JP2015523306A - ウエット酸エッチングにおけるスラッジ制御のための方法 - Google Patents

ウエット酸エッチングにおけるスラッジ制御のための方法 Download PDF

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Publication number
JP2015523306A
JP2015523306A JP2015515104A JP2015515104A JP2015523306A JP 2015523306 A JP2015523306 A JP 2015523306A JP 2015515104 A JP2015515104 A JP 2015515104A JP 2015515104 A JP2015515104 A JP 2015515104A JP 2015523306 A JP2015523306 A JP 2015523306A
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Japan
Prior art keywords
glass
etchant
sludge
amount
concentration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015515104A
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English (en)
Japanese (ja)
Other versions
JP2015523306A5 (enExample
Inventor
ホウ，ジュン
ジン，ユィホイ
シャンムガム，シャマラ
デリア テティカー，メフメト
デリア テティカー，メフメト
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of JP2015523306A publication Critical patent/JP2015523306A/ja
Publication of JP2015523306A5 publication Critical patent/JP2015523306A5/ja
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
JP2015515104A 2012-05-31 2013-05-28 ウエット酸エッチングにおけるスラッジ制御のための方法 Pending JP2015523306A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261653705P 2012-05-31 2012-05-31
US61/653,705 2012-05-31
PCT/US2013/042810 WO2013181123A1 (en) 2012-05-31 2013-05-28 Method for sludge control in wet acid etching

Publications (2)

Publication Number Publication Date
JP2015523306A true JP2015523306A (ja) 2015-08-13
JP2015523306A5 JP2015523306A5 (enExample) 2016-07-14

Family

ID=48614160

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015515104A Pending JP2015523306A (ja) 2012-05-31 2013-05-28 ウエット酸エッチングにおけるスラッジ制御のための方法

Country Status (7)

Country Link
US (1) US9290410B2 (enExample)
EP (1) EP2855385A1 (enExample)
JP (1) JP2015523306A (enExample)
KR (1) KR101971316B1 (enExample)
CN (1) CN104684859B (enExample)
TW (1) TWI555712B (enExample)
WO (1) WO2013181123A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013181213A1 (en) * 2012-05-31 2013-12-05 Corning Incorporated Systems and methods for acid-treating glass articles
CN106573829B (zh) 2014-07-30 2020-05-05 康宁股份有限公司 超声槽和均匀玻璃基板蚀刻方法
WO2021030122A1 (en) * 2019-08-13 2021-02-18 Corning Incorporated Textured glass articles and methods of making the same

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07215736A (ja) * 1994-01-31 1995-08-15 Hoya Corp ガラス体表面の化学的研磨法
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003063842A (ja) * 2001-08-24 2003-03-05 Stella Chemifa Corp 多成分を有するガラス基板用の微細加工表面処理液
JP2003073144A (ja) * 2001-08-31 2003-03-12 Stella Chemifa Corp 多成分を有するガラス基板用の微細加工表面処理液
JP2006326444A (ja) * 2005-05-25 2006-12-07 Sony Corp エッチングシステム
JP2008066706A (ja) * 2006-09-08 2008-03-21 Samsung Electronics Co Ltd エッチング液供給装置、エッチング装置及びエッチング方法
US20090110914A1 (en) * 2005-12-28 2009-04-30 Dajian Zhuang Process for Producing Hurricane-Resistant Glass
WO2009066624A1 (ja) * 2007-11-19 2009-05-28 Asahi Glass Co., Ltd. ガラス基板のエッチング処理方法
WO2009157378A1 (ja) * 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917320A1 (de) 1989-05-27 1990-12-20 Bayer Ag Harnstoffgruppen enthaltende (meth)-acrylsaeure-derivate von triisocyanaten und ihre verwendung
JP4370737B2 (ja) 2001-06-27 2009-11-25 三菱化学エンジニアリング株式会社 フッ酸の供給方法
CN101295673B (zh) * 2007-04-27 2010-11-03 南亚科技股份有限公司 一种形成位线接触插塞的方法与晶体管结构
KR100943321B1 (ko) 2008-03-03 2010-02-19 (주)세미로드 유리 식각 장치와 유리 기판의 슬러지 제거 방법
KR101093362B1 (ko) 2009-09-23 2011-12-14 호서대학교 산학협력단 유리 식각액
KR20110056095A (ko) 2009-11-20 2011-05-26 타코마테크놀러지 주식회사 식각액 조성물
JP5573219B2 (ja) * 2010-02-18 2014-08-20 ソニー株式会社 薄膜トランジスタ、ならびに電子機器およびその製造方法
KR101748177B1 (ko) 2011-07-29 2017-06-16 가부시키가이샤 하모닉 드라이브 시스템즈 복합 롤링 베어링부착 파동기어장치
US9926225B2 (en) 2011-12-30 2018-03-27 Corning Incorporated Media and methods for etching glass

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07215736A (ja) * 1994-01-31 1995-08-15 Hoya Corp ガラス体表面の化学的研磨法
JP2003020255A (ja) * 2001-04-12 2003-01-24 Nishiyama Stainless Chem Kk ガラス基板の化学加工方法
JP2003063842A (ja) * 2001-08-24 2003-03-05 Stella Chemifa Corp 多成分を有するガラス基板用の微細加工表面処理液
JP2003073144A (ja) * 2001-08-31 2003-03-12 Stella Chemifa Corp 多成分を有するガラス基板用の微細加工表面処理液
JP2006326444A (ja) * 2005-05-25 2006-12-07 Sony Corp エッチングシステム
US20090110914A1 (en) * 2005-12-28 2009-04-30 Dajian Zhuang Process for Producing Hurricane-Resistant Glass
JP2008066706A (ja) * 2006-09-08 2008-03-21 Samsung Electronics Co Ltd エッチング液供給装置、エッチング装置及びエッチング方法
WO2009066624A1 (ja) * 2007-11-19 2009-05-28 Asahi Glass Co., Ltd. ガラス基板のエッチング処理方法
WO2009157378A1 (ja) * 2008-06-25 2009-12-30 旭硝子株式会社 無アルカリガラス基板のエッチング方法及び表示デバイス

Also Published As

Publication number Publication date
TWI555712B (zh) 2016-11-01
KR101971316B1 (ko) 2019-04-22
TW201410629A (zh) 2014-03-16
CN104684859B (zh) 2019-07-12
EP2855385A1 (en) 2015-04-08
WO2013181123A1 (en) 2013-12-05
KR20150027133A (ko) 2015-03-11
CN104684859A (zh) 2015-06-03
US20150136736A1 (en) 2015-05-21
US9290410B2 (en) 2016-03-22

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