JP2016181687A - ハードマスクのための金属誘電体膜の蒸着 - Google Patents
ハードマスクのための金属誘電体膜の蒸着 Download PDFInfo
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- 229910052751 metal Inorganic materials 0.000 title claims abstract description 71
- 239000002184 metal Substances 0.000 title claims abstract description 71
- 230000008021 deposition Effects 0.000 title description 6
- 239000007789 gas Substances 0.000 claims abstract description 154
- 239000002243 precursor Substances 0.000 claims abstract description 139
- 238000012545 processing Methods 0.000 claims abstract description 113
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 71
- 238000000034 method Methods 0.000 claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 238000000151 deposition Methods 0.000 claims abstract description 26
- 239000012159 carrier gas Substances 0.000 claims abstract description 25
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 38
- 229910052721 tungsten Inorganic materials 0.000 claims description 38
- 239000010937 tungsten Substances 0.000 claims description 38
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 27
- 239000004215 Carbon black (E152) Substances 0.000 claims description 22
- 229930195733 hydrocarbon Natural products 0.000 claims description 22
- 150000002430 hydrocarbons Chemical class 0.000 claims description 22
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims description 19
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 claims description 18
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 claims description 18
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 16
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052786 argon Inorganic materials 0.000 claims description 8
- 150000004767 nitrides Chemical class 0.000 claims description 8
- PPJPTAQKIFHZQU-UHFFFAOYSA-N bis(tert-butylimino)tungsten;dimethylazanide Chemical compound C[N-]C.C[N-]C.CC(C)(C)N=[W]=NC(C)(C)C PPJPTAQKIFHZQU-UHFFFAOYSA-N 0.000 claims description 7
- -1 ethylene, propylene, butane Chemical class 0.000 claims description 7
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 6
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 6
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 6
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 claims description 6
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims description 6
- 239000001307 helium Substances 0.000 claims description 6
- 229910052734 helium Inorganic materials 0.000 claims description 6
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 6
- 229910052715 tantalum Inorganic materials 0.000 claims description 6
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 6
- 229910052719 titanium Inorganic materials 0.000 claims description 6
- 239000010936 titanium Substances 0.000 claims description 6
- 229910052720 vanadium Inorganic materials 0.000 claims description 6
- LEONUFNNVUYDNQ-UHFFFAOYSA-N vanadium atom Chemical compound [V] LEONUFNNVUYDNQ-UHFFFAOYSA-N 0.000 claims description 6
- INZDTEICWPZYJM-UHFFFAOYSA-N 1-(chloromethyl)-4-[4-(chloromethyl)phenyl]benzene Chemical compound C1=CC(CCl)=CC=C1C1=CC=C(CCl)C=C1 INZDTEICWPZYJM-UHFFFAOYSA-N 0.000 claims description 5
- NFFIWVVINABMKP-UHFFFAOYSA-N methylidynetantalum Chemical compound [Ta]#C NFFIWVVINABMKP-UHFFFAOYSA-N 0.000 claims description 5
- 239000002159 nanocrystal Substances 0.000 claims description 5
- 229910003468 tantalcarbide Inorganic materials 0.000 claims description 5
