JP2016502117A5 - - Google Patents

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JP2016502117A5
JP2016502117A5 JP2015550807A JP2015550807A JP2016502117A5 JP 2016502117 A5 JP2016502117 A5 JP 2016502117A5 JP 2015550807 A JP2015550807 A JP 2015550807A JP 2015550807 A JP2015550807 A JP 2015550807A JP 2016502117 A5 JP2016502117 A5 JP 2016502117A5
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Japan
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feature
unit
antenna
event
esd
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JP2015550807A
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JP6538566B2 (ja
JP2016502117A (ja
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Priority claimed from US14/140,860 external-priority patent/US9671448B2/en
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JP2015550807A 2012-12-28 2013-12-27 ツール内esd事象監視方法および装置 Active JP6538566B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261747199P 2012-12-28 2012-12-28
US61/747,199 2012-12-28
US14/140,860 2013-12-26
US14/140,860 US9671448B2 (en) 2012-12-28 2013-12-26 In-tool ESD events monitoring method and apparatus
PCT/US2013/078038 WO2014106075A1 (en) 2012-12-28 2013-12-27 In-tool esd events monitoring method and apparatus

Publications (3)

Publication Number Publication Date
JP2016502117A JP2016502117A (ja) 2016-01-21
JP2016502117A5 true JP2016502117A5 (enExample) 2017-02-16
JP6538566B2 JP6538566B2 (ja) 2019-07-03

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JP2015550807A Active JP6538566B2 (ja) 2012-12-28 2013-12-27 ツール内esd事象監視方法および装置

Country Status (8)

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US (1) US9671448B2 (enExample)
EP (1) EP2939036B1 (enExample)
JP (1) JP6538566B2 (enExample)
KR (1) KR102054541B1 (enExample)
CN (2) CN105074481A (enExample)
SG (1) SG11201505153VA (enExample)
TW (1) TWI615618B (enExample)
WO (1) WO2014106075A1 (enExample)

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CN113904736B (zh) * 2021-09-18 2023-05-23 中国电子科技集团公司第二十九研究所 一种多通道射频信号路由装置
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