape of the cross-sectional shape.
  • the high-pressure fluid ejected from each of the fluids merges and is discharged to the outside through the plurality of fluid discharge paths.
  • the plurality of high-pressure fluid ejection holes open perpendicularly to the sliding gap, and the sliders that linearly move along the axis always cover the axis. It will be formed.
  • FIG. 1 is a schematic perspective view of a hydrostatic linear motion guide unit according to the first embodiment
  • FIG. 2 is a side view thereof.
  • a slider fitted to a shaft is set on the shaft.
  • the slider serves as a stage or a base for placing and positioning the component, and the positioning is performed with a very micro precision of several micron or nano unit in a narrow micro area.
  • Such a static pressure type linear motion guide unit is particularly suitable for use in precision machinery manufacturing equipment such as semiconductor manufacturing equipment.
  • the hydrostatic linear motion guide unit 1 of the first embodiment includes a shaft 10 for linear motion guidance, and a small sliding gap 30 on the shaft 10. And a slider 20 that moves in a straight line along the axis 10.
  • a high-pressure fluid such as high-pressure air is supplied to the sliding gap 30 from a high-pressure fluid supply source (not shown), and the shaft 10 and the slider 20 are held in a non-contact state by the supplied high-pressure fluid.
  • a drive source such as a motor, the slider 20 moves linearly along the shaft 10 with very low friction.
  • the basic cross-sectional shape of the shaft 10 is an equilateral triangle, and in response to this, the basic cross-sectional shape of the inner peripheral surface of the slider 20 fitted to the shaft 10 leaving a small sliding gap 30. Is an equilateral triangle. Therefore, the basic shape of the shaft 10 is a regular triangular prism, and the basic shape of the inner peripheral surface of the slider 20 is a regular triangular cylinder.
  • a sliding gap 30 having a basic cross-sectional shape of an equilateral triangle is formed between the facing surfaces of the equilateral triangular prism and the equilateral triangular cylinder.
  • the sliding gap 30 has a uniform width (thickness) in all portions of the spread in the plane direction.
  • the outer contour shape of the cross section of the slider 20 may be a square or a rectangle depending on the size and shape of a component placed directly on the slider 20 or indirectly via a stage device. There is also a case.
  • a high-pressure fluid supply path for guiding the high-pressure fluid described above to the sliding gap 30 is formed inside the shaft 10.
  • This high-pressure fluid supply path has one relatively large-diameter supply hole 11 formed along the axial direction of the shaft 10, and branches from the supply hole 11 to form the sliding gap 30 and the regular triangular prism of the shaft 10. It is defined by a relatively small number (a plurality) of ejection holes 12 formed so as to open at right angles to each surface. In the first embodiment, a plurality of these ejection holes 12 are formed along the axial direction at positions that bisect each surface of the regular triangular prism of the shaft 10 in the width direction.
  • Supply hole 11 provides high pressure fluid supply at one end of shaft 10 Connected to the source via a tube, hose, etc.
  • the supply hole 11 may be configured to be connected to a high-pressure fluid supply source at both ends of the shaft 10.
  • each of the three ridge lines of the regular triangular prism of the axis 10 is cut off in one plane, and is omitted from the side view between the three corners of the regular triangular cylinder on the inner peripheral surface of the slider 20.
  • Three equilateral triangular fluid discharge paths 31 are formed along the axial direction.
  • the regular triangle of the basic cross-sectional shape of the sliding gap 30 is transformed into a substantially equilateral triangle (the overall shape of the sliding gap 30 is transformed into a substantially equilateral triangular cylinder), and each vertex thereof is transformed.
  • Three enlarged fluid discharge paths 31 are formed adjacent to the sliding gap 30 along the ridgeline that passes through.
  • the equilateral triangle of the basic cross-sectional shape of the shaft 10 is transformed into a substantially equilateral triangle as shown (see FIGS. 1 and 2).
  • the amount of deformation is intentionally enlarged in these figures to facilitate understanding.
  • the size of the passage of the fluid discharge passage 31 is larger than the size of the passage of the sliding gap 30.
  • the high-pressure fluid ejected from the plurality of ejection holes 12 is collected, and this fluid is collected outside the unit. Suitable for leading to. Therefore, the high-pressure fluid that has also been ejected from the plurality of ejection holes 12 that are opened on each surface of the substantially regular triangular prism of the shaft 10 is contained in the sliding gap 30 (more precisely, the cross-sectional shape of the sliding gap 30 is substantially positive).
