JP2015527211A5 - - Google Patents
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- Publication number
- JP2015527211A5 JP2015527211A5 JP2015528561A JP2015528561A JP2015527211A5 JP 2015527211 A5 JP2015527211 A5 JP 2015527211A5 JP 2015528561 A JP2015528561 A JP 2015528561A JP 2015528561 A JP2015528561 A JP 2015528561A JP 2015527211 A5 JP2015527211 A5 JP 2015527211A5
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- layer
- electrode
- doped region
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 58
- 229910052710 silicon Inorganic materials 0.000 claims description 57
- 239000010703 silicon Substances 0.000 claims description 57
- 238000000034 method Methods 0.000 claims description 27
- 239000000758 substrate Substances 0.000 claims description 10
- 238000004891 communication Methods 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 8
- 239000003989 dielectric material Substances 0.000 claims description 6
- 238000000059 patterning Methods 0.000 claims description 4
- 239000002019 doping agent Substances 0.000 claims 12
- 238000005530 etching Methods 0.000 claims 4
- 238000002161 passivation Methods 0.000 claims 3
- 239000002184 metal Substances 0.000 claims 2
- 238000005137 deposition process Methods 0.000 claims 1
- 238000005468 ion implantation Methods 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010292 electrical insulation Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261691662P | 2012-08-21 | 2012-08-21 | |
| US61/691,662 | 2012-08-21 | ||
| PCT/US2013/055668 WO2014031570A1 (en) | 2012-08-21 | 2013-08-20 | System and method for forming a buried lower electrode in conjunction with an encapsulated mems device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015527211A JP2015527211A (ja) | 2015-09-17 |
| JP2015527211A5 true JP2015527211A5 (https=) | 2017-09-21 |
| JP6272329B2 JP6272329B2 (ja) | 2018-01-31 |
Family
ID=49085201
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015528561A Active JP6272329B2 (ja) | 2012-08-21 | 2013-08-20 | 密閉されたｍｅｍｓデバイスと関連した埋め込み下部電極を形成するためのシステムおよび方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US10160632B2 (https=) |
| JP (1) | JP6272329B2 (https=) |
| CN (1) | CN104736469B (https=) |
| DE (1) | DE112013004119B4 (https=) |
| TW (1) | TWI623027B (https=) |
| WO (1) | WO2014031570A1 (https=) |
Families Citing this family (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102012210049A1 (de) * | 2012-06-14 | 2013-12-19 | Robert Bosch Gmbh | Hybrid integriertes Bauteil und Verfahren zu dessen Herstellung |
| WO2014123922A1 (en) | 2013-02-05 | 2014-08-14 | Butterfly Network, Inc. | Cmos ultrasonic transducers and related apparatus and methods |
| CN105174203B (zh) * | 2014-05-28 | 2016-09-28 | 无锡华润上华半导体有限公司 | 基于mems的传感器的制作方法 |
| US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| DE102015203393A1 (de) * | 2015-02-25 | 2016-08-25 | Infineon Technologies Ag | Halbleiterelement und Verfahren zu Herstellen von diesem |
| CN105540528A (zh) * | 2015-12-14 | 2016-05-04 | 中国科学院半导体研究所 | Mems电容式超声波传感器及其制备方法 |
| EP3397587B1 (en) * | 2015-12-30 | 2019-11-20 | Robert Bosch GmbH | System and method for maintaining a smoothed surface on a mems device |
| US10513429B2 (en) * | 2016-07-27 | 2019-12-24 | Taiwan Semiconductor Manufacturing Co., Ltd. | Integration scheme for microelectromechanical systems (MEMS) devices and complementary metal-oxide-semiconductor (CMOS) devices |
| US10196261B2 (en) | 2017-03-08 | 2019-02-05 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
| EP3642611B1 (en) | 2017-06-21 | 2024-02-14 | Butterfly Network, Inc. | Microfabricated ultrasonic transducer having individual cells with electrically isolated electrode sections |
| US10466126B2 (en) * | 2018-02-27 | 2019-11-05 | Globalfoundries Inc. | MEMS capacitive pressure sensors in fully depleted semiconductor on insulator (FDSOI) |
| DE102018210815A1 (de) * | 2018-06-30 | 2020-01-02 | Robert Bosch Gmbh | Elektrische Kontaktierung, Verfahren zur Herstellung einer elektrischen Kontaktierung, System |
