JP6320248B2 - プラズマエッチング方法 - Google Patents
プラズマエッチング方法Info
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- JP6320248B2 JP6320248B2 JP2014180073A JP2014180073A JP6320248B2 JP 6320248 B2 JP6320248 B2 JP 6320248B2 JP 2014180073 A JP2014180073 A JP 2014180073A JP 2014180073 A JP2014180073 A JP 2014180073A JP 6320248 B2 JP6320248 B2 JP 6320248B2
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- 238000000034 method Methods 0.000 title claims description 28
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- 238000012545 processing Methods 0.000 claims description 72
- 238000005530 etching Methods 0.000 claims description 37
- 230000006870 function Effects 0.000 claims description 8
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- 238000010790 dilution Methods 0.000 description 17
- 239000012895 dilution Substances 0.000 description 17
- 239000001307 helium Substances 0.000 description 15
- 229910052734 helium Inorganic materials 0.000 description 15
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 15
- 238000010586 diagram Methods 0.000 description 13
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 12
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 12
- 229920005591 polysilicon Polymers 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 230000001681 protective effect Effects 0.000 description 10
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- 229910004298 SiO 2 Inorganic materials 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 229920002120 photoresistant polymer Polymers 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 229910052786 argon Inorganic materials 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 235000012239 silicon dioxide Nutrition 0.000 description 6
- 238000003860 storage Methods 0.000 description 6
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 229910052681 coesite Inorganic materials 0.000 description 4
- 229910052906 cristobalite Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 229910052682 stishovite Inorganic materials 0.000 description 4
- 229910052905 tridymite Inorganic materials 0.000 description 4
- 229910003481 amorphous carbon Inorganic materials 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 239000002826 coolant Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 238000005728 strengthening Methods 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 229910052754 neon Inorganic materials 0.000 description 2
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 2
- 238000002407 reforming Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
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- 230000004888 barrier function Effects 0.000 description 1
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- 239000000498 cooling water Substances 0.000 description 1
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- 229910052736 halogen Inorganic materials 0.000 description 1
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Description
図1は、本発明の第1の実施形態に係るプラズマエッチング方法を実施することが可能なプラズマエッチング装置の一例を示す概略断面図である。
ガス種 C4F6/C4F8/He/O2/NF3
ガス流量 5〜70sccm/5〜70sccm/70〜200sccm/50〜100sccm/1〜20sccm
第1の高周波の周波数及び電力 40MHz/1500〜2500W
