JP2015518245A5 - - Google Patents

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JP2015518245A5
JP2015518245A5 JP2015504841A JP2015504841A JP2015518245A5 JP 2015518245 A5 JP2015518245 A5 JP 2015518245A5 JP 2015504841 A JP2015504841 A JP 2015504841A JP 2015504841 A JP2015504841 A JP 2015504841A JP 2015518245 A5 JP2015518245 A5 JP 2015518245A5
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emitter
tip
thin film
needle
oxide
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JP2015504841A
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JP6458727B2 (ja
JP2015518245A (ja
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Priority claimed from CN201210107766.0A external-priority patent/CN102629538B/zh
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JP2015504841A 2012-04-13 2012-12-31 低仕事関数及び高い化学的安定性を備えた電極材料 Expired - Fee Related JP6458727B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201210107766.0 2012-04-13
CN201210107766.0A CN102629538B (zh) 2012-04-13 2012-04-13 具有低逸出功和高化学稳定性的电极材料
PCT/CN2012/087966 WO2013152613A1 (zh) 2012-04-13 2012-12-31 具有低逸出功和高化学稳定性的电极材料

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JP2015518245A JP2015518245A (ja) 2015-06-25
JP2015518245A5 true JP2015518245A5 (enExample) 2017-09-28
JP6458727B2 JP6458727B2 (ja) 2019-01-30

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JP2015504841A Expired - Fee Related JP6458727B2 (ja) 2012-04-13 2012-12-31 低仕事関数及び高い化学的安定性を備えた電極材料

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US (1) US9812279B2 (enExample)
EP (1) EP2787522B1 (enExample)
JP (1) JP6458727B2 (enExample)
CN (1) CN102629538B (enExample)
WO (1) WO2013152613A1 (enExample)

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CN102629538B (zh) 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
JP6459135B2 (ja) * 2015-03-02 2019-01-30 国立研究開発法人物質・材料研究機構 エミッタの製造方法
JP2016207319A (ja) * 2015-04-17 2016-12-08 株式会社日立ハイテクノロジーズ 電界放出型電子源及びその製造方法
CN104880579B (zh) * 2015-06-02 2019-02-12 苏州明志金科仪器有限公司 超高真空自旋极化扫描隧道显微镜探针的制备方法和装置
US10083812B1 (en) * 2015-12-04 2018-09-25 Applied Physics Technologies, Inc. Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form
JP6529920B2 (ja) 2016-03-01 2019-06-12 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置
US10545258B2 (en) * 2016-03-24 2020-01-28 Schlumberger Technology Corporation Charged particle emitter assembly for radiation generator
US9984846B2 (en) * 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
US10784071B2 (en) * 2016-08-08 2020-09-22 Asml Netherlands B.V. Electron emitter and method of fabricating same
KR102374925B1 (ko) * 2016-09-06 2022-03-16 주식회사 히타치하이테크 전자원 및 전자선 조사 장치
JP6694515B2 (ja) 2016-10-13 2020-05-13 株式会社日立ハイテク 電子線装置
CN106783460A (zh) * 2017-01-05 2017-05-31 武汉科技大学 一种低逸出功阴极
WO2019107113A1 (ja) * 2017-11-29 2019-06-06 国立研究開発法人物質・材料研究機構 エミッタ、それを用いた電子銃、それを用いた電子機器、および、その製造方法
CN111048383B (zh) * 2018-10-12 2021-01-15 中国电子科技集团公司第三十八研究所 电子源和电子枪
CN111048372B (zh) * 2018-10-12 2021-04-27 中国电子科技集团公司第三十八研究所 一种电子源工作方法
CN111048373B (zh) * 2018-10-12 2021-04-27 中国电子科技集团公司第三十八研究所 一种电子源再生方法
CN111048382B (zh) * 2018-10-12 2021-03-23 中国电子科技集团公司第三十八研究所 电子源制造方法
EP3948962A4 (en) * 2019-04-05 2023-01-04 Modern Electron, Inc. THERMIONIC ENERGY CONVERTER WITH HEAT CONCENTRATED HOT SLEEV
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly
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US11948769B2 (en) 2022-01-12 2024-04-02 Applied Physics Technologies, Inc. Monolithic heater for thermionic electron cathode
TWI856768B (zh) * 2023-08-07 2024-09-21 埃爾思科技股份有限公司 半導體製程線上電子束檢測方法及應用於半導體製程線上電子束檢測設備之具有奈米級凸出結構的冷場發電子源發射極及其製法

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CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料

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