JP2015530265A5 - - Google Patents
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- Publication number
- JP2015530265A5 JP2015530265A5 JP2015525532A JP2015525532A JP2015530265A5 JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5 JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5
- Authority
- JP
- Japan
- Prior art keywords
- major surface
- carbide
- abrasive
- polishing
- precisely shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005296 abrasive Methods 0.000 claims 10
- 238000005498 polishing Methods 0.000 claims 9
- 239000000919 ceramic Substances 0.000 claims 5
- 239000000969 carrier Substances 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 2
- 238000000576 coating method Methods 0.000 claims 2
- 229910052580 B4C Inorganic materials 0.000 claims 1
- INAHAJYZKVIDIZ-UHFFFAOYSA-N Boron carbide Chemical compound B12B3B4C32B41 INAHAJYZKVIDIZ-UHFFFAOYSA-N 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N Silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- UONOETXJSWQNOL-UHFFFAOYSA-N Tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 claims 1
- 229910026551 ZrC Inorganic materials 0.000 claims 1
- 229910003460 diamond Inorganic materials 0.000 claims 1
- 239000010432 diamond Substances 0.000 claims 1
- TXKRDMUDKYVBLB-UHFFFAOYSA-N methane;titanium Chemical compound C.[Ti] TXKRDMUDKYVBLB-UHFFFAOYSA-N 0.000 claims 1
- UGHSGZIDZZRZKT-UHFFFAOYSA-N methane;zirconium Chemical compound C.[Zr] UGHSGZIDZZRZKT-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201261678665P | 2012-08-02 | 2012-08-02 | |
US61/678,665 | 2012-08-02 | ||
PCT/US2013/052828 WO2014022462A1 (fr) | 2012-08-02 | 2013-07-31 | Éléments abrasifs présentant des caractéristiques de forme précise, articles abrasifs fabriqués à partir de ceux-ci et leurs procédés de fabrication |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018211596A Division JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2015530265A JP2015530265A (ja) | 2015-10-15 |
JP2015530265A5 true JP2015530265A5 (fr) | 2016-09-15 |
Family
ID=50028490
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2015525532A Pending JP2015530265A (ja) | 2012-08-02 | 2013-07-31 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018211596A Pending JP2019063989A (ja) | 2012-08-02 | 2018-11-09 | 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 |
Country Status (8)
Country | Link |
---|---|
US (1) | US20150224625A1 (fr) |
EP (1) | EP2879836B1 (fr) |
JP (2) | JP2015530265A (fr) |
KR (1) | KR20150039795A (fr) |
CN (2) | CN115625629A (fr) |
SG (1) | SG11201500713PA (fr) |
TW (1) | TWI660816B (fr) |
WO (1) | WO2014022462A1 (fr) |
Families Citing this family (45)
Publication number | Priority date | Publication date | Assignee | Title |
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KR101607883B1 (ko) | 2010-12-31 | 2016-03-31 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 특정 모양의 연마 입자 및 그러한 입자의 형성 방법 |
CN108262695A (zh) | 2011-06-30 | 2018-07-10 | 圣戈本陶瓷及塑料股份有限公司 | 包括氮化硅磨粒的磨料制品 |
EP2726248B1 (fr) | 2011-06-30 | 2019-06-19 | Saint-Gobain Ceramics & Plastics, Inc. | Particules abrasives au carbure de silicium fritté à phase liquide |
CN103826802B (zh) | 2011-09-26 | 2018-06-12 | 圣戈本陶瓷及塑料股份有限公司 | 包括磨料颗粒材料的磨料制品,使用磨料颗粒材料的涂布磨料及其形成方法 |
PL2797716T3 (pl) | 2011-12-30 | 2021-07-05 | Saint-Gobain Ceramics & Plastics, Inc. | Kompozytowe ukształtowane cząstki ścierne i sposób ich formowania |
KR20170018102A (ko) | 2011-12-30 | 2017-02-15 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 형상화 연마입자 및 이의 형성방법 |
RU2602581C2 (ru) | 2012-01-10 | 2016-11-20 | Сэнт - Гобэйн Керамикс Энд Пластик,Инк. | Абразивные частицы, имеющие сложные формы, и способы их формования |
US8840696B2 (en) | 2012-01-10 | 2014-09-23 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive particles having particular shapes and methods of forming such particles |
