JP2016063214A - 埋め込みダイパッケージ用のabfgc空洞を用いた反りの制御 - Google Patents
埋め込みダイパッケージ用のabfgc空洞を用いた反りの制御 Download PDFInfo
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- 230000002787 reinforcement Effects 0.000 claims abstract description 101
- 238000000034 method Methods 0.000 claims abstract description 87
- 239000004020 conductor Substances 0.000 claims abstract description 20
- 239000011810 insulating material Substances 0.000 claims abstract description 17
- 230000003014 reinforcing effect Effects 0.000 claims description 50
- 239000000463 material Substances 0.000 claims description 17
- 238000000608 laser ablation Methods 0.000 claims description 15
- 239000004744 fabric Substances 0.000 claims description 11
- 239000011521 glass Substances 0.000 claims description 11
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 9
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 9
- 239000003989 dielectric material Substances 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 9
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 4
- 241001133184 Colletotrichum agaves Species 0.000 claims description 3
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 238000007790 scraping Methods 0.000 claims description 3
- 229910019655 synthetic inorganic crystalline material Inorganic materials 0.000 claims description 3
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 claims description 2
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 claims description 2
- 230000003252 repetitive effect Effects 0.000 claims 2
- 230000001668 ameliorated effect Effects 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 181
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 21
- 238000004891 communication Methods 0.000 description 15
- 239000004065 semiconductor Substances 0.000 description 13
- 239000012792 core layer Substances 0.000 description 11
- 238000012545 processing Methods 0.000 description 11
- 239000011888 foil Substances 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 6
- 239000000758 substrate Substances 0.000 description 6
- 239000011889 copper foil Substances 0.000 description 5
- 230000005855 radiation Effects 0.000 description 5
- 239000012779 reinforcing material Substances 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
- 238000004806 packaging method and process Methods 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000003365 glass fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- 229910052779 Neodymium Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 239000000835 fiber Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 description 2
- 238000012858 packaging process Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000002223 garnet Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000197 pyrolysis Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】パッケージは、ダイ側補強層210を通して形成された空洞を有するダイ側補強層210を含む。第1の面242およびデバイス面を含む反対側の第2の面241を有するダイ230は、ダイ230の第1の面242がダイ側補強層210の第1の面と実質的に同一平面となる状態で空洞220に配置される。ビルドアップ構造が、ダイ230の第2の面241に結合される。ビルドアップ構造は、パターニングされた導電性材料および絶縁材料の複数の交互層を含む。
