JP2016511534A5 - - Google Patents

Download PDF

Info

Publication number
JP2016511534A5
JP2016511534A5 JP2015553855A JP2015553855A JP2016511534A5 JP 2016511534 A5 JP2016511534 A5 JP 2016511534A5 JP 2015553855 A JP2015553855 A JP 2015553855A JP 2015553855 A JP2015553855 A JP 2015553855A JP 2016511534 A5 JP2016511534 A5 JP 2016511534A5
Authority
JP
Japan
Prior art keywords
substrate
act
enclosure
forming
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015553855A
Other languages
English (en)
Japanese (ja)
Other versions
JP6360499B2 (ja
JP2016511534A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2014/012080 external-priority patent/WO2014168665A2/en
Publication of JP2016511534A publication Critical patent/JP2016511534A/ja
Publication of JP2016511534A5 publication Critical patent/JP2016511534A5/ja
Application granted granted Critical
Publication of JP6360499B2 publication Critical patent/JP6360499B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2015553855A 2013-01-18 2014-01-17 少なくとも1つの囲いを有する超伝導デバイスを製造するための方法 Active JP6360499B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201361754298P 2013-01-18 2013-01-18
US61/754,298 2013-01-18
US201361871061P 2013-08-28 2013-08-28
US61/871,061 2013-08-28
PCT/US2014/012080 WO2014168665A2 (en) 2013-01-18 2014-01-17 Methods for making a superconducting device with at least one enclosure

Publications (3)

Publication Number Publication Date
JP2016511534A JP2016511534A (ja) 2016-04-14
JP2016511534A5 true JP2016511534A5 (OSRAM) 2017-02-16
JP6360499B2 JP6360499B2 (ja) 2018-07-18

Family

ID=51690101

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015553855A Active JP6360499B2 (ja) 2013-01-18 2014-01-17 少なくとも1つの囲いを有する超伝導デバイスを製造するための方法

Country Status (7)

Country Link
US (1) US10424712B2 (OSRAM)
EP (1) EP2946414B1 (OSRAM)
JP (1) JP6360499B2 (OSRAM)
KR (1) KR102192270B1 (OSRAM)
CA (1) CA2898608C (OSRAM)
SG (1) SG11201505617UA (OSRAM)
WO (1) WO2014168665A2 (OSRAM)

