CN105074481A - 工具中esd事件监测方法和设备 - Google Patents

工具中esd事件监测方法和设备 Download PDF

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Publication number
CN105074481A
CN105074481A CN201380073763.2A CN201380073763A CN105074481A CN 105074481 A CN105074481 A CN 105074481A CN 201380073763 A CN201380073763 A CN 201380073763A CN 105074481 A CN105074481 A CN 105074481A
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CN
China
Prior art keywords
antenna
esd
event
equipment
processing region
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201380073763.2A
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English (en)
Chinese (zh)
Inventor
莱尔·D.·尼尔森
史蒂文·B.·海曼
马克·E.·霍塞特
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Illinois Tool Works Inc
Original Assignee
Illinois Tool Works Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Illinois Tool Works Inc filed Critical Illinois Tool Works Inc
Priority to CN202010947085.XA priority Critical patent/CN112327069A/zh
Publication of CN105074481A publication Critical patent/CN105074481A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Relating To Insulation (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
CN201380073763.2A 2012-12-28 2013-12-27 工具中esd事件监测方法和设备 Pending CN105074481A (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010947085.XA CN112327069A (zh) 2012-12-28 2013-12-27 工具中esd事件监测方法和设备

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261747199P 2012-12-28 2012-12-28
US61/747,199 2012-12-28
US14/140,860 US9671448B2 (en) 2012-12-28 2013-12-26 In-tool ESD events monitoring method and apparatus
US14/140,860 2013-12-26
PCT/US2013/078038 WO2014106075A1 (en) 2012-12-28 2013-12-27 In-tool esd events monitoring method and apparatus

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202010947085.XA Division CN112327069A (zh) 2012-12-28 2013-12-27 工具中esd事件监测方法和设备

Publications (1)

Publication Number Publication Date
CN105074481A true CN105074481A (zh) 2015-11-18

Family

ID=51016477

Family Applications (2)

Application Number Title Priority Date Filing Date
CN202010947085.XA Pending CN112327069A (zh) 2012-12-28 2013-12-27 工具中esd事件监测方法和设备
CN201380073763.2A Pending CN105074481A (zh) 2012-12-28 2013-12-27 工具中esd事件监测方法和设备

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN202010947085.XA Pending CN112327069A (zh) 2012-12-28 2013-12-27 工具中esd事件监测方法和设备

Country Status (8)

Country Link
US (1) US9671448B2 (enExample)
EP (1) EP2939036B1 (enExample)
JP (1) JP6538566B2 (enExample)
KR (1) KR102054541B1 (enExample)
CN (2) CN112327069A (enExample)
SG (1) SG11201505153VA (enExample)
TW (1) TWI615618B (enExample)
WO (1) WO2014106075A1 (enExample)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106911742A (zh) * 2015-12-23 2017-06-30 深圳长城开发科技股份有限公司 Esd工业物联网系统
CN108020698A (zh) * 2017-12-29 2018-05-11 江苏林洋能源股份有限公司 一种用于电能表防窃电的esd高压检测电路和方法
CN109212956A (zh) * 2017-06-30 2019-01-15 莱尔德技术股份有限公司 无线紧急停止系统以及操作无线紧急停止系统的方法
CN109669084A (zh) * 2018-12-13 2019-04-23 歌尔科技有限公司 设备esd测试方法和系统
CN110088638A (zh) * 2016-09-16 2019-08-02 伊利诺斯工具制品有限公司 工具内esd事件选择性监测方法和装置
CN113167818A (zh) * 2018-09-11 2021-07-23 迈吉克汽车运动公司 用于在电气和/或电子电路上进行测试的工具的探针和包括探针的组件
US11307235B2 (en) 2012-12-28 2022-04-19 Illinois Tool Works Inc. In-tool ESD events selective monitoring method and apparatus

