JP2016530453A5 - - Google Patents
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- Publication number
- JP2016530453A5 JP2016530453A5 JP2016514091A JP2016514091A JP2016530453A5 JP 2016530453 A5 JP2016530453 A5 JP 2016530453A5 JP 2016514091 A JP2016514091 A JP 2016514091A JP 2016514091 A JP2016514091 A JP 2016514091A JP 2016530453 A5 JP2016530453 A5 JP 2016530453A5
- Authority
- JP
- Japan
- Prior art keywords
- gas
- component
- container
- target
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 51
- 238000000034 method Methods 0.000 claims 17
- 239000000203 mixture Substances 0.000 claims 15
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 claims 4
- 239000001257 hydrogen Substances 0.000 claims 3
- 229910052739 hydrogen Inorganic materials 0.000 claims 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- 229910015900 BF3 Inorganic materials 0.000 claims 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 150000002431 hydrogen Chemical class 0.000 claims 2
- BLIQUJLAJXRXSG-UHFFFAOYSA-N 1-benzyl-3-(trifluoromethyl)pyrrolidin-1-ium-3-carboxylate Chemical compound C1C(C(=O)O)(C(F)(F)F)CCN1CC1=CC=CC=C1 BLIQUJLAJXRXSG-UHFFFAOYSA-N 0.000 claims 1
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims 1
- UCKMPCXJQFINFW-UHFFFAOYSA-N Sulphide Chemical compound [S-2] UCKMPCXJQFINFW-UHFFFAOYSA-N 0.000 claims 1
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
- 229910002092 carbon dioxide Inorganic materials 0.000 claims 1
- 239000001569 carbon dioxide Substances 0.000 claims 1
- 229910002091 carbon monoxide Inorganic materials 0.000 claims 1
- IYRWEQXVUNLMAY-UHFFFAOYSA-N carbonyl fluoride Chemical compound FC(F)=O IYRWEQXVUNLMAY-UHFFFAOYSA-N 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 238000001816 cooling Methods 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 238000011010 flushing procedure Methods 0.000 claims 1
- 229910000078 germane Inorganic materials 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 239000012535 impurity Substances 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 claims 1
- 229910052754 neon Inorganic materials 0.000 claims 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 239000001301 oxygen Substances 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 claims 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 claims 1
- 229910000058 selane Inorganic materials 0.000 claims 1
- 229910000077 silane Inorganic materials 0.000 claims 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 claims 1
- PPMWWXLUCOODDK-UHFFFAOYSA-N tetrafluorogermane Chemical group F[Ge](F)(F)F PPMWWXLUCOODDK-UHFFFAOYSA-N 0.000 claims 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims 1
- 238000010792 warming Methods 0.000 claims 1
- 229910052724 xenon Inorganic materials 0.000 claims 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361824709P | 2013-05-17 | 2013-05-17 | |
| US61/824,709 | 2013-05-17 | ||
| PCT/US2014/038196 WO2014186575A1 (en) | 2013-05-17 | 2014-05-15 | Preparation of high pressure bf3/h2 mixtures |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016530453A JP2016530453A (ja) | 2016-09-29 |
| JP2016530453A5 true JP2016530453A5 (https=) | 2017-06-22 |
| JP6580032B2 JP6580032B2 (ja) | 2019-09-25 |
Family
ID=51898869
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016514091A Active JP6580032B2 (ja) | 2013-05-17 | 2014-05-15 | 高圧ｂｆ３／ｈ２混合物の製造 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US9996090B2 (https=) |
| EP (1) | EP2997112B1 (https=) |
| JP (1) | JP6580032B2 (https=) |
| KR (2) | KR102282129B1 (https=) |
| CN (1) | CN105392870B (https=) |
| SG (1) | SG11201509425QA (https=) |
| TW (1) | TWI633252B (https=) |
| WO (1) | WO2014186575A1 (https=) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014186575A1 (en) | 2013-05-17 | 2014-11-20 | Advanced Technology Materials, Inc. | Preparation of high pressure bf3/h2 mixtures |
| CN109195910B (zh) * | 2016-03-28 | 2022-05-24 | 恩特格里斯公司 | 氢化且富含三氟化硼同位素的掺杂剂来源的气体组合物 |
| US11353951B2 (en) * | 2018-06-08 | 2022-06-07 | Hewlett-Packard Development Company, L.P. | Computing input devices with sensors concealed in articles of clothing |
| CN113261073B (zh) * | 2018-12-15 | 2024-07-16 | 恩特格里斯公司 | 利用非钨材料的氟离子植入系统和其使用方法 |
| CN111744423B (zh) * | 2019-03-29 | 2022-08-02 | 中国石油天然气股份有限公司 | 标准混合气体的制备装置及制备方法 |
| IT202300010056A1 (it) * | 2023-05-18 | 2024-11-18 | Antares Vision S P A | Apparecchiatura per il riempimento di contenitori di taratura per sistemi di rilevazione della presenza di ossigeno |