Families Citing this family (55)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102178986B1 (ko) 2013-01-18 2020-11-18 예일 유니버시티 적어도 하나의 인클로저를 구비하는 초전도 디바이스
US9177814B2 (en) * 2013-03-15 2015-11-03 International Business Machines Corporation Suspended superconducting qubits
EP3262573B1 (en) 2015-02-27 2024-04-03 Yale University Techniques for coupling planar qubits to non-planar resonators and related systems and methods
US9971970B1 (en) * 2015-04-27 2018-05-15 Rigetti & Co, Inc. Microwave integrated quantum circuits with VIAS and methods for making the same
US9836699B1 (en) 2015-04-27 2017-12-05 Rigetti & Co. Microwave integrated quantum circuits with interposer
WO2017155531A1 (en) * 2016-03-10 2017-09-14 Technische Universiteit Delft Superconducting microwave-frequency vias for mult-planar quantum circuits
CN109564938A (zh) * 2016-08-15 2019-04-02 英特尔公司 用于量子比特的带线和微带传输线
KR101874187B1 (ko) * 2016-08-24 2018-07-03 한양대학교 산학협력단 조건 반사 동작을 수행하는 신경 소자 및 이의 구동 방법
WO2018052414A1 (en) * 2016-09-14 2018-03-22 Google Llc Reducing dissipation and frequency noise in quantum devices using a local vacuum cavity
EP3703141B1 (en) 2016-09-15 2021-08-04 Google LLC Capping layer for reducing ion mill damage
WO2018169585A1 (en) 2017-03-13 2018-09-20 Google Llc Integrating circuit elements in a stacked quantum computing device
US11121301B1 (en) * 2017-06-19 2021-09-14 Rigetti & Co, Inc. Microwave integrated quantum circuits with cap wafers and their methods of manufacture
US11276727B1 (en) 2017-06-19 2022-03-15 Rigetti & Co, Llc Superconducting vias for routing electrical signals through substrates and their methods of manufacture
US10398031B2 (en) 2017-09-29 2019-08-27 International Business Machines Corporation Integrating Josephson amplifiers or Josephson mixers into printed circuit boards
US10243132B1 (en) 2018-03-23 2019-03-26 International Business Machines Corporation Vertical josephson junction superconducting device
US10672971B2 (en) * 2018-03-23 2020-06-02 International Business Machines Corporation Vertical transmon qubit device with microstrip waveguides
US10256392B1 (en) 2018-03-23 2019-04-09 International Business Machines Corporation Vertical transmon qubit device
US10497746B1 (en) * 2018-05-25 2019-12-03 International Business Machines Corporation Three-dimensional integration for qubits on crystalline dielectric
US10505096B1 (en) 2018-05-25 2019-12-10 International Business Machines Corporation Three-dimensional integration for qubits on multiple height crystalline dielectric
US10615223B2 (en) * 2018-06-12 2020-04-07 International Business Machines Corporation Vertical silicon-on-metal superconducting quantum interference device
US10546992B2 (en) 2018-06-28 2020-01-28 International Business Machines Corporation Buried electrode geometry for lowering surface losses in superconducting microwave circuits
US10615826B2 (en) * 2018-07-30 2020-04-07 United States Of America As Represented By The Secretary Of The Navy Josephson junction-based transceiver
GB201813188D0 (en) * 2018-08-13 2018-09-26 Univ Oxford Innovation Ltd Superconducting quantum computing circuit package
JP7133842B2 (ja) 2018-10-09 2022-09-09 国立研究開発法人科学技術振興機構 超伝導複合量子計算回路
US11121302B2 (en) 2018-10-11 2021-09-14 SeeQC, Inc. System and method for superconducting multi-chip module
US11223355B2 (en) 2018-12-12 2022-01-11 Yale University Inductively-shunted transmon qubit for superconducting circuits
US10665581B1 (en) 2019-01-23 2020-05-26 Sandisk Technologies Llc Three-dimensional semiconductor chip containing memory die bonded to both sides of a support die and methods of making the same
US10879260B2 (en) 2019-02-28 2020-12-29 Sandisk Technologies Llc Bonded assembly of a support die and plural memory dies containing laterally shifted vertical interconnections and methods for making the same
TWI778409B (zh) * 2019-10-31 2022-09-21 國立研究開發法人科學技術振興機構 超導複合量子計算電路
TWI705587B (zh) * 2019-10-31 2020-09-21 國立研究開發法人科學技術振興機構 超導複合量子計算電路
JP7133854B2 (ja) * 2019-10-31 2022-09-09 国立研究開発法人科学技術振興機構 超伝導複合量子計算回路
US11177549B2 (en) 2019-11-06 2021-11-16 International Business Machines Corporation Method of growing titanium nitride on silicon substrate free from silicon nitride interface by using a titanium seed layer
US11094873B2 (en) 2019-11-14 2021-08-17 International Business Machines Corporation Transmon qubits with self defined junctions
JP7705393B2 (ja) 2019-12-05 2025-07-09 ディー-ウェイブ システムズ インコーポレイテッド 超伝導集積回路を製造するためのシステム及び方法
WO2021146028A1 (en) * 2020-01-17 2021-07-22 D-Wave Systems Inc. Systems and methods for fabricating superconducting integrated circuits
US11552236B2 (en) 2020-01-24 2023-01-10 International Business Machines Corporation Superconducting qubit capacitance and frequency of operation tuning
WO2021168010A1 (en) 2020-02-21 2021-08-26 Applied Materials, Inc. Method of making high critical temperature metal nitride layer
WO2021168007A1 (en) * 2020-02-21 2021-08-26 Applied Materials, Inc. High critical temperature metal nitride layer with oxide or oxynitride seed layer
WO2021178042A1 (en) * 2020-03-02 2021-09-10 Massachusetts Institute Of Technology Qubit circuits with deep, in-substrate components
US11937516B2 (en) * 2020-03-04 2024-03-19 International Business Machines Corporation Fabrication of a flux bias line local heating device
US12022749B2 (en) 2020-03-04 2024-06-25 International Business Machines Corporation Flux bias line local heating device
US12376501B2 (en) 2020-05-11 2025-07-29 1372934 B.C. Ltd. Kinetic inductance devices, methods for fabricating kinetic inductance devices, and articles employing the same
FR3114443B1 (fr) * 2020-09-21 2022-12-23 Commissariat Energie Atomique Structure d’intégration à routage bifonctionnel et assemblage comprenant une telle structure
FR3114444B1 (fr) * 2020-09-21 2022-09-30 Commissariat Energie Atomique Puce à routage bifonctionnel et procédé de fabrication associé
US11678591B2 (en) 2020-09-29 2023-06-13 International Business Machines Corporation Vacuum encapsulated Josephson junction
US11460877B2 (en) 2020-12-12 2022-10-04 Anyon Systems Inc. Hybrid photonics-solid state quantum computer
US12033981B2 (en) 2020-12-16 2024-07-09 International Business Machines Corporation Create a protected layer for interconnects and devices in a packaged quantum structure
JP7728194B2 (ja) * 2022-02-02 2025-08-22 株式会社東芝 電子回路、計算装置、及び、電子回路の製造方法
US20240237556A9 (en) * 2021-02-18 2024-07-11 Yale University Multimode superconducting cavity resonators
EP4295401A4 (en) * 2021-02-19 2024-12-25 Rigetti & Co, LLC CIRCUIT CONNECTION IN A CAP PLATE OF A SUPERCONDUCTING QUANTUM PROCESSING UNIT (QPU)
CN118339566A (zh) 2021-06-11 2024-07-12 西克公司 针对超导量子电路的通量偏置的系统和方法
US11664801B1 (en) 2021-12-08 2023-05-30 International Business Machines Corporation Multi-qubit architectures with mode-selective charge coupling between novel fluxonium-molecule qubits
US11937518B2 (en) 2022-05-20 2024-03-19 Northrop Grumman Systems Corporation Magnetic flux mitigation in superconducting circuits
EP4385944A1 (en) * 2022-12-14 2024-06-19 Imec VZW A method for bonding and interconnecting micro-electronic components
FR3154282A1 (fr) * 2023-10-11 2025-04-18 Commissariat A L'energie Atomique Et Aux Energies Alternatives Dispositif électronique à composant cryogénique et son procédé de réalisation