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107667296B (zh) * 2015-06-17 2021-01-05 英特尔Ip公司 定向脉冲注入微电子系统中用于静电测试
US9804216B2 (en) 2016-03-16 2017-10-31 International Business Machines Corporation Detection of electromagnetic field with electroactive polymers
US10637234B2 (en) 2016-06-22 2020-04-28 International Business Machines Corporation ESD protection circuit
US9933459B1 (en) * 2016-11-11 2018-04-03 Fluke Corporation Magnetically coupled ground reference probe
PL3891516T3 (pl) * 2018-09-11 2024-11-18 Magicmotorsport Srl Narzędzie i zestaw do wykonywania testów obwodów elektrycznych i/lub elektronicznych
WO2020124979A1 (en) * 2018-12-21 2020-06-25 Huawei Technologies Co., Ltd. A portable, integrated antenna test bed with built-in turntable
CN109686203B (zh) * 2019-01-29 2023-11-21 中国人民解放军陆军工程大学 静电电磁脉冲诱发空气式静电放电实验系统
US10805936B1 (en) * 2019-07-24 2020-10-13 Cypress Semiconductor Corporation Device, system and methods for mitigating interference in a wireless network
CN110646695B (zh) * 2019-09-29 2021-07-23 潍坊歌尔微电子有限公司 一种静电测试工装
DE102019217083A1 (de) * 2019-11-06 2021-05-06 Robert Bosch Gmbh Überwachungsanordnung zur Erkennung von Zuleitungsfehlern für ein Steuergerät
TWI772713B (zh) 2019-11-18 2022-08-01 和碩聯合科技股份有限公司 天線裝置及其靜電防護方法
KR102769072B1 (ko) * 2020-09-22 2025-02-18 삼성전자주식회사 Esd 테스트 방법 및 이를 수행하는 esd 테스트 시스템
CN112698114B (zh) * 2020-12-10 2023-04-14 北京无线电测量研究所 一种天线近场数据采集方法和系统
CN113158441B (zh) * 2021-03-31 2024-12-17 胜达克半导体科技(上海)股份有限公司 一种芯片测试机内提高抓取信号精度的方法
CN113904736B (zh) * 2021-09-18 2023-05-23 中国电子科技集团公司第二十九研究所 一种多通道射频信号路由装置
KR20230064052A (ko) 2021-11-02 2023-05-10 삼성전자주식회사 반도체 장치
TWI792820B (zh) * 2021-12-30 2023-02-11 趙文煌 1kV以下的電源迴路絕緣劣化偵測預警裝置
TWI806647B (zh) * 2022-06-08 2023-06-21 英業達股份有限公司 射頻及電磁干擾的自動測試系統及其方法
KR20230169599A (ko) 2022-06-09 2023-12-18 삼성전자주식회사 전류 검출 회로를 갖는 집적 회로 및 그것의 동작 방법
CN116298648B (zh) * 2023-05-12 2023-09-19 合肥联宝信息技术有限公司 一种静电路径的检测方法、装置及电子设备
TWI848814B (zh) * 2023-09-08 2024-07-11 英業達股份有限公司 靜電放電量測裝置
TWI855857B (zh) * 2023-09-08 2024-09-11 英業達股份有限公司 靜電放電量測方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903220A (en) * 1997-04-17 1999-05-11 Lucent Technologies Inc. Electrostatic discharge event detector
US5923160A (en) * 1997-04-19 1999-07-13 Lucent Technologies, Inc. Electrostatic discharge event locators
US20010056340A1 (en) * 2000-06-26 2001-12-27 Gorin Igor Anatoly CDM simulator for testing electrical devices
CN1568433A (zh) * 2001-08-13 2005-01-19 霍尼韦尔国际公司 执行电子器件的晶片级老化的方法
US20050258842A1 (en) * 2004-04-30 2005-11-24 Maloney Timothy J Radiation detector for electrostatic discharge
US20060157703A1 (en) * 2005-04-12 2006-07-20 Nec Electronics Corporation Charged plate,CDM simulator and test method
US20070164747A1 (en) * 2005-12-23 2007-07-19 Intel Corporation Method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment

