JP2017045966A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2017045966A JP2017045966A JP2015169751A JP2015169751A JP2017045966A JP 2017045966 A JP2017045966 A JP 2017045966A JP 2015169751 A JP2015169751 A JP 2015169751A JP 2015169751 A JP2015169751 A JP 2015169751A JP 2017045966 A JP2017045966 A JP 2017045966A
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Abstract
【解決手段】半導体装置は、p型の半導体からなる基体上のn−型半導体領域LDR1に形成された、pチャネル型のMOSFETからなる接続トランジスタTRを備える。接続トランジスタTRは、p型の半導体領域としてのリサーフ層RSF1を有し、低圧回路領域LSRと、低圧回路領域LSRに供給される電源電位よりも高い電源電位が供給される高圧回路領域HSRと、を接続する。また、当該半導体装置は、n−型半導体領域LDR1のうち、平面視において、接続トランジスタTRを囲む部分に形成されたp型半導体領域IDF1を有する。
【選択図】図3
Description
初めに、実施の形態1の半導体装置について説明する。本実施の形態1の半導体装置は、電力用半導体素子の制御信号を生成する制御回路が集積されたものである。
次に、実施の形態1の半導体装置が用いられる電気機器について説明する。図1は、実施の形態1の半導体装置が用いられる電気機器の機能ブロック図である。
次に、本実施の形態1の半導体装置の構成について説明する。図2は、実施の形態1の半導体装置の構成を示す平面図である。図3は、実施の形態1の半導体装置の要部平面図である。図4および図5は、実施の形態1の半導体装置の要部断面図である。
次に、図1および図4〜図8を参照し、本実施形態1に係る半導体装置SDの動作について説明する。図6は、実施の形態1の半導体装置における接続トランジスタ周辺の等価回路図である。図7および図8は、実施の形態1の半導体装置の要部平面図である。
次に、比較例の半導体装置について説明する。図9および図10は、比較例の半導体装置の要部平面図である。図11および図12は、比較例の半導体装置の要部断面図である。
本実施の形態1の半導体装置では、ソース領域SO1、リサーフ層RSF1およびドレイン領域DR1は、p型半導体領域IDF1により囲まれている。そのため、接続トランジスタTRは、p型半導体領域IDF1により囲まれている。また、領域SPR1は、p型半導体領域IDF1により囲まれた領域と、p型半導体領域IDF1が形成された領域と、を含む。
次に、本実施の形態1の半導体装置の変形例について説明する。図16は、実施の形態1の半導体装置の変形例の断面図である。なお、図16は、実施の形態1における図5の断面図に相当する断面図である。
次に、本実施の形態1の半導体装置の製造方法について説明する。図17〜図21は、実施の形態1の半導体装置の製造工程中の要部断面図である。なお、図17〜図21は、図4の断面図に相当する断面図である。
実施の形態1では、接続トランジスタTRがp型半導体領域IDF1により囲まれている例について説明した。一方、実施の形態2では、接続トランジスタTRがDTI(Deep Trench Isolation)構造により囲まれている例について説明する。
次に、本実施の形態2の半導体装置について説明する。図22および図23は、実施の形態2の半導体装置の要部平面図である。図24は、実施の形態2の半導体装置の要部断面図である。
次に、本実施の形態2の半導体装置の製造方法について説明する。図25および図26は、実施の形態2の半導体装置の製造工程中の要部断面図である。
BSC 容量素子
BSE 基体
CG コントロールゲート電極
CNT1、CNT2、DCNT1、DCNT2 コンタクト
DIF 絶縁膜
DNW1、DNW2 n型半導体領域
DPW p型半導体領域
DR1、DR2 ドレイン領域
DRE1、DRE2 ドレイン電極
EI 素子分離膜
EL1 電極
EPI n−型半導体層
FCNT1、FCNT2 コンタクト
FE、FP1、FP2 フィールドプレート電極
FPT1〜FPT4 膜部
GCC 電圧制御回路
GCNT1、GCNT2 コンタクト
GDL ガードリング
GE ゲート電極
GI1、GI3 ゲート絶縁膜
GI2、GI4 絶縁膜
GND 接地電位
GP1、GP2 ゲートプレート電極
HDC ハイサイド駆動回路
HDF1、HDF3、HDF4 p+型半導体領域
HDF2 n+型半導体領域
HIN 制御信号
HM トランジスタ
HRD 整流素子
HSR 高圧回路領域
HV 高圧電源
IDF1、IDF2 p型半導体領域
Ids ドレイン電流
IL1、IL2 層間絶縁膜
LC1〜LC4 リーク電流
LD 負荷
LDC ローサイド駆動回路
