JP2016076536A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP2016076536A JP2016076536A JP2014204596A JP2014204596A JP2016076536A JP 2016076536 A JP2016076536 A JP 2016076536A JP 2014204596 A JP2014204596 A JP 2014204596A JP 2014204596 A JP2014204596 A JP 2014204596A JP 2016076536 A JP2016076536 A JP 2016076536A
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 119
- 239000000758 substrate Substances 0.000 claims abstract description 75
- 230000015556 catabolic process Effects 0.000 claims abstract description 38
- 239000012535 impurity Substances 0.000 claims description 20
- 230000005669 field effect Effects 0.000 claims description 7
- 238000009792 diffusion process Methods 0.000 abstract description 65
- 238000009413 insulation Methods 0.000 abstract 1
- 239000010408 film Substances 0.000 description 133
- 239000010410 layer Substances 0.000 description 131
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 19
- 238000002955 isolation Methods 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 18
- 239000010703 silicon Substances 0.000 description 18
- 229910021332 silicide Inorganic materials 0.000 description 16
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 16
- 239000011229 interlayer Substances 0.000 description 11
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 229910052581 Si3N4 Inorganic materials 0.000 description 9
- 239000003990 capacitor Substances 0.000 description 9
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 239000004020 conductor Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 7
- 230000006378 damage Effects 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000011159 matrix material Substances 0.000 description 4
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 229910019001 CoSi Inorganic materials 0.000 description 2
- 229910005883 NiSi Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 229910021334 nickel silicide Inorganic materials 0.000 description 2
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1203—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body the substrate comprising an insulating body on a semiconductor body, e.g. SOI
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
- H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
- H01L21/84—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being other than a semiconductor body, e.g. being an insulating body
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/525—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections
- H01L23/5252—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body with adaptable interconnections comprising anti-fuses, i.e. connections having their state changed from non-conductive to conductive
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
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- H—ELECTRICITY
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- H10B—ELECTRONIC MEMORY DEVICES
- H10B20/00—Read-only memory [ROM] devices
- H10B20/20—Programmable ROM [PROM] devices comprising field-effect components
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Abstract
【解決手段】SOI基板を構成するSOI層SL上に設けられたゲート電極GMと、SOI層SL上に設けられ、高濃度の拡散領域D1を含むエピタキシャル層EPとに挟まれ、ゲート電極GMの側壁に接して形成された絶縁膜IFMを、アンチヒューズ素子における書込み動作の際に絶縁破壊を起こす対象とする。
【選択図】図2
Description
本実施の形態では、SOI基板上に、記憶素子であるアンチヒューズ素子を形成する場合において、ゲート電極の側壁を覆う絶縁膜を、書込み動作のために行う絶縁破壊の対象とすることについて説明する。
本実施の形態では、単位メモリセル内において2つの選択トランジスタを直列に接続し、これにより、高電圧により選択トランジスタの性能が低下することを防ぐことについて、図4〜図6を用いて説明する。図4は、本実施の形態の半導体装置を構成するメモリアレイを示す平面レイアウトである。図5は、図4のB−B線における断面図である。図6は、比較例の半導体装置および本実施の形態の半導体装置のそれぞれの動作を説明する表である。つまり、図6は、選択トランジスタが1つの場合または2つの場合における、絶縁破壊の前後のメモリセルの各部分に印加される電圧を示す表である。
BX BOX膜
CL 層間絶縁膜
CP1、CP2、CPM、CPS コンタクトプラグ
D1、D2、D3 拡散領域
EP エピタキシャル層
EX エクステンション領域
G1、G2、GM ゲート電極