EP2830829B1 (fr) | 2012-03-30 | 2018-01-10 | Saint-Gobain Abrasives, Inc. | Produits abrasifs ayant des fibres fibrillées |
CN104540639B (zh) | 2012-05-23 | 2019-01-29 | 圣戈本陶瓷及塑料股份有限公司 | 成形磨粒及其形成方法 |
EP2866977B8 (fr) | 2012-06-29 | 2023-01-18 | Saint-Gobain Ceramics & Plastics, Inc. | Particules abrasives ayant des formes particulières et procédés de formation de telles particules |
EP2879838B1 (fr) | 2012-08-02 | 2023-09-13 | 3M Innovative Properties Company | Articles abrasifs présentant des caractéristiques de forme précise et leur procédé de fabrication |
WO2014022453A1 (fr) | 2012-08-02 | 2014-02-06 | 3M Innovative Properties Company | Précurseur d'élément abrasif ayant des caractéristiques aux formes précises et procédé de fabrication de celui-ci |
MX2015004594A (es) | 2012-10-15 | 2015-07-23 | Saint Gobain Abrasives Inc | Particulas abrasivas que tienen formas particulares y metodos para formar tales particulas. |
US9074119B2 (en) | 2012-12-31 | 2015-07-07 | Saint-Gobain Ceramics & Plastics, Inc. | Particulate materials and methods of forming same |
KR102313225B1 (ko) * | 2013-03-12 | 2021-10-18 | 쓰리엠 이노베이티브 프로퍼티즈 컴파니 | 접합된 연마 용품 |
EP4364891A2 (fr) | 2013-03-29 | 2024-05-08 | Saint-Gobain Abrasives, Inc. | Particules abrasives ayant des formes particulières et procédés de formation de telles particules |
TW201502263A (zh) | 2013-06-28 | 2015-01-16 | Saint Gobain Ceramics | 包含成形研磨粒子之研磨物品 |
WO2015048768A1 (fr) | 2013-09-30 | 2015-04-02 | Saint-Gobain Ceramics & Plastics, Inc. | Particules abrasives formées et leurs procédé de formation |
CN106029301B (zh) | 2013-12-31 | 2018-09-18 | 圣戈班磨料磨具有限公司 | 包括成形磨粒的研磨制品 |
US9771507B2 (en) | 2014-01-31 | 2017-09-26 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle including dopant material and method of forming same |
US10557067B2 (en) | 2014-04-14 | 2020-02-11 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
BR112016023880A2 (pt) | 2014-04-14 | 2017-08-15 | Saint Gobain Ceramics | artigo abrasivo incluindo partículas abrasivas moldadas |
US9902045B2 (en) | 2014-05-30 | 2018-02-27 | Saint-Gobain Abrasives, Inc. | Method of using an abrasive article including shaped abrasive particles |
US20160144477A1 (en) * | 2014-11-21 | 2016-05-26 | Diane Scott | Coated compressive subpad for chemical mechanical polishing |
US9707529B2 (en) | 2014-12-23 | 2017-07-18 | Saint-Gobain Ceramics & Plastics, Inc. | Composite shaped abrasive particles and method of forming same |
US9914864B2 (en) | 2014-12-23 | 2018-03-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particles and method of forming same |
US9676981B2 (en) | 2014-12-24 | 2017-06-13 | Saint-Gobain Ceramics & Plastics, Inc. | Shaped abrasive particle fractions and method of forming same |
US10196551B2 (en) | 2015-03-31 | 2019-02-05 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
TWI634200B (zh) | 2015-03-31 | 2018-09-01 | 聖高拜磨料有限公司 | 固定磨料物品及其形成方法 |
CN115781499A (zh) | 2015-06-11 | 2023-03-14 | 圣戈本陶瓷及塑料股份有限公司 | 包括经成形研磨颗粒的研磨制品 |
KR102313436B1 (ko) | 2016-05-10 | 2021-10-19 | 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 | 연마 입자들 및 그 형성 방법 |
ES2922927T3 (es) | 2016-05-10 | 2022-09-21 | Saint Gobain Ceramics & Plastics Inc | Procedimientos de formación de partículas abrasivas |
TWI621502B (zh) * | 2016-08-18 | 2018-04-21 | 中國砂輪企業股份有限公司 | Double chemical mechanical polishing trimming system and method thereof |
US11230653B2 (en) | 2016-09-29 | 2022-01-25 | Saint-Gobain Abrasives, Inc. | Fixed abrasive articles and methods of forming same |
US10563105B2 (en) | 2017-01-31 | 2020-02-18 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
US10759024B2 (en) | 2017-01-31 | 2020-09-01 | Saint-Gobain Ceramics & Plastics, Inc. | Abrasive article including shaped abrasive particles |
CN110719946B (zh) | 2017-06-21 | 2022-07-15 | 圣戈本陶瓷及塑料股份有限公司 | 颗粒材料及其形成方法 |
WO2019012388A1 (fr) * | 2017-07-11 | 2019-01-17 | 3M Innovative Properties Company | Articles abrasifs comprenant des revêtements conformables et système de polissage composé de ces derniers |
