JP2017171551A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017171551A5 JP2017171551A5 JP2016061387A JP2016061387A JP2017171551A5 JP 2017171551 A5 JP2017171551 A5 JP 2017171551A5 JP 2016061387 A JP2016061387 A JP 2016061387A JP 2016061387 A JP2016061387 A JP 2016061387A JP 2017171551 A5 JP2017171551 A5 JP 2017171551A5
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- electrode portion
- ozone gas
- interval
- electrode part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 43
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 37
- 238000004519 manufacturing process Methods 0.000 claims description 9
- 150000002736 metal compounds Chemical class 0.000 claims description 7
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000002184 metal Substances 0.000 claims description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- 238000007599 discharging Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 1
- 229910052758 niobium Inorganic materials 0.000 claims 1
- 239000010955 niobium Substances 0.000 claims 1
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 claims 1
- 239000010936 titanium Substances 0.000 claims 1
- 229910052719 titanium Inorganic materials 0.000 claims 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims 1
- 229910052721 tungsten Inorganic materials 0.000 claims 1
- 239000010937 tungsten Substances 0.000 claims 1
- 239000002994 raw material Substances 0.000 description 2
Priority Applications (7)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016061387A JP6374902B2 (ja) | 2016-03-25 | 2016-03-25 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
| PCT/JP2017/011243 WO2017164178A1 (ja) | 2016-03-25 | 2017-03-21 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
| EP17770220.6A EP3434643A4 (en) | 2016-03-25 | 2017-03-21 | OZONE GAS GENERATION DEVICE AND METHOD FOR PRODUCING AN OZONE GAS GENERATION DEVICE |
| CN201780015820.XA CN108712998A (zh) | 2016-03-25 | 2017-03-21 | 臭氧气体生成装置及臭氧气体生成装置的制造方法 |
| KR1020187025828A KR102173948B1 (ko) | 2016-03-25 | 2017-03-21 | 오존 가스 발생 장치 및 오존 가스 발생 장치의 제조 방법 |
| US16/084,812 US11111144B2 (en) | 2016-03-25 | 2017-03-21 | Ozone gas generator and method for manufacturing ozone gas generator |
| TW106109527A TWI731950B (zh) | 2016-03-25 | 2017-03-22 | 臭氧氣體產生裝置及臭氧氣體產生裝置的製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016061387A JP6374902B2 (ja) | 2016-03-25 | 2016-03-25 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017171551A JP2017171551A (ja) | 2017-09-28 |
| JP6374902B2 JP6374902B2 (ja) | 2018-08-15 |
| JP2017171551A5 true JP2017171551A5 (enExample) | 2018-08-16 |
Family
ID=59899468
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016061387A Active JP6374902B2 (ja) | 2016-03-25 | 2016-03-25 | オゾンガス発生装置およびオゾンガス発生装置の製造方法 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11111144B2 (enExample) |
| EP (1) | EP3434643A4 (enExample) |
| JP (1) | JP6374902B2 (enExample) |
| KR (1) | KR102173948B1 (enExample) |
| CN (1) | CN108712998A (enExample) |
| TW (1) | TWI731950B (enExample) |
| WO (1) | WO2017164178A1 (enExample) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116157354B (zh) * | 2020-08-04 | 2025-07-15 | 住友精密工业株式会社 | 臭氧产生装置 |
