JP2017070030A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2017070030A5 JP2017070030A5 JP2015190750A JP2015190750A JP2017070030A5 JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5 JP 2015190750 A JP2015190750 A JP 2015190750A JP 2015190750 A JP2015190750 A JP 2015190750A JP 2017070030 A5 JP2017070030 A5 JP 2017070030A5
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- electrode
- driving device
- provided above
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 claims 3
- 239000007788 liquid Substances 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015190750A JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
| US15/268,972 US20170092838A1 (en) | 2015-09-29 | 2016-09-19 | Piezoelectric driving apparatus, method of manufacturing the same, motor, robot, and pump |
| CN201610851955.7A CN107017334A (zh) | 2015-09-29 | 2016-09-26 | 压电驱动装置及其制造方法、马达、机器人以及泵 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015190750A JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017070030A JP2017070030A (ja) | 2017-04-06 |
| JP2017070030A5 true JP2017070030A5 (enExample) | 2018-10-18 |
| JP6531909B2 JP6531909B2 (ja) | 2019-06-19 |
Family
ID=58495443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015190750A Active JP6531909B2 (ja) | 2015-09-29 | 2015-09-29 | 圧電駆動装置、モーター、ロボット及びポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6531909B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6946893B2 (ja) * | 2017-09-22 | 2021-10-13 | セイコーエプソン株式会社 | 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008301557A (ja) * | 2007-05-29 | 2008-12-11 | Kyocera Corp | 超音波モータ駆動装置 |
| JP2012231595A (ja) * | 2011-04-26 | 2012-11-22 | Canon Inc | 振動装置の駆動回路、塵埃除去装置及び振動型アクチュエータにおける振動装置の駆動回路 |
| JP5983018B2 (ja) * | 2012-05-16 | 2016-08-31 | セイコーエプソン株式会社 | 圧電モーター、圧電モーター装置、駆動回路及び駆動方法 |
-
2015
- 2015-09-29 JP JP2015190750A patent/JP6531909B2/ja active Active