JP5972611B2 - 直動浮上装置 - Google Patents
直動浮上装置 Download PDFInfo
- Publication number
- JP5972611B2 JP5972611B2 JP2012049845A JP2012049845A JP5972611B2 JP 5972611 B2 JP5972611 B2 JP 5972611B2 JP 2012049845 A JP2012049845 A JP 2012049845A JP 2012049845 A JP2012049845 A JP 2012049845A JP 5972611 B2 JP5972611 B2 JP 5972611B2
- Authority
- JP
- Japan
- Prior art keywords
- slide shaft
- slider
- plates
- base material
- porous layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005339 levitation Methods 0.000 title claims description 5
- 239000002184 metal Substances 0.000 claims description 45
- 230000003068 static effect Effects 0.000 claims description 17
- 239000000463 material Substances 0.000 claims description 14
- 230000002093 peripheral effect Effects 0.000 claims description 12
- 230000002706 hydrostatic effect Effects 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 description 19
- 238000003780 insertion Methods 0.000 description 8
- 230000037431 insertion Effects 0.000 description 8
- 238000010030 laminating Methods 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 235000019198 oils Nutrition 0.000 description 2
- 230000035699 permeability Effects 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
- F16C32/0618—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings via porous material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
- F16C33/02—Parts of sliding-contact bearings
- F16C33/04—Brasses; Bushes; Linings
- F16C33/06—Sliding surface mainly made of metal
- F16C33/12—Structural composition; Use of special materials or surface treatments, e.g. for rust-proofing
- F16C33/128—Porous bearings, e.g. bushes of sintered alloy
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Dispersion Chemistry (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Description
軸心方向に沿った複数の側面を有する角柱形のスライド軸と、
前記スライド軸の軸心周りに前記スライド軸を囲み、前記スライド軸の前記各側面に対向する内壁面を有し、前記スライド軸に対して、前記軸心方向に沿って相対的に移動するスライダと、を備え、
前記スライド軸の側面および前記スライダの内壁面のうち、いずれか一方の面は、当該面に対向する他方の面を支持対象面として非接触で支持する静圧気体軸受面を含み、
前記スライド軸および前記スライダのうち、前記静圧気体軸受面を有する一方の部品は、
前記各支持対象面側に向けられた溝形成面を有し、当該溝形成面の外周領域に、前記静圧気体軸受面から前記支持対象面に向けて噴出させる圧縮気体が供給される給気溝が、当該静圧気体軸受面の縁に沿った一重のパターンで形成されたベース材と、
前記ベース材の前記溝形成面に積層され、前記静圧気体軸受面を形成する多孔質層と、を有する。
Claims (3)
- 軸心方向に沿った複数の側面を有する角柱形のスライド軸と、
前記スライド軸の軸心周りに前記スライド軸を囲み、前記スライド軸の前記各側面に対向する内壁面を有し、前記スライド軸に対して、前記軸心方向に沿って相対的に移動するスライダと、を備え、
前記スライド軸の側面および前記スライダの内壁面のうち、いずれか一方の面は、当該面に対向する他方の面を支持対象面として非接触で支持する静圧気体軸受面を含み、
前記スライド軸および前記スライダのうち、前記静圧気体軸受面を有する一方の部品は、
前記各支持対象面側に向けられた溝形成面を有し、当該溝形成面の外周領域に、前記静圧気体軸受面から前記支持対象面に向けて噴出させる圧縮気体が供給される給気溝が、当該静圧気体軸受面の縁に沿った一重のパターンで形成されたベース材と、
前記ベース材の前記溝形成面に積層され、前記静圧気体軸受面を形成する多孔質層と、を有することを特徴とする直動浮上装置。 - 請求項1に記載の直動浮上装置であって、
前記スライダは、それぞれ前記ベース材および前記多孔質層を有し、前記スライド軸の支持対象面に前記多孔質層を向けて組み立てられた複数のプレートを備え、
前記各プレートの前記ベース材には、当該ベース材に形成された前記給気溝と交わり、当該プレートと隣り合う他の前記プレートの前記ベース材の通気路につながる通気路がさらに形成されており、
前記複数のプレートのうち、1枚の前記プレートの前記ベース材には、前記溝形成面の反対側の面に、当該ベース材に形成された前記給気溝とつながる給気口が形成されている
ことを特徴とする直動浮上装置。 - 請求項1または2に記載の直動浮上装置であって、
前記多孔質層は、セラミックまたは多孔質金属焼結層である
ことを特徴とする直動浮上装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012049845A JP5972611B2 (ja) | 2012-03-06 | 2012-03-06 | 直動浮上装置 |
PCT/JP2013/054339 WO2013133036A1 (ja) | 2012-03-06 | 2013-02-21 | 直動浮上装置 |
KR1020147027646A KR102004015B1 (ko) | 2012-03-06 | 2013-02-21 | 직동 부상 장치 |
CN201380013111.XA CN104204570A (zh) | 2012-03-06 | 2013-02-21 | 直接浮动装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2012049845A JP5972611B2 (ja) | 2012-03-06 | 2012-03-06 | 直動浮上装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2013185623A JP2013185623A (ja) | 2013-09-19 |
JP5972611B2 true JP5972611B2 (ja) | 2016-08-17 |
Family
ID=49116519
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012049845A Active JP5972611B2 (ja) | 2012-03-06 | 2012-03-06 | 直動浮上装置 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP5972611B2 (ja) |
KR (1) | KR102004015B1 (ja) |
CN (1) | CN104204570A (ja) |
WO (1) | WO2013133036A1 (ja) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI642858B (zh) * | 2017-09-06 | 2018-12-01 | 友達光電股份有限公司 | 氣浮軸承模組 |
CN115727062A (zh) * | 2022-11-03 | 2023-03-03 | 中国工程物理研究院总体工程研究所 | 一种用于精密直线振动台装置的复合式精密气体静压轴承 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6043724U (ja) * | 1983-09-02 | 1985-03-27 | 東陶機器株式会社 | 静圧流体軸受スライダー |
JP3660779B2 (ja) * | 1997-04-25 | 2005-06-15 | 京セラ株式会社 | 静圧気体軸受装置 |
JP2004019760A (ja) * | 2002-06-14 | 2004-01-22 | Nsk Ltd | 静圧軸受 |
JP2005273882A (ja) * | 2004-03-26 | 2005-10-06 | Kyocera Corp | 真空対応型静圧流体軸受 |
JP4468059B2 (ja) * | 2004-04-23 | 2010-05-26 | 太平洋セメント株式会社 | 静圧軸受け装置 |
JP5084580B2 (ja) * | 2008-03-26 | 2012-11-28 | 京セラ株式会社 | 移動装置 |
JP2011247405A (ja) * | 2009-07-30 | 2011-12-08 | Kyocera Corp | 案内装置 |
-
2012
- 2012-03-06 JP JP2012049845A patent/JP5972611B2/ja active Active
-
2013
- 2013-02-21 KR KR1020147027646A patent/KR102004015B1/ko active IP Right Grant
- 2013-02-21 WO PCT/JP2013/054339 patent/WO2013133036A1/ja active Application Filing
- 2013-02-21 CN CN201380013111.XA patent/CN104204570A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
WO2013133036A1 (ja) | 2013-09-12 |
KR20140133902A (ko) | 2014-11-20 |
CN104204570A (zh) | 2014-12-10 |
JP2013185623A (ja) | 2013-09-19 |
KR102004015B1 (ko) | 2019-07-25 |
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