CN104684859B - 用于湿酸性蚀刻中污泥控制的方法 - Google Patents

用于湿酸性蚀刻中污泥控制的方法 Download PDF

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Publication number
CN104684859B
CN104684859B CN201380028674.6A CN201380028674A CN104684859B CN 104684859 B CN104684859 B CN 104684859B CN 201380028674 A CN201380028674 A CN 201380028674A CN 104684859 B CN104684859 B CN 104684859B
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CN
China
Prior art keywords
etchant
glass
concentration
sludge
precipitation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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CN201380028674.6A
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English (en)
Chinese (zh)
Other versions
CN104684859A (zh
Inventor
侯军
金宇辉
S·尚穆加姆
M·D·泰蒂克
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Corning Inc
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Corning Inc
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Publication date
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Publication of CN104684859A publication Critical patent/CN104684859A/zh
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Publication of CN104684859B publication Critical patent/CN104684859B/zh
Expired - Fee Related legal-status Critical Current
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Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00—Surface treatment of glass, not in the form of fibres or filaments, by etching
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K13/00—Etching, surface-brightening or pickling compositions
    • C09K13/04—Etching, surface-brightening or pickling compositions containing an inorganic acid
    • C09K13/08—Etching, surface-brightening or pickling compositions containing an inorganic acid containing a fluorine compound

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Inorganic Chemistry (AREA)
  • Surface Treatment Of Glass (AREA)
  • Glass Compositions (AREA)
CN201380028674.6A 2012-05-31 2013-05-28 用于湿酸性蚀刻中污泥控制的方法 Expired - Fee Related CN104684859B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261653705P 2012-05-31 2012-05-31
US61/653,705 2012-05-31
PCT/US2013/042810 WO2013181123A1 (en) 2012-05-31 2013-05-28 Method for sludge control in wet acid etching

Publications (2)

Publication Number Publication Date
CN104684859A CN104684859A (zh) 2015-06-03
CN104684859B true CN104684859B (zh) 2019-07-12

Family

ID=48614160

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380028674.6A Expired - Fee Related CN104684859B (zh) 2012-05-31 2013-05-28 用于湿酸性蚀刻中污泥控制的方法

Country Status (7)

Country Link
US (1) US9290410B2 (enExample)
EP (1) EP2855385A1 (enExample)
JP (1) JP2015523306A (enExample)
KR (1) KR101971316B1 (enExample)
CN (1) CN104684859B (enExample)
TW (1) TWI555712B (enExample)
WO (1) WO2013181123A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013181213A1 (en) * 2012-05-31 2013-12-05 Corning Incorporated Systems and methods for acid-treating glass articles
CN106573829B (zh) 2014-07-30 2020-05-05 康宁股份有限公司 超声槽和均匀玻璃基板蚀刻方法
WO2021030122A1 (en) * 2019-08-13 2021-02-18 Corning Incorporated Textured glass articles and methods of making the same

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1549798A (zh) * 2001-08-31 2004-11-24 斯特拉化学株式会社 含有多成分的玻璃基板用的微细加工表面处理液
CN1990402A (zh) * 2005-12-28 2007-07-04 庄大建 防飓风玻璃生产工艺
CN101868428A (zh) * 2007-11-19 2010-10-20 旭硝子株式会社 玻璃基板的蚀刻处理方法
CN102076625A (zh) * 2008-06-25 2011-05-25 旭硝子株式会社 无碱玻璃基板的蚀刻方法及显示装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3917320A1 (de) 1989-05-27 1990-12-20 Bayer Ag Harnstoffgruppen enthaltende (meth)-acrylsaeure-derivate von triisocyanaten und ihre verwendung
JPH07215736A (ja) * 1994-01-31 1995-08-15 Hoya Corp ガラス体表面の化学的研磨法
JP3523239B2 (ja) * 2001-04-12 2004-04-26 西山ステンレスケミカル株式会社 ガラス基板の化学加工方法及びガラス基板
JP4370737B2 (ja) 2001-06-27 2009-11-25 三菱化学エンジニアリング株式会社 フッ酸の供給方法
JP5132859B2 (ja) * 2001-08-24 2013-01-30 ステラケミファ株式会社 多成分を有するガラス基板用の微細加工表面処理液
JP2006326444A (ja) * 2005-05-25 2006-12-07 Sony Corp エッチングシステム
KR20080022917A (ko) * 2006-09-08 2008-03-12 삼성전자주식회사 식각액 공급장치, 식각장치 및 식각방법
CN101295673B (zh) * 2007-04-27 2010-11-03 南亚科技股份有限公司 一种形成位线接触插塞的方法与晶体管结构
KR100943321B1 (ko) 2008-03-03 2010-02-19 (주)세미로드 유리 식각 장치와 유리 기판의 슬러지 제거 방법
KR101093362B1 (ko) 2009-09-23 2011-12-14 호서대학교 산학협력단 유리 식각액
KR20110056095A (ko) 2009-11-20 2011-05-26 타코마테크놀러지 주식회사 식각액 조성물
JP5573219B2 (ja) * 2010-02-18 2014-08-20 ソニー株式会社 薄膜トランジスタ、ならびに電子機器およびその製造方法
KR101748177B1 (ko) 2011-07-29 2017-06-16 가부시키가이샤 하모닉 드라이브 시스템즈 복합 롤링 베어링부착 파동기어장치
US9926225B2 (en) 2011-12-30 2018-03-27 Corning Incorporated Media and methods for etching glass

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1549798A (zh) * 2001-08-31 2004-11-24 斯特拉化学株式会社 含有多成分的玻璃基板用的微细加工表面处理液
CN1990402A (zh) * 2005-12-28 2007-07-04 庄大建 防飓风玻璃生产工艺
CN101868428A (zh) * 2007-11-19 2010-10-20 旭硝子株式会社 玻璃基板的蚀刻处理方法
CN102076625A (zh) * 2008-06-25 2011-05-25 旭硝子株式会社 无碱玻璃基板的蚀刻方法及显示装置

Also Published As

Publication number Publication date
TWI555712B (zh) 2016-11-01
KR101971316B1 (ko) 2019-04-22
TW201410629A (zh) 2014-03-16
EP2855385A1 (en) 2015-04-08
WO2013181123A1 (en) 2013-12-05
KR20150027133A (ko) 2015-03-11
CN104684859A (zh) 2015-06-03
US20150136736A1 (en) 2015-05-21
US9290410B2 (en) 2016-03-22
JP2015523306A (ja) 2015-08-13

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