JP2017168638A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2017168638A JP2017168638A JP2016052666A JP2016052666A JP2017168638A JP 2017168638 A JP2017168638 A JP 2017168638A JP 2016052666 A JP2016052666 A JP 2016052666A JP 2016052666 A JP2016052666 A JP 2016052666A JP 2017168638 A JP2017168638 A JP 2017168638A
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- 239000012535 impurity Substances 0.000 claims description 69
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- 238000012986 modification Methods 0.000 description 3
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- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
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- 230000006698 induction Effects 0.000 description 2
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Abstract
Description
図1(a)は、第1実施形態に係る半導体装置を表す模式的断面図である。図1(b)は、第1実施形態に係る半導体装置を表す模式的平面図である。図1(a)には、図1(b)のA1−A2線に沿った断面が表されている。
図2(a)〜図3は、第1実施形態に係る半導体装置の動作を表す模式的断面図である。図2(a)〜図3には、一例として、第3電極13と第5電極15との間の領域のみの動作が表示されている。
図4は、第2実施形態に係る半導体装置を表す模式的断面図である。
図5(a)は、第3実施形態の第1例に係る半導体装置を表す模式的断面図である。図5(b)は、第3実施形態の第2例に係る半導体装置を表す模式的断面図である。
図6は、第4実施形態に係る半導体装置を表す模式的斜視図である。図6では、エミッタ電極12の表示が略されている。
図7(a)は、第5実施形態に係る半導体装置を表す模式的断面図である。図7(b)は、第5実施形態に係る半導体装置の一部領域の不純物濃度プロファイルを表すグラフ図である。図7(b)の横軸は、Z軸方向における位置(図7(a)の点P、点Q、点R、点S)であり、縦軸は、不純物濃度(単位は、任意値(a.u.))であり、相対的な不純物濃度の高低が表されている。
図8(a)は、第6実施形態の第1例に係る半導体装置を表す模式的断面図である。図8(b)は、第6実施形態の第1例に係る半導体装置の一部領域の不純物濃度プロファイルを表すグラフ図である。図8(b)の横軸は、Z軸方向における位置(図8(a)の点P’、点Q’、点R’、点S’)であり、縦軸は、不純物濃度(単位は、任意値(a.u.))であり、相対的な不純物濃度の高低が表されている。
図13(a)は、第7実施形態に係る半導体装置を表す模式的断面図である。図13(b)は、第7実施形態に係る半導体装置の一部領域の不純物濃度プロファイルを表すグラフ図である。図13(b)の横軸は、Z軸方向における位置(図13(a)の点P’’、点Q’’、点R’’、点S’’)であり、縦軸は、不純物濃度(単位は、任意値(a.u.))であり、相対的な不純物濃度の高低が表されている。
例えば、オン状態では、左側のn+形エミッタ領域23から注入された電子電流e1と、右側のn+形エミッタ領域23から注入された電子電流e2と、は、その下方のp+形コレクタ領域25に到達する。一方、p+形コレクタ領域25から注入された正孔電流h1、h2は、エミッタ側に向かう。
ターンオフ時、n−形ベース領域21に残存する正孔は、p形ベース領域22およびp形半導体領域24を経由してエミッタ電極12に排出される。正孔にとっては、一対のn+形エミッタ領域23間のp形ベース領域22よりも、p形半導体領域24の方がポテンシャル牆壁が低くなる。また、正孔にとっては、p形ベース領域22を経由してエミッタ電極12に流れる場合よりも、p形半導体領域24を経由してエミッタ電極12に流れ易くなる。これにより、正孔h4によって形成される電流は、正孔h3によって形成される電流よりも大きくなる。
図15は、第8実施形態に係る半導体装置を表す模式的断面図である。
図16(a)は、第9実施形態の第1例に係る半導体装置を表す模式的断面図である。図16(b)は、第9実施形態の第2例に係る半導体装置を表す模式的断面図である。
