JP2017168859A - シリコンナノ粒子を用いて太陽電池を製造するためのレーザー接触プロセス、レーザーシステム及び太陽電池構造 - Google Patents
シリコンナノ粒子を用いて太陽電池を製造するためのレーザー接触プロセス、レーザーシステム及び太陽電池構造 Download PDFInfo
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Abstract
【解決手段】レーザー接触プロセスを用いて、エミッタに至るコンタクトホールを形成する。表面をナノ粒子パッシベーション膜でコーティングしたドープシリコンナノ粒子を基板上に形成し、不動態化されたシリコンナノ粒子上にレーザービームを当てて、太陽電池のエミッタに至るコンタクトホールを形成する。その際、エミッタに至るコンタクトホールを形成する前に、シリコンナノ粒子からドーパントを拡散させてエミッタを形成してもよい。さらに、レーザー接触プロセスはレーザー溶融プロセスであってよく、このレーザー溶融プロセスでシリコンナノ粒子の一部を溶融させることによってエミッタ及びエミッタに至るコンタクトホールを形成する。
【選択図】図13
Description
太陽電池のコンタクトに関しては、特許文献1〜3に開示されている。
[先行技術文献]
[特許文献]
[特許文献1]特表2011−512689号公報
[特許文献2]米国特許出願公開第2010/075234号明細書
[特許文献3]特表2010−528487号公報
(項目1)
太陽電池の複数のコンタクトホールを形成する方法であって、
太陽電池基板上に複数のドープシリコンナノ粒子を形成する工程と、
上記複数のドープシリコンナノ粒子をナノ粒子パッシベ―ション膜でコーティングする工程と、
レーザー接触プロセスにて上記複数のドープシリコンナノ粒子上にレーザービームを当て、上記複数のドープシリコンナノ粒子を貫通して上記太陽電池のエミッタに至る一のコンタクトホールを形成する工程と、を備える方法。
(項目2)
上記基板がシリコン基板を含む、項目1に記載の方法。
(項目3)
上記太陽電池基板上に上記複数のドープシリコンナノ粒子を形成する工程に先立ち、上記太陽電池基板上にパッシベーション膜を形成する工程を更に備える、項目1に記載の方法。
(項目4)
上記複数のドープシリコンナノ粒子は、上記パッシベーション膜上に形成される、項目3に記載の方法。
(項目5)
上記パッシベーション膜が二酸化ケイ素を含む、項目4に記載の方法。
(項目6)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に二酸化ケイ素を形成する工程を有する、項目1に記載の方法。
(項目7)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に窒化ケイ素を堆積させる工程を有する、項目1に記載の方法。
(項目8)
上記レーザー接触プロセスにて上記複数のドープシリコンナノ粒子上に上記レーザービームを当てて上記太陽電池の上記エミッタに至る上記一のコンタクトホールを形成する工程に先立ち、上記複数のドープシリコンナノ粒子からのドーパントを上記太陽電池基板内に拡散させて上記エミッタを形成する工程を更に備える、項目1に記載の方法。
(項目9)
上記エミッタに至る上記一のコンタクトホールを形成するべく、上記レーザー接触プロセスにて上記複数のドープシリコンナノ粒子上に上記レーザービームを当てた際に溶融された複数のドープシリコンナノ粒子から上記エミッタを形成する、項目1に記載の方法。
(項目10)
上記複数のドープシリコンナノ粒子上にキャップ層を形成する工程を更に備え、
上記一のコンタクトホールが上記キャップ層を貫通する、項目1に記載の方法。
(項目11)
上記エミッタを電気的に接続するべく、上記一のコンタクトホール内に金属接点を形成する工程を更に備える、項目1に記載の方法。
(項目12)
太陽電池基板と、
上記太陽電池基板上の複数のドープシリコンナノ粒子と、
上記複数のドープシリコンナノ粒子を貫通するコンタクトホールと、
エミッタと、
上記コンタクトホールを介して上記エミッタに電気的に接続する金属接点と、を備え、
上記複数のドープシリコンナノ粒子の各々又は塊の表面はナノ粒子パッシベーション膜を有する、太陽電池。
(項目13)
上記エミッタが上記太陽電池基板内にある、項目12に記載の太陽電池。
(項目14)
上記太陽電池基板がシリコン基板を含む、項目12に記載の太陽電池。
(項目15)
上記太陽電池基板と上記複数のドープシリコンナノ粒子との間にパッシベーション膜を更に備える、項目12に記載の太陽電池。
(項目16)
上記複数のドープシリコンナノ粒子上にキャップ層を更に備える、項目12に記載の太陽電池。
(項目17)
太陽電池の複数のコンタクトホールを形成する方法であって、
太陽電池基板上に複数のドープシリコンナノ粒子を形成する工程と、
上記複数のドープシリコンナノ粒子からドーパントを拡散させてエミッタを形成する工程と、
上記複数のドープシリコンナノ粒子をナノ粒子パッシベーション膜でコーティングする工程と、
レーザー接触プロセスにて上記複数のドープシリコンナノ粒子上にレーザービームを当て、上記複数のドープシリコンナノ粒子を貫通して上記エミッタに至るコンタクトホールを形成する工程と、を備える方法。