Family Cites Families (28)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5828480B2 (ja) * | 1979-05-01 | 1983-06-16 | 高千穂化学工業株式会社 | 標準混合ガスの充填混合方法 |
| JPS59201934A (ja) | 1983-04-28 | 1984-11-15 | Toyota Motor Corp | 着火時期センサの付着物除去装置 |
| DE3440260C1 (de) | 1984-11-03 | 1986-04-03 | Deutsche Gesellschaft für Wiederaufarbeitung von Kernbrennstoffen mbH, 3000 Hannover | Verfahren zur Vorbereitung einer Saugkokille fuer die Aufnahme von verglasten radioaktiven Abfallstoffen nach der Absaugmethode und Vorrichtung zur Durchfuehrung des Verfahrens |
| JPH0517520Y2 (https=) * | 1984-12-27 | 1993-05-11 | ||
| DE3637925A1 (de) * | 1986-11-05 | 1987-07-09 | Hahn Meitner Kernforsch | Verfahren zum befuellen von druckdosen mit unterschiedlichen technischen gasen |
| US5409046A (en) * | 1989-10-02 | 1995-04-25 | Swenson; Paul F. | System for fast-filling compressed natural gas powered vehicles |
| US5353848A (en) | 1993-04-27 | 1994-10-11 | The Boc Group, Inc. | Method of filling gas cylinders |
| EP1152818A4 (en) * | 1998-12-24 | 2005-09-14 | Cook Inc | Volumetric gas mixing device |
| FR2794216B1 (fr) * | 1999-05-26 | 2001-08-03 | Air Liquide | Installation de remplissage d'un volume de conditionnement avec du gaz |
| DE10107895B4 (de) * | 2001-02-20 | 2007-07-05 | Air Liquide Deutschland Gmbh | Verfahren und Vorrichtung zum Befüllen von Druckbehältern mit tiefsiedenden permanenten Gasen oder Gasgemischen |
| US6655422B2 (en) * | 2001-09-26 | 2003-12-02 | Atnl, Inc. | Computer controlled apparatus and method of filling cylinders with gas |
| JP2003336795A (ja) | 2002-03-13 | 2003-11-28 | Nippon Sanso Corp | 燃料充填装置および燃料漏れ検出方法 |
| US6857447B2 (en) | 2002-06-10 | 2005-02-22 | Advanced Technology Materials, Inc. | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases |
| US6779568B2 (en) | 2002-07-16 | 2004-08-24 | General Hydrogen Corporation | Gas distribution system |
| EP1450097A3 (en) * | 2003-02-19 | 2007-12-12 | Taiyo Nippon Sanso Corporation | Fuel filling device and fuel leakage detection method |
| WO2005043033A1 (de) * | 2003-10-17 | 2005-05-12 | L'AIR LIQUIDE Société Anonyme à Directoire et Conseil de Surveillance pour l'Etude et l'Exploitation | Verfahren zur gasbefüllung von druckgefässen |
| US7500497B2 (en) | 2003-12-19 | 2009-03-10 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Method of filling compressed-gas containers with gas |
| US20060243207A1 (en) | 2005-04-20 | 2006-11-02 | Jursich Gregory M | Fluid mixing and delivery system |
| DE102005019413A1 (de) | 2005-04-25 | 2006-10-26 | Messer Group Gmbh | Verfahren und Vorrichtung zum Befüllen eines Behälters mit einem Füllgas oder Füllgasgemisch |
| TWI552797B (zh) * | 2005-06-22 | 2016-10-11 | 恩特葛瑞斯股份有限公司 | 整合式氣體混合用之裝置及方法 |
| FR2896028B1 (fr) | 2006-01-06 | 2008-07-04 | Air Liquide | Procede et dispositif de remplissage de conteneurs de gaz sous pression |
| US7813627B2 (en) | 2006-09-29 | 2010-10-12 | Praxair Technology, Inc. | Low vapor pressure high purity gas delivery system |
| KR101933225B1 (ko) * | 2010-01-14 | 2018-12-27 | 엔테그리스, 아이엔씨. | 환기 가스 관리 시스템 및 공정 |
| US8779383B2 (en) * | 2010-02-26 | 2014-07-15 | Advanced Technology Materials, Inc. | Enriched silicon precursor compositions and apparatus and processes for utilizing same |
| US20120227816A1 (en) * | 2011-03-10 | 2012-09-13 | Xuemei Song | Dynamic gas blending |
| FR2976258B1 (fr) * | 2011-06-09 | 2014-09-05 | Air Liquide | Installation de conditionnement de no a debitmetres massiques |
| FR2976259B1 (fr) * | 2011-06-09 | 2013-07-05 | Air Liquide | Procede de conditionnement d'un melange gazeux no/n2 |
| WO2014186575A1 (en) | 2013-05-17 | 2014-11-20 | Advanced Technology Materials, Inc. | Preparation of high pressure bf3/h2 mixtures |
-
2014
- 2014-05-15 WO PCT/US2014/038196 patent/WO2014186575A1/en not_active Ceased
- 2014-05-15 US US14/891,352 patent/US9996090B2/en active Active
- 2014-05-15 EP EP14798140.1A patent/EP2997112B1/en active Active
- 2014-05-15 SG SG11201509425QA patent/SG11201509425QA/en unknown
- 2014-05-15 KR KR1020157035573A patent/KR102282129B1/ko active Active
- 2014-05-15 CN CN201480040791.9A patent/CN105392870B/zh active Active
- 2014-05-15 JP JP2016514091A patent/JP6580032B2/ja active Active
- 2014-05-15 KR KR1020217023010A patent/KR102392438B1/ko active Active
- 2014-05-16 TW TW103117348A patent/TWI633252B/zh active
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