JP2013529386A5 - - Google Patents
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- JP2013529386A5 JP2013529386A5 JP2013511174A JP2013511174A JP2013529386A5 JP 2013529386 A5 JP2013529386 A5 JP 2013529386A5 JP 2013511174 A JP2013511174 A JP 2013511174A JP 2013511174 A JP2013511174 A JP 2013511174A JP 2013529386 A5 JP2013529386 A5 JP 2013529386A5
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- JP
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- 239000000758 substrate Substances 0.000 description 12
- 238000005498 polishing Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/781,644 US8190285B2 (en) | 2010-05-17 | 2010-05-17 | Feedback for polishing rate correction in chemical mechanical polishing |
| US12/781,644 | 2010-05-17 | ||
| PCT/US2011/033998 WO2011146208A2 (en) | 2010-05-17 | 2011-04-26 | Feedback for polishing rate correction in chemical mechanical polishing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013529386A JP2013529386A (ja) | 2013-07-18 |
| JP2013529386A5 true JP2013529386A5 (enExample) | 2014-06-19 |
| JP6009436B2 JP6009436B2 (ja) | 2016-10-19 |
Family
ID=44912179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013511174A Active JP6009436B2 (ja) | 2010-05-17 | 2011-04-26 | 化学機械研磨における研磨速度補正のためのフィードバック |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US8190285B2 (enExample) |
| JP (1) | JP6009436B2 (enExample) |
| KR (1) | KR101769886B1 (enExample) |
| TW (1) | TWI593513B (enExample) |
| WO (1) | WO2011146208A2 (enExample) |
Families Citing this family (41)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5675617B2 (ja) * | 2008-09-04 | 2015-02-25 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 加工時における基板の分光モニタリングを使用した研磨速度の調整 |
| US8579675B2 (en) * | 2008-11-26 | 2013-11-12 | Applied Materials, Inc. | Methods of using optical metrology for feed back and feed forward process control |
| US8190285B2 (en) * | 2010-05-17 | 2012-05-29 | Applied Materials, Inc. | Feedback for polishing rate correction in chemical mechanical polishing |
| US8666665B2 (en) * | 2010-06-07 | 2014-03-04 | Applied Materials, Inc. | Automatic initiation of reference spectra library generation for optical monitoring |
| US20120034844A1 (en) * | 2010-08-05 | 2012-02-09 | Applied Materials, Inc. | Spectrographic monitoring using index tracking after detection of layer clearing |
| US8694144B2 (en) | 2010-08-30 | 2014-04-08 | Applied Materials, Inc. | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing |
| US10643853B2 (en) * | 2012-02-10 | 2020-05-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer thinning apparatus having feedback control and method of using |
| WO2013130366A1 (en) * | 2012-02-27 | 2013-09-06 | Applied Materials, Inc. | Feedback control using detection of clearance and adjustment for uniform topography |
| US8563335B1 (en) * | 2012-04-23 | 2013-10-22 | Applied Materials, Inc. | Method of controlling polishing using in-situ optical monitoring and fourier transform |
| US9011202B2 (en) * | 2012-04-25 | 2015-04-21 | Applied Materials, Inc. | Fitting of optical model with diffraction effects to measured spectrum |
| US9289875B2 (en) * | 2012-04-25 | 2016-03-22 | Applied Materials, Inc. | Feed forward and feed-back techniques for in-situ process control |
| US9248544B2 (en) * | 2012-07-18 | 2016-02-02 | Applied Materials, Inc. | Endpoint detection during polishing using integrated differential intensity |
| US9296084B2 (en) * | 2012-07-19 | 2016-03-29 | Applied Materials, Inc. | Polishing control using weighting with default sequence |
| US20140030956A1 (en) * | 2012-07-25 | 2014-01-30 | Jimin Zhang | Control of polishing of multiple substrates on the same platen in chemical mechanical polishing |
