JP2016502393A5 - - Google Patents

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JP2016502393A5
JP2016502393A5 JP2015545192A JP2015545192A JP2016502393A5 JP 2016502393 A5 JP2016502393 A5 JP 2016502393A5 JP 2015545192 A JP2015545192 A JP 2015545192A JP 2015545192 A JP2015545192 A JP 2015545192A JP 2016502393 A5 JP2016502393 A5 JP 2016502393A5
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rotor
stator
housing
assembly
drive shaft
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JP6382213B2 (ja
JP2016502393A (ja
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JP2015545192A 2012-11-30 2013-11-26 モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法 Active JP6382213B2 (ja)

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US201261732196P 2012-11-30 2012-11-30
US61/732,196 2012-11-30
PCT/US2013/072053 WO2014085483A1 (en) 2012-11-30 2013-11-26 Motor modules, multi-axis motor drive assemblies, multi-axis robot apparatus, and electronic device manufacturing systems and methods

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JP2016502393A JP2016502393A (ja) 2016-01-21
JP2016502393A5 true JP2016502393A5 (https=) 2017-01-12
JP6382213B2 JP6382213B2 (ja) 2018-08-29

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JP2015545192A Active JP6382213B2 (ja) 2012-11-30 2013-11-26 モータモジュール、多軸モータ駆動アセンブリ、多軸ロボット装置、並びに、電子デバイス製造のシステム及び方法
JP2015545190A Active JP6336467B2 (ja) 2012-11-30 2013-11-26 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法

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JP2015545190A Active JP6336467B2 (ja) 2012-11-30 2013-11-26 不等長の前腕部を備えた多軸ロボット装置、電子デバイス製造システム、及び、電子デバイス製造において基板を搬送するための方法

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US (2) US9742250B2 (https=)
JP (2) JP6382213B2 (https=)
KR (3) KR102214398B1 (https=)
CN (2) CN104823272B (https=)
TW (2) TWI609557B (https=)
WO (2) WO2014085483A1 (https=)

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