JP2016198826A - 薄板状ワークの製造方法及び両頭平面研削装置 - Google Patents
薄板状ワークの製造方法及び両頭平面研削装置 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 22
- 238000000227 grinding Methods 0.000 claims abstract description 134
- 230000003068 static effect Effects 0.000 claims abstract description 107
- 238000000034 method Methods 0.000 claims description 21
- 238000001514 detection method Methods 0.000 claims description 12
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- 230000002706 hydrostatic effect Effects 0.000 description 9
- 238000005452 bending Methods 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
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- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
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- 239000012530 fluid Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
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- 230000003252 repetitive effect Effects 0.000 description 1
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- 229920005989 resin Polymers 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/08—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for double side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
- B24B7/17—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings for simultaneously grinding opposite and parallel end faces, e.g. double disc grinders
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/306—Chemical or electrical treatment, e.g. electrolytic etching
- H01L21/30625—With simultaneous mechanical treatment, e.g. mechanico-chemical polishing
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67207—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process
- H01L21/67219—Apparatus for manufacturing or treating in a plurality of work-stations comprising a chamber adapted to a particular process comprising at least one polishing chamber
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- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
【解決手段】両頭平面研削装置を用いて、一対の静圧パッド1,2の間で静圧支持された薄板状のワークを回転させながら、一対の研削砥石4,5によりワークの両面を研削する研削工程(S11)と、前記研削工程の前に両頭平面研削装置を調整する事前調整工程(S1〜S10)とを備えた薄板状ワークの製造方法であって、事前調整工程では、調整用ワークWaを静圧支持しつつ研削砥石4,5により挟持する第1状態と、調整用ワークWaを静圧支持することなく研削砥石4,5により挟持する第2状態とで調整用ワークWaと静圧パッド1,2との距離を取得し、それら両状態における距離の変化量に基づいて両頭平面研削装置を調整する。
【選択図】図4
Description
4,5 研削砥石
6a〜6c,
7a〜7c エアセンサ(距離検出センサ)
W ワーク
Wa 調整用ワーク
Claims (6)
- 一対の静圧パッドと一対の研削砥石とを有する両頭平面研削装置を用いて、前記一対の静圧パッドの間で静圧支持された薄板状のワークを回転させながら、前記一対の研削砥石により前記ワークの両面を研削する研削工程と、前記研削工程の前に前記両頭平面研削装置を調整する事前調整工程とを備えた薄板状ワークの製造方法において、
前記事前調整工程では、調整用ワークを前記一対の静圧パッドの間で静圧支持しつつ前記一対の研削砥石により挟持する第1状態と、前記調整用ワークを前記静圧パッドにより静圧支持することなく前記一対の研削砥石により挟持する第2状態とで前記調整用ワークの姿勢に関する所定値を取得し、それら両状態における前記所定値の変化に基づいて前記両頭平面研削装置を調整する
ことを特徴とする薄板状ワークの製造方法。 - 前記一対の静圧パッドと前記調整用ワークとの距離を検出する距離検出センサの出力値を前記所定値とした
ことを特徴とする請求項1に記載の薄板状ワークの製造方法。 - 前記第1状態と前記第2状態とにおける前記距離検出センサの出力値の変化量が所定判定値以下となることを条件に前記事前調整工程を終了する
ことを特徴とする請求項2に記載の薄板状ワークの製造方法。 - 前記事前調整工程は、
前記調整用ワークを前記一対の静圧パッドの間で静圧支持する静圧支持工程と、
前記静圧支持工程で静圧支持された前記調整用ワークを前記一対の研削砥石により挟持する砥石支持工程と、
前記砥石支持工程の後に前記一対の静圧パッドによる静圧支持を停止する静圧支持停止工程と、
前記静圧支持停止工程の前後における前記距離検出センサの出力値の変化量が前記所定判定値以下であるか否かを判定する姿勢変化判定工程とを備え、
前記姿勢変化判定工程で前記変化量が前記所定判定値以下であると判定されるまで、前記変化量を小さくする方向に前記両頭平面研削装置を調整しつつ前記静圧支持工程以降の工程を繰り返す
ことを特徴とする請求項3に記載の薄板状ワークの製造方法。 - 前記砥石支持工程では、前記距離検出センサの出力値が前記静圧支持工程のときと略同一となる位置で前記一対の研削砥石により前記調整用ワークを挟持する
ことを特徴とする請求項4に記載の薄板状ワークの製造方法。 - 一対の静圧パッドの間で静圧支持された薄板状のワークを回転させながら、一対の研削砥石により前記ワークの両面を研削する両頭平面研削装置において、
調整用ワークを前記一対の静圧パッドの間で静圧支持しつつ前記一対の研削砥石により挟持する第1状態と、前記調整用ワークを前記静圧パッドにより静圧支持することなく前記一対の研削砥石により挟持する第2状態とで前記調整用ワークの姿勢に関する所定値を夫々取得し、それら両状態における前記所定値の変化に基づいて、前記ワークの研削前に所定の調整を行う事前調整手段を備えた
ことを特徴とする両頭平面研削装置。
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JP2015078531A JP6383700B2 (ja) | 2015-04-07 | 2015-04-07 | 薄板状ワークの製造方法及び両頭平面研削装置 |
CN201610182159.9A CN106041728B (zh) | 2015-04-07 | 2016-03-28 | 薄板状工件的制造方法以及双头平面磨削装置 |
TW105110045A TWI678262B (zh) | 2015-04-07 | 2016-03-30 | 薄板狀工件的製造方法以及雙頭平面磨削裝置 |
KR1020160042115A KR102499588B1 (ko) | 2015-04-07 | 2016-04-06 | 박판형상 워크의 제조방법 및 양두 평면 연삭장치 |
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US11400563B2 (en) * | 2018-12-07 | 2022-08-02 | Disco Corporation | Processing method for disk-shaped workpiece |
TWI826082B (zh) * | 2022-09-08 | 2023-12-11 | 大陸商西安奕斯偉材料科技股份有限公司 | 監控研磨裝置的加工狀態的系統、方法及雙面研磨裝置 |
CN117226707A (zh) * | 2023-11-10 | 2023-12-15 | 西安奕斯伟材料科技股份有限公司 | 驱动环、承载装置及双面研磨装置 |
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- 2016-03-28 CN CN201610182159.9A patent/CN106041728B/zh active Active
- 2016-03-30 TW TW105110045A patent/TWI678262B/zh active
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JPH10264024A (ja) * | 1997-01-23 | 1998-10-06 | Nippon Seiko Kk | 砥石アンバランス測定方法 |
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CN106041728A (zh) | 2016-10-26 |
TWI678262B (zh) | 2019-12-01 |
TW201642999A (zh) | 2016-12-16 |
JP6383700B2 (ja) | 2018-08-29 |
KR102499588B1 (ko) | 2023-02-15 |
KR20160120237A (ko) | 2016-10-17 |
CN106041728B (zh) | 2020-02-07 |
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