TWI615618B - 工具中靜電放電事件的監控方法及裝置 - Google Patents

工具中靜電放電事件的監控方法及裝置 Download PDF

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Publication number
TWI615618B
TWI615618B TW102149091A TW102149091A TWI615618B TW I615618 B TWI615618 B TW I615618B TW 102149091 A TW102149091 A TW 102149091A TW 102149091 A TW102149091 A TW 102149091A TW I615618 B TWI615618 B TW I615618B
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TW
Taiwan
Prior art keywords
esd
antenna
event
detector
signal
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TW102149091A
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English (en)
Chinese (zh)
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TW201432271A (zh
Inventor
尼爾遜賴爾Ｄ
海曼史蒂芬Ｂ
霍塞特馬克Ｅ
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伊利諾工具工程公司
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Application filed by 伊利諾工具工程公司 filed Critical 伊利諾工具工程公司
Publication of TW201432271A publication Critical patent/TW201432271A/zh
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Publication of TWI615618B publication Critical patent/TWI615618B/zh

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G01R31/002—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing where the device under test is an electronic circuit
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/001—Measuring interference from external sources to, or emission from, the device under test, e.g. EMC, EMI, EMP or ESD testing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005—Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Tests Of Electronic Circuits (AREA)
  • Testing Relating To Insulation (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Elimination Of Static Electricity (AREA)
TW102149091A 2012-12-28 2013-12-30 工具中靜電放電事件的監控方法及裝置 TWI615618B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201261747199P 2012-12-28 2012-12-28
US61/747,199 2012-12-28
US14/140,860 2013-12-26
US14/140,860 US9671448B2 (en) 2012-12-28 2013-12-26 In-tool ESD events monitoring method and apparatus

Publications (2)

Publication Number Publication Date
TW201432271A TW201432271A (zh) 2014-08-16
TWI615618B true TWI615618B (zh) 2018-02-21

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
TW102149091A TWI615618B (zh) 2012-12-28 2013-12-30 工具中靜電放電事件的監控方法及裝置

Country Status (8)

Country Link
US (1) US9671448B2 (enExample)
EP (1) EP2939036B1 (enExample)
JP (1) JP6538566B2 (enExample)
KR (1) KR102054541B1 (enExample)
CN (2) CN105074481A (enExample)
SG (1) SG11201505153VA (enExample)
TW (1) TWI615618B (enExample)
WO (1) WO2014106075A1 (enExample)

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US11417952B2 (en) 2019-11-18 2022-08-16 Pegatron Corporation Antenna device and electrostatic discharge protection method thereof

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CN110646695B (zh) * 2019-09-29 2021-07-23 潍坊歌尔微电子有限公司 一种静电测试工装
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KR102769072B1 (ko) * 2020-09-22 2025-02-18 삼성전자주식회사 Esd 테스트 방법 및 이를 수행하는 esd 테스트 시스템
CN112698114B (zh) * 2020-12-10 2023-04-14 北京无线电测量研究所 一种天线近场数据采集方法和系统
CN113158441B (zh) * 2021-03-31 2024-12-17 胜达克半导体科技(上海)股份有限公司 一种芯片测试机内提高抓取信号精度的方法
CN113904736B (zh) * 2021-09-18 2023-05-23 中国电子科技集团公司第二十九研究所 一种多通道射频信号路由装置
KR20230064052A (ko) 2021-11-02 2023-05-10 삼성전자주식회사 반도체 장치
TWI792820B (zh) * 2021-12-30 2023-02-11 趙文煌 1kV以下的電源迴路絕緣劣化偵測預警裝置
TWI806647B (zh) * 2022-06-08 2023-06-21 英業達股份有限公司 射頻及電磁干擾的自動測試系統及其方法
KR20230169599A (ko) 2022-06-09 2023-12-18 삼성전자주식회사 전류 검출 회로를 갖는 집적 회로 및 그것의 동작 방법
CN116298648B (zh) * 2023-05-12 2023-09-19 合肥联宝信息技术有限公司 一种静电路径的检测方法、装置及电子设备
TWI848814B (zh) * 2023-09-08 2024-07-11 英業達股份有限公司 靜電放電量測裝置
TWI855857B (zh) * 2023-09-08 2024-09-11 英業達股份有限公司 靜電放電量測方法

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11417952B2 (en) 2019-11-18 2022-08-16 Pegatron Corporation Antenna device and electrostatic discharge protection method thereof

Also Published As

Publication number Publication date
EP2939036B1 (en) 2017-05-24
KR20150103088A (ko) 2015-09-09
WO2014106075A1 (en) 2014-07-03
KR102054541B1 (ko) 2019-12-10
EP2939036A1 (en) 2015-11-04
US20140184253A1 (en) 2014-07-03
SG11201505153VA (en) 2015-08-28
US9671448B2 (en) 2017-06-06
CN112327069A (zh) 2021-02-05
JP6538566B2 (ja) 2019-07-03
TW201432271A (zh) 2014-08-16
CN105074481A (zh) 2015-11-18
JP2016502117A (ja) 2016-01-21

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