JP2017120821A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法 Download PDFInfo
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- JP2017120821A JP2017120821A JP2015256354A JP2015256354A JP2017120821A JP 2017120821 A JP2017120821 A JP 2017120821A JP 2015256354 A JP2015256354 A JP 2015256354A JP 2015256354 A JP2015256354 A JP 2015256354A JP 2017120821 A JP2017120821 A JP 2017120821A
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- insulating film
- heat treatment
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- semiconductor device
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Ceramic Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
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- Chemical Kinetics & Catalysis (AREA)
- Inorganic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
- Electrodes Of Semiconductors (AREA)
- Insulated Gate Type Field-Effect Transistor (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Semiconductor Integrated Circuits (AREA)
Abstract
【解決手段】ソース・ドレイン用のn+型半導体領域SDを形成した後、半導体基板SB上に、ゲート電極GEおよびサイドウォールスペーサSW1を覆うように、絶縁膜ZM1を形成する。それから、熱処理を行ってから、絶縁膜ZM1上に絶縁膜ZM2を形成し、絶縁膜ZM2上にレジストパターンRP1を形成する。それから、レジストパターンRP1をエッチングマスクとして用いて絶縁膜ZM2,ZM1をエッチングしてから、レジストパターンRP1を除去し、その後にウェット洗浄処理を行う。その後、サリサイドプロセスを用いて金属シリサイド層を形成する。
【選択図】図16
Description
<半導体装置の構造について>
本発明の一実施の形態である半導体装置の製造工程を図面を参照して説明する。図1〜図3は、本実施の形態の半導体装置の製造工程の一部を示すプロセスフロー図である。なお、図1に示されるプロセスフローが行われてから、図2に示されるプロセスフローが行われ、その後、図3に示されるプロセスフローが行われる。図4〜図24は、本実施の形態の半導体装置の製造工程中の要部断面図である。図4〜図24の断面図には、MISFET形成領域1Aおよび抵抗素子形成領域1Bの要部断面図が示されており、MISFET形成領域1AにMISFETが、抵抗素子形成領域1Bにポリシリコン抵抗素子が、それぞれ形成される様子が示されている。
本発明者が検討した第1検討例について、図25〜図33を参照して説明する。図25は、第1検討例の半導体装置の製造工程の一部を示すプロセスフロー図であり、図26〜図33は、第1検討例の半導体装置の製造工程中の要部断面図である。
に示されるように、ステップS107で金属膜ME101を形成し、上記図33に示されるように、ステップS108で熱処理を行って金属シリサイド層SLを形成し、ステップS109でウェット洗浄処理により未反応の金属膜ME101を除去する。未反応の金属膜ME101をステップS109で除去した後、必要に応じて、更に、半導体基板SBに熱処理を施すこともできる。その後、上記ステップS21(層間絶縁膜IL1形成工程)、上記ステップS22(コンタクトホールCT形成工程)、上記ステップS23(プラグPG形成工程)、および上記ステップS24(配線M1形成工程)が行われる。
本実施の形態の半導体装置の製造工程は、ステップS1で半導体基板SBを準備し、ステップS4,S5,S6で前記半導体基板SB上にMISFET用のゲート電極GEをゲート絶縁膜(ここでは絶縁膜GI)を介して形成する。それから、ステップS8でゲート電極GEの側壁上にサイドウォールスペーサSW(側壁絶縁膜)を形成し、ステップS9でイオン注入法を用いて前記半導体基板SBにn+型半導体領域SD(ソース・ドレイン領域)を形成する。それから、ステップS10で、半導体基板SB上に、ゲート電極GEおよびサイドウォールスペーサSWを覆うように、絶縁膜ZM1(第1絶縁膜)を形成し、ステップS11で、熱処理(第1の熱処理)を行う。それから、ステップS12で絶縁膜ZM1上に絶縁膜ZM2(第2絶縁膜)を形成し、ステップS14で絶縁膜ZM2上にレジストパターンRP1を形成する。それから、ステップS15で、レジストパターンRP1をエッチングマスクとして用いて絶縁膜ZM2および絶縁膜ZM1をエッチングすることにより、レジストパターンRP1で覆われない部分の絶縁膜ZM2および絶縁膜ZM1を除去し、レジストパターンRP1の下に絶縁膜ZM2および絶縁膜ZM1を残す。それから、ステップS16でレジストパターンRP1を除去し、ステップS17でウェット洗浄処理を行う。それから、ステップS18で、n+型半導体領域SD(ソース・ドレイン領域)上を含む半導体基板SB上に、ゲート電極GEおよびサイドウォールスペーサSWを覆うように、金属膜MEを形成する。それから、ステップS19で、熱処理(第2熱処理)を行って金属膜MEとn+型半導体領域SD(ソース・ドレイン領域)とを反応させて、n+型半導体領域SD上に金属シリサイド層SLを形成する。
