JP2017026612A5 - - Google Patents
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- Publication number
- JP2017026612A5 JP2017026612A5 JP2016140965A JP2016140965A JP2017026612A5 JP 2017026612 A5 JP2017026612 A5 JP 2017026612A5 JP 2016140965 A JP2016140965 A JP 2016140965A JP 2016140965 A JP2016140965 A JP 2016140965A JP 2017026612 A5 JP2017026612 A5 JP 2017026612A5
- Authority
- JP
- Japan
- Prior art keywords
- sample
- tomographic data
- charged particle
- pillar
- tomographic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 claims 32
- 239000002245 particle Substances 0.000 claims 17
- 238000003325 tomography Methods 0.000 claims 8
- 230000005540 biological transmission Effects 0.000 claims 3
- 238000010884 ion-beam technique Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 2
- 238000007493 shaping process Methods 0.000 claims 2
- 238000010894 electron beam technology Methods 0.000 claims 1
- 238000011065 in-situ storage Methods 0.000 claims 1
- 238000011835 investigation Methods 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201562196246P | 2015-07-23 | 2015-07-23 | |
| US62/196,246 | 2015-07-23 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017026612A JP2017026612A (ja) | 2017-02-02 |
| JP2017026612A5 true JP2017026612A5 (enExample) | 2017-08-24 |
| JP6393448B2 JP6393448B2 (ja) | 2018-09-19 |
Family
ID=57836148
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016140965A Active JP6393448B2 (ja) | 2015-07-23 | 2016-07-18 | Ｔｅｍ／ｓｔｅｍトモグラフィ連続傾斜の取得および位置合せのための基準マーク形成 |
Country Status (4)
| Country | Link |
|---|---|
| US (1) | US9627176B2 (enExample) |
| EP (1) | EP3121834A1 (enExample) |
| JP (1) | JP6393448B2 (enExample) |
| CN (1) | CN106370680B (enExample) |
Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102017212020B3 (de) * | 2017-07-13 | 2018-05-30 | Carl Zeiss Microscopy Gmbh | Verfahren zur In-situ-Präparation und zum Transfer mikroskopischer Proben, Computerprogrammprodukt sowie mikroskopische Probe |
| JP7154531B2 (ja) * | 2018-03-22 | 2022-10-18 | 国立大学法人東北大学 | 電子デバイスの評価方法および評価装置 |
| US10589360B2 (en) | 2018-06-17 | 2020-03-17 | Arevo, Inc. | Systems of articles of manufacture with corresponding fiducial marks and dimensional variations |
| EP3657528A1 (en) * | 2018-11-26 | 2020-05-27 | FEI Company | Method of imaging a sample using an electron microscope |
| US11264200B1 (en) * | 2020-09-23 | 2022-03-01 | Fei Company | Lamella alignment based on a reconstructed volume |
| CN112903733B (zh) * | 2021-01-25 | 2022-07-29 | 中国科学院广州地球化学研究所 | 一种透射电镜能谱超分辨分析方法 |
| US12260583B2 (en) * | 2021-02-09 | 2025-03-25 | Fei Company | 3D fiducial for precision 3D NAND channel tilt/shift analysis |
| US11476079B1 (en) * | 2021-03-31 | 2022-10-18 | Fei Company | Method and system for imaging a multi-pillar sample |
| CN115078772B (zh) * | 2022-05-30 | 2025-10-31 | 江苏第三代半导体研究院有限公司 | 一种apt样品制作方法及apt样品 |
| EP4379348A1 (en) * | 2022-11-30 | 2024-06-05 | Fei Company | Method for micromachining a biological sample for creating a lamella for analysis in a cryo-charged particle microscope |
| CN117553723B (zh) * | 2024-01-12 | 2024-04-23 | 中铁大桥局集团有限公司 | 一种基于三维扫描技术的预埋件装配板孔群的定位方法 |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7442924B2 (en) | 2005-02-23 | 2008-10-28 | Fei, Company | Repetitive circumferential milling for sample preparation |
| US7312448B2 (en) | 2005-04-06 | 2007-12-25 | Carl Zeiss Nts Gmbh | Method and apparatus for quantitative three-dimensional reconstruction in scanning electron microscopy |
| US7884326B2 (en) | 2007-01-22 | 2011-02-08 | Fei Company | Manipulator for rotating and translating a sample holder |
| JP5268324B2 (ja) * | 2007-10-29 | 2013-08-21 | 株式会社日立ハイテクノロジーズ | 荷電粒子線顕微装置及び顕微方法 |
| TWI372859B (en) * | 2008-10-03 | 2012-09-21 | Inotera Memories Inc | Method for manufacturing an electron tomography specimen with fiducial markers and method for constructing 3d image |
| JP5321918B2 (ja) * | 2010-06-15 | 2013-10-23 | 独立行政法人産業技術総合研究所 | 電子顕微鏡用試料作製方法 |
| EP2402976A1 (en) | 2010-06-30 | 2012-01-04 | Fei Company | Method of electron diffraction tomography |
| EP2708874A1 (en) | 2012-09-12 | 2014-03-19 | Fei Company | Method of performing tomographic imaging of a sample in a charged-particle microscope |
| EP2738786A1 (en) | 2012-11-29 | 2014-06-04 | Fei Company | Method of performing tomographic imaging of a sample in a charged-particle microscope |
| CN105264635B (zh) * | 2012-12-31 | 2018-11-20 | Fei 公司 | 用于利用带电粒子束的倾斜或掠射研磨操作的基准设计 |
| EP2811288B1 (en) | 2013-06-06 | 2016-08-10 | Fei Company | Method for electron tomography |
| EP2916342A1 (en) | 2014-03-05 | 2015-09-09 | Fei Company | Fabrication of a lamella for correlative atomic-resolution tomographic analyses |
-
2016
- 2016-01-06 US US14/989,419 patent/US9627176B2/en active Active
- 2016-03-04 EP EP16158607.8A patent/EP3121834A1/en not_active Withdrawn
- 2016-07-18 JP JP2016140965A patent/JP6393448B2/ja active Active
- 2016-07-22 CN CN201610806416.1A patent/CN106370680B/zh active Active
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