JP6380932B2 - ナノオーダ構造体の製造方法および製造装置 - Google Patents
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- 238000004519 manufacturing process Methods 0.000 title claims description 94
- 238000000034 method Methods 0.000 title description 16
- 239000000758 substrate Substances 0.000 claims description 127
- 239000000463 material Substances 0.000 claims description 99
- 230000008018 melting Effects 0.000 claims description 43
- 238000002844 melting Methods 0.000 claims description 43
- 239000010410 layer Substances 0.000 claims description 42
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 36
- 238000000151 deposition Methods 0.000 claims description 25
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 20
- 229910052802 copper Inorganic materials 0.000 claims description 20
- 239000010949 copper Substances 0.000 claims description 20
- 229910052759 nickel Inorganic materials 0.000 claims description 18
- 238000001816 cooling Methods 0.000 claims description 13
- 229910052782 aluminium Inorganic materials 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 12
- 239000002344 surface layer Substances 0.000 claims description 12
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 claims description 8
- 238000010894 electron beam technology Methods 0.000 claims description 4
- 239000007788 liquid Substances 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
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- 230000015572 biosynthetic process Effects 0.000 description 9
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- 239000002086 nanomaterial Substances 0.000 description 3
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
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- 125000004079 stearyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
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Description
また、上記課題を解決するために、本発明による製造方法は、基板の平坦面上に複数のナノオーダ構造体を形成する方法であって、基板の平坦面上に、ナノオーダ構造体の主材料を蒸着する第1の工程を含み、第1の工程において、基板の絶対温度を、主材料の融点(絶対温度)の0.25倍以下にし、第1の工程の前に、基板の平坦面上に、所定材料を蒸着することによって基板表面層を形成する工程を含み、基板表面層は、基板を回転させずに形成され、第1の工程においては基板を回転させる。
2…るつぼ
3…電子銃
4…材料
5…電子ビーム
6…蒸発流
7…ステージ
31…基板
32…原子
33…堆積した原子
34…堆積した原子の影
35…斜柱
36,71…ナノオーダ構造体
101…平面層
111…基板表面層
121,122,123…ナノオーダ構造体
124…平面層
Claims (11)
- 基板の平坦面上に、らせん形状やジグザグ形状の複数のナノオーダ構造体を形成する製造方法において、
前記基板の前記平坦面上に、前記ナノオーダ構造体の主材料としてニッケルや銅やアルミニウムを蒸着する第1の工程を含み、
前記第1の工程において、前記基板の絶対温度を、前記主材料の融点(絶対温度)の0.19倍〜0.25倍にすることを特徴とするナノオーダ構造体の製造方法。 - 請求項1に記載のナノオーダ構造体の製造方法において、
前記ナノオーダ構造体の線径は100nm未満であることを特徴とするナノオーダ構造体の製造方法。 - 請求項1に記載のナノオーダ構造体の製造方法において、
前記第1の工程において、前記基板を回転させることを特徴とするナノオーダ構造体の製造方法。 - 請求項1に記載のナノオーダ構造体の製造方法において、
前記第1の工程によって形成される複数の前記ナノオーダ構造体の上部に、所定材料を蒸着することによって平面層を形成する第2の工程を含むことを特徴とするナノオーダ構造体の製造方法。 - 請求項4に記載のナノオーダ構造体の製造方法において、
前記平面層の前記所定材料と、前記ナノオーダ構造体の前記主材料は、同じであることを特徴とするナノオーダ構造体の製造方法。 - 基板の平坦面上に複数のナノオーダ構造体を形成する製造方法において、
前記基板の前記平坦面上に、前記ナノオーダ構造体の主材料を蒸着する第1の工程を含み、
前記第1の工程において、前記基板の絶対温度を、前記主材料の融点(絶対温度)の0.25倍以下にし、
前記第1の工程によって形成される複数の前記ナノオーダ構造体の上部に、所定材料を蒸着することによって平面層を形成する第2の工程を含み、
前記第1の工程においては前記基板を回転させ、前記第2の工程においては前記基板を回転させないことを特徴とするナノオーダ構造体の製造方法。 - 請求項1に記載のナノオーダ構造体の製造方法において、
前記第1の工程の前に、前記基板の前記平坦面上に、所定材料を蒸着することによって基板表面層を形成する工程を含むことを特徴とするナノオーダ構造体の製造方法。 - 請求項7に記載のナノオーダ構造体の製造方法において、
前記基板表面層の前記所定材料と、前記ナノオーダ構造体の前記主材料は、同じであることを特徴とするナノオーダ構造体の製造方法。 - 基板の平坦面上に複数のナノオーダ構造体を形成する製造方法において、
前記基板の前記平坦面上に、前記ナノオーダ構造体の主材料を蒸着する第1の工程を含み、
前記第1の工程において、前記基板の絶対温度を、前記主材料の融点(絶対温度)の0.25倍以下にし、
前記第1の工程の前に、前記基板の前記平坦面上に、所定材料を蒸着することによって基板表面層を形成する工程を含み、
前記基板表面層は、前記基板を回転させずに形成され、前記第1の工程においては前記基板を回転させることを特徴とするナノオーダ構造体の製造方法。 - 真空チャンバを備え、前記真空チャンバ内で、らせん形状やジグザグ形状のナノオーダ構造体を形成するナノオーダ構造体の製造装置において、
前記真空チャンバ内に、
るつぼと、
前記るつぼ内に配置される材料としてニッケルや銅やアルミニウムに電子ビームを照射して、前記材料を蒸発させる電子銃と、
前記るつぼに対向し、蒸発した前記材料を蒸着させる部材を載置するステージと、
を配置し、
前記ステージは、回転可能に軸支されると共に、前記るつぼに対する角度が可変であり、
前記ステージを冷却する冷却装置と、
前記ステージを加熱する加熱装置と、
前記ステージの温度を検出する温度検出器と、
前記温度検出器によって検出される温度に基づいて、前記冷却装置および前記加熱装置を操作して、前記ステージの温度を制御する制御装置と、
を備え、
前記制御装置は、前記ステージの絶対温度を、前記材料の融点(絶対温度)の0.19倍〜0.25倍になるように、制御することを特徴とするナノオーダ構造体の製造装置。 - 請求項10に記載のナノオーダ構造体の製造装置において、
前記冷却装置は、液体窒素を冷媒とすることを特徴とするナノオーダ構造体の製造装置。
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JP2014214096A JP6380932B2 (ja) | 2014-10-21 | 2014-10-21 | ナノオーダ構造体の製造方法および製造装置 |
EP15002952.8A EP3012344A1 (en) | 2014-10-21 | 2015-10-16 | Method and apparatus for producing nanostructures, and substrate structure including nanostructures |
US14/887,788 US20160108514A1 (en) | 2014-10-21 | 2015-10-20 | Method and apparatus for producing nanostructures, and substrate structure including nanostructures |
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US7658991B2 (en) * | 2004-10-21 | 2010-02-09 | University Of Georgia Research Foundation, Inc. | Structures having aligned nanorods and methods of making |
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