(項目18)
上記複数のドープシリコンナノ粒子から上記ドーパントを拡散させて上記エミッタを形成する工程に先立ち、上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする、項目17に記載の方法。
(項目19)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に二酸化ケイ素を形成する工程を有する、項目17に記載の方法。
(項目20)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に窒化ケイ素を堆積させる工程を有する、項目17に記載の方法。
(項目21)
上記複数のドープシリコンナノ粒子上にキャップ層を形成する工程を更に備え、上記コンタクトホールが上記キャップ層を貫通する、項目17に記載の方法。
(項目22)
太陽電池の複数のコンタクトホールを形成する方法であって、
太陽電池の基板上に複数のドープシリコンナノ粒子を形成する工程と、
上記複数のドープシリコンナノ粒子をナノ粒子パッシベーション膜でコーティングする工程と、
上記複数のドープシリコンナノ粒子の一部をレーザービームで溶融し、上記太陽電池のエミッタを上記複数のドープシリコンナノ粒子の溶融された部分で形成して、上記太陽電池の上記エミッタに対する一のコンタクトホールを形成する工程と、を備える方法。
(項目23)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に二酸化ケイ素を形成する工程を有する、項目22に記載の方法。
(項目24)
上記複数のドープシリコンナノ粒子を上記ナノ粒子パッシベーション膜でコーティングする工程が、
上記複数のドープシリコンナノ粒子の各々又は塊の表面上に窒化ケイ素を堆積させる工程を有する、項目22に記載の方法。
(項目25)
上記複数のドープシリコンナノ粒子上にキャップ層を形成する工程を更に含み、上記一のコンタクトホールが上記キャップ層を貫通する、項目22に記載の方法。
Claims (14)
- 太陽電池の複数のコンタクトホールを形成する方法であって、
太陽電池基板上に複数のドープシリコンナノ粒子を形成する工程と、
前記複数のドープシリコンナノ粒子をナノ粒子パッシベ―ション膜でコーティングする工程と、
レーザー接触プロセスにて前記複数のドープシリコンナノ粒子上にレーザービームを当て、前記複数のドープシリコンナノ粒子を貫通して前記太陽電池のエミッタに至る一のコンタクトホールを形成する工程と、を備える方法。 - 前記太陽電池基板上に前記複数のドープシリコンナノ粒子を形成する工程に先立ち、前記太陽電池基板上にパッシベーション膜を形成する工程を更に備える、請求項1に記載の方法。
- 前記複数のドープシリコンナノ粒子は、前記パッシベーション膜上に形成される、請求項1または2に記載の方法。
- 前記パッシベーション膜が二酸化ケイ素を含む、請求項1から3の何れか一項に記載の方法。
- 前記複数のドープシリコンナノ粒子を前記ナノ粒子パッシベーション膜でコーティングする工程が、
前記複数のドープシリコンナノ粒子の各々又は塊の表面上に二酸化ケイ素を形成する工程と、
前記複数のドープシリコンナノ粒子の各々又は塊の表面上に窒化ケイ素を堆積させる工程と、
を有する、請求項1に記載の方法。 - 前記レーザー接触プロセスにて前記複数のドープシリコンナノ粒子上に前記レーザービームを当てて前記太陽電池の前記エミッタに至る前記一のコンタクトホールを形成する工程に先立ち、前記複数のドープシリコンナノ粒子からのドーパントを前記太陽電池基板内に拡散させて前記エミッタを形成する工程を更に備える、請求項1に記載の方法。
- 前記エミッタに至る前記一のコンタクトホールを形成するべく、前記レーザー接触プロセスにて前記複数のドープシリコンナノ粒子上に前記レーザービームを当てた際に溶融された複数のドープシリコンナノ粒子から前記エミッタを形成する、請求項1に記載の方法。
- 前記複数のドープシリコンナノ粒子上にキャップ層を形成する工程を更に備え、
前記一のコンタクトホールが前記キャップ層を貫通する、請求項1から7の何れか一項に記載の方法。 - 前記エミッタを電気的に接続するべく、前記一のコンタクトホール内に金属接点を形成する工程を更に備える、請求項1から8の何れか一項に記載の方法。
- 太陽電池基板と、
前記太陽電池基板上の複数のドープシリコンナノ粒子と、
前記複数のドープシリコンナノ粒子を貫通するコンタクトホールと、
エミッタと、
前記コンタクトホールを介して前記エミッタに電気的に接続する金属接点と、を備え、
前記複数のドープシリコンナノ粒子の各々又は塊の表面はナノ粒子パッシベーション膜を有する、太陽電池。 - 前記エミッタが前記太陽電池基板内にある、請求項10に記載の太陽電池。
- 前記太陽電池基板がシリコン基板を含む、請求項10または11に記載の太陽電池。
- 前記太陽電池基板と前記複数のドープシリコンナノ粒子との間にパッシベーション膜を更に備える、請求項10から12のいずれか一項に記載の太陽電池。
- 前記複数のドープシリコンナノ粒子上にキャップ層を更に備える、請求項10から13のいずれか一項に記載の太陽電池。
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