| KR20150085000A (ko) * | 2012-11-16 | 2015-07-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 캐리어 헤드용 센서들에 의한 기록 측정들 |
| US20140242877A1 (en) * | 2013-02-26 | 2014-08-28 | Applied Materials, Inc. | Spectrographic metrology with multiple measurements |
| WO2014149330A1 (en) * | 2013-03-15 | 2014-09-25 | Applied Materials, Inc. | Dynamic residue clearing control with in-situ profile control (ispc) |
| US9490186B2 (en) | 2013-11-27 | 2016-11-08 | Applied Materials, Inc. | Limiting adjustment of polishing rates during substrate polishing |
| US9375824B2 (en) * | 2013-11-27 | 2016-06-28 | Applied Materials, Inc. | Adjustment of polishing rates during substrate polishing with predictive filters |
| US9997420B2 (en) | 2013-12-27 | 2018-06-12 | Taiwan Semiconductor Manufacturing Company Limited | Method and/or system for chemical mechanical planarization (CMP) |
| US10464184B2 (en) * | 2014-05-07 | 2019-11-05 | Applied Materials, Inc. | Modifying substrate thickness profiles |
| US9610672B2 (en) * | 2014-06-27 | 2017-04-04 | Applied Materials, Inc. | Configurable pressure design for multizone chemical mechanical planarization polishing head |
| KR101679131B1 (ko) * | 2014-12-29 | 2016-11-23 | 주식회사 엘지실트론 | 웨이퍼 연마장치 및 그 연마방법 |
| JP6575463B2 (ja) * | 2016-08-24 | 2019-09-18 | 信越半導体株式会社 | ウェーハの研磨方法 |
| US10562148B2 (en) * | 2016-10-10 | 2020-02-18 | Applied Materials, Inc. | Real time profile control for chemical mechanical polishing |
| JP6847811B2 (ja) * | 2017-10-24 | 2021-03-24 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
| TWI825075B (zh) | 2018-04-03 | 2023-12-11 | 美商應用材料股份有限公司 | 針對墊子厚度使用機器學習及補償的拋光裝置、拋光系統、方法及電腦儲存媒體 |
| US12447578B2 (en) | 2018-09-26 | 2025-10-21 | Applied Materials, Inc. | Compensation for substrate doping in edge reconstruction for in-situ electromagnetic inductive monitoring |
| US11989492B2 (en) * | 2018-12-26 | 2024-05-21 | Applied Materials, Inc. | Preston matrix generator |
| TWI810069B (zh) | 2020-06-08 | 2023-07-21 | 美商應用材料股份有限公司 | 用於在拋光相鄰導電層的堆疊期間的輪廓控制的系統、方法及電腦程式產品 |
| CN115038549B (zh) | 2020-06-24 | 2024-03-12 | 应用材料公司 | 使用研磨垫磨损补偿的基板层厚度确定 |
| JP7436684B2 (ja) * | 2020-06-26 | 2024-02-22 | アプライド マテリアルズ インコーポレイテッド | 変形可能な基板チャック |
| JP7389718B2 (ja) * | 2020-06-29 | 2023-11-30 | 株式会社荏原製作所 | 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体 |
| JP7637482B2 (ja) * | 2020-08-11 | 2025-02-28 | 株式会社荏原製作所 | 基板処理装置及び研磨部材のドレッシング制御方法 |
| US12311494B2 (en) * | 2021-03-03 | 2025-05-27 | Applied Materials, Inc. | Pressure signals during motor torque monitoring to provide spatial resolution |
| US11969854B2 (en) | 2021-03-05 | 2024-04-30 | Applied Materials, Inc. | Control of processing parameters during substrate polishing using expected future parameter changes |
| JP7547275B2 (ja) * | 2021-03-31 | 2024-09-09 | 株式会社荏原製作所 | ワークピースの膜厚を推定するモデルを作成する方法、そのようなモデルを用いてワークピースの研磨中に膜厚を推定する方法、およびコンピュータにこれらの方法を実行させるためのプログラム |
| CN113246012B (zh) * | 2021-05-14 | 2022-08-09 | 上海华力集成电路制造有限公司 | 化学机械研磨的控制方法、设备和存储介质 |
| JP2024040885A (ja) * | 2022-09-13 | 2024-03-26 | 株式会社荏原製作所 | 研磨装置におけるグラフの表示方法およびコンピュータプログラム |
| CN115946036B (zh) * | 2022-12-15 | 2025-08-05 | 北京晶亦精微科技股份有限公司 | 一种研磨压力修整方法、装置、计算机设备及介质 |
| CN117140200A (zh) * | 2023-09-19 | 2023-12-01 | 安徽久泰电气有限公司 | 一种打磨机器人全自动打磨抛光控制方法及系统 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6024630A (en) * | 1995-06-09 | 2000-02-15 | Applied Materials, Inc. | Fluid-pressure regulated wafer polishing head |
| US5681215A (en) * | 1995-10-27 | 1997-10-28 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
| US6491569B2 (en) * | 2001-04-19 | 2002-12-10 | Speedfam-Ipec Corporation | Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP |
