JP2016064357A - 基板洗浄装置および基板洗浄方法 - Google Patents

基板洗浄装置および基板洗浄方法 Download PDF

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Publication number
JP2016064357A
JP2016064357A JP2014194743A JP2014194743A JP2016064357A JP 2016064357 A JP2016064357 A JP 2016064357A JP 2014194743 A JP2014194743 A JP 2014194743A JP 2014194743 A JP2014194743 A JP 2014194743A JP 2016064357 A JP2016064357 A JP 2016064357A
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Prior art keywords
substrate
cleaning
brush
cleaning liquid
speed
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JP2014194743A
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Japanese (ja)
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JP2016064357A5 (enrdf_load_stackoverflow
Inventor
加藤　智也
Tomoya Kato
智也 加藤
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Shibaura Mechatronics Corp
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Shibaura Mechatronics Corp
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Priority to JP2014194743A priority Critical patent/JP2016064357A/ja
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Publication of JP2016064357A5 publication Critical patent/JP2016064357A5/ja
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  • Cleaning Or Drying Semiconductors (AREA)
JP2014194743A 2014-09-25 2014-09-25 基板洗浄装置および基板洗浄方法 Pending JP2016064357A (ja)

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JP2014194743A JP2016064357A (ja) 2014-09-25 2014-09-25 基板洗浄装置および基板洗浄方法

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JP2014194743A JP2016064357A (ja) 2014-09-25 2014-09-25 基板洗浄装置および基板洗浄方法

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JP2016064357A true JP2016064357A (ja) 2016-04-28
JP2016064357A5 JP2016064357A5 (enrdf_load_stackoverflow) 2018-06-07

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107537800A (zh) * 2017-09-04 2018-01-05 东莞市沃顿印刷有限公司 一种新型原材料除尘机
CN112718865A (zh) * 2021-01-08 2021-04-30 中铝东南材料院（福建）科技有限公司 一种减少铝合金热轧辊面粘铝及铝粉的生产方法
WO2023195537A1 (ja) * 2022-04-08 2023-10-12 株式会社荏原製作所 基板洗浄装置、基板処理装置、基板洗浄方法およびプログラム

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076987A (ja) * 1993-06-15 1995-01-10 Toshiba Corp 洗浄装置
JP2002096037A (ja) * 2000-09-22 2002-04-02 Tokyo Electron Ltd 基板洗浄具及び基板洗浄装置
JP2002307023A (ja) * 2001-04-13 2002-10-22 Display Technologies Inc 自己洗浄機能付きのブラシ洗浄装置、及びこれを用いる平面表示装置または半導体素子の製造方法
JP2003112951A (ja) * 2001-10-05 2003-04-18 Dainippon Printing Co Ltd ガラス板洗浄装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076987A (ja) * 1993-06-15 1995-01-10 Toshiba Corp 洗浄装置
JP2002096037A (ja) * 2000-09-22 2002-04-02 Tokyo Electron Ltd 基板洗浄具及び基板洗浄装置
JP2002307023A (ja) * 2001-04-13 2002-10-22 Display Technologies Inc 自己洗浄機能付きのブラシ洗浄装置、及びこれを用いる平面表示装置または半導体素子の製造方法
JP2003112951A (ja) * 2001-10-05 2003-04-18 Dainippon Printing Co Ltd ガラス板洗浄装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107537800A (zh) * 2017-09-04 2018-01-05 东莞市沃顿印刷有限公司 一种新型原材料除尘机
CN112718865A (zh) * 2021-01-08 2021-04-30 中铝东南材料院（福建）科技有限公司 一种减少铝合金热轧辊面粘铝及铝粉的生产方法
WO2023195537A1 (ja) * 2022-04-08 2023-10-12 株式会社荏原製作所 基板洗浄装置、基板処理装置、基板洗浄方法およびプログラム

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