MX2015014977A - Metodo para fabricar una pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma. - Google Patents

Metodo para fabricar una pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma.

Info

Publication number
MX2015014977A
MX2015014977A MX2015014977A MX2015014977A MX2015014977A MX 2015014977 A MX2015014977 A MX 2015014977A MX 2015014977 A MX2015014977 A MX 2015014977A MX 2015014977 A MX2015014977 A MX 2015014977A MX 2015014977 A MX2015014977 A MX 2015014977A
Authority
MX
Mexico
Prior art keywords
same
thin film
electronic product
multilayer thin
layer thin
Prior art date
Application number
MX2015014977A
Other languages
English (en)
Inventor
Jin Hyun Cho
Jin Sub Kim
Hyun Jun Jung
Hyong Jun Yoo
Min Chul Jung
Original Assignee
Samsung Electronics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Samsung Electronics Co Ltd filed Critical Samsung Electronics Co Ltd
Publication of MX2015014977A publication Critical patent/MX2015014977A/es

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B15/00—Layered products comprising a layer of metal
    • B32B15/04—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material
    • B32B15/08—Layered products comprising a layer of metal comprising metal as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0015—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterized by the colour of the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/3485—Sputtering using pulsed power to the target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/322—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer only coatings of metal elements only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C23C30/005—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process on hard metal substrates
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
    • Y10T428/263—Coating layer not in excess of 5 mils thick or equivalent
    • Y10T428/264—Up to 3 mils
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31511—Of epoxy ether
    • Y10T428/31515—As intermediate layer
    • Y10T428/31522—Next to metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/3154—Of fluorinated addition polymer from unsaturated monomers
    • Y10T428/31544—Addition polymer is perhalogenated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31681—Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/31504—Composite [nonstructural laminate]
    • Y10T428/31678—Of metal
    • Y10T428/31692—Next to addition polymer from unsaturated monomers
    • Y10T428/31699—Ester, halide or nitrile of addition polymer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Microelectronics & Electronic Packaging (AREA)

Abstract

Aquí se divulga un método para formar una película delgada multi-capa depositando partículas objetivo, separadas de un objetivo mediante descarga de plasma de gas inerte, sobre un objeto de metal utilizando un aparato de deposición de película delgada multi-capa y una película delgada multi-capa formada a través del método. De manera más específica, se utiliza un aparato de deposición por pulverización como el aparato de deposición de película delgada multi-capa. El método incluye recubrir un objeto de metal con una capa de recubrimiento, depositar al menos una capa de mejoramiento de dureza sobre la capa de recubrimiento, y depositar una capa de color sobre al menos una capa de mejoramiento de dureza.
MX2015014977A 2013-05-31 2014-05-13 Metodo para fabricar una pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma. MX2015014977A (es)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20130062484 2013-05-31
KR20130078132 2013-07-04
KR1020130131649A KR102129908B1 (ko) 2013-05-31 2013-10-31 다층박막의 제조방법, 다층박막이 형성된 부재, 및 이를 포함하는 전자제품.
PCT/KR2014/004251 WO2014193100A1 (en) 2013-05-31 2014-05-13 Method of manufacturing multi-layer thin film, member including the same and electronic product including the same

Publications (1)

Publication Number Publication Date
MX2015014977A true MX2015014977A (es) 2016-02-05

Family

ID=52459807

Family Applications (1)

Application Number Title Priority Date Filing Date
MX2015014977A MX2015014977A (es) 2013-05-31 2014-05-13 Metodo para fabricar una pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma.

Country Status (6)

Country Link
US (1) US9845535B2 (es)
EP (1) EP2961861B1 (es)
KR (1) KR102129908B1 (es)
CN (1) CN105264116A (es)
MX (1) MX2015014977A (es)
WO (1) WO2014193100A1 (es)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102383501B1 (ko) 2015-01-08 2022-04-07 삼성전자주식회사 다층 박막, 그 제조 방법 및 이를 포함하는 전자 제품
CN105543926B (zh) * 2015-12-08 2017-10-20 西安工业大学 轻合金及复合材料表面耐蚀、减磨协合涂层的制备方法
US20190112698A1 (en) * 2017-10-12 2019-04-18 Srg Global, Inc. Trim component having textured surface supporting pvd-deposited coating, and/or method of making the same
CN108642450A (zh) * 2018-05-29 2018-10-12 佛山科学技术学院 一种多层镀金薄膜结构及其在金属表面真空镀金的方法
WO2021211106A1 (en) * 2020-04-15 2021-10-21 Hewlett-Packard Development Company, L.P. Coated substrates for electronic devices
KR20220106532A (ko) * 2021-01-22 2022-07-29 삼성전자주식회사 층상 구조를 가지는 전자 장치 커버 및 이의 제조방법
WO2024019256A1 (ko) * 2022-07-21 2024-01-25 삼성전자주식회사 가전기기용 외장재