RP1 レジストパターン
SB 半導体基板
SD n+型半導体領域
SW1 サイドウォールスペーサ
ZM1,ZM2 絶縁膜
Claims (19)
- (a)半導体基板を準備する工程、
(b)前記(a)工程後、前記半導体基板上にMISFET用のゲート電極をゲート絶縁膜を介して形成する工程、
(c)前記(b)工程後、前記ゲート電極の側壁上に側壁絶縁膜を形成する工程、
(d)前記(c)工程後、イオン注入法を用いて前記半導体基板に前記MISFET用のソース・ドレイン領域を形成する工程、
(e)前記(d)工程後、前記半導体基板上に、前記ゲート電極および前記側壁絶縁膜を覆うように、第1絶縁膜を形成する工程、
(f)前記(e)工程後、第1の熱処理温度で第1の熱処理を行う工程、
(g)前記(f)工程後、前記第1絶縁膜上に第2絶縁膜を形成する工程、
(h)前記(g)工程後、前記第2絶縁膜上にレジストパターンを形成する工程、
(i)前記(h)工程後、前記レジストパターンをエッチングマスクとして用いて前記第2絶縁膜および前記第1絶縁膜をエッチングすることにより、前記レジストパターンで覆われない部分の前記第2絶縁膜および前記第1絶縁膜を除去し、前記レジストパターンの下に前記第2絶縁膜および前記第1絶縁膜を残す工程、
(j)前記(i)工程後、前記レジストパターンを除去する工程、
(k)前記(j)工程後、ウェット洗浄処理を行う工程、
(l)前記(k)工程後、前記ソース・ドレイン領域上を含む前記半導体基板上に、前記ゲート電極および前記側壁絶縁膜を覆うように、金属膜を形成する工程、
(m)前記(l)工程後、第2の熱処理を行って前記金属膜と前記ソース・ドレイン領域とを反応させて、前記ソース・ドレイン領域上に金属シリサイド層を形成する工程、
を有する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(h)工程では、前記レジストパターンは、前記ソース・ドレイン領域の上方には形成されず、
前記(i)工程では、前記ソース・ドレイン領域上の前記第2絶縁膜および前記第1絶縁膜は除去される、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(d)工程の後で、前記(e)工程の前に、前記第1の熱処理温度以上の温度での熱処理は行われない、半導体装置の製造方法。 - 請求項3記載の半導体装置の製造方法において、
前記(g)工程の後で、前記(i)工程の前に、前記第1の熱処理温度以上の温度での熱処理は行われない、半導体装置の製造方法。 - 請求項4記載の半導体装置の製造方法において、
(g1)前記(g)後で、前記(h)工程前に、前記第1の熱処理温度よりも低い第2の熱処理温度で第3の熱処理を行う工程、
を更に有する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1の熱処理により、前記ソース・ドレイン領域内の不純物が活性化される、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1の熱処理温度は、900℃以上である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(e)工程で形成された前記第1絶縁膜の第1の厚さよりも、前記(g)工程で形成された前記第2絶縁膜の第2の厚さが厚い、半導体装置の製造方法。 - 請求項8記載の半導体装置の製造方法において、
前記第1の厚さは10nm以上である、半導体装置の製造方法。 - 請求項9記載の半導体装置の製造方法において、
前記第1の厚さは20nm以下である、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
(n)前記(m)工程後、前記(m)工程にて反応しなかった前記金属膜を除去する工程、
を更に有する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1絶縁膜は、前記金属シリサイド層の形成を防止するシリサイドブロック膜として機能する、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(k)工程では、前記ウェット洗浄処理により、前記第2絶縁膜の少なくとも一部がエッチングされる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1絶縁膜と前記第2絶縁膜とは、同種の材料からなる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記第1絶縁膜と前記第2絶縁膜とは、異なる種類の材料からなる、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(i)工程では、前記ソース・ドレイン領域上および前記ゲート電極上の前記第2絶縁膜および前記第1絶縁膜は除去され、
前記(m)工程では、前記第2の熱処理により前記金属膜と前記ソース・ドレイン領域および前記ゲート電極とが反応して、前記ソース・ドレイン領域上と前記ゲート電極上とに、それぞれ前記金属シリサイド層が形成される、半導体装置の製造方法。 - 請求項1記載の半導体装置の製造方法において、
前記(b)工程では、前記ゲート電極と、抵抗素子用の導体パターンとが、前記半導体基板上に形成され、
前記(e)工程では、前記半導体基板上に、前記導体パターン、前記ゲート電極および前記側壁絶縁膜を覆うように、前記第1絶縁膜が形成され、
前記(h)工程では、前記導体パターンの一部の上方に、前記レジストパターンが形成され、
