JP2016194467A - 物理量センサーの検査方法及び物理量センサーの製造方法 - Google Patents

物理量センサーの検査方法及び物理量センサーの製造方法 Download PDF

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JP2016194467A
JP2016194467A JP2015074861A JP2015074861A JP2016194467A JP 2016194467 A JP2016194467 A JP 2016194467A JP 2015074861 A JP2015074861 A JP 2015074861A JP 2015074861 A JP2015074861 A JP 2015074861A JP 2016194467 A JP2016194467 A JP 2016194467A
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signal
physical quantity
drive
voltage
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Japanese (ja)
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JP2016194467A5 (enExample
Inventor
政宏 押尾
Masahiro Oshio
政宏 押尾
佐藤　健二
Kenji Sato
健二 佐藤
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Seiko Epson Corp
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Seiko Epson Corp
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Priority to JP2015074861A priority Critical patent/JP2016194467A/ja
Priority to US15/075,656 priority patent/US10041796B2/en
Publication of JP2016194467A publication Critical patent/JP2016194467A/ja
Publication of JP2016194467A5 publication Critical patent/JP2016194467A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5726—Signal processing
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5776—Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
    • G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Signal Processing (AREA)
  • Manufacturing & Machinery (AREA)
  • Gyroscopes (AREA)
JP2015074861A 2015-04-01 2015-04-01 物理量センサーの検査方法及び物理量センサーの製造方法 Withdrawn JP2016194467A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2015074861A JP2016194467A (ja) 2015-04-01 2015-04-01 物理量センサーの検査方法及び物理量センサーの製造方法
US15/075,656 US10041796B2 (en) 2015-04-01 2016-03-21 Method for inspecting physical quantity sensor and method for manufacturing physical quantity sensor

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Application Number Priority Date Filing Date Title
JP2015074861A JP2016194467A (ja) 2015-04-01 2015-04-01 物理量センサーの検査方法及び物理量センサーの製造方法

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JP2016194467A true JP2016194467A (ja) 2016-11-17
JP2016194467A5 JP2016194467A5 (enExample) 2018-04-19

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US (1) US10041796B2 (enExample)
JP (1) JP2016194467A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101158B2 (en) 2015-04-24 2018-10-16 Seiko Epson Corporation Circuit for physical quantity sensor, physical quantity sensor, and method for manufacturing physical quantity sensor

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6492739B2 (ja) 2015-02-20 2019-04-03 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体
JP6586735B2 (ja) * 2015-02-20 2019-10-09 セイコーエプソン株式会社 回路装置、物理量検出装置、電子機器及び移動体

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09236436A (ja) * 1996-03-01 1997-09-09 Nissan Motor Co Ltd 角速度センサの自己診断方法
JP2002526761A (ja) * 1998-10-01 2002-08-20 エーアーデーエス・ドイチュラント・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 共振構造を有するセンサ、特に加速度センサ又は回転速度センサ、並びに自己試験をするための装置及び方法
US20050091006A1 (en) * 2003-10-22 2005-04-28 Rober Stephen J. Electronic sensor with signal conditioning
JP2005233706A (ja) * 2004-02-18 2005-09-02 Matsushita Electric Ind Co Ltd 角速度センサ
US20100219839A1 (en) * 2008-12-30 2010-09-02 Colin Findlay Steele Apparatus and method for testing a capacitive transducer and/or associated electronic circuitry
JP2010286368A (ja) * 2009-06-12 2010-12-24 Epson Toyocom Corp 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法

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US7152474B2 (en) * 2002-09-18 2006-12-26 Carnegie Mellon University Built-in self test of MEMS
EP1959233A1 (en) * 2007-02-13 2008-08-20 STMicroelectronics S.r.l. Microelectromechanical gyroscope with self-test function and control method of a microelectromechanical gyroscope
US9714842B2 (en) * 2011-09-16 2017-07-25 Invensense, Inc. Gyroscope self test by applying rotation on coriolis sense mass
US9069006B2 (en) * 2012-04-05 2015-06-30 Fairchild Semiconductor Corporation Self test of MEMS gyroscope with ASICs integrated capacitors
US20140074418A1 (en) * 2012-09-13 2014-03-13 Freescale Semiconductor, Inc. Method and system for calibrating an inertial sensor
JP6222423B2 (ja) * 2013-03-28 2017-11-01 セイコーエプソン株式会社 物理量センサー、電子機器及び移動体
DE102014225844A1 (de) * 2014-12-15 2016-06-16 Robert Bosch Gmbh Verfahren zum Testen der Funktionalität eines Drehratensensors

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09236436A (ja) * 1996-03-01 1997-09-09 Nissan Motor Co Ltd 角速度センサの自己診断方法
JP2002526761A (ja) * 1998-10-01 2002-08-20 エーアーデーエス・ドイチュラント・ゲゼルシャフト・ミト・ベシュレンクテル・ハフツング 共振構造を有するセンサ、特に加速度センサ又は回転速度センサ、並びに自己試験をするための装置及び方法
US20050091006A1 (en) * 2003-10-22 2005-04-28 Rober Stephen J. Electronic sensor with signal conditioning
JP2006515423A (ja) * 2003-10-22 2006-05-25 モトローラ・インコーポレイテッド 信号処理を有する電子センサ
JP2005233706A (ja) * 2004-02-18 2005-09-02 Matsushita Electric Ind Co Ltd 角速度センサ
US20100219839A1 (en) * 2008-12-30 2010-09-02 Colin Findlay Steele Apparatus and method for testing a capacitive transducer and/or associated electronic circuitry
JP2010286368A (ja) * 2009-06-12 2010-12-24 Epson Toyocom Corp 物理量検出装置並びに物理量検出装置の制御方法、異常診断システム及び異常診断方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10101158B2 (en) 2015-04-24 2018-10-16 Seiko Epson Corporation Circuit for physical quantity sensor, physical quantity sensor, and method for manufacturing physical quantity sensor

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US20160290828A1 (en) 2016-10-06
US10041796B2 (en) 2018-08-07

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