Family Cites Families (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2909190A (en) 1958-10-29 1959-10-20 Exxon Research Engineering Co Static electricity detection and control system
EP0425823A1 (en) 1989-09-29 1991-05-08 Antivision Systems Corp. Electrocstatic imaging apparatus
US5359319A (en) 1990-08-13 1994-10-25 Minnesota Mining And Manufacturing Company Electrostatic discharge detector and display
US5315255A (en) 1992-07-16 1994-05-24 Micron Technology, Inc. Non-contact, electrostatic, discharge detector
CN1162746A (zh) * 1996-04-15 1997-10-22 三菱电机株式会社 微波探测器
WO1998000676A1 (en) 1996-06-28 1998-01-08 Intelligent Enclosures Corporation Environmentally enhanced enclosure for managing cmp contamination
DE10060284C2 (de) 2000-12-05 2003-07-17 Bruker Biospin Ag Faellanden Magnetanordnung mit einem aktiv abgeschirmten supraleitenden Magnetspulensytem und einem zusätzlichen Strompfad zur Streufeldunterdrückung im Quenchfall
JP2003028921A (ja) * 2001-07-18 2003-01-29 Nec Corp 静電破壊試験方法及び試験装置
US7700379B2 (en) * 2001-08-13 2010-04-20 Finisar Corporation Methods of conducting wafer level burn-in of electronic devices
US7525316B2 (en) * 2005-09-06 2009-04-28 3M Innovative Properties Company Electrostatic discharge event and transient signal detection and measurement device and method
US7248055B2 (en) 2005-12-20 2007-07-24 Dell Products L.P. Electrostatic discharge transient and frequency spectrum measurement of gap discharge
US7433165B2 (en) * 2006-03-17 2008-10-07 Adc Dsl Systems, Inc. Auto-resetting span-power protection
US8594957B2 (en) * 2008-02-20 2013-11-26 Advantest (Singapore) Pte Ltd System, method and computer program for detecting an electrostatic discharge event
JP4931252B2 (ja) * 2008-08-14 2012-05-16 鹿児島県 静電気放電発生箇所の検出方法及び検出装置
US20100117674A1 (en) * 2008-11-11 2010-05-13 Thermo Fisher Scientific Inc. Systems and methods for charged device model electrostatic discharge testing
US8026736B2 (en) 2008-12-30 2011-09-27 Intel Corporation Water-level charged device model for electrostatic discharge test methods, and apparatus using same
CN102262202B (zh) * 2010-05-25 2013-05-29 上海政申信息科技有限公司 静电放电信号处理方法及其处理装置与静电放电检测仪
BR112014031137B1 (pt) * 2012-06-14 2020-12-01 Prysmian S.P.A. aparelho e método para detecção da descarga parcial

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5903220A (en) * 1997-04-17 1999-05-11 Lucent Technologies Inc. Electrostatic discharge event detector
US5923160A (en) * 1997-04-19 1999-07-13 Lucent Technologies, Inc. Electrostatic discharge event locators
US20010056340A1 (en) * 2000-06-26 2001-12-27 Gorin Igor Anatoly CDM simulator for testing electrical devices
CN1568433A (zh) * 2001-08-13 2005-01-19 霍尼韦尔国际公司 执行电子器件的晶片级老化的方法
US20050258842A1 (en) * 2004-04-30 2005-11-24 Maloney Timothy J Radiation detector for electrostatic discharge
US20060157703A1 (en) * 2005-04-12 2006-07-20 Nec Electronics Corporation Charged plate,CDM simulator and test method
US20070164747A1 (en) * 2005-12-23 2007-07-19 Intel Corporation Method and apparatus for simulating electrostatic discharge events in manufacturing and calibrating monitoring equipment

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11307235B2 (en) 2012-12-28 2022-04-19 Illinois Tool Works Inc. In-tool ESD events selective monitoring method and apparatus
CN106911742A (zh) * 2015-12-23 2017-06-30 深圳长城开发科技股份有限公司 Esd工业物联网系统
CN110088638A (zh) * 2016-09-16 2019-08-02 伊利诺斯工具制品有限公司 工具内esd事件选择性监测方法和装置
CN110088638B (zh) * 2016-09-16 2022-07-22 伊利诺斯工具制品有限公司 工具内esd事件选择性监测方法和装置
CN109212956A (zh) * 2017-06-30 2019-01-15 莱尔德技术股份有限公司 无线紧急停止系统以及操作无线紧急停止系统的方法
CN108020698A (zh) * 2017-12-29 2018-05-11 江苏林洋能源股份有限公司 一种用于电能表防窃电的esd高压检测电路和方法
CN113167818A (zh) * 2018-09-11 2021-07-23 迈吉克汽车运动公司 用于在电气和/或电子电路上进行测试的工具的探针和包括探针的组件
CN109669084A (zh) * 2018-12-13 2019-04-23 歌尔科技有限公司 设备esd测试方法和系统

Also Published As

Publication number Publication date
SG11201505153VA (en) 2015-08-28
TW201432271A (zh) 2014-08-16
US9671448B2 (en) 2017-06-06
EP2939036B1 (en) 2017-05-24
KR102054541B1 (ko) 2019-12-10
JP6538566B2 (ja) 2019-07-03
KR20150103088A (ko) 2015-09-09
EP2939036A1 (en) 2015-11-04
WO2014106075A1 (en) 2014-07-03
JP2016502117A (ja) 2016-01-21
US20140184253A1 (en) 2014-07-03
CN112327069A (zh) 2021-02-05
TWI615618B (zh) 2018-02-21

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Application publication date: 20151118