JP2016079486A5 - - Google Patents

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Publication number
JP2016079486A5
JP2016079486A5 JP2014214096A JP2014214096A JP2016079486A5 JP 2016079486 A5 JP2016079486 A5 JP 2016079486A5 JP 2014214096 A JP2014214096 A JP 2014214096A JP 2014214096 A JP2014214096 A JP 2014214096A JP 2016079486 A5 JP2016079486 A5 JP 2016079486A5
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JP
Japan
Prior art keywords
nano
order structure
substrate
order
manufacturing
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Application number
JP2014214096A
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English (en)
Japanese (ja)
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JP6380932B2 (ja
JP2016079486A (ja
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Priority to JP2014214096A priority Critical patent/JP6380932B2/ja
Priority claimed from JP2014214096A external-priority patent/JP6380932B2/ja
Priority to EP15002952.8A priority patent/EP3012344A1/en
Priority to US14/887,788 priority patent/US20160108514A1/en
Publication of JP2016079486A publication Critical patent/JP2016079486A/ja
Publication of JP2016079486A5 publication Critical patent/JP2016079486A5/ja
Application granted granted Critical
Publication of JP6380932B2 publication Critical patent/JP6380932B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2014214096A 2014-10-21 2014-10-21 ナノオーダ構造体の製造方法および製造装置 Expired - Fee Related JP6380932B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014214096A JP6380932B2 (ja) 2014-10-21 2014-10-21 ナノオーダ構造体の製造方法および製造装置
EP15002952.8A EP3012344A1 (en) 2014-10-21 2015-10-16 Method and apparatus for producing nanostructures, and substrate structure including nanostructures
US14/887,788 US20160108514A1 (en) 2014-10-21 2015-10-20 Method and apparatus for producing nanostructures, and substrate structure including nanostructures

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014214096A JP6380932B2 (ja) 2014-10-21 2014-10-21 ナノオーダ構造体の製造方法および製造装置

Publications (3)

Publication Number Publication Date
JP2016079486A JP2016079486A (ja) 2016-05-16
JP2016079486A5 true JP2016079486A5 (enExample) 2017-03-23
JP6380932B2 JP6380932B2 (ja) 2018-08-29

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ID=54697421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014214096A Expired - Fee Related JP6380932B2 (ja) 2014-10-21 2014-10-21 ナノオーダ構造体の製造方法および製造装置

Country Status (3)

Country Link
US (1) US20160108514A1 (enExample)
EP (1) EP3012344A1 (enExample)
JP (1) JP6380932B2 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020107515A1 (de) * 2020-03-18 2021-09-23 Nanowired Gmbh Multimetall Klettwelding
DE102020118446A1 (de) * 2020-07-13 2022-01-13 Nanowired Gmbh Verbindungselement
CN116445887A (zh) * 2023-06-20 2023-07-18 中国科学院理化技术研究所 一种利用螺旋外延生长制备金属性二维过渡金属硫族化合物的方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3259844B2 (ja) * 1990-03-27 2002-02-25 株式会社豊田中央研究所 異方性ナノ複合材料およびその製造方法
US7658991B2 (en) * 2004-10-21 2010-02-09 University Of Georgia Research Foundation, Inc. Structures having aligned nanorods and methods of making
JP4923477B2 (ja) * 2004-11-24 2012-04-25 株式会社豊田中央研究所 量子ドットアレイ及びその製造方法、並びに量子ドットアレイ素子及びその製造方法
JP4938365B2 (ja) 2006-06-26 2012-05-23 パナソニック株式会社 カーボン金型、およびその製造方法
US8282993B2 (en) * 2007-04-02 2012-10-09 Rensselaer Polytechnic Institute Ultrathin magnesium nanoblades
TWI372418B (en) * 2008-08-14 2012-09-11 Univ Nat Chiao Tung Nanostructured thin-film formed by utilizing oblique-angle deposition and method of the same
US8405996B2 (en) 2009-06-30 2013-03-26 General Electric Company Article including thermal interface element and method of preparation
JP2011150154A (ja) * 2010-01-22 2011-08-04 Showa Shinku:Kk 薄膜、及び、薄膜の形成方法
JP5870113B2 (ja) * 2011-10-31 2016-02-24 株式会社日立製作所 半導体装置
TWI490474B (zh) * 2012-01-12 2015-07-01 Phansco Corp 表面增強拉曼光譜（ｓｅｒｓ）感測基板及其製造方法
US20140142252A1 (en) 2012-11-19 2014-05-22 Sangho Cho Self-assembled structures, method of manufacture thereof and articles comprising the same
CN104903998A (zh) * 2013-01-09 2015-09-09 株式会社日立制作所 半导体装置及其制造方法

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