JP7154531B2 - 電子デバイスの評価方法および評価装置 - Google Patents
電子デバイスの評価方法および評価装置 Download PDFInfo
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Description
11 ウェハ
12 下部電極
13 参照層
14 トンネル障壁絶縁膜
15 記録層
16,17 導電性異物
18 ダメージ層
30 試料
40 評価装置
42 電子源
43 画像取得部
44 元素分析部
45 画像処理部
60 キャップ層
61 上部電極
70 熱酸化シリコン基板
71 下部電極
72 参照層
73 最上層
74 トンネル障壁絶縁膜
75 最下層
76 スペーサー
77 最上層
78 記録層
79 キャップ
80 キャップ層
81 上部電極エッチストッパー
82 上部電極
Claims (11)
- 下部電極、強磁性体で形成された参照層、トンネル障壁絶縁膜、強磁性体で形成された記録層、および上部電極が順に積層された電子デバイスの評価方法において、
前記トンネル障壁絶縁膜を有する試料を作製する試料作製工程と、
前記試料に対して複数の角度から電子線を照射して複数の画像を取得する画像取得工程と、
前記複数の画像を用いて画像処理を行うことにより、前記試料の立体像を再構成し、前記立体像から前記試料の断面像を生成する画像処理工程とを有し、
前記画像処理工程は、前記断面像として、前記トンネル障壁絶縁膜の水平断面像を生成し、前記水平断面像の濃淡によって、前記参照層と前記トンネル障壁絶縁膜との間の界面および/または前記トンネル障壁絶縁膜と前記記録層との間の界面の凹凸を評価する
ことを特徴とする電子デバイスの評価方法。 - 前記試料には、前記記録層と前記参照層を短絡させる導電性異物と、前記トンネル障壁絶縁膜の結晶性を劣化させる絶縁性異物との少なくともいずれかが付着していることを特徴とする請求項1に記載の電子デバイスの評価方法。
- 前記画像取得工程は、前記複数の画像を透過型電子顕微鏡により取得することを特徴とする請求項1または2に記載の電子デバイスの評価方法。
- 前記透過型電子顕微鏡として走査型透過電子顕微鏡を用いることを特徴とする請求項3に記載の電子デバイスの評価方法。
- 前記画像処理工程は、トモグラフィー法を用いて前記断面像を生成することを特徴とする請求項1~4のうちいずれか1項に記載の電子デバイスの評価方法。
- 前記電子線が照射された前記試料の元素分析を行う元素分析工程を有し、
前記画像処理工程は、前記元素分析の結果を用いて元素マッピング像を生成することを特徴とする請求項1~5のうちいずれか1項に記載の電子デバイスの評価方法。 - 前記元素分析工程は、エネルギー分散型X線分光により前記元素分析を行うことを特徴とする請求項6に記載の電子デバイスの評価方法。
- 前記元素分析工程は、電子エネルギー損失分光により前記元素分析を行うことを特徴とする請求項6または7に記載の電子デバイスの評価方法。
- 前記試料には、エッチング処理により生じたダメージ層が形成されていることを特徴とする請求項1~8のうちいずれか1項に記載の電子デバイスの評価方法。
- 前記水平断面像により、さらに、前記ダメージ層を評価することを特徴とする請求項9に記載の電子デバイスの評価方法。
- 下部電極、強磁性体で形成された参照層、トンネル障壁絶縁膜、強磁性体で形成された記録層、および上部電極が順に積層された電子デバイスの評価装置において、
前記トンネル障壁絶縁膜を有する試料に対して複数の角度から電子線を出力する電子源と、
前記試料を透過した前記電子線を検出することにより複数の画像を取得する画像取得部と、
前記複数の画像から前記試料の立体像を再構成し、前記立体像から前記試料の断面像を生成する画像処理部と、
を備え、
前記画像処理部は、前記断面像として、前記トンネル障壁絶縁膜の水平断面像を生成し、前記水平断面像の濃淡によって、前記参照層と前記トンネル障壁絶縁膜との間の界面および/または前記トンネル障壁絶縁膜と前記記録層との間の界面の凹凸を評価する
ことを特徴とする電子デバイスの評価装置。
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US16/360,516 US11062876B2 (en) | 2018-03-22 | 2019-03-21 | Evaluation method and evaluation apparatus for electronic device |
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Citations (5)
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JP2004349574A (ja) | 2003-05-23 | 2004-12-09 | Sony Corp | 磁気メモリ素子の製造方法、磁気メモリ素子の検査方法 |
US20110284744A1 (en) | 2010-05-20 | 2011-11-24 | California Institute Of Technology | Method and system for 4d tomography and ultrafast scanning electron microscopy |
JP2014022296A (ja) | 2012-07-23 | 2014-02-03 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料作製方法 |
JP2016103387A (ja) | 2014-11-28 | 2016-06-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2017026612A (ja) | 2015-07-23 | 2017-02-02 | エフ・イ−・アイ・カンパニー | Tem/stemトモグラフィ連続傾斜の取得および位置合せのための基準マーク形成 |
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JP2007073907A (ja) | 2005-09-09 | 2007-03-22 | Toshiba Corp | 電子デバイスの評価方法および電子デバイス |
CN104246929B (zh) * | 2012-06-29 | 2017-10-20 | 太阳诱电株式会社 | 层叠陶瓷电容器 |
JP6239246B2 (ja) * | 2013-03-13 | 2017-11-29 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置、試料観察方法、試料台、観察システム、および発光部材 |
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Patent Citations (5)
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JP2004349574A (ja) | 2003-05-23 | 2004-12-09 | Sony Corp | 磁気メモリ素子の製造方法、磁気メモリ素子の検査方法 |
US20110284744A1 (en) | 2010-05-20 | 2011-11-24 | California Institute Of Technology | Method and system for 4d tomography and ultrafast scanning electron microscopy |
JP2014022296A (ja) | 2012-07-23 | 2014-02-03 | Hitachi High-Technologies Corp | 荷電粒子線装置及び試料作製方法 |
JP2016103387A (ja) | 2014-11-28 | 2016-06-02 | 株式会社日立ハイテクノロジーズ | 荷電粒子線装置 |
JP2017026612A (ja) | 2015-07-23 | 2017-02-02 | エフ・イ−・アイ・カンパニー | Tem/stemトモグラフィ連続傾斜の取得および位置合せのための基準マーク形成 |
Non-Patent Citations (1)
Title |
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HWANG,K. et al.,Advanced Characterization of Nanoscale Bridge in Magnetic Tunnel Junction by 3-dimensional EDS Tomography,Microscopy and Microanalysis,2013年,Volume 19,Issue S2,pp.1852-1853,doi:10.1017/S1431927613011252 |
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