LDF1、LDF2、LDR1、LDR2 n−型半導体領域
LGC 信号処理回路
LIN 制御信号
LM トランジスタ
LSC レベルシフト回路
LSR 低圧回路領域
LV 低圧電源
OPC 電力制御回路
OT1、OT2 出力端子
PBT1〜PBT3 寄生バイポーラトランジスタ
PD1 寄生ダイオード
PT1〜PT4 部分
R レベルシフト抵抗
RFP フィールドプレート電極
RFP1 部分電極
RSF1、RSF2 リサーフ層
SCNT1〜SCNT4 コンタクト
SD 半導体装置
SO1、SO2 ソース領域
SOE1、SOE2 ソース電極
SPR 分離領域
SPR1、SPR2 領域
SUB 基板
SUE1、SUE2 電極
TR 接続トランジスタ
TRP 溝部
TRP1〜TRP4 部分
TS 上面
VB、VCC 電源電位
VINC1、VINC2 電源配線
VOUT 出力電位
VS 基準電位
VT 電源電位
Wn1、Wn2、Wp 幅
Claims (15)
- p型の半導体からなる基体と、
前記基体の主面の第1領域で、前記基体上に形成されたn型の半導体層と、
前記半導体層上に形成された第1ゲート絶縁膜と、
前記第1ゲート絶縁膜上に形成された第1ゲート電極と、
前記半導体層のうち、平面視において、前記第1ゲート電極に対して、第1方向における第1の側に配置された部分の上層部に形成されたp型の第1半導体領域と、
前記半導体層のうち、平面視において、前記第1ゲート電極に対して前記第1の側と反対側に配置された部分の上層部に形成されたp型の第2半導体領域と、
前記第2半導体領域のうち、平面視において、前記第1ゲート電極側と反対側に配置された部分の上層部に形成されたp型の第3半導体領域と、
前記半導体層のうち、平面視において、前記第1半導体領域、前記第2半導体領域および前記第3半導体領域を囲む部分に、前記第1半導体領域、前記第2半導体領域および前記第3半導体領域から離れて形成されたp型の第4半導体領域と、
前記基体の前記主面のうち、平面視において、前記第1領域に対して前記第1の側に配置された第2領域で、前記基体の上方に形成された第1回路部と、
前記基体の前記主面のうち、平面視において、前記第1領域に対して前記第1の側と反対側に配置された第3領域で、前記基体の上方に形成された第2回路部と、
を有し、
前記第3半導体領域におけるp型の不純物濃度は、前記第2半導体領域におけるp型の不純物濃度よりも高く、
前記第1回路部には、第1電源電位が供給され、
前記第2回路部には、第2電源電位が供給され、
前記第1電源電位は、前記第2電源電位よりも高く、
前記第1ゲート電極は、前記第1回路部と電気的に接続され、
前記第3半導体領域は、前記第2回路部と電気的に接続され、
前記第1ゲート絶縁膜と、前記第1ゲート電極と、前記第1半導体領域と、前記第2半導体領域と、前記第3半導体領域と、により、前記第1回路部と前記第2回路部とを接続する第1トランジスタが形成されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第4半導体領域は、
平面視において、前記第2半導体領域に対して、前記第1方向と交差する第2方向における第2の側に配置された第1部分と、
平面視において、前記第3半導体領域に対して、前記第1方向における前記第1の側と反対側に配置された第2部分と、
平面視において、前記第2半導体領域に対して、前記第2方向における前記第2の側と反対側に配置された第3部分と、
を含み、
前記第1部分、前記第2部分および前記第3部分は、一体的に形成されている、半導体装置。 - 請求項2記載の半導体装置において、
前記第4半導体領域は、平面視において、前記第1半導体領域に対して、前記第1方向における前記第1の側に配置された第4部分を含み、
前記第1部分、前記第2部分、前記第3部分および前記第4部分は、一体的に形成されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第4半導体領域は、前記基体と接触している、半導体装置。 - 請求項1記載の半導体装置において、
前記第4半導体領域は、平面視において、前記第2半導体領域および前記第3半導体領域に対して、前記第1方向と交差する第3方向における第3の側に配置された第5部分を含み、
前記半導体装置は、さらに、前記半導体層のうち、前記第5部分に対して、前記第3の側に配置された部分の上層部に、前記第5部分から離れて形成されたn型の第5半導体領域を有し、
前記第5半導体領域におけるn型の不純物濃度は、前記半導体層におけるn型の不純物濃度よりも高い、半導体装置。 - 請求項5記載の半導体装置において、
前記第5半導体領域には、前記第1トランジスタがオン状態のときの前記第3半導体領域の電位よりも低い電位が供給される、半導体装置。 - 請求項5記載の半導体装置において、
前記第1領域で、前記半導体層のうち、前記第5部分に対して前記第3の側に配置された部分に形成されたp型の第6半導体領域を有し、
前記第6半導体領域は、前記基体と接触している、半導体装置。 - 請求項7記載の半導体装置において、
前記第5半導体領域には、前記第1トランジスタがオン状態のときの前記第3半導体領域の電位よりも低い電位が供給され、