  • Each triangular flow channel is divided into two adjacent fluid discharge channels 3 1 and flows in the same flow channel length (see arrows and flow channel lengths a and b in FIG. 2).
  • the fluid is merged in the fluid discharge path 31 ahead, and is discharged to the outside through the fluid discharge path 31.
  • the discharge direction may be opposite to the high-pressure fluid supply direction (see FIG. 1), may be the same direction, or may be both directions with a substantially central portion in the axial direction as a boundary. good. In this way, the flow of the high-pressure fluid ejected from each of the plurality of ejection holes 12 is stabilized, and it is possible to obtain steady levitation with respect to the shaft 10 of the slider 20.
  • the method of forming the fluid discharge path 31 may be modified as shown in FIG.
  • each ridge line of the regular triangular prism of the shaft 10 is recessed, and each corner of the regular triangular cylinder on the inner peripheral surface of the slider 20 is recessed.
  • these two concave depressions are combined to form a fluid discharge passage 31 having a substantially circular cross section.
  • the cross sectional shape of the inner peripheral surface of the slider 20 The square is deformed as shown (see FIG. 3).
  • the positioning of the slider 20 is performed with a very fine accuracy of several microns or nano units in a narrow micro area. It is used when Therefore, the amount of linear motion of the slider 20 is a minute amount of several hundred micron force up to several millimeters, so that the plurality of ejection holes 12 are within a range where the slider 20 that linearly moves along the axis 10 always covers the axis 10.
  • Each of the shafts 10 can be formed inside.
  • a high-pressure fluid supply path for guiding high-pressure fluid to the sliding gap 30 between the shaft 10 and the slider 20 and maintaining them in a non-contact state is formed inside the shaft 10 on the fixed side. Therefore, the linear movement of the slider 20 on the moving side can be performed without any obstacle, and the positioning of the slider 20 (positioning, accurate linear movement operation, etc.) can be performed with high accuracy with micro precision. Further, the structure is simplified, and the manufacturing cost can be reduced.
  • the high-pressure fluid supply path has a supply hole 11 formed along the axial direction of the shaft 10, and a plurality of holes formed so as to branch from the supply hole 11 and open to the sliding gap 30. Since it is defined by the ejection hole 12, the structure of the high-pressure fluid supply path that guides the high-pressure fluid through the inside of the shaft 10 to the sliding gap 30 between the shaft 10 and the slider 20 is simplified. It can be easily formed inside.
  • the sliding gap 30 has a substantially equilateral triangle in cross-sectional shape, and the sliding gap 30 has a plurality of fluid discharges along a ridge line passing through each vertex of the substantially equilateral triangle in the cross-sectional shape.
  • the passages 31 are formed adjacent to each other, and the high-pressure fluids ejected from the plurality of ejection holes 12 are joined together and discharged to the outside through the plurality of fluid discharge passages 31 respectively.
  • the macroscopic degree of freedom of rotation can be regulated, and the hydrostatic linear motion guide unit with excellent stability and freedom only in one axis direction 1 can be easily manufactured.
  • a plurality of fluid discharge paths 31 are formed as described above, and these fluid discharge paths 31 are spaces that are relatively larger than the sliding gap 30, so that the pressure inside each of them is High-pressure fluid force that is maintained at a substantially uniform atmospheric pressure and is ejected from each of the plurality of ejection holes 11 and is uniformly ejected from the plurality of ejection holes 11 via the sliding gap 30 into the corresponding fluid discharge passage 31.
  • each pressure of the fluid existing in the fluid discharge path 31 and the sliding gap 30 can be held substantially uniformly in the axial direction.
  • the non-contact holding of the slider 20 with respect to the shaft 10 is not biased in the axial direction, and the linear movement and positioning of the slider 20 can be performed smoothly, and the slider 20 can be positioned with micro precision. Can be performed with higher accuracy.
  • the pressure in the fluid discharge path 31 is almost equal to the atmospheric pressure over the entire axial length.
  • the pressure becomes high and deviates from the atmospheric pressure on the inner side in the axial direction, and becomes a low pressure close to the atmospheric pressure on the outer side in the axial direction.
  • the high-pressure fluid ejected from the plurality of ejection holes 11 formed along the axial direction respectively enters the corresponding fluid discharge path 31 via the sliding gap 30 from the plurality of ejection holes 11. It becomes impossible to eject uniformly, and the non-contact holding of the slider 20 with respect to the shaft 10 is biased in the axial direction, so that the positioning of the slider 20 with micro accuracy can be performed with high accuracy. become unable.