JP7198801B2 (ja) * | 2017-07-11 | 2023-01-04 | スリーエム イノベイティブ プロパティズ カンパニー | 適合性コーティングを含む研磨物品及びそれによる研磨システム |
SG11202108831UA (en) * | 2019-02-13 | 2021-09-29 | 3M Innovative Properties Co | Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof |
CN114867582A (zh) | 2019-12-27 | 2022-08-05 | 圣戈本陶瓷及塑料股份有限公司 | 磨料制品及其形成方法 |
CN111546247B (zh) * | 2020-04-30 | 2022-03-25 | 郑州力弘超硬材料有限公司 | 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法 |
KR20220033050A (ko) * | 2020-09-07 | 2022-03-15 | 엔지케이 인슐레이터 엘티디 | 내화재 |
WO2023060457A1 (fr) * | 2021-10-13 | 2023-04-20 | 大连理工大学 | Dispositif de liaison en treillis flexible pour composant plat de type disque et procédé de serrage adaptatif |
Family Cites Families (38)
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US2488276A (en) * | 1943-12-28 | 1949-11-15 | Norton Co | Grinding wheel |
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US20050260930A1 (en) * | 1999-06-15 | 2005-11-24 | Yuji Okuda | Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer |
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TW467802B (en) * | 1999-10-12 | 2001-12-11 | Hunatech Co Ltd | Conditioner for polishing pad and method for manufacturing the same |
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US7384438B1 (en) * | 2000-07-19 | 2008-06-10 | 3M Innovative Properties Company | Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same |
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JP4624293B2 (ja) * | 2006-03-31 | 2011-02-02 | 株式会社ノリタケスーパーアブレーシブ | Cmpパッドコンディショナー |
US7410413B2 (en) * | 2006-04-27 | 2008-08-12 | 3M Innovative Properties Company | Structured abrasive article and method of making and using the same |
US8323072B1 (en) * | 2007-03-21 | 2012-12-04 | 3M Innovative Properties Company | Method of polishing transparent armor |
US20080287047A1 (en) * | 2007-05-18 | 2008-11-20 | Sang Fang Chemical Industry Co., Ltd. | Polishing pad, use thereof and method for making the same |
US8080073B2 (en) * | 2007-12-20 | 2011-12-20 | 3M Innovative Properties Company | Abrasive article having a plurality of precisely-shaped abrasive composites |
JP2010125567A (ja) * | 2008-11-28 | 2010-06-10 | Mitsubishi Materials Corp | Cmpパッドコンディショナー |
JP2010125586A (ja) * | 2008-12-01 | 2010-06-10 | Mitsubishi Materials Corp | 半導体研磨布用コンディショナー及びその製造方法 |
WO2010063647A1 (fr) * | 2008-12-03 | 2010-06-10 | Struers A/S | Disque abrasif |
SG174351A1 (en) * | 2009-03-24 | 2011-10-28 | Saint Gobain Abrasives Inc | Abrasive tool for use as a chemical mechanical planarization pad conditioner |
EP2438609A4 (fr) * | 2009-06-02 | 2016-03-09 | Saint Gobain Abrasives Inc | Outils de conditionnement cmp résistants à la corrosion et leurs procédés de fabrication et d'utilisation |
KR101091030B1 (ko) * | 2010-04-08 | 2011-12-09 | 이화다이아몬드공업 주식회사 | 감소된 마찰력을 갖는 패드 컨디셔너 제조방법 |
US20120171935A1 (en) * | 2010-12-20 | 2012-07-05 | Diamond Innovations, Inc. | CMP PAD Conditioning Tool |
US20130065490A1 (en) * | 2011-09-12 | 2013-03-14 | 3M Innovative Properties Company | Method of refurbishing vinyl composition tile |
-
2013
- 2013-07-31 CN CN202211322368.0A patent/CN115625629A/zh active Pending
- 2013-07-31 CN CN201380040394.7A patent/CN104684686A/zh active Pending
- 2013-07-31 SG SG11201500713PA patent/SG11201500713PA/en unknown
- 2013-07-31 EP EP13826255.5A patent/EP2879836B1/fr active Active
- 2013-07-31 US US14/418,453 patent/US20150224625A1/en not_active Abandoned
- 2013-07-31 WO PCT/US2013/052828 patent/WO2014022462A1/fr active Application Filing
- 2013-07-31 JP JP2015525532A patent/JP2015530265A/ja active Pending
- 2013-07-31 KR KR20157004858A patent/KR20150039795A/ko not_active Application Discontinuation
- 2013-08-01 TW TW102127669A patent/TWI660816B/zh active
-
2018
- 2018-11-09 JP JP2018211596A patent/JP2019063989A/ja active Pending
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