JP2017118625A5 - - Google Patents

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Publication number
JP2017118625A5
JP2017118625A5 JP2015249646A JP2015249646A JP2017118625A5 JP 2017118625 A5 JP2017118625 A5 JP 2017118625A5 JP 2015249646 A JP2015249646 A JP 2015249646A JP 2015249646 A JP2015249646 A JP 2015249646A JP 2017118625 A5 JP2017118625 A5 JP 2017118625A5
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JP
Japan
Prior art keywords
electrode
piezoelectric
layer
contact hole
driving device
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Application number
JP2015249646A
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English (en)
Japanese (ja)
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JP2017118625A (ja
JP6693120B2 (ja
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Priority to JP2015249646A priority Critical patent/JP6693120B2/ja
Priority claimed from JP2015249646A external-priority patent/JP6693120B2/ja
Publication of JP2017118625A publication Critical patent/JP2017118625A/ja
Publication of JP2017118625A5 publication Critical patent/JP2017118625A5/ja
Application granted granted Critical
Publication of JP6693120B2 publication Critical patent/JP6693120B2/ja
Expired - Fee Related legal-status Critical Current
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JP2015249646A 2015-12-22 2015-12-22 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ Expired - Fee Related JP6693120B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015249646A JP6693120B2 (ja) 2015-12-22 2015-12-22 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015249646A JP6693120B2 (ja) 2015-12-22 2015-12-22 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Publications (3)

Publication Number Publication Date
JP2017118625A JP2017118625A (ja) 2017-06-29
JP2017118625A5 true JP2017118625A5 (enExample) 2019-01-31
JP6693120B2 JP6693120B2 (ja) 2020-05-13

Family

ID=59232296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015249646A Expired - Fee Related JP6693120B2 (ja) 2015-12-22 2015-12-22 圧電駆動装置およびその製造方法、モーター、ロボット、ならびにポンプ

Country Status (1)

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JP (1) JP6693120B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2018230712A1 (ja) 2017-06-16 2020-04-16 学校法人同志社 ＴＧＦ−β阻害剤の新規スクリーニング法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006340503A (ja) * 2005-06-02 2006-12-14 Seiko Epson Corp 圧電アクチュエータ及びこれを備えた機器
JP5454795B2 (ja) * 2010-07-08 2014-03-26 セイコーエプソン株式会社 圧電素子の製造方法および液滴噴射ヘッドの製造方法

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