JP2017017916A - 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 - Google Patents

圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 Download PDF

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Publication number
JP2017017916A
JP2017017916A JP2015134198A JP2015134198A JP2017017916A JP 2017017916 A JP2017017916 A JP 2017017916A JP 2015134198 A JP2015134198 A JP 2015134198A JP 2015134198 A JP2015134198 A JP 2015134198A JP 2017017916 A JP2017017916 A JP 2017017916A
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Japan
Prior art keywords
piezoelectric
vibrating
vibrating body
electrode
drive device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015134198A
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English (en)
Japanese (ja)
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JP2017017916A5 (enExample
Inventor
豊 荒川
Yutaka Arakawa
豊 荒川
晃雄 小西
Akio Konishi
晃雄 小西
橋本　泰治
Taiji Hashimoto
泰治 橋本
宮澤　修
Osamu Miyazawa
修 宮澤
友寿 岩▲崎▼
Tomohisa Iwasaki
友寿 岩▲崎▼
幸一郎 露木
Koichiro Tsuyuki
幸一郎 露木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2015134198A priority Critical patent/JP2017017916A/ja
Priority to CN201610423946.8A priority patent/CN106329985A/zh
Priority to US15/193,269 priority patent/US10195737B2/en
Priority to EP16177487.2A priority patent/EP3121861B1/en
Publication of JP2017017916A publication Critical patent/JP2017017916A/ja
Publication of JP2017017916A5 publication Critical patent/JP2017017916A5/ja
Pending legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/12—Programme-controlled manipulators characterised by positioning means for manipulator elements electric
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H02N2/003—Driving devices, e.g. vibrators using longitudinal or radial modes combined with bending modes
    • H02N2/004—Rectangular vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0055—Supports for driving or driven bodies; Means for pressing driving body against driven body
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/005—Mechanical details, e.g. housings
    • H02N2/0065—Friction interface
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/108—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors around multiple axes of rotation, e.g. spherical rotor motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/14—Drive circuits; Control arrangements or methods
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/802—Circuitry or processes for operating piezoelectric or electrostrictive devices not otherwise provided for, e.g. drive circuits
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/871—Single-layered electrodes of multilayer piezoelectric or electrostrictive devices, e.g. internal electrodes

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
JP2015134198A 2015-07-03 2015-07-03 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法 Pending JP2017017916A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015134198A JP2017017916A (ja) 2015-07-03 2015-07-03 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法
CN201610423946.8A CN106329985A (zh) 2015-07-03 2016-06-15 压电驱动装置、机器人以及压电驱动装置的驱动方法
US15/193,269 US10195737B2 (en) 2015-07-03 2016-06-27 Piezoelectric drive device, robot, and method for driving piezoelectric drive device
EP16177487.2A EP3121861B1 (en) 2015-07-03 2016-07-01 Piezoelectric drive device, robot, and method for driving piezoelectric drive device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015134198A JP2017017916A (ja) 2015-07-03 2015-07-03 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法

Publications (2)

Publication Number Publication Date
JP2017017916A true JP2017017916A (ja) 2017-01-19
JP2017017916A5 JP2017017916A5 (enExample) 2018-07-12

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JP2015134198A Pending JP2017017916A (ja) 2015-07-03 2015-07-03 圧電駆動装置、ロボット及び圧電駆動装置の駆動方法

Country Status (4)

Country Link
US (1) US10195737B2 (enExample)
EP (1) EP3121861B1 (enExample)
JP (1) JP2017017916A (enExample)
CN (1) CN106329985A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109546888A (zh) * 2017-09-22 2019-03-29 精工爱普生株式会社 压电驱动装置、压电电机、机器人、电子元件输送装置、打印机和投影仪
JP2019083628A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
US11205974B2 (en) 2017-11-17 2021-12-21 Seiko Epson Corporation Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector
US11682985B2 (en) 2020-09-23 2023-06-20 Seiko Epson Corporation Piezoelectric driving device and robot comprising the same
US11746863B2 (en) 2018-05-31 2023-09-05 Seiko Epson Corporation Rotary-to-linear motion converter
US11888416B2 (en) 2021-04-19 2024-01-30 Seiko Epson Corporation Piezoelectric drive device and robot

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JP6467809B2 (ja) * 2014-08-13 2019-02-13 セイコーエプソン株式会社 圧電駆動装置及びその駆動方法、ロボット及びその駆動方法
US20170092838A1 (en) * 2015-09-29 2017-03-30 Seiko Epson Corporation Piezoelectric driving apparatus, method of manufacturing the same, motor, robot, and pump
JP7200550B2 (ja) * 2018-08-31 2023-01-10 セイコーエプソン株式会社 圧電駆動装置、ロボットおよびプリンター
JP2021145471A (ja) * 2020-03-12 2021-09-24 セイコーエプソン株式会社 圧電駆動装置、圧電モーター及びロボット
US11379765B2 (en) 2020-11-25 2022-07-05 Bank Of America Corporation Occupancy prediction using real-time information

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JP2004104984A (ja) * 2002-04-03 2004-04-02 Olympus Corp 超音波リニアモータ
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Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109546888A (zh) * 2017-09-22 2019-03-29 精工爱普生株式会社 压电驱动装置、压电电机、机器人、电子元件输送装置、打印机和投影仪
JP2019058040A (ja) * 2017-09-22 2019-04-11 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
US11133453B2 (en) 2017-09-22 2021-09-28 Seiko Epson Corporation Piezoelectric driving device, piezoelectric motor, robot, electronic-component conveying apparatus, printer, and projector
CN109546888B (zh) * 2017-09-22 2023-10-10 精工爱普生株式会社 压电驱动装置、压电电机、机器人、电子元件输送装置、打印机和投影仪
JP2019083628A (ja) * 2017-10-30 2019-05-30 セイコーエプソン株式会社 圧電駆動装置、圧電モーター、ロボット、電子部品搬送装置、プリンターおよびプロジェクター
US11205974B2 (en) 2017-11-17 2021-12-21 Seiko Epson Corporation Piezoelectric driving device, piezoelectric motor, robot, electronic component conveyance apparatus, printer, and projector
US11746863B2 (en) 2018-05-31 2023-09-05 Seiko Epson Corporation Rotary-to-linear motion converter
US11682985B2 (en) 2020-09-23 2023-06-20 Seiko Epson Corporation Piezoelectric driving device and robot comprising the same
US11888416B2 (en) 2021-04-19 2024-01-30 Seiko Epson Corporation Piezoelectric drive device and robot

Also Published As

Publication number Publication date
EP3121861A3 (en) 2017-03-15
CN106329985A (zh) 2017-01-11
EP3121861A2 (en) 2017-01-25
US20170001306A1 (en) 2017-01-05
US10195737B2 (en) 2019-02-05
EP3121861B1 (en) 2018-08-22

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