Family Cites Families (88)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3723755A (en) 1970-10-12 1973-03-27 A Morse Parametric amplifier
US4403189A (en) 1980-08-25 1983-09-06 S.H.E. Corporation Superconducting quantum interference device having thin film Josephson junctions
US4344052A (en) 1980-09-29 1982-08-10 International Business Machines Corporation Distributed array of Josephson devices with coherence
US4585999A (en) 1984-04-27 1986-04-29 The United States Of America As Represented By The United States Department Of Energy Radiofrequency amplifier based on a dc superconducting quantum interference device
JPS6182449A (ja) 1984-09-28 1986-04-26 Mitsubishi Electric Corp プラスチツクモ−ルド型半導体装置
US4780724A (en) 1986-04-18 1988-10-25 General Electric Company Antenna with integral tuning element
US4924234A (en) 1987-03-26 1990-05-08 Hughes Aircraft Company Plural level beam-forming network
GB2219434A (en) * 1988-06-06 1989-12-06 Philips Nv A method of forming a contact in a semiconductor device
JPH02194638A (ja) 1989-01-24 1990-08-01 Fujitsu Ltd 半導体装置
US5105166A (en) 1989-11-30 1992-04-14 Raytheon Company Symmetric bi-directional amplifier
US5075655A (en) * 1989-12-01 1991-12-24 The United States Of America As Represented By The Secretary Of The Navy Ultra-low-loss strip-type transmission lines, formed of bonded substrate layers
US5326986A (en) 1991-03-05 1994-07-05 University Of Houston - University Park Parallel N-junction superconducting interferometer with enhanced flux-to-voltage transfer function
US5186379A (en) 1991-06-17 1993-02-16 Hughes Aircraft Company Indium alloy cold weld bumps
US5254950A (en) 1991-09-13 1993-10-19 The Regents, University Of California DC superconducting quantum interference device usable in nuclear quadrupole resonance and zero field nuclear magnetic spectrometers
US5296457A (en) 1992-03-23 1994-03-22 The Regents Of The University Of California Clamshell microwave cavities having a superconductive coating
US5635834A (en) 1993-09-15 1997-06-03 The Broken Hill Proprietary Company Limited SQUID detector with flux feedback coil sized and located to produce uniform feedback flux
US5493719A (en) 1994-07-01 1996-02-20 The United States Of America As Represented By The Secretary Of The Air Force Integrated superconductive heterodyne receiver
JP3421184B2 (ja) 1995-12-19 2003-06-30 理化学研究所 波長可変レーザーにおける波長選択方法および波長可変レーザーにおける波長選択可能なレーザー発振装置
RU2106717C1 (ru) 1996-08-07 1998-03-10 Научно-исследовательский институт измерительных систем Способ анизотропного травления кристаллов кремния
US6578018B1 (en) 1999-07-27 2003-06-10 Yamaha Hatsudoki Kabushiki Kaisha System and method for control using quantum soft computing
US6486756B2 (en) 2000-03-27 2002-11-26 Hitachi, Ltd. Superconductor signal amplifier
US6627915B1 (en) * 2000-08-11 2003-09-30 D-Wave Systems, Inc. Shaped Josephson junction qubits
US6549059B1 (en) 2001-02-23 2003-04-15 Trw Inc. Underdamped Josephson transmission line
KR20030016407A (ko) 2001-05-15 2003-02-26 싱크로 가부시키가이샤 파형 검출 장치 및 그것을 사용한 상태 감시 시스템
EP1262911A1 (en) 2001-05-30 2002-12-04 Hitachi Europe Limited Quantum computer
US6803599B2 (en) 2001-06-01 2004-10-12 D-Wave Systems, Inc. Quantum processing system for a superconducting phase qubit
US6621374B2 (en) 2001-07-19 2003-09-16 Lockheed Martin Corporation Splitter/combiner using artificial transmission lines, and paralleled amplifier using same
RU2212671C1 (ru) 2001-10-11 2003-09-20 Алексенко Андрей Геннадьевич Туннельный нанодатчик механических колебаний и способ его изготовления