  • the plurality of ejection holes 12 are formed so as to open perpendicularly to the sliding gap 30, the dynamic pressure of the high-pressure fluid ejected from each of the plurality of ejection holes 12 slides.
  • the slider 20 does not act on the inner peripheral surface of the slider 20 facing the gap 30 from an oblique direction, and the slider 20 does not generate excessive rotational force or propulsive force.
  • the high-pressure fluid ejected from each of the plurality of ejection holes 12 is divided into two in the direction of two adjacent fluid discharge passages 31 in each planar flow passage having a substantially equilateral triangular cross-sectional shape of the sliding gap 30.
  • the plurality of ejection holes 11 are respectively formed inside the shaft 10 in a range in which the slider 20 that linearly moves along the shaft 10 covers the shaft 10 at all times, the microscopic in a narrow region is formed.
  • the slider 20 With a high degree of accuracy, it is possible to minimize the leakage and consumption of high-pressure fluid that passes through the plurality of ejection holes 11.
  • the first embodiment has a regular triangular shape of the basic cross-sectional shape of the shaft 10, a regular triangular shape of the basic sectional shape of the inner peripheral surface of the slider 20, and a regular triangular shape of the basic sectional structure of the sliding gap 30. Further modifications can be made by transforming into an odd regular polygon such as a regular pentagon or a regular heptagon. These modified examples can also exhibit the same effects as the static pressure linear motion guide unit 1 of the first embodiment.
  • FIG. 4 is a side view of the static pressure linear motion guide unit of the second embodiment.
  • the static pressure linear motion guide unit 1 of the second embodiment has a rectangular (quadrature) basic cross-sectional shape of the shaft 10 and the inner circumference of the slider 20. This is different in that the basic cross-sectional shape of the surface is rectangular and the basic cross-sectional structure of the sliding gap 30 is rectangular. In this case, these rectangles do not necessarily have to be squares (regular tetragons).
  • the shape of the four corners of the cross-sectional structure of the sliding gap 30 is due to the fact that the basic cross-sectional shape of the shaft 10 and the like is rectangular, and the hydrostatic linear motion of Example 1 Slightly different from that of guide unit 1. That is, in the static pressure linear motion guide unit 1 of the second embodiment, each of the four ridge lines of the quadrangular column of the shaft 10 is cut off by one plane, and the slider 20 Between the four corners of the square cylinder on the inner peripheral surface of the cylinder, four fluid discharge paths 31 having a substantially triangular shape in side view are formed along the axial direction.
  • the hydrostatic linear motion guide unit 1 of the second embodiment is different from the hydrostatic linear motion guide unit 1 of the first embodiment in the above points, but there are no particular differences in other points. The explanation is omitted.
  • the static pressure linear motion guide unit 1 of the second embodiment is configured as described above, and acts on each surface of the rectangular cylinder of the shaft 10 and each surface of the square cylinder on the inner peripheral surface of the slider 20. Since the pressures of the high-pressure fluids that cancel each other around the shaft 10 do not generate a force (rotational force or torque) to rotate the slider 20 around the shaft 10, and Therefore, the non-contact holding of the slider 20 with respect to the shaft 10 is not biased in the radial direction, and as a result, the subtle asymmetry of the fluid pressure in the axial direction from the supply direction of the high-pressure fluid to the discharge direction (high pressure on the upstream side) Therefore, even if a low pressure occurs on the downstream side, the slider 20 can be linearly moved and positioned smoothly without tilting, increasing the positioning of the slider 20 with high accuracy. Precision can be done .
  • the static pressure linear motion guide unit 1 of the second embodiment can be modified as shown in FIGS. 5 and 6.
  • each of the four corners of the rectangular cylinder on the inner peripheral surface of the slider 20 is recessed, and the side view is omitted between the square column of the shaft 10 and Four circular fluid discharge paths 31 are formed along the axial direction.
  • each of the four corners of the quadrangular column of the shaft 10 and each of the four corners of the square cylinder on the inner peripheral surface of the slider 20 are Each of the concavities, which are opposed to each other, are combined to form four fluid discharge passages 31 that are substantially circular in a side view along the axial direction.
  • the basic cross-sectional rectangle of the shaft 10, the basic cross-sectional rectangle of the inner peripheral surface of the slider 20, and the basic cross-sectional rectangle of the sliding gap 30 are all hexagonal and octagonal. Further deformation can be performed by deforming into an even polygon such as a shape. In either case, their cross-sectional shapes need to be symmetrical with respect to the horizontal plane passing through the center of the axis 10 and symmetrical with respect to the vertical plane passing through the center of the axis 10. By doing in this way, these modified examples can also have the same effect as that produced by the static pressure linear motion guide unit 1 of the second embodiment.