| EP3885042A1 (en) | 2020-03-24 | 2021-09-29 | Imec VZW | Method for fabricating a microfluidic device |
| IT202000011755A1 (it) * | 2020-05-20 | 2021-11-20 | St Microelectronics Srl | Procedimento di fabbricazione di un dispositivo micro-elettro-meccanico, in particolare sensore di movimento con comando/rilevazione di tipo capacitivo, e relativo dispositivo mems |
| DE102022208515A1 (de) * | 2022-08-17 | 2024-02-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung eines Siliziumschichtsystems mit elektrischen Verbindungen |
| DE102022208514A1 (de) * | 2022-08-17 | 2024-02-22 | Robert Bosch Gesellschaft mit beschränkter Haftung | Verfahren zur Herstellung von mikroelektromechanischen Strukturen |
Family Cites Families (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3399336B2 (ja) | 1997-12-22 | 2003-04-21 | 株式会社豊田中央研究所 | 検出器 |
| US6664126B1 (en) | 1999-09-03 | 2003-12-16 | University Of Maryland, College Park | Process for fabrication of 3-dimensional micromechanisms |
| EP1151962B1 (en) | 2000-04-28 | 2007-06-13 | STMicroelectronics S.r.l. | Structure for electrically connecting a first body of semiconductor material overlaid by a second body of semiconductor material, composite structure using the electric connection structure, and manufacturing process thereof |
| US6913941B2 (en) | 2002-09-09 | 2005-07-05 | Freescale Semiconductor, Inc. | SOI polysilicon trench refill perimeter oxide anchor scheme |
| US6940705B2 (en) | 2003-07-25 | 2005-09-06 | Taiwan Semiconductor Manufacturing Company, Ltd. | Capacitor with enhanced performance and method of manufacture |
| US7056757B2 (en) | 2003-11-25 | 2006-06-06 | Georgia Tech Research Corporation | Methods of forming oxide masks with submicron openings and microstructures formed thereby |
| TWI253436B (en) | 2004-02-27 | 2006-04-21 | Opus Microsystems Corp | Micromechanical actuator with multiple-plane comb electrodes and methods of making |
| CN100339738C (zh) | 2004-03-12 | 2007-09-26 | 先进微系统科技股份有限公司 | 具有多组梳状电极的微机电致动器及其制造方法 |
| US7825484B2 (en) | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
| CN100452397C (zh) | 2005-11-11 | 2009-01-14 | 台湾积体电路制造股份有限公司 | 半导体结构与隔绝一第一电路和一第二电路的方法 |
| US8085964B2 (en) | 2006-05-22 | 2011-12-27 | Audio Pixels Ltd. | Apparatus and methods for generating pressure waves |
| JP4737140B2 (ja) | 2006-10-20 | 2011-07-27 | セイコーエプソン株式会社 | Ｍｅｍｓデバイスおよびその製造方法 |
| CN101953174B (zh) | 2007-11-21 | 2014-12-10 | 奥迪欧彼塞尔斯有限公司 | 数字扬声器装置 |
| US8125046B2 (en) | 2008-06-04 | 2012-02-28 | Infineon Technologies Ag | Micro-electromechanical system devices |
| US8148790B2 (en) | 2008-07-08 | 2012-04-03 | Wispry, Inc. | Thin-film lid MEMS devices and methods |
| ES2342872B1 (es) | 2009-05-20 | 2011-05-30 | Baolab Microsystems S.L. | Chip que comprende un mems dispuesto en un circuito integrado y procedimiento de fabricacion correspondiente. |
| US8563345B2 (en) * | 2009-10-02 | 2013-10-22 | National Semiconductor Corporated | Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements |
| JP5218497B2 (ja) | 2009-12-04 | 2013-06-26 | 株式会社デンソー | 半導体装置およびその製造方法 |
| IT1400096B1 (it) * | 2010-05-12 | 2013-05-17 | St Microelectronics Srl | Processo di fabbricazione di circuiti elettronici integrati e circuiti cosi' ottenuti |
| DE102010062555B4 (de) | 2010-12-08 | 2019-05-23 | Robert Bosch Gmbh | Mikromechanische Membranvorrichtung und entsprechendes Herstellungsverfahren sowie Membrananordnung |
| US8673756B2 (en) | 2011-04-14 | 2014-03-18 | Robert Bosch Gmbh | Out-of-plane spacer defined electrode |
-
2013
- 2013-08-17 US US13/969,522 patent/US10160632B2/en active Active
- 2013-08-20 DE DE112013004119.7T patent/DE112013004119B4/de active Active
- 2013-08-20 WO PCT/US2013/055668 patent/WO2014031570A1/en not_active Ceased
- 2013-08-20 JP JP2015528561A patent/JP6272329B2/ja active Active
- 2013-08-20 CN CN201380048541.5A patent/CN104736469B/zh active Active
- 2013-08-22 TW TW102130179A patent/TWI623027B/zh active
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