JP2016502094A5 - - Google Patents
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- JP2016502094A5 JP2016502094A5 JP2015545153A JP2015545153A JP2016502094A5 JP 2016502094 A5 JP2016502094 A5 JP 2016502094A5 JP 2015545153 A JP2015545153 A JP 2015545153A JP 2015545153 A JP2015545153 A JP 2015545153A JP 2016502094 A5 JP2016502094 A5 JP 2016502094A5
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- 238000000034 method Methods 0.000 claims 16
- 238000010894 electron beam technology Methods 0.000 claims 5
- 230000004069 differentiation Effects 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000003384 imaging method Methods 0.000 claims 1
- 238000007689 inspection Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261731580P | 2012-11-30 | 2012-11-30 | |
| US61/731,580 | 2012-11-30 | ||
| US13/772,929 | 2013-02-21 | ||
| US13/772,929 US8884223B2 (en) | 2012-11-30 | 2013-02-21 | Methods and apparatus for measurement of relative critical dimensions |
| PCT/US2013/071733 WO2014085343A1 (en) | 2012-11-30 | 2013-11-25 | Methods and apparatus for measurement of relative critical dimensions |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016502094A JP2016502094A (ja) | 2016-01-21 |
| JP2016502094A5 true JP2016502094A5 (enExample) | 2017-01-12 |
| JP6305423B2 JP6305423B2 (ja) | 2018-04-04 |
Family
ID=50824514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015545153A Active JP6305423B2 (ja) | 2012-11-30 | 2013-11-25 | 相対的なクリティカルディメンションの測定のための方法および装置 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US8884223B2 (enExample) |
| JP (1) | JP6305423B2 (enExample) |
| KR (1) | KR102001715B1 (enExample) |
| DE (1) | DE112013005748B4 (enExample) |
| IL (1) | IL239094B (enExample) |
| SG (1) | SG11201504253PA (enExample) |
| TW (1) | TWI611162B (enExample) |
| WO (1) | WO2014085343A1 (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10304178B2 (en) | 2015-09-18 | 2019-05-28 | Taiwan Semiconductor Manfacturing Company, Ltd. | Method and system for diagnosing a semiconductor wafer |
| US10997712B2 (en) * | 2018-01-18 | 2021-05-04 | Canon Virginia, Inc. | Devices, systems, and methods for anchor-point-enabled multi-scale subfield alignment |
| KR102702714B1 (ko) * | 2019-05-21 | 2024-09-05 | 어플라이드 머티어리얼스, 인코포레이티드 | 강화된 단면 특징 측정 방법론 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5367578A (en) * | 1991-09-18 | 1994-11-22 | Ncr Corporation | System and method for optical recognition of bar-coded characters using template matching |
| US5736863A (en) | 1996-06-19 | 1998-04-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Abatement of electron beam charging distortion during dimensional measurements of integrated circuit patterns with scanning electron microscopy by the utilization of specially designed test structures |
| US5969273A (en) | 1998-02-12 | 1999-10-19 | International Business Machines Corporation | Method and apparatus for critical dimension and tool resolution determination using edge width |
| US7133549B2 (en) * | 1999-04-05 | 2006-11-07 | Applied Materials, Inc. | Local bias map using line width measurements |
| US6277661B1 (en) * | 2000-06-29 | 2001-08-21 | Advanced Micro Devices, Inc. | Method for detecting sloped contact holes using a critical-dimension waveform |
| JP4979819B2 (ja) * | 2000-09-12 | 2012-07-18 | キヤノン株式会社 | 色処理装置およびその方法 |
| US6774365B2 (en) | 2001-03-28 | 2004-08-10 | Advanced Micro Devices, Inc. | SEM inspection and analysis of patterned photoresist features |
| US6784425B1 (en) | 2001-06-29 | 2004-08-31 | Kla-Tencor Technologies Corporation | Energy filter multiplexing |
| US7274820B2 (en) * | 2001-09-26 | 2007-09-25 | Kabushiki Kaisha Toshiba | Pattern evaluation system, pattern evaluation method and program |
| KR100498706B1 (ko) * | 2003-02-04 | 2005-07-01 | 동부아남반도체 주식회사 | 이미지 프로세싱을 이용한 웨이퍼 정렬 방법 |
| JP4769725B2 (ja) * | 2003-10-08 | 2011-09-07 | アプライド マテリアルズ イスラエル リミテッド | 測定システム及び方法 |
| KR20060017087A (ko) | 2004-08-19 | 2006-02-23 | 삼성전자주식회사 | 웨이퍼의 임계치수검출방법 |
| KR100663367B1 (ko) * | 2005-12-06 | 2007-01-02 | 삼성전자주식회사 | 반도체소자의 시디 측정방법 및 관련된 측정기 |
| KR100697554B1 (ko) | 2006-02-14 | 2007-03-21 | 삼성전자주식회사 | 임계 치수 측정 방법 |
| JP4825734B2 (ja) * | 2007-06-15 | 2011-11-30 | 株式会社日立ハイテクノロジーズ | 異種計測装置間のキャリブレーション方法及びそのシステム |
| JP4971050B2 (ja) * | 2007-06-21 | 2012-07-11 | 株式会社日立製作所 | 半導体装置の寸法測定装置 |
| JP4586051B2 (ja) * | 2007-08-03 | 2010-11-24 | 株式会社日立ハイテクノロジーズ | 走査型電子顕微鏡 |
| KR20100024087A (ko) | 2008-08-25 | 2010-03-05 | 삼성전자주식회사 | 반도체 공정 제어 방법 |
| JP5429869B2 (ja) * | 2008-12-22 | 2014-02-26 | 株式会社 Ｎｇｒ | パターン検査装置および方法 |
| JP2011101254A (ja) * | 2009-11-06 | 2011-05-19 | Seiko Epson Corp | 測色器を備えた印刷装置における同測色器の補正装置、測色器の補正用ｌｕｔ |
| US8294125B2 (en) | 2009-11-18 | 2012-10-23 | Kla-Tencor Corporation | High-sensitivity and high-throughput electron beam inspection column enabled by adjustable beam-limiting aperture |
| KR101662306B1 (ko) | 2010-11-02 | 2016-10-10 | 삼성전자주식회사 | 패턴의 선폭 측정 방법 및 이를 수행하기 위한 선폭 측정 장치 |
| KR20120068128A (ko) * | 2010-12-17 | 2012-06-27 | 삼성전자주식회사 | 패턴의 결함 검출 방법 및 이를 수행하기 위한 결함 검출 장치 |
| JP5537443B2 (ja) * | 2011-01-04 | 2014-07-02 | 株式会社東芝 | Ｅｕｖマスク用ブランクの良否判定方法及びｅｕｖマスクの製造方法 |
| US8432441B2 (en) | 2011-02-22 | 2013-04-30 | Hermes Microvision Inc. | Method and system for measuring critical dimension and monitoring fabrication uniformity |
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2013
- 2013-02-21 US US13/772,929 patent/US8884223B2/en active Active
- 2013-11-25 KR KR1020157017437A patent/KR102001715B1/ko active Active
- 2013-11-25 DE DE112013005748.4T patent/DE112013005748B4/de active Active
- 2013-11-25 WO PCT/US2013/071733 patent/WO2014085343A1/en not_active Ceased
- 2013-11-25 JP JP2015545153A patent/JP6305423B2/ja active Active
- 2013-11-25 SG SG11201504253PA patent/SG11201504253PA/en unknown
- 2013-11-29 TW TW102143922A patent/TWI611162B/zh active
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2015
- 2015-05-31 IL IL239094A patent/IL239094B/en active IP Right Grant