JP2016207770A - 被処理体を処理する方法 - Google Patents
被処理体を処理する方法 Download PDFInfo
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- JP2016207770A JP2016207770A JP2015085882A JP2015085882A JP2016207770A JP 2016207770 A JP2016207770 A JP 2016207770A JP 2015085882 A JP2015085882 A JP 2015085882A JP 2015085882 A JP2015085882 A JP 2015085882A JP 2016207770 A JP2016207770 A JP 2016207770A
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- gas
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- 238000012545 processing Methods 0.000 title claims abstract description 338
- 238000000034 method Methods 0.000 title claims abstract description 260
- 239000007789 gas Substances 0.000 claims description 471
- 239000007788 liquid Substances 0.000 claims description 44
- 229920006395 saturated elastomer Polymers 0.000 claims description 44
- 238000005530 etching Methods 0.000 claims description 33
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 15
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 14
- 239000004215 Carbon black (E152) Substances 0.000 claims description 12
- 229930195733 hydrocarbon Natural products 0.000 claims description 12
- 150000002430 hydrocarbons Chemical class 0.000 claims description 12
- 239000011368 organic material Substances 0.000 claims description 7
- 125000004432 carbon atom Chemical group C* 0.000 claims description 6
- 125000004430 oxygen atom Chemical group O* 0.000 claims description 6
- 230000008016 vaporization Effects 0.000 claims description 4
- 239000011148 porous material Substances 0.000 description 67
- 239000012528 membrane Substances 0.000 description 38
- 238000004380 ashing Methods 0.000 description 34
- 238000007789 sealing Methods 0.000 description 31
- 150000003254 radicals Chemical class 0.000 description 19
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- 238000009833 condensation Methods 0.000 description 12
- 230000005494 condensation Effects 0.000 description 12
- 239000003507 refrigerant Substances 0.000 description 12
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- 230000000052 comparative effect Effects 0.000 description 10
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 9
- 238000012546 transfer Methods 0.000 description 9
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- 238000001228 spectrum Methods 0.000 description 8
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- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 6
- 238000010790 dilution Methods 0.000 description 6
- 239000012895 dilution Substances 0.000 description 6
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- 229920003229 poly(methyl methacrylate) Polymers 0.000 description 6
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- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 6
- 238000005033 Fourier transform infrared spectroscopy Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 239000000758 substrate Substances 0.000 description 5
