JP2016213393A5 - - Google Patents
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- Publication number
- JP2016213393A5 JP2016213393A5 JP2015097909A JP2015097909A JP2016213393A5 JP 2016213393 A5 JP2016213393 A5 JP 2016213393A5 JP 2015097909 A JP2015097909 A JP 2015097909A JP 2015097909 A JP2015097909 A JP 2015097909A JP 2016213393 A5 JP2016213393 A5 JP 2016213393A5
- Authority
- JP
- Japan
- Prior art keywords
- processed
- processing
- vacuum
- chamber
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims 14
- 238000000034 method Methods 0.000 claims 12
- 238000011017 operating method Methods 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015097909A JP6430889B2 (ja) | 2015-05-13 | 2015-05-13 | 真空処理装置およびその運転方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015097909A JP6430889B2 (ja) | 2015-05-13 | 2015-05-13 | 真空処理装置およびその運転方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016213393A JP2016213393A (ja) | 2016-12-15 |
| JP2016213393A5 true JP2016213393A5 (enExample) | 2018-02-15 |
| JP6430889B2 JP6430889B2 (ja) | 2018-11-28 |
Family
ID=57552101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015097909A Active JP6430889B2 (ja) | 2015-05-13 | 2015-05-13 | 真空処理装置およびその運転方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6430889B2 (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7242890B2 (ja) * | 2020-09-25 | 2023-03-20 | 株式会社日立ハイテク | 真空処理装置の運転方法 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009206345A (ja) * | 2008-02-28 | 2009-09-10 | Hitachi High-Technologies Corp | 真空処理装置 |
| JP2013143413A (ja) * | 2012-01-10 | 2013-07-22 | Hitachi High-Technologies Corp | 真空処理装置 |
| JP2013143513A (ja) * | 2012-01-12 | 2013-07-22 | Hitachi High-Technologies Corp | 真空処理装置 |
-
2015
- 2015-05-13 JP JP2015097909A patent/JP6430889B2/ja active Active
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