JP2016519844A5 - - Google Patents

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JP2016519844A5
JP2016519844A5 JP2016500194A JP2016500194A JP2016519844A5 JP 2016519844 A5 JP2016519844 A5 JP 2016519844A5 JP 2016500194 A JP2016500194 A JP 2016500194A JP 2016500194 A JP2016500194 A JP 2016500194A JP 2016519844 A5 JP2016519844 A5 JP 2016519844A5
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gas delivery
gas
insert
liner
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JP6473131B2 (ja
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更なる関連する一実施形態では、側部ガス注入キットは、更に、（ａ）上部ライナリング内の複数のガス送出インサートポケットと、（ｂ）ガス送出インサートポケット内へ延びる複数のガス送出インサートと、（ｃ）ガス送出インサートと同心の複数のＯリングインサート溝の各々と、複数のガス送出インサートポケットの対応するものの内部側壁に対して圧縮される複数のＯリングインサート溝内の第２の複数のＯリングとを更に含む。
本発明の例示的な実施形態が達成される方法を詳細に理解することができるように、上記で簡単に要約した本発明のより詳細な説明を、添付図面に示されるその実施形態を参照して得ることができる。特定の周知のプロセスは、本発明を不明瞭にしないために、本明細書で説明されていないことを理解すべきである。
一実施形態の簡略化したブロック図である。 図１に対応する立面図である。 ８つのガス出口を有する一実施形態を示す。 図３の実施形態用の側部ガス送出キットを示す。 図４の側部ガス送出キットの切欠断面図である。 図５の一部の拡大図である。 底部ライナを示す。 底部ライナによって囲まれたワークピース支持台を示す。 上部からの上部ライナリングの図を示す。 底部からの上部ライナリングの図を示す。 図１０の一部の拡大図である。 〜 それぞれガス送出リングの上面図及び底面図である。 図１２の線１４−１４に沿った拡大断面図である。 図６の注入ノズルの拡大図である。 図１５に対応する断面図である。 図６のガス送出インサートの拡大図である。 図１７に対応する断面図である。 図４の実施形態で使用されたガス送出ブロックを示す。 図１９に対応する断面図である。 図４のガス分配リング、上部ライナリング、注入ノズル、及びガス分配インサートの分解アセンブリを示す。 図２１の一部の拡大図である。
図２１及び図２２内の組み立て手順は、上部ライナリング１４０内のノズルポケット１６４内に注入ノズル１４８を挿入する工程と、ガス送出リング１４４上にガス送出インサート１４６を取り付ける工程と、その後、ガス送出インサート１４６をそれぞれのインサート収容穴１８６内に挿入するようにガス送出リング１４０と上部ライナリング１４０を一緒にする工程を伴う。

Claims (1)

  1. 前記チャンバはチャンバ内部を含み、前記側部ガスプレナムはライナエッジを含み、
    前記プラズマリアクタは、
    前記ライナエッジの上方のガス送出リングであって、前記複数の組のガス流チャネルは、前記ガス送出リング内に形成されるガス送出リングと、
    前記ガス送出リングの上方の上部ライナリングであって、前記複数の側部ガス出口は、前記上部ライナリング内へ延び、前記上部ライナリングは、前記チャンバ内部に対向する上部ライナリング面を含む上部ライナリングとを含む請求項５記載のプラズマリアクタ。
JP2016500194A 2013-03-12 2014-02-03 方位角方向及び半径方向分布制御を備えたマルチゾーンガス注入アセンブリ Active JP6473131B2 (ja)

Applications Claiming Priority (3)

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US201361777225P 2013-03-12 2013-03-12
US61/777,225 2013-03-12
PCT/US2014/014389 WO2014163742A1 (en) 2013-03-12 2014-02-03 Multi-zone gas injection assembly with azimuthal and radial distribution control

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JP2016519844A JP2016519844A (ja) 2016-07-07
JP2016519844A5 true JP2016519844A5 (ja) 2016-12-28
JP6473131B2 JP6473131B2 (ja) 2019-02-20

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JP2018018875A Active JP6563535B2 (ja) 2013-03-12 2018-02-06 方位角方向及び半径方向分布制御を備えたマルチゾーンガス注入アセンブリ
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JP2019135834A Active JP6862505B2 (ja) 2013-03-12 2019-07-24 方位角方向及び半径方向分布制御を備えたマルチゾーンガス注入アセンブリ

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US (3) US10008368B2 (ja)
JP (3) JP6473131B2 (ja)
KR (3) KR102176189B1 (ja)
CN (3) CN107424901B (ja)
TW (1) TWI586829B (ja)
WO (1) WO2014163742A1 (ja)

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