JP2013529386A5 - - Google Patents
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- JP2013529386A5 JP2013529386A5 JP2013511174A JP2013511174A JP2013529386A5 JP 2013529386 A5 JP2013529386 A5 JP 2013529386A5 JP 2013511174 A JP2013511174 A JP 2013511174A JP 2013511174 A JP2013511174 A JP 2013511174A JP 2013529386 A5 JP2013529386 A5 JP 2013529386A5
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US12/781,644 | 2010-05-17 | ||
| US12/781,644 US8190285B2 (en) | 2010-05-17 | 2010-05-17 | Feedback for polishing rate correction in chemical mechanical polishing |
| PCT/US2011/033998 WO2011146208A2 (en) | 2010-05-17 | 2011-04-26 | Feedback for polishing rate correction in chemical mechanical polishing |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2013529386A JP2013529386A (ja) | 2013-07-18 |
| JP2013529386A5 true JP2013529386A5 (enExample) | 2014-06-19 |
| JP6009436B2 JP6009436B2 (ja) | 2016-10-19 |
Family
ID=44912179
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2013511174A Expired - Fee Related JP6009436B2 (ja) | 2010-05-17 | 2011-04-26 | 化学機械研磨における研磨速度補正のためのフィードバック |
Country Status (5)
| Country | Link |
|---|---|
| US (3) | US8190285B2 (enExample) |
| JP (1) | JP6009436B2 (enExample) |
| KR (1) | KR101769886B1 (enExample) |
| TW (1) | TWI593513B (enExample) |
| WO (1) | WO2011146208A2 (enExample) |
Families Citing this family (42)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8369978B2 (en) * | 2008-09-04 | 2013-02-05 | Applied Materials | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing |
| US8579675B2 (en) * | 2008-11-26 | 2013-11-12 | Applied Materials, Inc. | Methods of using optical metrology for feed back and feed forward process control |
| US8190285B2 (en) * | 2010-05-17 | 2012-05-29 | Applied Materials, Inc. | Feedback for polishing rate correction in chemical mechanical polishing |
| US8666665B2 (en) * | 2010-06-07 | 2014-03-04 | Applied Materials, Inc. | Automatic initiation of reference spectra library generation for optical monitoring |
| US20120034844A1 (en) * | 2010-08-05 | 2012-02-09 | Applied Materials, Inc. | Spectrographic monitoring using index tracking after detection of layer clearing |
| US8694144B2 (en) | 2010-08-30 | 2014-04-08 | Applied Materials, Inc. | Endpoint control of multiple substrates of varying thickness on the same platen in chemical mechanical polishing |
| US10643853B2 (en) * | 2012-02-10 | 2020-05-05 | Taiwan Semiconductor Manufacturing Company, Ltd. | Wafer thinning apparatus having feedback control and method of using |
| US9472475B2 (en) | 2012-02-27 | 2016-10-18 | Applied Materials, Inc. | Feedback control using detection of clearance and adjustment for uniform topography |
| US8563335B1 (en) * | 2012-04-23 | 2013-10-22 | Applied Materials, Inc. | Method of controlling polishing using in-situ optical monitoring and fourier transform |
| US9289875B2 (en) * | 2012-04-25 | 2016-03-22 | Applied Materials, Inc. | Feed forward and feed-back techniques for in-situ process control |
| US9011202B2 (en) * | 2012-04-25 | 2015-04-21 | Applied Materials, Inc. | Fitting of optical model with diffraction effects to measured spectrum |
| US9248544B2 (en) * | 2012-07-18 | 2016-02-02 | Applied Materials, Inc. | Endpoint detection during polishing using integrated differential intensity |
| US9296084B2 (en) * | 2012-07-19 | 2016-03-29 | Applied Materials, Inc. | Polishing control using weighting with default sequence |
| US20140030956A1 (en) * | 2012-07-25 | 2014-01-30 | Jimin Zhang | Control of polishing of multiple substrates on the same platen in chemical mechanical polishing |
