JP2017183529A - 薄膜インダクタ - Google Patents
薄膜インダクタ Download PDFInfo
- Publication number
- JP2017183529A JP2017183529A JP2016068789A JP2016068789A JP2017183529A JP 2017183529 A JP2017183529 A JP 2017183529A JP 2016068789 A JP2016068789 A JP 2016068789A JP 2016068789 A JP2016068789 A JP 2016068789A JP 2017183529 A JP2017183529 A JP 2017183529A
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- layer
- coil
- thin film
- film inductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 59
- 239000004020 conductor Substances 0.000 claims description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 17
- 239000007769 metal material Substances 0.000 claims description 15
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- 239000002131 composite material Substances 0.000 claims description 9
- 239000010949 copper Substances 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 7
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 6
- 229910052742 iron Inorganic materials 0.000 claims description 6
- 229910052782 aluminium Inorganic materials 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- 238000009413 insulation Methods 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 198
- 239000011810 insulating material Substances 0.000 description 19
- 238000007747 plating Methods 0.000 description 14
- 239000011889 copper foil Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 235000012431 wafers Nutrition 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 4
- 239000010408 film Substances 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- -1 polyethylene Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000976 Electrical steel Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910004541 SiN Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910001035 Soft ferrite Inorganic materials 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
- H01F17/0013—Printed inductances with stacked layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/32—Insulating of coils, windings, or parts thereof
- H01F27/323—Insulation between winding turns, between winding layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/042—Printed circuit coils by thin film techniques
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/02—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets
- H01F41/04—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for manufacturing cores, coils, or magnets for manufacturing coils
- H01F41/041—Printed circuit coils
- H01F41/046—Printed circuit coils structurally combined with ferromagnetic material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/04—Fixed inductances of the signal type with magnetic core
- H01F2017/048—Fixed inductances of the signal type with magnetic core with encapsulating core, e.g. made of resin and magnetic powder
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F27/00—Details of transformers or inductances, in general
- H01F27/28—Coils; Windings; Conductive connections
- H01F27/2804—Printed windings
- H01F2027/2809—Printed windings on stacked layers
Abstract
【解決手段】薄膜インダクタ1では、ヤング率の低い第1絶縁層21がコイル部10の周囲を被覆することで、外部から何らかの力を受けた場合に第1絶縁層21が応力を吸収することで、コイル部10が変形することを防ぐことができ、インダクタとしての特性の低下を防ぐことができる。また、第2絶縁層22が第1絶縁層21を被覆する構成を備えることにより、薄膜インダクタ1全体としての剛性を高めることができる。
【選択図】図3
Description
Claims (3)
- 少なくとも一層のコイル導体層で構成され、両端部に端子電極が設けられたコイル部と、
前記コイル部を被覆する第1絶縁層と、
前記第1絶縁層を被覆し、前記第1絶縁層よりもヤング率が高い第2絶縁層と、を備える薄膜インダクタ。 - 前記第2絶縁層は、セラミック又は樹脂と、金属材料と、の複合材料を主成分とする請求項1に記載の薄膜インダクタ。
- 前記金属材料はニッケル、鉄、アルミニウム又は銅である請求項2に記載の薄膜インダクタ。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016068789A JP6740668B2 (ja) | 2016-03-30 | 2016-03-30 | 薄膜インダクタ |
US15/467,278 US10366820B2 (en) | 2016-03-30 | 2017-03-23 | Thin film inductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016068789A JP6740668B2 (ja) | 2016-03-30 | 2016-03-30 | 薄膜インダクタ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2017183529A true JP2017183529A (ja) | 2017-10-05 |
JP6740668B2 JP6740668B2 (ja) | 2020-08-19 |
Family
ID=59961907
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2016068789A Active JP6740668B2 (ja) | 2016-03-30 | 2016-03-30 | 薄膜インダクタ |
Country Status (2)
Country | Link |
---|---|
US (1) | US10366820B2 (ja) |