US6614047B2 (en) 2001-12-17 2003-09-02 D-Wave Systems, Inc. Finger squid qubit device
US6908779B2 (en) * 2002-01-16 2005-06-21 Matsushita Electric Industrial Co., Ltd. Semiconductor device and method for manufacturing the same
US7307275B2 (en) 2002-04-04 2007-12-11 D-Wave Systems Inc. Encoding and error suppression for superconducting quantum computers
US6911664B2 (en) 2002-04-15 2005-06-28 D-Wave Systems, Inc. Extra-substrate control system
US6900454B2 (en) 2002-04-20 2005-05-31 D-Wave Systems, Inc. Resonant controlled qubit system
FR2839389B1 (fr) 2002-05-03 2005-08-05 Commissariat Energie Atomique Dispositif de bit quantique supraconducteur a jonctions josephson
US6943368B2 (en) 2002-11-25 2005-09-13 D-Wave Systems, Inc. Quantum logic using three energy levels
US7364923B2 (en) 2003-03-03 2008-04-29 The Governing Council Of The University Of Toronto Dressed qubits
WO2004084132A2 (en) 2003-03-18 2004-09-30 Magiq Technologies, Inc. Universal quantum computing
EP1634351B1 (de) 2003-06-13 2008-04-30 QEST Quantenelektronische Systeme GmbH Supraleitende quantenantenne
JP4113076B2 (ja) 2003-08-28 2008-07-02 株式会社日立製作所 超電導半導体集積回路
US6995404B2 (en) 2003-10-22 2006-02-07 The Johns Hopkins University Techniques for quantum processing with photons and the zeno effect
US20050134377A1 (en) 2003-12-23 2005-06-23 Dent Paul W. Doherty amplifier
US7418283B2 (en) 2004-03-29 2008-08-26 D-Wave Systems Inc. Adiabatic quantum computation with superconducting qubits
US7225674B2 (en) 2004-04-30 2007-06-05 The Regents Of The University Of California Self-stabilizing, floating microelectromechanical device
US8284585B2 (en) 2004-07-27 2012-10-09 Japan Science And Technology Agency Josephson quantum computing device and integrated circuit using such devices
US7253654B2 (en) 2004-11-08 2007-08-07 D-Wave Systems Inc. Superconducting qubits having a plurality of capacitive couplings
US7533068B2 (en) 2004-12-23 2009-05-12 D-Wave Systems, Inc. Analog processor comprising quantum devices
US7375802B2 (en) 2005-08-04 2008-05-20 Lockheed Martin Corporation Radar systems and methods using entangled quantum particles
US8164082B2 (en) 2005-09-30 2012-04-24 Wisconsin Alumni Research Foundation Spin-bus for information transfer in quantum computing
US7836007B2 (en) 2006-01-30 2010-11-16 Hewlett-Packard Development Company, L.P. Methods for preparing entangled quantum states
US7870087B2 (en) 2006-11-02 2011-01-11 D-Wave Systems Inc. Processing relational database problems using analog processors
KR101446943B1 (ko) 2006-12-05 2014-10-06 디-웨이브 시스템즈, 인코포레이티드 양자 프로세서 요소들의 국부적 프로그래밍을 위한 시스템들, 방법들 및 장치
US7724020B2 (en) 2007-12-13 2010-05-25 Northrop Grumman Systems Corporation Single flux quantum circuits
WO2008134875A1 (en) 2007-05-02 2008-11-13 D-Wave Systems, Inc. Systems, devices, and methods for controllably coupling qubits
US7899092B2 (en) 2007-05-22 2011-03-01 Magiq Technologies, Inc. Fast quantum gates with ultrafast chirped pulses
US7859744B2 (en) 2007-07-27 2010-12-28 Magiq Technologies, Inc. Tunable compact entangled-photon source and QKD system using same
US7498832B2 (en) 2007-08-03 2009-03-03 Northrop Grumman Systems Corporation Arbitrary quantum operations with a common coupled resonator
US8149494B1 (en) 2007-09-07 2012-04-03 The United States Of America As Represented By The Secretary Of The Navy Two-photon absorption switch having which-path exclusion and monolithic mach-zehnder interferometer
US20090074355A1 (en) 2007-09-17 2009-03-19 Beausoleil Raymond G Photonically-coupled nanoparticle quantum systems and methods for fabricating the same
