JP6538566B2 - ツール内ｅｓｄ事象監視方法および装置 - Google Patents

ツール内ｅｓｄ事象監視方法および装置 Download PDF

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JP6538566B2
JP6538566B2 JP2015550807A JP2015550807A JP6538566B2 JP 6538566 B2 JP6538566 B2 JP 6538566B2 JP 2015550807 A JP2015550807 A JP 2015550807A JP 2015550807 A JP2015550807 A JP 2015550807A JP 6538566 B2 JP6538566 B2 JP 6538566B2
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esd
antenna
event
pulse
detector
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JP2016502117A5 (enExample
JP2016502117A (ja
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ディー．ネルセン ライル
ディー．ネルセン ライル
ビー．ヘイマン スティーブン
ビー．ヘイマン スティーブン
イー．ホグセット マーク
イー．ホグセット マーク
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イリノイ トゥール ワークス インコーポレイティド
イリノイ トゥール ワークス インコーポレイティド
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Relating To Insulation (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
JP2015550807A 2012-12-28 2013-12-27 ツール内ｅｓｄ事象監視方法および装置 Active JP6538566B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261747199P 2012-12-28 2012-12-28
US61/747,199 2012-12-28
US14/140,860 2013-12-26
US14/140,860 US9671448B2 (en) 2012-12-28 2013-12-26 In-tool ESD events monitoring method and apparatus
PCT/US2013/078038 WO2014106075A1 (en) 2012-12-28 2013-12-27 In-tool esd events monitoring method and apparatus

Publications (3)

Publication Number Publication Date
JP2016502117A JP2016502117A (ja) 2016-01-21
JP2016502117A5 JP2016502117A5 (enExample) 2017-02-16
JP6538566B2 true JP6538566B2 (ja) 2019-07-03

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JP2015550807A Active JP6538566B2 (ja) 2012-12-28 2013-12-27 ツール内ｅｓｄ事象監視方法および装置

Country Status (8)

Country Link
US (1) US9671448B2 (enExample)
EP (1) EP2939036B1 (enExample)
JP (1) JP6538566B2 (enExample)
KR (1) KR102054541B1 (enExample)
CN (2) CN105074481A (enExample)
SG (1) SG11201505153VA (enExample)
TW (1) TWI615618B (enExample)
WO (1) WO2014106075A1 (enExample)

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KR102769072B1 (ko) * 2020-09-22 2025-02-18 삼성전자주식회사 Esd 테스트 방법 및 이를 수행하는 esd 테스트 시스템
CN112698114B (zh) * 2020-12-10 2023-04-14 北京无线电测量研究所 一种天线近场数据采集方法和系统
CN113158441B (zh) * 2021-03-31 2024-12-17 胜达克半导体科技(上海)股份有限公司 一种芯片测试机内提高抓取信号精度的方法
CN113904736B (zh) * 2021-09-18 2023-05-23 中国电子科技集团公司第二十九研究所 一种多通道射频信号路由装置
KR20230064052A (ko) 2021-11-02 2023-05-10 삼성전자주식회사 반도체 장치
TWI792820B (zh) * 2021-12-30 2023-02-11 趙文煌 1kV以下的電源迴路絕緣劣化偵測預警裝置
TWI806647B (zh) * 2022-06-08 2023-06-21 英業達股份有限公司 射頻及電磁干擾的自動測試系統及其方法
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CN116298648B (zh) * 2023-05-12 2023-09-19 合肥联宝信息技术有限公司 一种静电路径的检测方法、装置及电子设备
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Also Published As

Publication number Publication date
EP2939036B1 (en) 2017-05-24
KR20150103088A (ko) 2015-09-09
TWI615618B (zh) 2018-02-21
WO2014106075A1 (en) 2014-07-03
KR102054541B1 (ko) 2019-12-10
EP2939036A1 (en) 2015-11-04
US20140184253A1 (en) 2014-07-03
SG11201505153VA (en) 2015-08-28
US9671448B2 (en) 2017-06-06
CN112327069A (zh) 2021-02-05
TW201432271A (zh) 2014-08-16
CN105074481A (zh) 2015-11-18
JP2016502117A (ja) 2016-01-21

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