JP (1) | JP6740668B2 (ja) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018037652A (ja) * | 2016-08-30 | 2018-03-08 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | インダクタの製造方法及びインダクタ |
JP2019125707A (ja) * | 2018-01-17 | 2019-07-25 | Tdk株式会社 | コイル部品及びその製造方法 |
JP2020027820A (ja) * | 2018-08-09 | 2020-02-20 | 新光電気工業株式会社 | インダクタ及びインダクタの製造方法 |
JP2020191408A (ja) * | 2019-05-23 | 2020-11-26 | 株式会社村田製作所 | コイル部品 |
JP2021022611A (ja) * | 2019-07-25 | 2021-02-18 | 株式会社村田製作所 | インダクタ部品 |
JP7435387B2 (ja) | 2020-09-28 | 2024-02-21 | Tdk株式会社 | 積層コイル部品 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017179590A1 (ja) * | 2016-04-14 | 2017-10-19 | 株式会社村田製作所 | 受動素子アレイおよびプリント配線板 |
KR101883046B1 (ko) * | 2016-04-15 | 2018-08-24 | 삼성전기주식회사 | 코일 전자 부품 |
KR102494352B1 (ko) * | 2017-10-20 | 2023-02-03 | 삼성전기주식회사 | 코일 전자부품 |
DE102017124675A1 (de) * | 2017-10-23 | 2019-04-25 | Gottfried Wilhelm Leibniz Universität Hannover | Herstellung induktiver elektrischer Bauelemente |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006310716A (ja) * | 2005-03-31 | 2006-11-09 | Tdk Corp | 平面コイル素子 |
JP2008072071A (ja) * | 2006-09-15 | 2008-03-27 | Taiyo Yuden Co Ltd | コモンモードチョークコイル |
JP2014170917A (ja) * | 2013-02-28 | 2014-09-18 | Samsung Electro-Mechanics Co Ltd | コモンモードフィルター及びその製造方法 |
JP2015126199A (ja) * | 2013-12-27 | 2015-07-06 | 東光株式会社 | 電子部品の製造方法、電子部品 |
JP2016009858A (ja) * | 2014-06-24 | 2016-01-18 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | チップ電子部品及びその製造方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5459120B2 (ja) * | 2009-07-31 | 2014-04-02 | 住友電気工業株式会社 | リアクトル、リアクトル用部品、及びコンバータ |
KR20130117397A (ko) * | 2012-04-17 | 2013-10-28 | 주식회사 이노칩테크놀로지 | 회로 보호 소자 |
KR101973410B1 (ko) | 2013-08-14 | 2019-09-02 | 삼성전기주식회사 | 박막 인덕터용 코일 유닛, 박막 인덕터용 코일 유닛의 제조방법, 박막 인덕터 및 박막 인덕터의 제조방법 |
KR101975478B1 (ko) * | 2013-10-04 | 2019-05-07 | 삼성전기주식회사 | 자성 기판 및 그 제조 방법, 상기 자성 기판과 절연재의 접합 구조물, 그리고 상기 접합 구조물을 갖는 칩 부품 |
US20160086722A1 (en) * | 2014-09-19 | 2016-03-24 | Samsung Electro-Mechanics Co., Ltd. | Common mode filter and method of manufacturing the same |
-
2016
- 2016-03-30 JP JP2016068789A patent/JP6740668B2/ja active Active
-
2017
- 2017-03-23 US US15/467,278 patent/US10366820B2/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006310716A (ja) * | 2005-03-31 | 2006-11-09 | Tdk Corp | 平面コイル素子 |
JP2008072071A (ja) * | 2006-09-15 | 2008-03-27 | Taiyo Yuden Co Ltd | コモンモードチョークコイル |
JP2014170917A (ja) * | 2013-02-28 | 2014-09-18 | Samsung Electro-Mechanics Co Ltd | コモンモードフィルター及びその製造方法 |
JP2015126199A (ja) * | 2013-12-27 | 2015-07-06 | 東光株式会社 | 電子部品の製造方法、電子部品 |
JP2016009858A (ja) * | 2014-06-24 | 2016-01-18 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | チップ電子部品及びその製造方法 |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10763031B2 (en) | 2016-08-30 | 2020-09-01 | Samsung Electro-Mechanics Co., Ltd. | Method of manufacturing an inductor |
JP2018037652A (ja) * | 2016-08-30 | 2018-03-08 | サムソン エレクトロ−メカニックス カンパニーリミテッド. | インダクタの製造方法及びインダクタ |
US11600430B2 (en) | 2016-08-30 | 2023-03-07 | Samsung Electro-Mechanics Co., Ltd. | Inductor including high-rigidity insulating layers |
JP2019125707A (ja) * | 2018-01-17 | 2019-07-25 | Tdk株式会社 | コイル部品及びその製造方法 |
JP7069739B2 (ja) | 2018-01-17 | 2022-05-18 | Tdk株式会社 | コイル部品及びその製造方法 |
US11527346B2 (en) | 2018-08-09 | 2022-12-13 | Shinko Electric Industries Co., Ltd. | Inductor |
JP2020027820A (ja) * | 2018-08-09 | 2020-02-20 | 新光電気工業株式会社 | インダクタ及びインダクタの製造方法 |
JP7223525B2 (ja) | 2018-08-09 | 2023-02-16 | 新光電気工業株式会社 | インダクタ及びインダクタの製造方法 |
JP2020191408A (ja) * | 2019-05-23 | 2020-11-26 | 株式会社村田製作所 | コイル部品 |
JP7226094B2 (ja) | 2019-05-23 | 2023-02-21 | 株式会社村田製作所 | コイル部品 |
US11646147B2 (en) | 2019-05-23 | 2023-05-09 | Murata Manufacturing Co., Ltd. | Coil component |
JP2022173530A (ja) * | 2019-07-25 | 2022-11-18 | 株式会社村田製作所 | インダクタ部品 |
JP7156197B2 (ja) | 2019-07-25 | 2022-10-19 | 株式会社村田製作所 | インダクタ部品 |
JP2021022611A (ja) * | 2019-07-25 | 2021-02-18 | 株式会社村田製作所 | インダクタ部品 |
JP7447959B2 (ja) | 2019-07-25 | 2024-03-12 | 株式会社村田製作所 | インダクタ部品 |
JP7435387B2 (ja) | 2020-09-28 | 2024-02-21 | Tdk株式会社 | 積層コイル部品 |
Also Published As
Publication number | Publication date |
---|---|
JP6740668B2 (ja) | 2020-08-19 |
US20170287622A1 (en) | 2017-10-05 |
US10366820B2 (en) | 2019-07-30 |
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