| KR20150085000A (ko) * | 2012-11-16 | 2015-07-22 | 어플라이드 머티어리얼스, 인코포레이티드 | 캐리어 헤드용 센서들에 의한 기록 측정들 |
| US20140242877A1 (en) * | 2013-02-26 | 2014-08-28 | Applied Materials, Inc. | Spectrographic metrology with multiple measurements |
| KR101699197B1 (ko) * | 2013-03-15 | 2017-01-23 | 어플라이드 머티어리얼스, 인코포레이티드 | 인-시튜 프로파일 제어(ｉｓｐｃ)를 이용한 동적 잔류물 클리어링 제어 |
| US9490186B2 (en) | 2013-11-27 | 2016-11-08 | Applied Materials, Inc. | Limiting adjustment of polishing rates during substrate polishing |
| US9375824B2 (en) * | 2013-11-27 | 2016-06-28 | Applied Materials, Inc. | Adjustment of polishing rates during substrate polishing with predictive filters |
| US9997420B2 (en) | 2013-12-27 | 2018-06-12 | Taiwan Semiconductor Manufacturing Company Limited | Method and/or system for chemical mechanical planarization (CMP) |
| US10464184B2 (en) | 2014-05-07 | 2019-11-05 | Applied Materials, Inc. | Modifying substrate thickness profiles |
| US9610672B2 (en) * | 2014-06-27 | 2017-04-04 | Applied Materials, Inc. | Configurable pressure design for multizone chemical mechanical planarization polishing head |
| KR101679131B1 (ko) * | 2014-12-29 | 2016-11-23 | 주식회사 엘지실트론 | 웨이퍼 연마장치 및 그 연마방법 |
| JP6575463B2 (ja) * | 2016-08-24 | 2019-09-18 | 信越半導体株式会社 | ウェーハの研磨方法 |
| US10562148B2 (en) * | 2016-10-10 | 2020-02-18 | Applied Materials, Inc. | Real time profile control for chemical mechanical polishing |
| JP6847811B2 (ja) | 2017-10-24 | 2021-03-24 | 株式会社荏原製作所 | 研磨方法および研磨装置 |
| TWI825075B (zh) * | 2018-04-03 | 2023-12-11 | 美商應用材料股份有限公司 | 針對墊子厚度使用機器學習及補償的拋光裝置、拋光系統、方法及電腦儲存媒體 |
| KR102631891B1 (ko) | 2018-09-26 | 2024-02-01 | 어플라이드 머티어리얼스, 인코포레이티드 | 인-시튜 전자기 유도 모니터링에 대한 가장자리 재구성에서의 기판 도핑에 대한 보상 |
| US11989492B2 (en) * | 2018-12-26 | 2024-05-21 | Applied Materials, Inc. | Preston matrix generator |
| TWI809389B (zh) | 2020-06-08 | 2023-07-21 | 美商應用材料股份有限公司 | 用於在拋光相鄰導電層的堆疊期間的輪廓控制的系統、方法及電腦程式產品 |
| JP7447284B2 (ja) | 2020-06-24 | 2024-03-11 | アプライド マテリアルズ インコーポレイテッド | 研磨パッドの摩耗補償による基板層の厚さの決定 |
| KR102737625B1 (ko) * | 2020-06-26 | 2024-12-04 | 어플라이드 머티어리얼스, 인코포레이티드 | 변형가능한 기판 척 |
| JP7389718B2 (ja) * | 2020-06-29 | 2023-11-30 | 株式会社荏原製作所 | 研磨方法、研磨装置、およびプログラムを記録したコンピュータ読み取り可能な記録媒体 |
| JP7637482B2 (ja) * | 2020-08-11 | 2025-02-28 | 株式会社荏原製作所 | 基板処理装置及び研磨部材のドレッシング制御方法 |
| CN116490321B (zh) * | 2020-09-15 | 2026-07-03 | 国立大学法人长冈技术科学大学 | 研磨状态解析预测程序、存储装置、阴极荧光装置以及研磨状态解析预测方法 |
| KR102747336B1 (ko) * | 2021-03-03 | 2024-12-31 | 어플라이드 머티어리얼스, 인코포레이티드 | 공간 분해능을 제공하기 위한 모터 토크 모니터링 동안의 압력 신호들 |
| KR102757747B1 (ko) | 2021-03-05 | 2025-01-21 | 어플라이드 머티어리얼스, 인코포레이티드 | 기판 연마 동안 비용 함수 또는 예상되는 장래 파라미터 변경들을 사용한 처리 파라미터들의 제어 |
| JP7547275B2 (ja) * | 2021-03-31 | 2024-09-09 | 株式会社荏原製作所 | ワークピースの膜厚を推定するモデルを作成する方法、そのようなモデルを用いてワークピースの研磨中に膜厚を推定する方法、およびコンピュータにこれらの方法を実行させるためのプログラム |
| CN113246012B (zh) * | 2021-05-14 | 2022-08-09 | 上海华力集成电路制造有限公司 | 化学机械研磨的控制方法、设备和存储介质 |
| JP2024040885A (ja) * | 2022-09-13 | 2024-03-26 | 株式会社荏原製作所 | 研磨装置におけるグラフの表示方法およびコンピュータプログラム |
| CN115946036B (zh) * | 2022-12-15 | 2025-08-05 | 北京晶亦精微科技股份有限公司 | 一种研磨压力修整方法、装置、计算机设备及介质 |
| CN117140200A (zh) * | 2023-09-19 | 2023-12-01 | 安徽久泰电气有限公司 | 一种打磨机器人全自动打磨抛光控制方法及系统 |
Family Cites Families (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6024630A (en) * | 1995-06-09 | 2000-02-15 | Applied Materials, Inc. | Fluid-pressure regulated wafer polishing head |
| US5681215A (en) * | 1995-10-27 | 1997-10-28 | Applied Materials, Inc. | Carrier head design for a chemical mechanical polishing apparatus |
| US6491569B2 (en) * | 2001-04-19 | 2002-12-10 | Speedfam-Ipec Corporation | Method and apparatus for using optical reflection data to obtain a continuous predictive signal during CMP |