- YNQLUTRBYVCPMQ-UHFFFAOYSA-N Ethylbenzene Chemical compound CCC1=CC=CC=C1 YNQLUTRBYVCPMQ-UHFFFAOYSA-N 0.000 description 4
- IIEWJVIFRVWJOD-UHFFFAOYSA-N ethylcyclohexane Chemical compound CCC1CCCCC1 IIEWJVIFRVWJOD-UHFFFAOYSA-N 0.000 description 4
- 229960004592 isopropanol Drugs 0.000 description 4
- TVMXDCGIABBOFY-UHFFFAOYSA-N octane Chemical compound CCCCCCCC TVMXDCGIABBOFY-UHFFFAOYSA-N 0.000 description 4
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 229910052786 argon Inorganic materials 0.000 description 3
- 239000007795 chemical reaction product Substances 0.000 description 3
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- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- 229940044613 1-propanol Drugs 0.000 description 2
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 2
- ZNQVEEAIQZEUHB-UHFFFAOYSA-N 2-ethoxyethanol Chemical compound CCOCCO ZNQVEEAIQZEUHB-UHFFFAOYSA-N 0.000 description 2
- 229940093475 2-ethoxyethanol Drugs 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004880 explosion Methods 0.000 description 2
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- 238000011068 loading method Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000009832 plasma treatment Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910004014 SiF4 Inorganic materials 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005224 laser annealing Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- -1 oxygen radicals Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- ABTOQLMXBSRXSM-UHFFFAOYSA-N silicon tetrafluoride Chemical compound F[Si](F)(F)F ABTOQLMXBSRXSM-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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Abstract
Description
式(1)のアントワン式によって規定される飽和蒸気圧pと絶対温度Tの関係は、図10に示すグラフでは直線関係である(なお、定数Cの値がゼロでない場合には、図10に示す直線が横方向にシフトするだけであって、飽和蒸気圧pと絶対温度Tとの関係に直線関係が存在することには変わりはない)。したがって、図10に示す各フルオロカーボンガスに関する複数の実測値の関係は、アントワン式によって規定される直線関係に一致している。よって、実測値から外挿した直線を用いることにより、実測値がない温度領域の飽和蒸気圧を定量的に予測することが可能である。
・工程ST1のガスG1:C6F6ガス(50sccm)
・工程ST1の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST1のステージPDの温度:−50℃
・工程ST1の処理時間:30秒
・工程ST2のガスG2:NF3/SiF4/Arガス(100/120/30sccm)
・工程ST2の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST2のステージPDの温度:−50℃
・工程ST2の処理時間:10秒
・工程ST3のガスG2:NF3/SiF4/Arガス(120/100/30sccm)
・工程ST3の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST3のステージPDの温度:−50℃
・工程ST3の高周波電力:60MHz、100W
・工程ST3の高周波バイアス電力:0.4MHz、50W
・工程ST3の処理時間:3秒
・シーケンスSQの実行回数:15回
・工程ST4のステージの温度:200℃
・工程ST4の処理時間:60秒
・工程ST1のガスG1:2−プロパノール(50sccm)
・工程ST1の処理容器12内の圧力:0.14Torr(18.67Pa)
・工程ST1のステージPDの温度:−20℃
・工程ST1の処理時間:30秒
・工程ST2のガスG2:NF3/SiF4/Arガス(120/100/30sccm)
・工程ST2の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST2のステージPDの温度:−20℃
・工程ST2の処理時間:5秒
・工程ST3のガスG2:NF3/SiF4/Arガス(120/100/30sccm)
・工程ST3の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST3のステージPDの温度:−20℃