GF1、GF2、GFM ゲート絶縁膜
IF、IFM 絶縁膜
Q1、Q2 選択トランジスタ
QM メモリトランジスタ
S1 シリサイド層
SB 半導体基板
SL SOI層
STI 素子分離領域
Claims (8)
- 半導体基板、前記半導体基板上に形成された第1絶縁膜、および、前記第1絶縁膜上に形成された第1半導体層を含むSOI基板と、
前記第1半導体層上に、第2絶縁膜を介して形成された第1ゲート電極と、
前記第1ゲート電極を挟むように前記第1半導体層上に形成された、第2半導体層および第3半導体層と、
前記第1半導体層上に、第3絶縁膜を介して形成された第2ゲート電極と、
を有し、
前記第1半導体層は、第1導電型を有し、前記第2半導体層および前記第3半導体層は、前記第1導電型とは異なる第2導電型を有し、
前記第2半導体層および前記第3半導体層は、前記第1ゲート電極を含む第1電界効果トランジスタのソース・ドレイン領域を構成し、
前記2半導体層と前記第2ゲート電極とは、第4絶縁膜を介して隣接している、半導体装置。 - 請求項1記載の半導体装置において、
前記第2半導体層の不純物濃度は、前記第2ゲート電極の直下の前記第1半導体層の不純物濃度より大きい、半導体装置。 - 請求項1記載の半導体装置において、
前記第2ゲート電極および前記第4絶縁膜は、記憶素子を構成し、
前記記憶素子は、前記第4絶縁膜において絶縁破壊を起こすことで情報の書込みを行う、半導体装置。 - 請求項1記載の半導体装置において、
前記第1半導体層上に、第5絶縁膜を介して形成された第3ゲート電極をさらに有し、
前記第3半導体層は、前記第3ゲート電極を含む第2電界効果トランジスタのドレイン領域を構成する、半導体装置。 - 請求項4記載の半導体装置において、
前記第2ゲート電極および前記第4絶縁膜は、記憶素子を構成し、
前記記憶素子は、前記第4絶縁膜において絶縁破壊を起こすことで情報の書込み動作を行い、
前記書込み動作では、前記第1ゲート電極に、前記第3ゲート電極よりも大きい電圧を印加する、半導体装置。 - 請求項1記載の半導体装置において、
前記第2ゲート電極および前記第4絶縁膜は、記憶素子を構成し、
前記記憶素子と前記第1電界効果トランジスタとは、単位メモリセルを構成し、
前記単位メモリセルは、前記SOI基板の上面に沿って複数並んで配置されており、
複数の前記単位メモリセルを構成する複数の前記記憶素子のそれぞれは、1つの前記第2ゲート電極を共有しており、
複数の前記単位メモリセルを構成する複数の前記第1電界効果トランジスタのそれぞれのソース領域は、互いに分離されている、半導体装置。 - 請求項1記載の半導体装置において、
前記第2ゲート電極および前記第4絶縁膜は、記憶素子を構成し、
前記記憶素子と前記第1電界効果トランジスタとは、単位メモリセルを構成し、
前記単位メモリセルは、前記SOI基板の上面に沿って複数並んで配置されており、
複数の前記単位メモリセルを構成する複数の前記記憶素子のそれぞれの前記第2ゲート電極は、互いに分離されており、
複数の前記単位メモリセルを構成する複数の前記第1電界効果トランジスタのそれぞれは、互いに1つのソース領域を共有している、半導体装置。 - 請求項1記載の半導体装置において、
前記第2半導体層には、プラグが接続されていない、半導体装置。
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JP2014204596A JP6316725B2 (ja) | 2014-10-03 | 2014-10-03 | 半導体装置 |
TW104129812A TW201614815A (en) | 2014-10-03 | 2015-09-09 | Semiconductor device |
CN201510630011.2A CN105489609B (zh) | 2014-10-03 | 2015-09-29 | 半导体器件 |
US14/874,405 US9837424B2 (en) | 2014-10-03 | 2015-10-03 | Semiconductor device with anti-fuse memory element |
US15/811,432 US20180069014A1 (en) | 2014-10-03 | 2017-11-13 | Semiconductor device |
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JP2014204596A JP6316725B2 (ja) | 2014-10-03 | 2014-10-03 | 半導体装置 |
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JP2016076536A true JP2016076536A (ja) | 2016-05-12 |
JP6316725B2 JP6316725B2 (ja) | 2018-04-25 |
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US (2) | US9837424B2 (ja) |
JP (1) | JP6316725B2 (ja) |
CN (1) | CN105489609B (ja) |
TW (1) | TW201614815A (ja) |
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JP5406437B2 (ja) | 2007-06-22 | 2014-02-05 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
JP6594261B2 (ja) * | 2016-05-24 | 2019-10-23 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
JP6716450B2 (ja) * | 2016-12-28 | 2020-07-01 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
JP2019075513A (ja) * | 2017-10-19 | 2019-05-16 | ルネサスエレクトロニクス株式会社 | 半導体装置の製造方法 |
US10879256B2 (en) | 2017-11-22 | 2020-12-29 | Taiwan Semiconductor Manufacturing Co., Ltd. | Embedded memory using SOI structures and methods |
CN115206978A (zh) * | 2021-04-13 | 2022-10-18 | 联华电子股份有限公司 | 一次性可编程存储单元及其制作方法 |
US20230180470A1 (en) * | 2021-12-07 | 2023-06-08 | Nanya Technology Corporation | Memory device having merged active area |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10341000A (ja) * | 1997-04-11 | 1998-12-22 | Citizen Watch Co Ltd | 半導体不揮発性記憶装置およびその製造方法 |
JP2008288358A (ja) * | 2007-05-17 | 2008-11-27 | Nec Electronics Corp | Otpメモリセル、otpメモリ及びotpメモリセルの製造方法 |
JP2008294448A (ja) * | 2007-05-25 | 2008-12-04 | Toshiba Corp | ゲート電極下に金属シリサイドのパイプを有する電気ヒューズ |
US20120008364A1 (en) * | 2010-07-06 | 2012-01-12 | Maxchip Electronics Corp. | One time programmable memory and the manufacturing method and operation method thereof |