前記(k)工程では、前記ソース・ドレイン領域上を含む前記半導体基板上に、前記導体パターン、前記ゲート電極および前記側壁絶縁膜を覆うように、前記金属膜が形成される、半導体装置の製造方法。 - 請求項17記載の半導体装置の製造方法において、
前記(i)工程では、前記ソース・ドレイン領域上、前記ゲート電極上、および前記導体パターンの一部上の前記第2絶縁膜および前記第1絶縁膜は除去され、
前記(m)工程では、前記第2の熱処理により前記金属膜と前記ソース・ドレイン領域、前記ゲート電極および前記導体パターンとが反応して、前記ソース・ドレイン領域上と前記ゲート電極上と前記導体パターンの一部上とに、それぞれ前記金属シリサイド層が形成される、半導体装置の製造方法。 - (a)半導体基板を準備する工程、
(b)前記(a)工程後、前記半導体基板上にMISFET用のゲート電極をゲート絶縁膜を介して形成する工程、
(c)前記(b)工程後、前記ゲート電極の側壁上に側壁絶縁膜を形成する工程、
(d)前記(c)工程後、イオン注入法を用いて前記半導体基板に前記MISFET用のソース・ドレイン領域を形成する工程、
(e)前記(d)工程後、前記半導体基板上に、前記ゲート電極および前記側壁絶縁膜を覆うように、第1絶縁膜を形成する工程、
(f)前記(e)工程後、第1の熱処理温度で第1の熱処理を行う工程、
(g)前記(f)工程後、前記第1絶縁膜上に第2絶縁膜を形成する工程、
(h)前記(g)工程後、前記第2絶縁膜上にレジストパターンを形成する工程、
(i)前記(h)工程後、前記レジストパターンをエッチングマスクとして用いて前記第2絶縁膜および前記第1絶縁膜をエッチングすることにより、前記レジストパターンで覆われない部分の前記第2絶縁膜および前記第1絶縁膜を除去し、前記レジストパターンの下に前記第2絶縁膜および前記第1絶縁膜を残す工程、
(j)前記(i)工程後、前記レジストパターンを除去する工程、
(k)前記(j)工程後、ウェット洗浄処理を行う工程、
(l)前記(k)工程後、前記ソース・ドレイン領域上を含む前記半導体基板上に、前記ゲート電極および前記側壁絶縁膜を覆うように、金属膜を形成する工程、
(m)前記(l)工程後、第2の熱処理を行って前記金属膜と前記ソース・ドレイン領域とを反応させて、前記ソース・ドレイン領域上に金属シリサイド層を形成する工程、
を有し、
前記(d)工程の後で、前記(e)工程の前に、前記第1の熱処理温度以上の温度での熱処理は行われず、
前記(f)工程では、前記第1の熱処理により、前記ソース・ドレイン領域内の不純物が活性化され、
前記(g)工程の後で、前記(i)工程の前に、前記第1の熱処理温度以上の温度での熱処理は行われず、
前記(h)工程では、前記レジストパターンは、前記ソース・ドレイン領域の上方には形成されず、
前記(i)工程では、前記ソース・ドレイン領域上の前記第2絶縁膜および前記第1絶縁膜は除去される、半導体装置の製造方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09199720A (ja) * | 1996-01-22 | 1997-07-31 | Oki Electric Ind Co Ltd | Mos型半導体装置とその製造方法 |
JP2004103900A (ja) * | 2002-09-11 | 2004-04-02 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2004165627A (ja) * | 2002-11-14 | 2004-06-10 | Samsung Electronics Co Ltd | L字型スペーサを採用した半導体素子の製造方法 |
JP2004235255A (ja) * | 2003-01-28 | 2004-08-19 | Nec Electronics Corp | 半導体装置の製造方法及び半導体装置 |
JP2007019206A (ja) * | 2005-07-07 | 2007-01-25 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2010098042A (ja) * | 2008-10-15 | 2010-04-30 | Renesas Technology Corp | 半導体装置の製造方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH09199720A (ja) * | 1996-01-22 | 1997-07-31 | Oki Electric Ind Co Ltd | Mos型半導体装置とその製造方法 |
JP2004103900A (ja) * | 2002-09-11 | 2004-04-02 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2004165627A (ja) * | 2002-11-14 | 2004-06-10 | Samsung Electronics Co Ltd | L字型スペーサを採用した半導体素子の製造方法 |
JP2004235255A (ja) * | 2003-01-28 | 2004-08-19 | Nec Electronics Corp | 半導体装置の製造方法及び半導体装置 |
JP2007019206A (ja) * | 2005-07-07 | 2007-01-25 | Matsushita Electric Ind Co Ltd | 半導体装置及びその製造方法 |
JP2010098042A (ja) * | 2008-10-15 | 2010-04-30 | Renesas Technology Corp | 半導体装置の製造方法 |
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