| JP3932836B2 (ja) | 2001-07-27 | 2007-06-20 | 株式会社日立製作所 | 薄膜の膜厚計測方法及びその装置並びにそれを用いたデバイスの製造方法 |
| US6945845B2 (en) * | 2003-03-04 | 2005-09-20 | Applied Materials, Inc. | Chemical mechanical polishing apparatus with non-conductive elements |
| US6991516B1 (en) * | 2003-08-18 | 2006-01-31 | Applied Materials Inc. | Chemical mechanical polishing with multi-stage monitoring of metal clearing |
| US7074109B1 (en) * | 2003-08-18 | 2006-07-11 | Applied Materials | Chemical mechanical polishing control system and method |
| JP4464642B2 (ja) * | 2003-09-10 | 2010-05-19 | 株式会社荏原製作所 | 研磨状態監視装置、研磨状態監視方法、研磨装置及び研磨方法 |
| WO2005123335A1 (en) * | 2004-06-21 | 2005-12-29 | Ebara Corporation | Polishing apparatus and polishing method |
| JP4689367B2 (ja) * | 2004-07-09 | 2011-05-25 | 株式会社荏原製作所 | 研磨プロファイル又は研磨量の予測方法、研磨方法及び研磨装置 |
| KR101361875B1 (ko) * | 2005-05-26 | 2014-02-12 | 가부시키가이샤 니콘 | Ｃｍｐ 연마 장치에서의 연마 종료점 검출 방법, ｃｍｐ연마 장치, 및 반도체 디바이스의 제조 방법 |
| KR101521414B1 (ko) * | 2005-08-22 | 2015-05-19 | 어플라이드 머티어리얼스, 인코포레이티드 | 화학적 기계적 폴리싱의 스펙트럼 기반 모니터링을 위한 장치 및 방법 |
| US8260446B2 (en) * | 2005-08-22 | 2012-09-04 | Applied Materials, Inc. | Spectrographic monitoring of a substrate during processing using index values |
| US8392012B2 (en) * | 2008-10-27 | 2013-03-05 | Applied Materials, Inc. | Multiple libraries for spectrographic monitoring of zones of a substrate during processing |
| JP5534672B2 (ja) * | 2005-08-22 | 2014-07-02 | アプライド マテリアルズ インコーポレイテッド | 化学機械的研磨のスペクトルに基づく監視のための装置および方法 |
| US7409260B2 (en) * | 2005-08-22 | 2008-08-05 | Applied Materials, Inc. | Substrate thickness measuring during polishing |
| KR101678082B1 (ko) * | 2007-02-23 | 2016-11-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 연마 엔드포인트들을 결정하기 위한 스펙트럼 사용 |
| JP5675617B2 (ja) * | 2008-09-04 | 2015-02-25 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | 加工時における基板の分光モニタリングを使用した研磨速度の調整 |
| US20100103422A1 (en) * | 2008-10-27 | 2010-04-29 | Applied Materials, Inc. | Goodness of fit in spectrographic monitoring of a substrate during processing |
| WO2010062497A2 (en) * | 2008-10-27 | 2010-06-03 | Applied Materials, Inc. | Goodness of fit in spectrographic monitoring of a substrate during processing |
| US20100114532A1 (en) * | 2008-11-03 | 2010-05-06 | Applied Materials, Inc. | Weighted spectrographic monitoring of a substrate during processing |
| US20100120331A1 (en) * | 2008-11-07 | 2010-05-13 | Applied Materials, Inc. | Endpoint control of multiple-wafer chemical mechanical polishing |
| US8295967B2 (en) | 2008-11-07 | 2012-10-23 | Applied Materials, Inc. | Endpoint control of multiple-wafer chemical mechanical polishing |
| US8579675B2 (en) * | 2008-11-26 | 2013-11-12 | Applied Materials, Inc. | Methods of using optical metrology for feed back and feed forward process control |
| US8190285B2 (en) * | 2010-05-17 | 2012-05-29 | Applied Materials, Inc. | Feedback for polishing rate correction in chemical mechanical polishing |
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2010
- 2010-05-17 US US12/781,644 patent/US8190285B2/en active Active
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2011
- 2011-04-26 WO PCT/US2011/033998 patent/WO2011146208A2/en not_active Ceased
- 2011-04-26 JP JP2013511174A patent/JP6009436B2/ja active Active
- 2011-04-26 KR KR1020127032822A patent/KR101769886B1/ko active Active
- 2011-05-09 TW TW100116191A patent/TWI593513B/zh active
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2012
- 2012-05-24 US US13/480,434 patent/US8467896B2/en active Active
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2013
- 2013-06-17 US US13/919,144 patent/US8755927B2/en active Active