JP2016018948A - 導電パターン形成方法、半導体装置、及び電子機器 - Google Patents
導電パターン形成方法、半導体装置、及び電子機器 Download PDFInfo
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- H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
- H01L23/53204—Conductive materials
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
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- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
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- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
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Abstract
【解決手段】本発明の導電パターン形成方法の一つの態様は、基材上にアルミニウム・ネオジム合金膜を形成する工程と、アルミニウム・ネオジム合金膜上に、アルミニウム・ネオジム合金膜の厚さの1/4倍以上の厚さを有する導電膜を形成する工程と、アルミニウム・ネオジム合金膜と導電膜とをドライエッチングを用いてパターニングする工程と、を有することを特徴とする。
【選択図】図4
Description
本実施形態においては、半導体装置の一例として液晶装置について説明する。
次に、図6(a)に示すように、ゲート絶縁膜6上に、各TFTのゲート電極13,14,15、及び蓄積容量33の上部電極16を形成する。以下、本実施形態の電極の形成方法について、詳細に説明する。なお、以下に説明する電極の形成方法は、特許請求の範囲における導電パターン形成方法に相当する。
次に、電子機器の実施形態について説明する。本実施形態の電子機器は、一例として、本発明を適用した表示装置(半導体装置)を備える電子ペーパーである。
Claims (8)
- 基材上にアルミニウム・ネオジム合金膜を形成する工程と、
前記アルミニウム・ネオジム合金膜上に、前記アルミニウム・ネオジム合金膜の厚さの1/4倍以上の厚さを有する導電膜を形成する工程と、
前記アルミニウム・ネオジム合金膜と前記導電膜とをドライエッチングを用いてパターニングする工程と、
を有することを特徴とする導電パターン形成方法。 - 前記導電膜は、チタンまたは窒化チタンからなる、請求項1に記載の導電パターン形成方法。
- 前記アルミニウム・ネオジム合金膜を形成する工程の前に、前記基材上に第2の導電膜を形成する工程を有し、
前記アルミニウム・ネオジム合金膜を形成する工程において、前記アルミニウム・ネオジム合金膜を、前記第2の導電膜上に形成する、請求項1または2に記載の導電パターン形成方法。 - 前記第2の導電膜は、チタンからなる、請求項3に記載の導電パターン形成方法。
- 請求項1から4のいずれか一項に記載の導電パターン形成方法を用いて形成された導電パターンを備えることを特徴とする半導体装置。
- アルミニウム・ネオジム合金膜と、
前記アルミニウム・ネオジム合金膜上に積層され、前記アルミニウム・ネオジム合金膜の厚さの1/4倍以上の厚さを有する導電膜と、
を備える導電パターンを備えることを特徴とする半導体装置。 - 前記導電パターンは、ゲート配線とソース配線とのうちの少なくとも一方を構成する、請求項5または6に記載の半導体装置。
- 請求項5から7のいずれか一項に記載の半導体装置を備えることを特徴とする電子機器。
Priority Applications (3)
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JP2014142024A JP2016018948A (ja) | 2014-07-10 | 2014-07-10 | 導電パターン形成方法、半導体装置、及び電子機器 |
US14/790,178 US9552996B2 (en) | 2014-07-10 | 2015-07-02 | Semiconductor device, having conductive pattern and electronic apparatus |
CN201510397652.8A CN105261589A (zh) | 2014-07-10 | 2015-07-08 | 导电图案形成方法、半导体装置、以及电子设备 |
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JP2014142024A JP2016018948A (ja) | 2014-07-10 | 2014-07-10 | 導電パターン形成方法、半導体装置、及び電子機器 |
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Cited By (2)
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JP2017139381A (ja) * | 2016-02-04 | 2017-08-10 | 株式会社コベルコ科研 | 表示装置用配線構造 |
CN112213894A (zh) * | 2019-07-12 | 2021-01-12 | 夏普株式会社 | 显示面板用阵列基板的制造方法 |
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CN108573980B (zh) * | 2017-03-09 | 2021-02-19 | 群创光电股份有限公司 | 导体结构以及面板装置 |
KR102598061B1 (ko) * | 2018-09-03 | 2023-11-03 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
US11060051B2 (en) | 2018-10-12 | 2021-07-13 | Fujimi Incorporated | Composition for rinsing or cleaning a surface with ceria particles adhered |
JP2022083170A (ja) * | 2020-11-24 | 2022-06-03 | 株式会社ジャパンディスプレイ | 表示装置及びその製造方法 |
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JP2002341367A (ja) * | 2001-05-18 | 2002-11-27 | Nec Corp | 液晶表示装置及びその製造方法 |
JP2004119923A (ja) * | 2002-09-30 | 2004-04-15 | Seiko Epson Corp | 半導体装置およびその製造方法 |
JP2004193264A (ja) * | 2002-12-10 | 2004-07-08 | Canon Inc | 結晶性薄膜の製造方法 |
Cited By (3)
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JP2017139381A (ja) * | 2016-02-04 | 2017-08-10 | 株式会社コベルコ科研 | 表示装置用配線構造 |
CN112213894A (zh) * | 2019-07-12 | 2021-01-12 | 夏普株式会社 | 显示面板用阵列基板的制造方法 |
CN112213894B (zh) * | 2019-07-12 | 2023-08-22 | 夏普株式会社 | 显示面板用阵列基板的制造方法 |
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US20160013072A1 (en) | 2016-01-14 |
US9552996B2 (en) | 2017-01-24 |
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