JP2016068383A5 - - Google Patents

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Publication number
JP2016068383A5
JP2016068383A5 JP2014199906A JP2014199906A JP2016068383A5 JP 2016068383 A5 JP2016068383 A5 JP 2016068383A5 JP 2014199906 A JP2014199906 A JP 2014199906A JP 2014199906 A JP2014199906 A JP 2014199906A JP 2016068383 A5 JP2016068383 A5 JP 2016068383A5
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JP
Japan
Prior art keywords
ratio
thin film
carbon
oxygen
film layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014199906A
Other languages
English (en)
Japanese (ja)
Other versions
JP6638182B2 (ja
JP2016068383A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2014199906A external-priority patent/JP6638182B2/ja
Priority to JP2014199906A priority Critical patent/JP6638182B2/ja
Priority to CN201580051842.2A priority patent/CN106715116A/zh
Priority to KR1020177007561A priority patent/KR102401713B1/ko
Priority to US15/508,823 priority patent/US10054487B2/en
Priority to PCT/JP2015/077240 priority patent/WO2016052369A1/ja
Priority to TW104132346A priority patent/TWI700192B/zh
Publication of JP2016068383A publication Critical patent/JP2016068383A/ja
Publication of JP2016068383A5 publication Critical patent/JP2016068383A5/ja
Publication of JP6638182B2 publication Critical patent/JP6638182B2/ja
Application granted granted Critical
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014199906A 2014-09-30 2014-09-30 積層フィルムおよびフレキシブル電子デバイス Expired - Fee Related JP6638182B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2014199906A JP6638182B2 (ja) 2014-09-30 2014-09-30 積層フィルムおよびフレキシブル電子デバイス
PCT/JP2015/077240 WO2016052369A1 (ja) 2014-09-30 2015-09-28 積層フィルムおよびフレキシブル電子デバイス
KR1020177007561A KR102401713B1 (ko) 2014-09-30 2015-09-28 적층 필름 및 플렉시블 전자 디바이스
US15/508,823 US10054487B2 (en) 2014-09-30 2015-09-28 Laminated film and flexible electronic device
CN201580051842.2A CN106715116A (zh) 2014-09-30 2015-09-28 层叠膜和挠性电子设备
TW104132346A TWI700192B (zh) 2014-09-30 2015-09-30 積層膜及可撓性電子裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014199906A JP6638182B2 (ja) 2014-09-30 2014-09-30 積層フィルムおよびフレキシブル電子デバイス

Publications (3)

Publication Number Publication Date
JP2016068383A JP2016068383A (ja) 2016-05-09
JP2016068383A5 true JP2016068383A5 (enExample) 2017-11-16
JP6638182B2 JP6638182B2 (ja) 2020-01-29

Family

ID=55630405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014199906A Expired - Fee Related JP6638182B2 (ja) 2014-09-30 2014-09-30 積層フィルムおよびフレキシブル電子デバイス

Country Status (6)

Country Link
US (1) US10054487B2 (enExample)
JP (1) JP6638182B2 (enExample)
KR (1) KR102401713B1 (enExample)
CN (1) CN106715116A (enExample)
TW (1) TWI700192B (enExample)
WO (1) WO2016052369A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6998734B2 (ja) * 2016-11-29 2022-01-18 住友化学株式会社 積層体及びこれを含むデバイス
JP6983039B2 (ja) * 2016-11-29 2021-12-17 住友化学株式会社 ガスバリア性フィルム及びフレキシブル電子デバイス
CN108632406B (zh) * 2017-03-21 2021-03-09 研能科技股份有限公司 可携式电子装置
JP2019020448A (ja) * 2017-07-11 2019-02-07 株式会社ジャパンディスプレイ 表示装置
JP7114844B2 (ja) 2017-08-18 2022-08-09 エルジー・ケム・リミテッド 基板
JP7261547B2 (ja) * 2017-08-25 2023-04-20 住友化学株式会社 積層フィルム
JP7211740B2 (ja) * 2017-09-13 2023-01-24 住友化学株式会社 ガスバリア性フィルムおよびフレキシブル電子デバイス
WO2019188771A1 (ja) 2018-03-27 2019-10-03 住友化学株式会社 積層フィルム
EP3871876A4 (en) * 2018-10-23 2022-08-03 Sumitomo Chemical Company Limited LAMINATED BODY, FLEXIBLE ELECTRONIC DEVICE AND METHOD OF MAKING LAMINATED BODY
JP2021085760A (ja) * 2019-11-28 2021-06-03 住友化学株式会社 光学フィルムの製造方法
US20230009077A1 (en) * 2021-07-09 2023-01-12 Taiwan Semiconductor Manufacturing Co., Ltd. Contact structures in semiconductor devices

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4083564B2 (ja) 2001-12-26 2008-04-30 住友ベークライト株式会社 有機層の形成方法及びガスバリア性プラスチックフィルム
JP2006324406A (ja) 2005-05-18 2006-11-30 Sharp Corp フレックスリジッド多層配線板
CN101579957A (zh) * 2008-05-14 2009-11-18 拜耳材料科技贸易(上海)有限公司 一种复合材料及其制备方法和用途
CN102387920B (zh) 2009-04-09 2015-01-07 住友化学株式会社 气体阻隔性层叠膜
JP5654245B2 (ja) 2010-02-17 2015-01-14 富士フイルム株式会社 バリア性積層体および太陽電池用保護シート
JP5825016B2 (ja) * 2011-09-29 2015-12-02 コニカミノルタ株式会社 バリアーフィルムの製造方法
US9891473B2 (en) 2012-03-27 2018-02-13 Sumitomo Chemical Company, Limited Laminated film, organic electroluminescence device, photoelectric converter, and liquid crystal display
JP5870834B2 (ja) * 2012-04-27 2016-03-01 大日本印刷株式会社 ガスバリア性フィルムの製造方法
CN104736335B (zh) * 2012-10-19 2017-03-08 柯尼卡美能达株式会社 气体阻隔膜和气体阻隔膜的制造方法
JP6147539B2 (ja) * 2013-03-29 2017-06-14 東京インキ株式会社 ガスバリア性積層体
WO2015186434A1 (ja) * 2014-06-02 2015-12-10 コニカミノルタ株式会社 ガスバリアーフィルム

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