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6399219B1 (en) * 1999-12-23 2002-06-04 Vapor Technologies, Inc. Article having a decorative and protective coating thereon
US20050249886A1 (en) * 2004-05-06 2005-11-10 Ge Molly Mo H Method of making a corrosion-resistant non-stick coating
US7297397B2 (en) * 2004-07-26 2007-11-20 Npa Coatings, Inc. Method for applying a decorative metal layer
KR100810243B1 (ko) * 2006-08-08 2008-03-06 삼성전자주식회사 휴대 단말기의 키패드 제조방법 및 그 키패드
US20100272932A1 (en) * 2008-03-07 2010-10-28 Mitsubishi Electric Corporation Decorative component
CN101662902A (zh) * 2008-08-27 2010-03-03 深圳富泰宏精密工业有限公司 壳体及其制作方法
JP5332424B2 (ja) * 2008-09-09 2013-11-06 Ｊｆｅスチール株式会社 黒色塗装鋼板、加工品および薄型テレビ用パネル
TW201212782A (en) * 2010-09-09 2012-03-16 Hon Hai Prec Ind Co Ltd Housing and method for making the same
TW201226207A (en) * 2010-12-22 2012-07-01 Hon Hai Prec Ind Co Ltd Casing having golden color, related method for fabricating same and electronic device having same
CN103935075B (zh) * 2013-01-23 2018-07-03 深圳富泰宏精密工业有限公司 壳体及其制作方法
KR20140142123A (ko) * 2013-05-31 2014-12-11 삼성전자주식회사 다층박막의 제조방법, 다층박막이 형성된 부재, 및 이를 포함하는 전자제품.

Also Published As

Publication number Publication date
EP2961861A4 (en) 2016-11-30
CN105264116A (zh) 2016-01-20
EP2961861B1 (en) 2018-07-04
US20140355184A1 (en) 2014-12-04
EP2961861A1 (en) 2016-01-06
KR102129908B1 (ko) 2020-07-06
US9845535B2 (en) 2017-12-19
WO2014193100A1 (en) 2014-12-04
KR20140142122A (ko) 2014-12-11

Similar Documents

Publication Publication Date Title
MX2015014977A (es) Metodo para fabricar una pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma.
EP3228161A4 (en) Plasma source utilizing a macro-particle reduction coating and method of using a plasma source utilizing a macro-particle reduction coating for deposition of thin film coatings and modification of surfaces
EP3642377A4 (en) IRON-BASED ALLOY SUITABLE FOR PROVIDING A HARD AND CORROSION-RESISTANT COATING ON A SUBSTRATE, ARTICLE INCLUDING A HARD CORROSION-RESISTANT COATING, AND ITS PRODUCTION PROCESS
WO2015196066A3 (en) Method for the fabrication and transfer of graphene
MY198714A (en) Photovoltaic devices and method of manufacturing
WO2012125481A3 (en) Thin film through-glass via and methods for forming same
MX2015012261A (es) Revestimientos que exhiben una apariencia de tri-capa, metodos de revestimiento y substratos relacionados.
EP3733802A4 (en) COATING COMPOSITION, COATED ARTICLE AND METHOD FOR MANUFACTURING A MULTI-LAYER COATING FILM
MX2016013455A (es) Metodo para galvanizar un tira de metal movil y tira de metal recubierta producida de este modo.
MX2015014976A (es) Metodo para fabricar pelicula delgada multi-capa, elemento que incluye la misma y producto electronico que incluye la misma.
GB201216405D0 (en) Multilayer coated wear-resistant member and method for making the same
WO2012174260A3 (en) Pinhole-free dielectric thin film fabrication
WO2014163911A3 (en) Cylinder liners with adhesive metallic layers and methods of forming the cylinder liners
EP3728692A4 (en) CHEMICAL-RESISTANT MULTI-LAYER PAINTING APPLIED BY ATOMIC DEPOSITION
WO2012168709A3 (en) Improvements to the application of coating materials
WO2014008484A3 (en) Method to produce highly transparent hydrogenated carbon protective coating for transparent substrates
EP3689476A4 (en) PROCESS FOR FORMING A MULTI-LAYER COATING FILM
MX2016005564A (es) Capa de carrera contra oxidacion.
MY188421A (en) Polymer coatings and methods for depositing polymer coatings
MX2016013047A (es) Sustrato de multiples capas y metodo de fabricacion.
EP3385072A4 (en) ANTI-SLIP COMPOSITE COATING FILM, ANTI-SLIP SUBSTRATE, AND METHOD FOR MANUFACTURING ANTI-SLIP SUBSTRATE
EP3561143A4 (en) METHOD OF FORMING SPRAY FILM OF INTERMETALLIC COMPOUND FILM, SPRAY FILM, METHOD OF PRODUCING METAL PRODUCT HAVING SPRAY FILM, AND GLASS TRANSPORT ROLL
EP3512979A4 (en) PARTICLE COATING BY ATOMIC LAYER DEPOSITION (ALD)
EP3245315A4 (en) Components with an atomic layer deposition coating and methods of producing the same
EP3915688A4 (en) METHOD OF FORMING A MULTI-LAYER COATING FILM