Family Cites Families (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6200866B1 (en) * | 1998-02-23 | 2001-03-13 | Sharp Laboratories Of America, Inc. | Use of silicon germanium and other alloys as the replacement gate for the fabrication of MOSFET |
EP1436815B1 (en) | 2001-09-18 | 2010-03-03 | Kilopass Technology, Inc. | Semiconductor memory cell and memory array using a breakdown phenomena in an ultra-thin dielectric |
JP5000055B2 (ja) * | 2001-09-19 | 2012-08-15 | ルネサスエレクトロニクス株式会社 | 半導体装置 |
US6700151B2 (en) | 2001-10-17 | 2004-03-02 | Kilopass Technologies, Inc. | Reprogrammable non-volatile memory using a breakdown phenomena in an ultra-thin dielectric |
JP4139105B2 (ja) * | 2001-12-20 | 2008-08-27 | 株式会社ルネサステクノロジ | 半導体装置の製造方法 |
US6972466B1 (en) * | 2004-02-23 | 2005-12-06 | Altera Corporation | Bipolar transistors with low base resistance for CMOS integrated circuits |
FR2893763A1 (fr) * | 2005-11-21 | 2007-05-25 | St Microelectronics Sa | Element de memoire non-volatile |
JP4762118B2 (ja) * | 2006-11-17 | 2011-08-31 | 株式会社東芝 | 不揮発性半導体記憶装置 |
JP2009064860A (ja) * | 2007-09-05 | 2009-03-26 | Renesas Technology Corp | 半導体装置 |
JP5528667B2 (ja) * | 2007-11-28 | 2014-06-25 | ルネサスエレクトロニクス株式会社 | 半導体装置および半導体装置の制御方法 |
US20100078728A1 (en) * | 2008-08-28 | 2010-04-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Raise s/d for gate-last ild0 gap filling |
US20110309416A1 (en) * | 2010-06-21 | 2011-12-22 | International Business Machines Corporation | Structure and method to reduce fringe capacitance in semiconductor devices |
CN102098028A (zh) * | 2010-10-14 | 2011-06-15 | 中国科学院上海微系统与信息技术研究所 | 基于混合晶向soi工艺的cmos环形振荡器及制备方法 |
JP5915181B2 (ja) * | 2011-04-05 | 2016-05-11 | 富士通セミコンダクター株式会社 | 半導体装置およびその製造方法 |
US8816470B2 (en) * | 2011-04-21 | 2014-08-26 | International Business Machines Corporation | Independently voltage controlled volume of silicon on a silicon on insulator chip |
US8946806B2 (en) * | 2011-07-24 | 2015-02-03 | Globalfoundries Singapore Pte. Ltd. | Memory cell with decoupled channels |
US9263583B2 (en) * | 2013-10-14 | 2016-02-16 | Globalfoundries Inc. | Integrated finFET-BJT replacement metal gate |
US9905648B2 (en) * | 2014-02-07 | 2018-02-27 | Stmicroelectronics, Inc. | Silicon on insulator device with partially recessed gate |
CN109326581B (zh) * | 2014-03-24 | 2023-01-10 | 太浩研究有限公司 | 使用间隔体击穿的反熔丝元件 |
US9473135B2 (en) * | 2014-09-29 | 2016-10-18 | Stmicroelectronics International N.V. | Driver circuit including driver transistors with controlled body biasing |
-
2014
- 2014-10-03 JP JP2014204596A patent/JP6316725B2/ja active Active
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2015
- 2015-09-09 TW TW104129812A patent/TW201614815A/zh unknown
- 2015-09-29 CN CN201510630011.2A patent/CN105489609B/zh active Active
- 2015-10-03 US US14/874,405 patent/US9837424B2/en active Active
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Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10341000A (ja) * | 1997-04-11 | 1998-12-22 | Citizen Watch Co Ltd | 半導体不揮発性記憶装置およびその製造方法 |
JP2008288358A (ja) * | 2007-05-17 | 2008-11-27 | Nec Electronics Corp | Otpメモリセル、otpメモリ及びotpメモリセルの製造方法 |
JP2008294448A (ja) * | 2007-05-25 | 2008-12-04 | Toshiba Corp | ゲート電極下に金属シリサイドのパイプを有する電気ヒューズ |
US20120008364A1 (en) * | 2010-07-06 | 2012-01-12 | Maxchip Electronics Corp. | One time programmable memory and the manufacturing method and operation method thereof |
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Publication number | Publication date |
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CN105489609A (zh) | 2016-04-13 |
JP6316725B2 (ja) | 2018-04-25 |
US20180069014A1 (en) | 2018-03-08 |
TW201614815A (en) | 2016-04-16 |
US9837424B2 (en) | 2017-12-05 |
US20160099251A1 (en) | 2016-04-07 |
CN105489609B (zh) | 2020-11-03 |
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