| JP3932836B2 (ja) | 2001-07-27 | 2007-06-20 | 株式会社日立製作所 | 薄膜の膜厚計測方法及びその装置並びにそれを用いたデバイスの製造方法 |
| US6945845B2 (en) * | 2003-03-04 | 2005-09-20 | Applied Materials, Inc. | Chemical mechanical polishing apparatus with non-conductive elements |
| US7074109B1 (en) * | 2003-08-18 | 2006-07-11 | Applied Materials | Chemical mechanical polishing control system and method |
| US6991516B1 (en) * | 2003-08-18 | 2006-01-31 | Applied Materials Inc. | Chemical mechanical polishing with multi-stage monitoring of metal clearing |
| JP4464642B2 (ja) * | 2003-09-10 | 2010-05-19 | 株式会社荏原製作所 | 研磨状態監視装置、研磨状態監視方法、研磨装置及び研磨方法 |
| KR101078007B1 (ko) * | 2004-06-21 | 2011-10-28 | 가부시키가이샤 에바라 세이사꾸쇼 | 폴리싱장치 및 폴리싱방법 |
| JP4689367B2 (ja) * | 2004-07-09 | 2011-05-25 | 株式会社荏原製作所 | 研磨プロファイル又は研磨量の予測方法、研磨方法及び研磨装置 |
| WO2006126420A1 (ja) * | 2005-05-26 | 2006-11-30 | Nikon Corporation | Ｃｍｐ研磨装置における研磨終了点検出方法、ｃｍｐ研磨装置、及び半導体デバイスの製造方法 |
| US8392012B2 (en) * | 2008-10-27 | 2013-03-05 | Applied Materials, Inc. | Multiple libraries for spectrographic monitoring of zones of a substrate during processing |
| US7409260B2 (en) * | 2005-08-22 | 2008-08-05 | Applied Materials, Inc. | Substrate thickness measuring during polishing |
| CN102626895B (zh) * | 2005-08-22 | 2016-05-25 | 应用材料公司 | 基于光谱的监测化学机械研磨的装置及方法 |
| US8260446B2 (en) * | 2005-08-22 | 2012-09-04 | Applied Materials, Inc. | Spectrographic monitoring of a substrate during processing using index values |
| JP5534672B2 (ja) * | 2005-08-22 | 2014-07-02 | アプライド マテリアルズ インコーポレイテッド | 化学機械的研磨のスペクトルに基づく監視のための装置および方法 |
| JP5654753B2 (ja) * | 2007-02-23 | 2015-01-14 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | スペクトルを使用した研磨終了点の決定 |
| US8369978B2 (en) * | 2008-09-04 | 2013-02-05 | Applied Materials | Adjusting polishing rates by using spectrographic monitoring of a substrate during processing |
| WO2010062497A2 (en) * | 2008-10-27 | 2010-06-03 | Applied Materials, Inc. | Goodness of fit in spectrographic monitoring of a substrate during processing |
| US20100103422A1 (en) * | 2008-10-27 | 2010-04-29 | Applied Materials, Inc. | Goodness of fit in spectrographic monitoring of a substrate during processing |
| US20100114532A1 (en) * | 2008-11-03 | 2010-05-06 | Applied Materials, Inc. | Weighted spectrographic monitoring of a substrate during processing |
| US20100120331A1 (en) * | 2008-11-07 | 2010-05-13 | Applied Materials, Inc. | Endpoint control of multiple-wafer chemical mechanical polishing |
| US8295967B2 (en) | 2008-11-07 | 2012-10-23 | Applied Materials, Inc. | Endpoint control of multiple-wafer chemical mechanical polishing |
| US8579675B2 (en) * | 2008-11-26 | 2013-11-12 | Applied Materials, Inc. | Methods of using optical metrology for feed back and feed forward process control |
| US8190285B2 (en) * | 2010-05-17 | 2012-05-29 | Applied Materials, Inc. | Feedback for polishing rate correction in chemical mechanical polishing |
-
2010
- 2010-05-17 US US12/781,644 patent/US8190285B2/en active Active
-
2011
- 2011-04-26 WO PCT/US2011/033998 patent/WO2011146208A2/en not_active Ceased
- 2011-04-26 KR KR1020127032822A patent/KR101769886B1/ko not_active Expired - Fee Related
- 2011-04-26 JP JP2013511174A patent/JP6009436B2/ja not_active Expired - Fee Related
- 2011-05-09 TW TW100116191A patent/TWI593513B/zh not_active IP Right Cessation
-
2012
- 2012-05-24 US US13/480,434 patent/US8467896B2/en active Active
-
2013
- 2013-06-17 US US13/919,144 patent/US8755927B2/en not_active Expired - Fee Related
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