JP2016064647A5 - - Google Patents
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- Publication number
- JP2016064647A5 JP2016064647A5 JP2015176366A JP2015176366A JP2016064647A5 JP 2016064647 A5 JP2016064647 A5 JP 2016064647A5 JP 2015176366 A JP2015176366 A JP 2015176366A JP 2015176366 A JP2015176366 A JP 2015176366A JP 2016064647 A5 JP2016064647 A5 JP 2016064647A5
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film layer
- atomic ratio
- silicon
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010408 film Substances 0.000 claims 13
- 239000010409 thin film Substances 0.000 claims 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 9
- 229910052799 carbon Inorganic materials 0.000 claims 7
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims 6
- 238000009826 distribution Methods 0.000 claims 6
- 229910052710 silicon Inorganic materials 0.000 claims 6
- 239000010703 silicon Substances 0.000 claims 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 229910052760 oxygen Inorganic materials 0.000 claims 4
- 239000001301 oxygen Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- 238000004566 IR spectroscopy Methods 0.000 claims 3
- 125000004432 carbon atom Chemical group C* 0.000 claims 3
- 238000000034 method Methods 0.000 claims 3
- 125000004430 oxygen atom Chemical group O* 0.000 claims 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 claims 1
- 230000004913 activation Effects 0.000 claims 1
- 150000001721 carbon Chemical group 0.000 claims 1
- 238000003475 lamination Methods 0.000 claims 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014182051 | 2014-09-08 | ||
| JP2014182051 | 2014-09-08 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016064647A JP2016064647A (ja) | 2016-04-28 |
| JP2016064647A5 true JP2016064647A5 (enExample) | 2018-10-18 |
| JP6657687B2 JP6657687B2 (ja) | 2020-03-04 |
Family
ID=55459028
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015176366A Expired - Fee Related JP6657687B2 (ja) | 2014-09-08 | 2015-09-08 | 積層フィルムおよびフレキシブル電子デバイス |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10385447B2 (enExample) |
| JP (1) | JP6657687B2 (enExample) |
| KR (1) | KR102384767B1 (enExample) |
| CN (1) | CN106660318B (enExample) |
| TW (1) | TWI672391B (enExample) |
| WO (1) | WO2016039280A1 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2018088352A1 (ja) * | 2016-11-11 | 2018-05-17 | 住友化学株式会社 | ガスバリア性フィルム及びそれを含むデバイス |
| JP6702153B2 (ja) * | 2016-11-18 | 2020-05-27 | コニカミノルタ株式会社 | ポリアリレートフィルム積層体 |
| JP6998734B2 (ja) * | 2016-11-29 | 2022-01-18 | 住友化学株式会社 | 積層体及びこれを含むデバイス |
| US10911431B2 (en) * | 2018-05-21 | 2021-02-02 | Wickr Inc. | Local encryption for single sign-on |
Family Cites Families (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006096046A (ja) | 2000-03-14 | 2006-04-13 | Dainippon Printing Co Ltd | ガスバリアフィルム |
| JP3734724B2 (ja) | 2001-06-08 | 2006-01-11 | 大日本印刷株式会社 | ガスバリアフィルム |
| JP4747605B2 (ja) | 2005-02-22 | 2011-08-17 | 東洋製罐株式会社 | プラズマcvd法による蒸着膜 |
| JP2008049576A (ja) | 2006-08-24 | 2008-03-06 | Toppan Printing Co Ltd | ガスバリア性積層体 |
| JP2008143097A (ja) * | 2006-12-12 | 2008-06-26 | Dainippon Printing Co Ltd | ガスバリア性積層フィルム |
| DE102008002515A1 (de) * | 2008-06-18 | 2009-12-24 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Dichtungsartikel |
| JP5244622B2 (ja) | 2009-01-08 | 2013-07-24 | 三菱樹脂株式会社 | ガスバリア性フィルム |
| CN102387920B (zh) * | 2009-04-09 | 2015-01-07 | 住友化学株式会社 | 气体阻隔性层叠膜 |
| JP5782671B2 (ja) * | 2009-06-30 | 2015-09-24 | 大日本印刷株式会社 | 撥水性離型薄膜形成方法 |
| JP5513959B2 (ja) * | 2009-09-01 | 2014-06-04 | 住友化学株式会社 | ガスバリア性積層フィルム |
| JP5673927B2 (ja) * | 2010-10-08 | 2015-02-18 | 住友化学株式会社 | 積層フィルム |
| TWI523758B (zh) * | 2011-06-21 | 2016-03-01 | 住友化學股份有限公司 | 層合薄膜及電子裝置 |
| CN104220249B (zh) * | 2012-03-27 | 2016-08-24 | 住友化学株式会社 | 层叠膜、有机电致发光装置、光电转换装置及液晶显示器 |
| JP5899044B2 (ja) | 2012-05-08 | 2016-04-06 | 三菱樹脂株式会社 | ガスバリア性フィルム |
| US9395836B2 (en) * | 2012-10-01 | 2016-07-19 | Atmel Corporation | System and method for reducing borders of a touch sensor |
| JP5565537B1 (ja) * | 2012-10-19 | 2014-08-06 | コニカミノルタ株式会社 | ガスバリアーフィルム及びガスバリアーフィルムの製造方法 |
| WO2014092041A1 (ja) * | 2012-12-13 | 2014-06-19 | コニカミノルタ株式会社 | 有機エレクトロルミネッセンスデバイスの製造方法 |
| US9640780B2 (en) * | 2013-03-11 | 2017-05-02 | Konica Minolta, Inc. | Gas barrier film, method for producing gas barrier film, and organic electroluminescent element |
| JP6705170B2 (ja) * | 2013-12-26 | 2020-06-03 | 住友化学株式会社 | 積層フィルムおよびフレキシブル電子デバイス |
| JP6642003B2 (ja) | 2013-12-26 | 2020-02-05 | 住友化学株式会社 | 積層フィルムおよびフレキシブル電子デバイス |
-
2015
- 2015-09-07 KR KR1020177004689A patent/KR102384767B1/ko active Active
- 2015-09-07 WO PCT/JP2015/075288 patent/WO2016039280A1/ja not_active Ceased
- 2015-09-07 US US15/509,082 patent/US10385447B2/en active Active
- 2015-09-07 CN CN201580047436.9A patent/CN106660318B/zh not_active Expired - Fee Related
- 2015-09-07 TW TW104129484A patent/TWI672391B/zh not_active IP Right Cessation
- 2015-09-08 JP JP2015176366A patent/JP6657687B2/ja not_active Expired - Fee Related
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