KR102054541B1 - 툴 내의 ｅｓｄ 이벤트 모니터링 방법 및 장치 - Google Patents

툴 내의 ｅｓｄ 이벤트 모니터링 방법 및 장치 Download PDF

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KR102054541B1
KR102054541B1 KR1020157019982A KR20157019982A KR102054541B1 KR 102054541 B1 KR102054541 B1 KR 102054541B1 KR 1020157019982 A KR1020157019982 A KR 1020157019982A KR 20157019982 A KR20157019982 A KR 20157019982A KR 102054541 B1 KR102054541 B1 KR 102054541B1
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esd
event
antenna
detector
signal
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KR20150103088A (ko
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라일 디. 넬슨
스티븐 비. 하이만
마크 이. 호그셋
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일리노이즈 툴 워크스 인코포레이티드
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R29/00—Arrangements for measuring or indicating electric quantities not covered by groups G01R19/00 - G01R27/00
    • G01R29/12—Measuring electrostatic fields or voltage-potential
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Relating To Insulation (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
KR1020157019982A 2012-12-28 2013-12-27 툴 내의 ｅｓｄ 이벤트 모니터링 방법 및 장치 Active KR102054541B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261747199P 2012-12-28 2012-12-28
US61/747,199 2012-12-28
US14/140,860 2013-12-26
US14/140,860 US9671448B2 (en) 2012-12-28 2013-12-26 In-tool ESD events monitoring method and apparatus
PCT/US2013/078038 WO2014106075A1 (en) 2012-12-28 2013-12-27 In-tool esd events monitoring method and apparatus

Publications (2)

Publication Number Publication Date
KR20150103088A KR20150103088A (ko) 2015-09-09
KR102054541B1 true KR102054541B1 (ko) 2019-12-10

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Country Status (8)

Country Link
US (1) US9671448B2 (enExample)
EP (1) EP2939036B1 (enExample)
JP (1) JP6538566B2 (enExample)
KR (1) KR102054541B1 (enExample)
CN (2) CN105074481A (enExample)
SG (1) SG11201505153VA (enExample)
TW (1) TWI615618B (enExample)
WO (1) WO2014106075A1 (enExample)

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US10637234B2 (en) 2016-06-22 2020-04-28 International Business Machines Corporation ESD protection circuit
TWI752076B (zh) * 2016-09-16 2022-01-11 美商伊利諾工具工程公司 工具內esd事件的選擇性監控方法及裝置
US9933459B1 (en) * 2016-11-11 2018-04-03 Fluke Corporation Magnetically coupled ground reference probe
US10782665B2 (en) * 2017-06-30 2020-09-22 Cattron North America, Inc. Wireless emergency stop systems, and corresponding methods of operating a wireless emergency stop system for a machine safety interface
CN108020698A (zh) * 2017-12-29 2018-05-11 江苏林洋能源股份有限公司 一种用于电能表防窃电的esd高压检测电路和方法
CN113039443A (zh) * 2018-09-11 2021-06-25 迈吉克汽车运动公司 用于在电气和/或电子电路上进行测试的工具和组件
EP3918349A1 (en) * 2018-09-11 2021-12-08 Magicmotorsport Srl Probe for tools for carrying out tests on electrical and/or electronic circuits and assembly comprising the probe
CN109669084A (zh) * 2018-12-13 2019-04-23 歌尔科技有限公司 设备esd测试方法和系统
WO2020124979A1 (en) * 2018-12-21 2020-06-25 Huawei Technologies Co., Ltd. A portable, integrated antenna test bed with built-in turntable
CN109686203B (zh) * 2019-01-29 2023-11-21 中国人民解放军陆军工程大学 静电电磁脉冲诱发空气式静电放电实验系统
US10805936B1 (en) * 2019-07-24 2020-10-13 Cypress Semiconductor Corporation Device, system and methods for mitigating interference in a wireless network
CN110646695B (zh) * 2019-09-29 2021-07-23 潍坊歌尔微电子有限公司 一种静电测试工装
DE102019217083A1 (de) * 2019-11-06 2021-05-06 Robert Bosch Gmbh Überwachungsanordnung zur Erkennung von Zuleitungsfehlern für ein Steuergerät
TWI772713B (zh) 2019-11-18 2022-08-01 和碩聯合科技股份有限公司 天線裝置及其靜電防護方法
KR102769072B1 (ko) * 2020-09-22 2025-02-18 삼성전자주식회사 Esd 테스트 방법 및 이를 수행하는 esd 테스트 시스템
CN112698114B (zh) * 2020-12-10 2023-04-14 北京无线电测量研究所 一种天线近场数据采集方法和系统
CN113158441B (zh) * 2021-03-31 2024-12-17 胜达克半导体科技(上海)股份有限公司 一种芯片测试机内提高抓取信号精度的方法
CN113904736B (zh) * 2021-09-18 2023-05-23 中国电子科技集团公司第二十九研究所 一种多通道射频信号路由装置
KR20230064052A (ko) 2021-11-02 2023-05-10 삼성전자주식회사 반도체 장치
TWI792820B (zh) * 2021-12-30 2023-02-11 趙文煌 1kV以下的電源迴路絕緣劣化偵測預警裝置
TWI806647B (zh) * 2022-06-08 2023-06-21 英業達股份有限公司 射頻及電磁干擾的自動測試系統及其方法
KR20230169599A (ko) 2022-06-09 2023-12-18 삼성전자주식회사 전류 검출 회로를 갖는 집적 회로 및 그것의 동작 방법
CN116298648B (zh) * 2023-05-12 2023-09-19 合肥联宝信息技术有限公司 一种静电路径的检测方法、装置及电子设备
TWI848814B (zh) * 2023-09-08 2024-07-11 英業達股份有限公司 靜電放電量測裝置
TWI855857B (zh) * 2023-09-08 2024-09-11 英業達股份有限公司 靜電放電量測方法

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Also Published As

Publication number Publication date
EP2939036B1 (en) 2017-05-24
KR20150103088A (ko) 2015-09-09
TWI615618B (zh) 2018-02-21
WO2014106075A1 (en) 2014-07-03
EP2939036A1 (en) 2015-11-04
US20140184253A1 (en) 2014-07-03
SG11201505153VA (en) 2015-08-28
US9671448B2 (en) 2017-06-06
CN112327069A (zh) 2021-02-05
JP6538566B2 (ja) 2019-07-03
TW201432271A (zh) 2014-08-16
CN105074481A (zh) 2015-11-18
JP2016502117A (ja) 2016-01-21

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