前記基体の電位は、接地電位である、半導体装置。 - 請求項5記載の半導体装置において、
前記半導体層のうち、前記第5部分に対して前記第3の側に配置された部分上に、前記第5部分から離れて形成された第2ゲート絶縁膜と、
前記第2ゲート絶縁膜上に形成された第2ゲート電極と、
前記半導体層のうち、前記第5部分に対して前記第3の側に配置された部分の上層部に、前記第5部分から離れて形成されたn型の第7半導体領域と、
を有し、
前記第5半導体領域は、平面視において、前記第2ゲート電極に対して前記第1の側と反対側に配置され、
前記第7半導体領域は、平面視において、前記第2ゲート電極に対して前記第1の側に配置され、
前記第7半導体領域におけるn型の不純物濃度は、前記半導体層におけるn型の不純物濃度よりも高く、
前記第2ゲート絶縁膜と、前記第2ゲート電極と、前記第5半導体領域と、前記第7半導体領域と、により第2トランジスタが形成されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第2半導体領域の前記第1方向における長さは、前記第1半導体領域の前記第1方向における長さよりも長い、半導体装置。 - 請求項1記載の半導体装置において、
前記半導体層のうち、平面視において、前記第1半導体領域を挟んで前記第1ゲート電極と反対側に配置された部分の上層部に形成されたn型の第8半導体領域と、
前記第1半導体領域の上方および前記第8半導体領域の上方に形成された第1配線と、
を有し、
前記第8半導体領域におけるn型の不純物濃度は、前記半導体層におけるn型の不純物濃度よりも高く、
前記第8半導体領域は、前記第1配線を介して、前記第1半導体領域と電気的に接続されている、半導体装置。 - p型の半導体からなる基体と、
前記基体の主面の第1領域で、前記基体上に形成されたn型の半導体層と、
前記半導体層上に形成された第1ゲート絶縁膜と、
前記第1ゲート絶縁膜上に形成された第1ゲート電極と、
前記半導体層のうち、平面視において、前記第1ゲート電極に対して、第1方向における第1の側に配置された部分の上層部に形成されたp型の第1半導体領域と、
前記半導体層のうち、平面視において、前記第1ゲート電極に対して前記第1の側と反対側に配置された部分の上層部に形成されたp型の第2半導体領域と、
前記第2半導体領域のうち、平面視において、前記第1ゲート電極側と反対側に配置された部分の上層部に形成されたp型の第3半導体領域と、
前記半導体層のうち、平面視において、前記第1半導体領域、前記第2半導体領域および前記第3半導体領域を囲む部分に、前記第1半導体領域、前記第2半導体領域および前記第3半導体領域から離れて形成された開口部と、
前記開口部に埋め込まれた素子分離膜と、
前記基体の前記主面のうち、平面視において、前記第1領域に対して前記第1の側に配置された第2領域で、前記基体の上方に形成された第1回路部と、
前記基体の前記主面のうち、平面視において、前記第1領域に対して前記第1の側と反対側に配置された第3領域で、前記基体の上方に形成された第2回路部と、
を有する半導体装置であって、
前記第3半導体領域におけるp型の不純物濃度は、前記第2半導体領域におけるp型の不純物濃度よりも高く、
前記第1回路部には、第1電源電位が供給され、
前記第2回路部には、第2電源電位が供給され、
前記第1電源電位は、前記第2電源電位よりも高く、
前記第1ゲート電極は、前記第1回路部と電気的に接続され、
前記第3半導体領域は、前記第2回路部と電気的に接続され、
前記第1ゲート絶縁膜と、前記第1ゲート電極と、前記第1半導体領域と、前記第2半導体領域と、前記第3半導体領域と、により、前記第1回路部と前記第2回路部とを接続するトランジスタが形成され、
前記開口部は、平面視において、前記第2半導体領域および前記第3半導体領域に対して、前記第1方向と交差する第2方向における第2の側に配置された第1部分を含み、
前記素子分離膜は、前記第1部分に埋め込まれた第1膜部を含み、
前記半導体装置は、さらに、前記半導体層のうち、前記第1膜部に対して前記第2の側に配置された部分の上層部に、前記第1膜部から離れて形成されたn型の第4半導体領域を有し、
前記第4半導体領域におけるn型の不純物濃度は、前記半導体層におけるn型の不純物濃度よりも高い、半導体装置。 - 請求項12記載の半導体装置において、
前記第4半導体領域には、前記トランジスタがオン状態のときの前記第3半導体領域の電位よりも低い電位が供給される、半導体装置。 - 請求項12記載の半導体装置において、
前記第1領域で、前記半導体層のうち、前記第1膜部に対して前記第2の側に配置された部分に形成されたp型の第5半導体領域を有し、
前記第5半導体領域は、前記基体と接触している、半導体装置。 - 請求項14記載の半導体装置において、
前記第4半導体領域には、前記トランジスタがオン状態のときの前記第3半導体領域の電位よりも低い電位が供給され、
前記基体の電位は、接地電位である、半導体装置。
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