- 239000001257 hydrogen Substances 0.000 claims description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 50
- 239000004065 semiconductor Substances 0.000 description 7
- 238000005530 etching Methods 0.000 description 6
- 238000005229 chemical vapour deposition Methods 0.000 description 4
- 230000006870 function Effects 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 description 2
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/02274—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition in the presence of a plasma [PECVD]
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/3065—Plasma etching; Reactive-ion etching
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
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- H01J37/32082—Radio frequency generated discharge
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- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
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- H01L21/02107—Forming insulating materials on a substrate
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- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
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- H01L21/02183—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing tantalum, e.g. Ta2O5
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- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
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- H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
- H01L21/0334—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane
- H01L21/0337—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their size, orientation, disposition, behaviour, shape, in horizontal or vertical plane characterised by the process involved to create the mask, e.g. lift-off masks, sidewalls, or to modify the mask, e.g. pre-treatment, post-treatment
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H05H1/00—Generating plasma; Handling plasma
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- H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy
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- H01J2237/332—Coating
- H01J2237/3321—CVD [Chemical Vapor Deposition]
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Abstract
Description
Claims (32)
- 基板上に金属誘電体膜を蒸着するための方法であって、
プラズマ強化化学蒸着(PECVD)処理チャンバ内に前記基板を配置する工程と、
搬送ガスを前記PECVD処理チャンバに供給する工程と、
誘電体前駆体ガスを前記PECVD処理チャンバに供給する工程と、
金属前駆体ガスを前記PECVD処理チャンバに供給する工程と、
前記PECVD処理チャンバ内でプラズマを生成する工程と、
500℃未満の処理温度で前記基板上に金属誘電体膜を蒸着する工程と、
を備える、方法。 - 請求項1に記載の方法であって、前記金属前駆体ガスは、チタン前駆体ガス、タンタル前駆体ガス、タングステン前駆体ガス、および、バナジウム前駆体ガスからなる群より選択される、方法。
- 請求項1に記載の方法であって、前記金属前駆体ガスは、タングステン前駆体ガスを含む、方法。
- 請求項3に記載の方法であって、前記タングステン前駆体ガスは、WFaを含み、aは、1以上の整数である、方法。
- 請求項3に記載の方法であって、前記タングステン前駆体ガスは、ビス(tert‐ブチルイミド)ビス(ジメチルアミド)タングステン(BTBMW)を含む、方法。
- 請求項1に記載の方法であって、前記搬送ガスは、水素分子(H2)、アルゴン(Ar)、窒素分子(N2)、ヘリウム(He)、および/または、それらの組み合わせからなる群より選択される、方法。
- 請求項1に記載の方法であって、前記誘電体前駆体ガスは、炭化水素前駆体ガスを含む、方法。
- 請求項7に記載の方法であって、前記炭化水素前駆体ガスは、CxHyを含み、xは2から10までの整数、yは2から24までの整数である、方法。
- 請求項1に記載の方法であって、前記誘電体前駆体ガスは、窒化物系の前駆体ガスを含む、方法。
- 請求項7に記載の方法であって、前記炭化水素前駆体ガスは、メタン、アセチレン、エチレン、プロピレン、ブタン、シクロヘキサン、ベンゼン、および、トルエンからなる群より選択される、方法。
- 請求項1の方法であって、前記金属誘電体膜は、ナノ結晶である、方法。
- 請求項1に記載の方法であって、
前記PECVD処理チャンバは、台座から間隔を空けて配置された第1の電極を備え、
前記台座は、第2の電極を備え、
プラズマ発生器からのRF電力が前記第2の電極に供給され、前記第1の電極は接地されている、方法。 - 請求項12に記載の方法であって、前記第1の電極は、シャワーヘッドを含む、方法。
- 請求項1に記載の方法であって、前記誘電体前駆体ガスに対する金属前駆体ガスの割合は、20%より大きい、方法。
- 請求項1に記載の方法であって、前記金属誘電体膜は、炭化タングステン膜、炭化タンタル膜、窒化タンタル膜、および、炭化バナジウム膜からなる群より選択される、方法。
- 金属誘電体膜を蒸着するための方法であって、
プラズマ強化化学蒸着(PECVD)処理チャンバ内に基板を配置する工程と、