US7932515B2 (en) 2008-01-03 2011-04-26 D-Wave Systems Inc. Quantum processor
US8260145B2 (en) 2008-03-12 2012-09-04 Deepnarayan Gupta Digital radio frequency tranceiver system and method
JP2011518409A (ja) * 2008-03-30 2011-06-23 ヒルズ, インコーポレイテッド 超伝導ワイヤおよびケーブルならびにその製造方法
US7932514B2 (en) 2008-05-23 2011-04-26 International Business Machines Corporation Microwave readout for flux-biased qubits
US7969178B2 (en) 2008-05-29 2011-06-28 Northrop Grumman Systems Corporation Method and apparatus for controlling qubits with single flux quantum logic
WO2009152180A2 (en) 2008-06-10 2009-12-17 D-Wave Systems Inc. Parameter learning system for solvers
US7724083B2 (en) 2008-08-05 2010-05-25 Northrop Grumman Systems Corporation Method and apparatus for Josephson distributed output amplifier
JP5091813B2 (ja) 2008-09-17 2012-12-05 株式会社東芝 量子ゲート方法および装置
EP2411163B1 (en) * 2009-03-26 2013-05-15 Norwegian University of Science and Technology (NTNU) Wafer bond cmut array with conductive vias
CN102379037B (zh) * 2009-03-30 2015-08-19 高通股份有限公司 使用顶部后钝化技术和底部结构技术的集成电路芯片
EP2249173A1 (en) 2009-05-08 2010-11-10 Mbda Uk Limited Radar apparatus with amplifier duplexer
IT1398934B1 (it) 2009-06-18 2013-03-28 Edison Spa Elemento superconduttivo e relativo procedimento di preparazione
FR2950877B1 (fr) * 2009-10-07 2012-01-13 Commissariat Energie Atomique Structure a cavite comportant une interface de collage a base de materiau getter
US8600200B1 (en) 2010-04-01 2013-12-03 Sandia Corporation Nano-optomechanical transducer
US8525619B1 (en) 2010-05-28 2013-09-03 Sandia Corporation Lateral acoustic wave resonator comprising a suspended membrane of low damping resonator material
US8111083B1 (en) 2010-12-01 2012-02-07 Northrop Grumman Systems Corporation Quantum processor
US8416109B2 (en) 2010-12-16 2013-04-09 Hypres, Inc. Superconducting analog-to-digital converter with current amplified feedback
US9379303B2 (en) 2011-06-14 2016-06-28 Glocbalfoundries Inc. Modular array of fixed-coupling quantum systems for quantum information processing
JP5831000B2 (ja) * 2011-07-21 2015-12-09 ソニー株式会社 信号処理装置、制御方法、並びに信号処理システムおよび方法
US8861619B2 (en) 2011-08-16 2014-10-14 Wisconsin Alumni Research Foundation System and method for high-frequency amplifier
US8837544B2 (en) 2011-10-28 2014-09-16 Hewlett-Packard Development Company, L.P. Quantum optical device
US8841764B2 (en) 2012-01-31 2014-09-23 International Business Machines Corporation Superconducting quantum circuit having a resonant cavity thermalized with metal components
US9601103B2 (en) 2012-10-19 2017-03-21 The Regents Of The University Of Michigan Methods and devices for generating high-amplitude and high-frequency focused ultrasound with light-absorbing materials
KR102178986B1 (ko) 2013-01-18 2020-11-18 예일 유니버시티 적어도 하나의 인클로저를 구비하는 초전도 디바이스
US9350460B2 (en) 2013-04-23 2016-05-24 Raytheon Bbn Technologies Corp. System and method for quantum information transfer between optical photons and superconductive qubits
EP3111380B1 (en) 2014-02-28 2019-09-04 Rigetti & Co., Inc. Processing signals in a quantum computing system
KR102344884B1 (ko) 2014-11-25 2021-12-29 삼성전자주식회사 멀티 큐빗 커플링 구조
EP3262573B1 (en) 2015-02-27 2024-04-03 Yale University Techniques for coupling planar qubits to non-planar resonators and related systems and methods
US9836699B1 (en) 2015-04-27 2017-12-05 Rigetti & Co. Microwave integrated quantum circuits with interposer
US9503063B1 (en) 2015-09-16 2016-11-22 International Business Machines Corporation Mechanically tunable superconducting qubit