| JP7499218B2 (ja) * | 2021-07-02 | 2024-06-13 | 日本特殊陶業株式会社 | オゾン発生体及びオゾン発生器 |
| CN115594152B (zh) * | 2021-07-09 | 2024-07-09 | 财团法人工业技术研究院 | 臭氧产生装置以及臭氧产生方法 |
| CN116553482A (zh) * | 2023-05-23 | 2023-08-08 | 苏州晶拓半导体科技有限公司 | 无氮添加高浓度臭氧发生装置及其制备方法 |
| KR102786870B1 (ko) | 2024-11-27 | 2025-03-28 | 에코인사이트 주식회사 | 플라즈마 볼텍스를 이용한 고효율 오존 생성장치 |
| JP7839937B1 (ja) * | 2025-03-27 | 2026-04-02 | 住友精密工業株式会社 | オゾンガス発生用放電セル及びその製造方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0733405A (ja) * | 1993-07-15 | 1995-02-03 | Fuji Electric Co Ltd | オゾン発生装置 |
| JPH07242403A (ja) * | 1994-03-04 | 1995-09-19 | Meidensha Corp | オゾン発生装置 |
| US6060027A (en) * | 1998-05-14 | 2000-05-09 | Fantom Technologies Inc. | Ozone generator |
| JP4260335B2 (ja) * | 2000-04-10 | 2009-04-30 | 三菱電機株式会社 | オゾン発生装置およびその製造方法 |
| JP2005053766A (ja) * | 2003-07-18 | 2005-03-03 | Ishikawajima Harima Heavy Ind Co Ltd | オゾン発生装置 |
| TW200528390A (en) * | 2004-02-25 | 2005-09-01 | Toshiba Mitsubishi Elec Inc | Apparatus and method of producing ozone gas |
| WO2007014473A1 (de) * | 2005-08-03 | 2007-02-08 | Ozonia Ag | Ozongenerator |
| JP5283400B2 (ja) * | 2008-03-05 | 2013-09-04 | 住友精密工業株式会社 | オゾン発生装置用放電セル |
| TWI476145B (zh) * | 2009-06-02 | 2015-03-11 | 鴻海精密工業股份有限公司 | 臭氧發生裝置 |
| JP5369189B2 (ja) * | 2009-10-02 | 2013-12-18 | 住友精密工業株式会社 | オゾンガス発生装置及びその製造方法 |
| JP2012126614A (ja) | 2010-12-16 | 2012-07-05 | Mitsubishi Electric Corp | オゾン発生装置およびオゾン発生装置の製造方法 |
| CA2764215C (en) * | 2010-12-21 | 2014-03-18 | Kabushiki Kaisha Toshiba | Ozone generating apparatus |
-
2016
- 2016-03-25 JP JP2016061387A patent/JP6374902B2/ja active Active
-
2017
- 2017-03-21 EP EP17770220.6A patent/EP3434643A4/en not_active Withdrawn
- 2017-03-21 KR KR1020187025828A patent/KR102173948B1/ko active Active
- 2017-03-21 CN CN201780015820.XA patent/CN108712998A/zh active Pending
- 2017-03-21 US US16/084,812 patent/US11111144B2/en active Active
- 2017-03-21 WO PCT/JP2017/011243 patent/WO2017164178A1/ja not_active Ceased
- 2017-03-22 TW TW106109527A patent/TWI731950B/zh active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI552222B (zh) | 用於介電蝕刻的負離子控制 | |
| JP2012504843A5 (enExample) | ||
| JP6374902B2 (ja) | オゾンガス発生装置およびオゾンガス発生装置の製造方法 | |
| JP6239483B2 (ja) | 窒素ラジカル生成システム | |
| JPWO2019229873A1 (ja) | 活性ガス生成装置 | |
| JP2013168396A5 (enExample) | ||
| JP6495854B2 (ja) | 半導体装置の製造方法 | |
| JP2018182290A (ja) | 静電チャック | |
| TWI577632B (zh) | 臭氧產生裝置 | |
| US9455683B2 (en) | Piezoelectric piece for piezoelectric vibrator and manufacturing method thereof | |
| US10577261B2 (en) | Water treatment apparatus and water treatment method | |
| JP5961899B2 (ja) | 大気圧プラズマ発生装置 | |
| WO2018164005A1 (ja) | 空気清浄機 | |
| JP2019014624A (ja) | 放電反応装置 | |
| JP5664792B2 (ja) | オゾン発生装置およびその製造方法 | |
| JP2006196210A (ja) | プラズマ発生装置 | |
| FI3272706T3 (fi) | Otsonikaasugeneraattori ja menetelmä otsonikaasugeneraattorin valmistamiseksi | |
| JP2019199390A (ja) | オゾン発生装置 | |
| US20140332513A1 (en) | Device for drilling a substrate and a method for drilling a substrate | |
| JP2019139950A5 (enExample) | ||
| JP6865727B2 (ja) | ＳｉＧｅ層のエッチング方法 | |
| JP5750938B2 (ja) | オゾン発生装置 | |
| JP2022038899A (ja) | 発電素子 | |
| JP2020030965A (ja) | 電極装置、プラズマ発生装置 | |
| JP2008264699A (ja) | 振動子 |