搬送ガスを前記PECVD処理チャンバに供給する工程と、
誘電体前駆体ガスを前記PECVD処理チャンバに供給する工程と、
金属前駆体ガスを前記PECVD処理チャンバに供給する工程と、
前記PECVD処理チャンバ内でプラズマを生成する工程と、
前記基板上に金属誘電体膜を蒸着する工程と、
を備え、
前記PECVD処理チャンバは、台座から間隔を空けて配置された第1の電極を備え、
前記台座は、第2の電極を備え、
プラズマ発生器からのRF電力が前記第2の電極に供給され、前記第1の電極は接地されている、方法。 - 請求項16に記載の方法であって、前記金属前駆体ガスは、チタン前駆体ガス、タンタル前駆体ガス、タングステン前駆体ガス、および、バナジウム前駆体ガスからなる群より選択される、方法。
- 請求項17に記載の方法であって、前記金属前駆体ガスは、タングステン前駆体ガスを含む、方法。
- 請求項18に記載の方法であって、前記タングステン前駆体ガスは、WFaを含み、aは、1以上の整数である、方法。
- 請求項18に記載の方法であって、前記タングステン前駆体ガスは、ビス(tert‐ブチルイミド)ビス(ジメチルアミド)タングステン(BTBMW)を含む、方法。
- 請求項16に記載の方法であって、前記搬送ガスは、水素分子(H2)、アルゴン(Ar)、窒素分子(N2)、ヘリウム(He)、および/または、それらの組み合わせからなる群より選択される、方法。
- 請求項16に記載の方法であって、前記誘電体前駆体ガスは、炭化水素前駆体ガスを含む、方法。
- 請求項22に記載の方法であって、前記炭化水素前駆体ガスは、CxHyを含み、xは2から10までの整数、yは2から24までの整数である、方法。
- 請求項16に記載の方法であって、前記誘電体前駆体ガスは、窒化物系の前駆体ガスを含む、方法。
- 請求項23に記載の方法であって、前記炭化水素前駆体ガスは、メタン、アセチレン、エチレン、プロピレン、ブタン、シクロヘキサン、ベンゼン、および、トルエンからなる群より選択される、方法。
- 請求項16の方法であって、前記金属誘電体膜は、ナノ結晶である、方法。
- 請求項16に記載の方法であって、
前記PECVD処理チャンバは、台座から間隔を空けて配置された第1の電極を備え、
前記台座は、第2の電極を備え、
プラズマ発生器からのRF電力が前記第2の電極に供給され、前記第1の電極は接地されている、方法。 - 請求項27に記載の方法であって、前記第1の電極は、シャワーヘッドを含む、方法。
- 請求項16に記載の方法であって、前記誘電体前駆体ガスに対する金属前駆体ガスの割合は、20%より大きい、方法。
- 請求項16に記載の方法であって、前記金属誘電体膜は、炭化タングステン膜、炭化タンタル膜、窒化タンタル膜、および、炭化バナジウム膜からなる群より選択される、方法。
- 金属誘電体膜を蒸着するための基板処理システムであって、
台座を備えたプラズマ強化化学蒸着(PECVD)処理チャンバと、
搬送ガス、誘電体前駆体ガス、および、金属前駆体ガスの内の少なくとも1つを選択的に供給するよう構成されたガス供給システムと、
前記PECVD処理チャンバ内でプラズマを選択的に形成するよう構成されたプラズマ発生器と、
前記ガス供給システムおよび前記プラズマ発生器と通信するよう構成されたコントローラであって、さらに、
前記搬送ガス、前記誘電体前駆体ガス、および、前記金属前駆体ガスを前記PECVD処理チャンバに供給し、
前記PECVD処理チャンバ内でプラズマを点火し、
500℃未満の処理温度で前記基板上に金属誘電体膜を蒸着するよう構成された、コントローラと、
を備える、システム。 - 金属誘電体膜を蒸着するための基板処理システムであって、
台座を備えたプラズマ強化化学蒸着(PECVD)処理チャンバと、
前記台座から間隔を空けて配置された第1の電極であって、
前記台座は、第2の電極を備え、
前記第1の電極は接地されている、第1の電極と、
搬送ガス、誘電体前駆体ガス、および、金属前駆体ガスの内の少なくとも1つを前記PECVD処理チャンバに選択的に供給するよう構成されたガス供給システムと、
RF電力を前記第2の電極に供給することにより、前記PECVD処理チャンバ内でプラズマを選択的に形成するよう構成されたプラズマ発生器と、
前記ガス供給システムおよび前記プラズマ発生器と通信するよう構成されたコントローラであって、さらに、
前記搬送ガス、前記誘電体前駆体ガス、および、前記金属前駆体ガスを前記PECVD処理チャンバに供給し、
前記PECVD処理チャンバ内で前記プラズマを点火し、
前記基板上に金属誘電体膜を蒸着するよう構成された、コントローラと、
を備える、システム。
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KR102601706B1 (ko) * | 2017-05-12 | 2023-11-10 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판들 및 챔버 컴포넌트들 상에서의 금속 실리사이드 층들의 증착 |
JP7221879B2 (ja) | 2017-05-12 | 2023-02-14 | アプライド マテリアルズ インコーポレイテッド | 基板及びチャンバ部品上への金属ケイ素化合物層の堆積 |
JP7282785B2 (ja) | 2018-01-15 | 2023-05-29 | アプライド マテリアルズ インコーポレイテッド | 炭化タングステン膜の接着性及び欠陥を改善する技法 |
JP2021510934A (ja) * | 2018-01-15 | 2021-04-30 | アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated | 炭化タングステン膜の接着性及び欠陥を改善する技法 |
KR20200100859A (ko) * | 2018-01-15 | 2020-08-26 | 어플라이드 머티어리얼스, 인코포레이티드 | 텅스텐 탄화물 막에 대한 접착 및 결함들을 개선하기 위한 기법들 |
US11859275B2 (en) | 2018-01-15 | 2024-01-02 | Applied Materials, Inc. | Techniques to improve adhesion and defects for tungsten carbide film |
KR102628317B1 (ko) | 2018-01-15 | 2024-01-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 텅스텐 탄화물 막에 대한 접착 및 결함들을 개선하기 위한 기법들 |
JP7471492B2 (ja) | 2018-01-15 | 2024-04-19 | アプライド マテリアルズ インコーポレイテッド | 炭化タングステン膜の接着性及び欠陥を改善する技法 |
KR102350978B1 (ko) * | 2020-08-20 | 2022-01-13 | 이만호 | 다중 전극 이온 빔 발생 장치 및 이를 이용한 표면 개질 방법 |
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JP6934705B2 (ja) | 2021-09-15 |
CN106024605A (zh) | 2016-10-12 |
TW201700762A (zh) | 2017-01-01 |
KR102500931B1 (ko) | 2023-02-16 |
TWI717336B (zh) | 2021-02-01 |
US20160284541A1 (en) | 2016-09-29 |
US9875890B2 (en) | 2018-01-23 |
CN116013767A (zh) | 2023-04-25 |
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