Similar Documents

Publication Publication Date Title
JP2016511534A5 (OSRAM)
JP6744379B2 (ja) 少なくとも1つの囲いを有する超伝導デバイス
JP6360499B2 (ja) 少なくとも1つの囲いを有する超伝導デバイスを製造するための方法
JP2016004833A5 (OSRAM)
JP2021504936A5 (OSRAM)
JP2017034246A5 (ja) 半導体装置の作製方法
JP2016149546A5 (OSRAM)
JP2015026831A5 (ja) 半導体装置
US20150035150A1 (en) Conductive interconnect structures incorporating negative thermal expansion materials and associated systems, devices, and methods
JP2012084865A5 (ja) 半導体装置の作製方法
JP2014526149A5 (OSRAM)
JP2017085099A5 (ja) 半導体装置の作製方法
SG192320A1 (en) Semiconductor devices with copper interconnects and methods for fabricating same
JP2015188079A5 (OSRAM)
JP2012134500A5 (OSRAM)
WO2016118209A3 (en) Multi-layer semiconductor devices fabricated using a combination of substrate and via structures and fabrication techniques
JP2016526284A5 (OSRAM)
WO2015047321A8 (en) Previous layer self-aligned via and plug patterning for back end of line (beol) interconnects
JP2012235103A5 (ja) 半導体装置の作製方法、及び半導体装置
JP2015019057A5 (OSRAM)
JP2017028269A5 (ja) 半導体装置及び電子機器
JP2013031842A5 (OSRAM)
JP2017063192A5 (ja) 半導体装置の作製方法、電子機器の作製方法、半導体装置、及び電子機器
TW201244550A (en) Plasma treatment apparatus
EP3032582A3 (en) Structure and formation method of chip package structure