第2の高周波の周波数及び電力 3MHz/5000〜9000W
高周波パルスの周波数 1〜150kHz
高周波パルスのデューティー比 10〜60%
高周波パルスのオフ時間 30〜150μsec
直流電圧(DC) 500〜1000V
以上、本発明の実施形態について説明したが、本発明は上記実施形態に限定されることなく種々変形可能である。例えば、本発明を実施する装置は、上に例示したものに限らず、例えば高周波電源を下部電極にプラズマ生成用のものを一つ設けたものであってもよい。また、上記実施形態では、プラズマエッチングの際に第1の直流電圧を印加したが、必須ではない。更に、本発明が適用される被処理体としては、図3に示すものに限らず、任意の被処理体であってよい。例えばフォトレジストとエッチング対象膜との間に反射防止膜が介在されたものであってもよい。エッチング対象膜は典型的には酸化膜等の絶縁膜であるが、これに限るものではない。図11−1〜図11−3は、被処理体の別の一例を示す図である。例えば、図11−1に示すように、Si基板301上に絶縁膜302が形成され、その上にエッチングマスクであるハードマスクとして例えば有機膜であるアモルファスカーボン膜303が形成され、更にその上にフォトリソグラフィによりパターン化されたフォトレジスト膜(例えばArFレジスト膜)304がエッチングマスクとして形成された構造の半導体ウエハWを被処理体としても良い。この場合、図11−2に示すように、まず、フォトレジスト膜304をマスクとして、アモルファスカーボン膜303をエッチングする。その後、図11−3に示すように、アモルファスカーボン膜303をマスクとして、CxFy系ガスのプラズマにより、絶縁膜302をエッチングすることでビア・トレンチを形成する。
16…サセプタ(下部電極)
34…上部電極
46…第1の整合器
48…第1の高周波電源
50…第1の直流電源
66a…処理ガス供給源
84…排気装置
88…第2の整合器
90…第2の高周波電源
95…パルスコントローラ
100…制御部
102…記憶部
W…半導体ウエハ(被処理基板)
Claims (6)
- 被処理体が収容され、その内部が真空排気可能な処理容器と、前記処理容器内に配置され、前記被処理体の載置台として機能する下部電極と、前記下部電極に対向するように前記処理容器内に配置された上部電極と、前記処理容器内に少なくともCxFyガスとArガスよりも質量が軽い希ガスとを含む処理ガスを供給する処理ガス供給ユニットと、前記上部電極又は前記下部電極の少なくとも一方にプラズマ生成用の高周波電力を印加するプラズマ生成用高周波電力印加ユニットと、前記上部電極に負の直流電圧を印加する第1の直流電源とを具備するプラズマエッチング装置を用いて、エッチング対象膜にホールを形成するプラズマエッチング方法であって、
前記プラズマ生成用高周波電力印加ユニットをオンにして前記処理容器内に少なくとも前記CxFyガスと前記Arガスよりも質量が軽い希ガスとを含む処理ガスのプラズマを生成する第1条件と、前記プラズマ生成用高周波電力印加ユニットをオフにして前記処理容器内の少なくとも前記CxFyガスと前記Arガスよりも質量が軽い希ガスとを含む処理ガスのプラズマを消滅させる第2条件とを交互に繰り返し、前記第1の直流電源から、前記第1条件の期間よりも前記第2条件の期間のほうが印加電圧の絶対値が大きくなるように負の直流電圧を印加して、前記エッチング対象膜をエッチングしてホールを形成し、
前記Arガスよりも質量が軽い希ガスの流量は、70〜200sccmであることを特徴とするプラズマエッチング方法。 - 第1の絶縁層と第2の絶縁層とが交互に積層された積層膜と第1の絶縁層上に形成されたマスク層とエッチング対象膜とを有する被処理体が収容され、その内部が真空排気可能な処理容器と、前記処理容器内に配置され、前記被処理体の載置台として機能する下部電極と、前記下部電極に対向するように前記処理容器内に配置された上部電極と、前記処理容器内に少なくともCxFyガスとArガスよりも質量が軽い希ガスとを含む処理ガスを供給する処理ガス供給ユニットと、前記上部電極又は前記下部電極の少なくとも一方にプラズマ生成用の高周波電力を印加するプラズマ生成用高周波電力印加ユニットと、前記上部電極に負の直流電圧を印加する第1の直流電源とを具備するプラズマエッチング装置を用いて、前記エッチング対象膜にホールを形成するプラズマエッチング方法であって、
前記第1の絶縁層を第1のプラズマによりエッチングする第1のプラズマエッチング工程と、
前記第2の絶縁層を第1のプラズマによりエッチングする第2のプラズマエッチング工程と
を有し、
前記第2のプラズマエッチング工程では、
前記プラズマ生成用高周波電力印加ユニットをオンにして前記処理容器内に少なくとも前記CxFyガスと前記Arガスよりも質量が軽い希ガスとを含む処理ガスのプラズマを生成する第1条件と、前記プラズマ生成用高周波電力印加ユニットをオフにして前記処理容器内の少なくとも前記CxFyガスと前記Arガスよりも質量が軽い希ガスとを含む処理ガスのプラズマを消滅させる第2条件とを交互に繰り返し、前記第1の直流電源から、前記第1条件の期間よりも前記第2条件の期間のほうが印加電圧の絶対値が大きくなるように負の直流電圧を印加して、前記エッチング対象膜をエッチングしてホールを形成し、
前記Arガスよりも質量が軽い希ガスの流量は、70〜200sccmであることを特徴とするプラズマエッチング方法。 - 前記CxFyガスは、C4F6ガス又はC4F8ガスであり、前記処理ガスは、少なくとも前記C4F6ガス、前記C4F8ガスの1つを含むことを特徴とする請求項1又は2に記載のプラズマエッチング方法。
- 前記処理ガスは、O2ガスを含むことを特徴とする請求項1〜3のいずれか1項に記載のプラズマエッチング方法。
- 前記処理ガスは、NF3ガスを含むことを特徴とする請求項1〜4のいずれか1項に記載のプラズマエッチング方法。
- 前記Arガスよりも質量が軽い希ガスは、Heガス、Neガスであることを特徴とする請求項1〜5のいずれか1項に記載のプラズマエッチング方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014180073A JP6320248B2 (ja) | 2014-03-04 | 2014-09-04 | プラズマエッチング方法 |
KR1020150029511A KR102358732B1 (ko) | 2014-03-04 | 2015-03-03 | 플라즈마 에칭 방법 및 플라즈마 에칭 장치 |
US14/638,393 US9324575B2 (en) | 2014-03-04 | 2015-03-04 | Plasma etching method and plasma etching apparatus |
CN201510097179.1A CN104900511B (zh) | 2014-03-04 | 2015-03-04 | 等离子体蚀刻方法和等离子体蚀刻装置 |
EP15157548.7A EP2916347A1 (en) | 2014-03-04 | 2015-03-04 | Plasma etching method and plasma etching apparatus |