  • the polygon of the cross-sectional shape of the shaft 10 can all be transformed into an ellipse.
  • the static pressure type linear motion guide unit 1 of the first embodiment is modified in an upside down manner to combine two, and each of the static pressure type linear motion guides is combined. It is also possible to obtain the combined static pressure linear motion guide unit 40 by creating the slider 20 of the unit 1 integrally with the same material force and integrating the both static pressure linear motion guide units 1 together. .
  • the slider 20 on the fixed side and the shaft 10 on the moving side.
  • the linear movement of the shaft 10 is not performed without any obstacles, and it is somewhat difficult to position the shaft 10 with a microscopic accuracy with high accuracy.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

L'invention concerne une unité (1) de guidage linéaire hydrostatique ayant un arbre (10) pour effectuer un guidage linéaire et une coulisse (20) adaptée sur l'arbre (10) avec un très petit espace de coulissement (30) laissé entre les deux et se déplaçant linéairement le long de l'arbre (10). De la fluide haute pression adressée dans le très petit espace de coulissement (30) maintient l'arbre (10) et la coulisse (20) sans contact entre eux, et la coulisse (20) se déplace linéairement le long de l'arbre (10). Un chemin d'alimentation de fluide haute pression est formé à l'intérieur de l'arbre (10) pour permettre au fluide haute pression adressé à partir d'une source d'alimentation en fluide haute pression d'être amené à l'espace de coulissement (30) à travers le chemin d'alimentation en fluide haute pression. Le chemin d'alimentation en fluide haute pression est composé d'un trou d'alimentation (11) et de trous d'éjection (12) branchés à partir du trou d'alimentation (11). La structure permet à un tuyau souple pour l'alimentation en fluide haute pression, tel que de l'air haute pression, d'être placé sur le côté stationnaire. Ceci permet d'éliminer une influence au positionnement de composants latéraux de mouvement qui est effectué avec une précision de l'ordre du micron. Ainsi, l'unité de guidage linéaire hydrostatique a une structure simple, présente une excellente stabilité de fonctionnement et a des coûts de fabrication réduits.
PCT/JP2006/313584 2006-07-07 2006-07-07 Unité de guidage linéaire hydrostatique WO2008004306A1 (fr)

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PCT/JP2006/313584 WO2008004306A1 (fr) 2006-07-07 2006-07-07 Unité de guidage linéaire hydrostatique
JP2008523583A JPWO2008004306A1 (ja) 2006-07-07 2006-07-07 静圧形直動案内ユニット

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013194816A (ja) * 2012-03-19 2013-09-30 Sumitomo Heavy Ind Ltd エアガイド装置
WO2016076083A1 (fr) * 2014-11-12 2016-05-19 Ntn株式会社 Actionneur linéaire électrique et dispositif de frein électrique
JP2017073501A (ja) * 2015-10-08 2017-04-13 株式会社ニューフレアテクノロジー ステージ装置および荷電粒子ビーム描画装置
CN112576622A (zh) * 2020-11-19 2021-03-30 西北工业大学 一种短行程导轨供气的气浮式移动装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPS617617U (ja) * 1984-06-20 1986-01-17 エヌ・テ−・エヌ東洋ベアリング株式会社 静圧スライド
JPS62117035U (fr) * 1986-01-16 1987-07-25
JP2005273882A (ja) * 2004-03-26 2005-10-06 Kyocera Corp 真空対応型静圧流体軸受

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60113816A (ja) * 1983-11-22 1985-06-20 Miyoutoku:Kk エア−スライド装置
JPS617617U (ja) * 1984-06-20 1986-01-17 エヌ・テ−・エヌ東洋ベアリング株式会社 静圧スライド
JPS62117035U (fr) * 1986-01-16 1987-07-25
JP2005273882A (ja) * 2004-03-26 2005-10-06 Kyocera Corp 真空対応型静圧流体軸受

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013194816A (ja) * 2012-03-19 2013-09-30 Sumitomo Heavy Ind Ltd エアガイド装置
WO2016076083A1 (fr) * 2014-11-12 2016-05-19 Ntn株式会社 Actionneur linéaire électrique et dispositif de frein électrique
JP2017073501A (ja) * 2015-10-08 2017-04-13 株式会社ニューフレアテクノロジー ステージ装置および荷電粒子ビーム描画装置
CN112576622A (zh) * 2020-11-19 2021-03-30 西北工业大学 一种短行程导轨供气的气浮式移动装置

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