JP2017125837A5 - - Google Patents

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Publication number
JP2017125837A5
JP2017125837A5 JP2016215336A JP2016215336A JP2017125837A5 JP 2017125837 A5 JP2017125837 A5 JP 2017125837A5 JP 2016215336 A JP2016215336 A JP 2016215336A JP 2016215336 A JP2016215336 A JP 2016215336A JP 2017125837 A5 JP2017125837 A5 JP 2017125837A5
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JP
Japan
Prior art keywords
precursor gas
directing
workpiece
supplying
substrate
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JP2016215336A
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English (en)
Japanese (ja)
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JP7046482B2 (ja
JP2017125837A (ja
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Priority claimed from US15/087,968 external-priority patent/US9978586B2/en
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Publication of JP2017125837A publication Critical patent/JP2017125837A/ja
Publication of JP2017125837A5 publication Critical patent/JP2017125837A5/ja
Priority to JP2022020992A priority Critical patent/JP7342165B2/ja
Application granted granted Critical
Publication of JP7046482B2 publication Critical patent/JP7046482B2/ja
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JP2016215336A 2015-11-06 2016-11-02 改良された材料付着法 Active JP7046482B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022020992A JP7342165B2 (ja) 2015-11-06 2022-02-15 改良された材料付着法および集束イオン・ビーム・システム

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201562252308P 2015-11-06 2015-11-06
US62/252,308 2015-11-06
US15/087,968 2016-03-31
US15/087,968 US9978586B2 (en) 2015-11-06 2016-03-31 Method of material deposition

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2022020992A Division JP7342165B2 (ja) 2015-11-06 2022-02-15 改良された材料付着法および集束イオン・ビーム・システム

Publications (3)

Publication Number Publication Date
JP2017125837A JP2017125837A (ja) 2017-07-20
JP2017125837A5 true JP2017125837A5 (OSRAM) 2019-10-24
JP7046482B2 JP7046482B2 (ja) 2022-04-04

Family

ID=58667953

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016215336A Active JP7046482B2 (ja) 2015-11-06 2016-11-02 改良された材料付着法
JP2022020992A Active JP7342165B2 (ja) 2015-11-06 2022-02-15 改良された材料付着法および集束イオン・ビーム・システム

Family Applications After (1)

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JP2022020992A Active JP7342165B2 (ja) 2015-11-06 2022-02-15 改良された材料付着法および集束イオン・ビーム・システム

Country Status (5)

Country Link
US (3) US9978586B2 (OSRAM)
JP (2) JP7046482B2 (OSRAM)
KR (1) KR102629567B1 (OSRAM)
CN (1) CN107058944B (OSRAM)
TW (1) TWI716483B (OSRAM)

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JP7221405B2 (ja) * 2019-09-17 2023-02-13 株式会社日立ハイテク イオンビーム装置
US11233017B2 (en) 2019-10-03 2022-01-25 Texas Instruments Incorporated Ex-situ manufacture of metal micro-wires and FIB placement in IC circuits
EP3922752B1 (en) 2020-06-12 2025-09-03 Imec VZW A method for preparing a sample for transmission electron microscopy
DE102021132834B4 (de) 2021-12-13 2024-08-08 Carl Zeiss Microscopy Gmbh Gasreservoir, Gaszuführungseinrichtung mit einem Gasreservoir und Teilchenstrahlgerät mit einer Gaszuführungseinrichtung
DE102021132832A1 (de) 2021-12-13 2023-06-15 Carl Zeiss Microscopy Gmbh Gaszuführungseinrichtung, Teilchenstrahlgerät mit einer Gaszuführungseinrichtung sowie Verfahren zum Betrieb der Gaszuführungseinrichtung und des Teilchenstrahlgeräts
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TW202527021A (zh) 2022-09-26 2025-07-01 德商卡爾蔡司多重掃描電子顯微鏡有限公司 帶電粒子束裝置的擾動補償
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WO2025149160A1 (en) 2024-01-11 2025-07-17 Carl Zeiss Smt Gmbh Disturbance compensation for charged particle beam devices

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