【選択図】図2E
Description
Claims (25)
- 第1の面および反対側の第2の面を有するダイ側補強層と、
第1の面および、複数の接点を含むデバイス面を含む反対側の第2の面を有するダイと、
前記ダイの第2の面に結合されたビルドアップ構造と
を備え、
前記ダイ側補強層を通して空洞が形成され、
前記ダイは、前記ダイの前記第1の面が前記ダイ側補強層の前記第1の面と実質的に同一平面となる状態で前記空洞に配置され、
前記ビルドアップ構造は、パターニングされた導電性材料および絶縁材料の複数の交互層を有し、
パターニングされた導電性材料の複数の層のうちの少なくとも1つは、前記ダイの前記複数の接点のうちの1つに結合される、デバイスパッケージ。 - 前記ダイ側補強層は、ガラスクロス材料である、請求項1に記載のデバイスパッケージ。
- 前記ダイ側補強層を通して形成された前記空洞の複数の側壁から前記ダイの複数の側壁を間隙が分離する、請求項1または2に記載のデバイスパッケージ。
- 前記間隙の幅は、前記デバイスパッケージに対して所望の剛性を提供するように選択される、請求項3に記載のデバイスパッケージ。
- 前記間隙の前記幅は、1.0μmおよび1.0mmの間である、請求項4に記載のデバイスパッケージ。
- 前記空洞の前記複数の側壁から前記ダイの前記複数の側壁を分離する前記間隙は、絶縁材料で充填される、請求項3から5のいずれか1項に記載のデバイスパッケージ。
- 前記空洞の前記複数の側壁から前記ダイの前記複数の側壁を分離する前記間隙を埋める前記絶縁材料は、前記ビルドアップ構造に用いられる絶縁材料と同じである、請求項6に記載のデバイスパッケージ。
- 前記ダイの側壁は、前記ダイ側補強層を通して形成された前記空洞の側壁に接触する、請求項1に記載のデバイスパッケージ。
- 前記ダイ側補強層は、前記ダイの厚さよりも薄い厚さを有する、請求項1から8のいずれか1項に記載のデバイスパッケージ。
- 前記ダイの前記第1の面は、ダイ背面フィルム(DBF)を含み、前記DBFの表面は、前記ダイ側補強層の前記第1の面と実質的に同一平面である、請求項1から9のいずれか1項に記載のデバイスパッケージ。
- 前記ダイ側補強層は、互いに積層された複数の層を有する、請求項1から10のいずれか1項に記載のデバイスパッケージ。
- 前記ビルドアップ構造は、1つ又は複数の中間ガラスクロス補強層をさらに有する、請求項1から11のいずれか1項に記載のデバイスパッケージ。
- 第1の面および、複数の接点を含むデバイス面を含む反対側の第2の面を有する複数のダイをさらに備え、
前記複数のダイは、前記複数のダイのそれぞれの前記第1の面が前記ダイ側補強層の前記第1の面と実質的に同一平面となる状態で前記空洞内に配置される、請求項1から12のいずれか1項に記載のデバイスパッケージ。 - 前記ダイ側補強層を通して形成された複数の空洞をさらに備え、
1つ又は複数のダイは、前記複数の空洞のそれぞれに配置される、請求項1から13のいずれか1項に記載のデバイスパッケージ。 - コアの表面上にダイ側補強層を形成する段階と、
前記コアの前記表面の一部を露出させるべく、前記ダイ側補強層を通して空洞を形成する段階と、
第1の面および、複数の接点を含むデバイス面を含む反対側の第2の面を有するダイを前記コアの露出された前記表面に取り付ける段階と
を備え、
前記ダイは、前記ダイの前記第1の面が前記コアの前記表面に接触した状態で前記空洞内に配置される、デバイスパッケージを形成するための方法。 - 前記ダイ側補強層を通る前記空洞は、レーザアブレーション処理により形成される、請求項15に記載の方法。
- 前記レーザアブレーション処理は、前記コアの前記表面が露出されるまで、反復ラスタパターンで前記ダイ側補強層の複数の部分を削ることを含む、請求項16に記載の方法。
- 前記レーザアブレーション処理に用いられる前記レーザは、二酸化炭素(CO2)レーザ、一酸化炭素(CO)レーザ、ネオジムドープされたイットリウムアルミニウムガーネット(Nd:YAG)レーザ、またはエキシマーレーザーである、請求項17に記載の方法。
- 前記レーザアブレーション処理は、それぞれのパスの間に、約6μmの厚さである前記ダイ側補強層の複数の部分を削る、請求項17または18に記載の方法。
- 前記レーザアブレーション処理は、レーザ投影パターニング処理である、請求項16から19のいずれか1項に記載の方法。
- 前記ダイ側補強層および前記ダイの前記第2の面上にビルドアップ構造を形成する段階をさらに備え、
前記ビルドアップ構造は、パターニングされた導電性材料および絶縁材料の複数の交互層を有し、
前記パターニングされた導電性材料の複数の層のうちの少なくとも1つは、前記ダイの前記複数の接点のうちの1つに結合される、請求項15から20のいずれか1項に記載の方法。 - コアの表面上にダイ側補強層を形成する段階と、
前記コアの前記表面が露出されるまで、反復ラスタパターンで前記ダイ側補強層の複数の部分を削ることを含むレーザアブレーション処理で前記コアの前記表面の一部を露出させるべく、前記ダイ側補強層を通して空洞を形成する段階と、
第1の面および、複数の接点を含むデバイス面を含む反対側の第2の面を有するダイを前記コアの露出された前記表面に取り付ける段階と、
前記ダイ側補強層および前記ダイの前記第2の面上にビルドアップ構造を形成する段階と、
エッチングプロセスで、前記ダイ側補強層の底面および前記ダイの前記第2の面から前記コアを除去する段階と
を備え、
前記ダイは、前記ダイの前記第1の面が前記コアの前記表面に接触した状態で前記空洞内に配置され、
前記ビルドアップ構造は、パターニングされた導電性材料および絶縁材料の複数の交互層を有し、パターニングされた導電性材料の複数の層のうちの少なくとも1つは、前記ダイの前記複数の接点のうちの1つに結合される、
デバイスパッケージを形成するための方法。 - 前記空洞は、前記ダイの幅よりも広く、誘電材料で充填された間隙は、前記ダイ側補強層を通して形成された前記空洞の複数の側壁から前記ダイの複数の側壁を分離し、
前記間隙の幅は、前記デバイスパッケージに対して所望の剛性を提供するように選択される、請求項22に記載の方法。 - 第1の面および、複数の接点を含むデバイス面を含む反対側の第2の面を有する複数のダイを、前記コアの露出された前記表面に取り付ける段階をさらに備え、
前記複数のダイのそれぞれは、前記ダイの前記第1の面が前記コアの前記表面に接触した状態で前記空洞内に配置される、請求項22または23に記載の方法。 - 前記ダイ側補強層を通して複数の空洞を形成する段階と、
前記複数の空洞のそれぞれに、1つ又は複数のダイを取り付ける段階と
をさらに備える、請求項22から24のいずれか1項に記載の方法。
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