TW104106767A TWI665726B (zh) | 2014-03-04 | 2015-03-04 | 電漿蝕刻方法及電漿蝕刻裝置 |
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JP2014042172 | 2014-03-04 | ||
JP2014042172 | 2014-03-04 | ||
JP2014180073A JP6320248B2 (ja) | 2014-03-04 | 2014-09-04 | プラズマエッチング方法 |
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CN104798446B (zh) * | 2013-03-12 | 2017-09-08 | 应用材料公司 | 具有方位角与径向分布控制的多区域气体注入组件 |
JP6230954B2 (ja) * | 2014-05-09 | 2017-11-15 | 東京エレクトロン株式会社 | エッチング方法 |
US10510625B2 (en) * | 2015-11-17 | 2019-12-17 | Lam Research Corporation | Systems and methods for controlling plasma instability in semiconductor fabrication |
JP6378234B2 (ja) * | 2016-03-22 | 2018-08-22 | 東京エレクトロン株式会社 | プラズマ処理方法及びプラズマ処理装置 |
US9773643B1 (en) * | 2016-06-30 | 2017-09-26 | Lam Research Corporation | Apparatus and method for deposition and etch in gap fill |
US10847368B2 (en) * | 2017-04-07 | 2020-11-24 | Applied Materials, Inc. | EUV resist patterning using pulsed plasma |
KR20190014623A (ko) * | 2017-08-03 | 2019-02-13 | 삼성전자주식회사 | 플라즈마 공정 장치 및 이를 이용한 반도체 장치 제조 방법 |
JP6945388B2 (ja) * | 2017-08-23 | 2021-10-06 | 東京エレクトロン株式会社 | エッチング方法及びエッチング処理装置 |
KR102477354B1 (ko) * | 2018-03-29 | 2022-12-15 | 삼성전자주식회사 | 가스 분배 판을 갖는 플라즈마 처리 장치 |
JP6886940B2 (ja) * | 2018-04-23 | 2021-06-16 | 東京エレクトロン株式会社 | プラズマ処理方法 |
JP6965205B2 (ja) * | 2018-04-27 | 2021-11-10 | 東京エレクトロン株式会社 | エッチング装置、及びエッチング方法 |
JP7068140B2 (ja) * | 2018-11-05 | 2022-05-16 | 東京エレクトロン株式会社 | プラズマ処理装置及びプラズマ処理方法 |
JP7481823B2 (ja) * | 2018-11-05 | 2024-05-13 | 東京エレクトロン株式会社 | エッチング方法及びプラズマ処理装置 |
JP7241540B2 (ja) * | 2018-12-28 | 2023-03-17 | 東京エレクトロン株式会社 | 測定方法及び測定治具 |
US11257678B2 (en) * | 2019-04-19 | 2022-02-22 | Hitachi High-Tech Corporation | Plasma processing method |
TW202117802A (zh) * | 2019-07-02 | 2021-05-01 | 美商應用材料股份有限公司 | 固化介電質材料的方法與設備 |
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JP2002110650A (ja) * | 2000-10-03 | 2002-04-12 | Tokyo Electron Ltd | プラズマエッチング方法およびプラズマエッチング装置 |
JP4749683B2 (ja) * | 2004-06-08 | 2011-08-17 | 東京エレクトロン株式会社 | エッチング方法 |
KR100844930B1 (ko) * | 2005-09-28 | 2008-07-09 | 주식회사 하이닉스반도체 | 플라스크 모양의 리세스게이트를 갖는 반도체 소자의 제조방법 |
JP2008078515A (ja) * | 2006-09-25 | 2008-04-03 | Tokyo Electron Ltd | プラズマ処理方法 |
US8383001B2 (en) * | 2009-02-20 | 2013-02-26 | Tokyo Electron Limited | Plasma etching method, plasma etching apparatus and storage medium |
JP5466480B2 (ja) * | 2009-02-20 | 2014-04-09 | 東京エレクトロン株式会社 | プラズマエッチング方法、プラズマエッチング装置および記憶媒体 |
JP5662079B2 (ja) * | 2010-02-24 | 2015-01-28 | 東京エレクトロン株式会社 | エッチング処理方法 |
US9373521B2 (en) * | 2010-02-24 | 2016-06-21 | Tokyo Electron Limited | Etching processing method |
JP5893864B2 (ja) * | 2011-08-02 | 2016-03-23 | 東京エレクトロン株式会社 | プラズマエッチング方法 |
KR102038649B1 (ko) | 2012-02-20 | 2019-10-30 | 도쿄엘렉트론가부시키가이샤 | 전원 시스템, 플라즈마 에칭 장치 및 플라즈마 에칭 방법 |
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US9324575B2 (en) | 2016-04-26 |
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TW201546896A (zh) | 2015-12-16 |
KR102358732B1 (ko) | 2022-02-04 |
EP2916347A1 (en) | 2015-09-09 |
CN104900511A (zh) | 2015-09-09 |
US20150255305A1 (en) | 2015-09-10 |
JP2015181143A (ja) | 2015-10-15 |
CN104900511B (zh) | 2017-10-10 |
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