・工程ST3の高周波電力:60MHz、100W
・工程ST3の高周波バイアス電力:0.4MHz、50W
・工程ST3の処理時間:3秒
・シーケンスSQの実行回数:15回
・工程ST4のステージの温度:200℃
・工程ST4の処理時間:60秒
・工程ST5のガスG3:C6F6ガス(250sccm)
・工程ST5の処理容器12内の圧力:0.2Torr(26.66Pa)
・工程ST5のステージPDの温度:−50℃
・工程ST5の処理時間:30秒
・工程ST6のガスG4:O2ガス(200sccm)
・工程ST6の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST6のステージPDの温度:−50℃
・工程ST6の処理時間:10秒
・工程ST7のガスG4:O2ガス(200sccm)
・工程ST7の処理容器12内の圧力:0.1Torr(13.33Pa)
・工程ST7のステージPDの温度:−50℃
・工程ST7の高周波電力:60MHz、200W
・工程ST7の高周波バイアス電力:0.4MHz、100W
・工程ST7の処理時間:4秒
・シーケンスSQの実行回数:40回
・工程ST8のステージの温度:200℃
・CO2ガス流量:380sccm
・処理容器12内の圧力:0.1Torr(13.33Pa)
・ステージPDの温度:−50℃
・高周波電力:60MHz、200W
・高周波バイアス電力:0.4MHz、100W
・処理時間:155秒
Claims (20)
- 多孔質膜、及び、有機材料から構成され該多孔質膜上に設けられたマスクを有する被処理体を処理する方法であって、
前記多孔質膜を有する被処理体が収容されたプラズマ処理装置の処理容器内に第1のガスを供給する工程と、
前記マスクを除去するために、前記処理容器内において第2のガスのプラズマを生成する工程と、
を含み、
前記第1のガスは、前記処理容器内でその上に前記被処理体が載置されているステージの温度において133.3パスカル以下の飽和蒸気圧を有する処理ガスからなるか、又は、該処理ガスを含み、
前記第1のガスを供給する前記工程では、プラズマは生成されず、前記処理容器内に供給される前記処理ガスの分圧は、前記飽和蒸気圧の20%以上である、
方法。 - 前記第1のガスを供給する前記工程、及び前記第2のガスのプラズマを生成する前記工程を含むシーケンスが繰り返し実行される、請求項1に記載の方法。
- 前記第1のガスを供給する前記工程と前記第2のガスのプラズマを生成する前記工程との間において、プラズマを生成せずに、前記処理容器内に前記第2のガスを供給する工程を更に含む、請求項1又は2に記載の方法。
- 前記第1のガスを供給する前記工程における前記処理容器内の空間の圧力は、133.3パスカル以下である、請求項1〜3の何れか一項に記載の方法。
- 前記第2のガスのプラズマを生成する前記工程における前記処理容器内の空間の圧力は、40パスカル以下である、請求項1〜4の何れか一項に記載の方法。
- 前記処理ガスは、フルオロカーボンガスを含む、請求項1〜5の何れか一項に記載の方法。
- 前記フルオロカーボンガスは、C7F8ガス及びC6F6ガスのうち少なくとも一方を含み、
前記第1のガスを供給する前記工程において前記処理容器内に供給される前記処理ガスの分圧は、前記飽和蒸気圧の100%以下である、
請求項6に記載の方法。 - 前記処理ガスは、炭化水素ガス、又は、酸素含有炭化水素ガスである、請求項1〜5の何れか一項に記載の方法。
- 前記処理ガスに含まれる分子中の炭素原子の原子数に対して該分子中の酸素原子の原子数が1/2以下である、請求項8に記載の方法。
- 前記処理ガスに基づく前記多孔質膜中の液体を気化させて気体を生成し、該気体を排気する工程を更に含む、請求項1〜9の何れか一項に記載の方法。
- 前記多孔質膜を有する被処理体が収容されたプラズマ処理装置の処理容器内に第3のガスを供給する工程と、
前記処理容器内において前記多孔質膜のエッチング用の第4のガスのプラズマを生成する工程と、
を更に含み、
前記第3のガスを供給する前記工程及び前記第4のガスのプラズマを生成する前記工程は、前記第1のガスを供給する前記工程及び前記第2のガスのプラズマを生成する前記工程の前に実行され、
前記第3のガスは、前記処理容器内でその上に前記被処理体が載置されているステージの温度において133.3パスカル以下の飽和蒸気圧を有する処理ガスからなるか、又は、該処理ガスを含み、
前記第3のガスを供給する前記工程では、プラズマは生成されず、該第3のガスを構成する前記処理ガスの分圧は、該第3のガスを構成する該処理ガスの飽和蒸気圧の20%以上である、
請求項1〜10の何れか一項に記載の方法。 - 前記第3のガスを供給する前記工程、及び前記第4のガスのプラズマを生成する前記工程を含むシーケンスが繰り返し実行される、請求項11に記載の方法。
- 前記第3のガスを供給する前記工程と前記第4のガスのプラズマを生成する前記工程との間において、プラズマを生成せずに、前記処理容器内に前記第4のガスを供給する工程を更に含む、請求項11又は12に記載の方法。
- 前記第3のガスを供給する前記工程における前記処理容器内の空間の圧力は、133.3パスカル以下である、請求項11〜13の何れか一項に記載の方法。
- 前記第4のガスのプラズマを生成する前記工程における前記処理容器内の空間の圧力は、40パスカル以下である、請求項11〜14の何れか一項に記載の方法。
- 前記第3のガスを構成する前記処理ガスは、フルオロカーボンガスを含む、請求項11〜15の何れか一項に記載の方法。
- 前記第3のガスを構成する前記フルオロカーボンガスは、C7F8ガス及びC6F6ガスのうち少なくとも一方を含み、
前記第3のガスを供給する前記工程において前記処理容器内に供給される該第3のガスを構成する前記処理ガスの分圧は、該第3のガスを構成する該処理ガスの飽和蒸気圧の100%以下である、
請求項16に記載の方法。 - 前記第3のガスを構成する前記処理ガスは、炭化水素ガス、又は、酸素含有炭化水素ガスである、請求項11〜15の何れか一項に記載の方法。
- 前記第3のガスを構成する前記処理ガスに含まれる分子中の炭素原子の原子数に対して該分子中の酸素原子の原子数が1/2以下である、請求項18に記載の方法。
- 前記第3のガスを構成する前記処理ガスに基づく前記多孔質膜中の液体を気化させて気体を生成し、該気体を排気する工程を更に含む、請求項11〜19の何れか一項に記載の方法。
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