図17は、第10実施形態に係る半導体装置を表す模式的斜視図である。図17では、エミッタ電極12の表示が略されている。
図18は、第11実施形態に係る半導体装置を表す模式的断面図である。
図19は、第12実施形態に係る半導体装置を表す模式的断面図である。
図20(a)〜図21(b)は、第13実施形態に係る半導体装置を表す模式的平面図である。
Claims (10)
- 第1電極と、
第2電極と、
前記第1電極と前記第2電極との間に設けられた第1導電形の第1半導体領域と、
前記第1半導体領域と前記第2電極との間に設けられた第3電極と、
前記第1半導体領域と前記第2電極との間に設けられ、前記第1電極から前記第2電極に向かう第1方向に交差する第2方向において前記第3電極に並ぶ第4電極と、
前記第1半導体領域と前記第2電極との間、および前記第3電極と前記第4電極との間に設けられ、前記第2電極に電気的に接続された第2導電形の第2半導体領域と、
前記第2半導体領域と前記第2電極との間に設けられ、前記第2電極に電気的に接続された第1導電形の第3半導体領域と、
前記第1半導体領域と前記第2電極との間に設けられ、前記第2方向において前記第4電極を介して前記第2半導体領域に並び、第1領域と、第2領域と、を含み、前記第2領域の不純物濃度は、前記第1領域の不純物濃度よりも高く、前記第2領域は、前記第1方向において、前記第1領域と前記第2電極との間に設けられ、前記第1領域および前記第2領域は、前記第2電極に電気的に接続された第2導電形の第4半導体領域と、
前記第3電極と、前記第1半導体領域、前記第2半導体領域、前記第3半導体領域、および前記第2電極と、の間に設けられた第1絶縁膜と、
前記第4電極と、前記第1半導体領域、前記第2半導体領域、および前記第4半導体領域と、の間に設けられた第2絶縁膜と、
前記第1電極と前記第1半導体領域との間に設けられ、前記第1電極に電気的に接続された第2導電形の第5半導体領域と、
を備えた半導体装置。 - 前記第4半導体領域と前記第1半導体領域との界面と前記第1電極との間の距離は、前記第2半導体領域と前記第1半導体領域との界面と前記第1電極との間の距離よりも短い、請求項1記載の半導体装置。
- 第1電極と、
第2電極と、
前記第1電極と前記第2電極との間に設けられた第1導電形の第1半導体領域と、
前記第1半導体領域と前記第2電極との間に設けられた第3電極と、
前記第1半導体領域と前記第2電極との間に設けられ、前記第1電極から前記第2電極に向かう第1方向に交差する第2方向において前記第3電極に並ぶ第4電極と、
前記第1半導体領域と前記第2電極との間、および前記第3電極と前記第4電極との間に設けられ、前記第2電極に電気的に接続された第2導電形の第2半導体領域と、
前記第2半導体領域と前記第2電極との間に設けられ、前記第2電極に電気的に接続された第1導電形の第3半導体領域と、
前記第1半導体領域と前記第2電極との間に設けられ、前記第2電極に電気的に接続され、前記第2方向において前記第4電極を介して前記第2半導体領域に並ぶ第2導電形の第4半導体領域と、
前記第3電極と、前記第1半導体領域、前記第2半導体領域、前記第3半導体領域、および前記第2電極と、の間に設けられた第1絶縁膜と、
前記第4電極と、前記第1半導体領域、前記第2半導体領域、および前記第4半導体領域と、の間に設けられた第2絶縁膜と、
前記第1電極と前記第1半導体領域との間に設けられ、前記第1電極に電気的に接続された第2導電形の第5半導体領域と、
を備え、
前記第1方向における前記第1半導体領域の不純物濃度プロファイルは、前記第3電極と前記第4電極との間で極大値を有する半導体装置。 - 第5電極と、
第3絶縁膜と、
をさらに備え、
前記第5電極は、前記第1半導体領域と前記第2電極との間に設けられ、前記第2方向において前記第4電極に並び、前記第3電極とは反対側に設けられ、
前記第3絶縁膜は、前記第5電極と、前記第1半導体領域および前記第4半導体領域と、の間に設けられ、
前記第4半導体領域は、前記第4電極と前記第5電極との間に設けられている請求項1〜3のいずれか1つに記載の半導体装置。 - 前記第2方向において、前記第4半導体領域の長さは、前記第2半導体領域の長さよりも長い請求項1〜4のいずれか1つに記載の半導体装置。
- 前記第3半導体領域は、前記第1絶縁膜に接し、前記第2絶縁膜には接していない請求項1〜5のいずれか1つに記載の半導体装置。
- 前記第4電極または前記第5電極は、前記第2電極に電気的に接続されている請求項3〜6のいずれか1つに記載の半導体装置。
- 前記第2絶縁膜は、前記第4電極と前記第3半導体領域との間に設けられている請求項1〜6のいずれか1つに記載の半導体装置。
- 前記第3半導体領域は、前記第1方向および前記第2方向に交差する第3方向に並ぶ複数の領域として設けられている請求項1〜8のいずれか1つに記載の半導体装置。
- 前記第1半導体領域は、前記第1電極に近づくほど不純物濃度が高くなる領域を有する請求項1〜9のいずれか1つに記載の半導体装置。
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