JP6458727B2 - 低仕事関数及び高い化学的安定性を備えた電極材料 - Google Patents

低仕事関数及び高い化学的安定性を備えた電極材料 Download PDF

Info

Publication number
JP6458727B2
JP6458727B2 JP2015504841A JP2015504841A JP6458727B2 JP 6458727 B2 JP6458727 B2 JP 6458727B2 JP 2015504841 A JP2015504841 A JP 2015504841A JP 2015504841 A JP2015504841 A JP 2015504841A JP 6458727 B2 JP6458727 B2 JP 6458727B2
Authority
JP
Japan
Prior art keywords
emitter
tip
thin film
needle
oxide thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2015504841A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015518245A5 (enExample
JP2015518245A (ja
Inventor
ジェンシン イェン
ジェンシン イェン
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of JP2015518245A publication Critical patent/JP2015518245A/ja
Publication of JP2015518245A5 publication Critical patent/JP2015518245A5/ja
Application granted granted Critical
Publication of JP6458727B2 publication Critical patent/JP6458727B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/13—Solid thermionic cathodes
    • H01J1/14—Solid thermionic cathodes characterised by the material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems
    • H01J9/022—Manufacture of electrodes or electrode systems of cold cathodes
    • H01J9/025—Manufacture of electrodes or electrode systems of cold cathodes of field emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2913—Rod, strand, filament or fiber
    • Y10T428/2916—Rod, strand, filament or fiber including boron or compound thereof [not as steel]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2015504841A 2012-04-13 2012-12-31 低仕事関数及び高い化学的安定性を備えた電極材料 Expired - Fee Related JP6458727B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201210107766.0 2012-04-13
CN201210107766.0A CN102629538B (zh) 2012-04-13 2012-04-13 具有低逸出功和高化学稳定性的电极材料
PCT/CN2012/087966 WO2013152613A1 (zh) 2012-04-13 2012-12-31 具有低逸出功和高化学稳定性的电极材料

Publications (3)

Publication Number Publication Date
JP2015518245A JP2015518245A (ja) 2015-06-25
JP2015518245A5 JP2015518245A5 (enExample) 2017-09-28
JP6458727B2 true JP6458727B2 (ja) 2019-01-30

Family

ID=46587777

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015504841A Expired - Fee Related JP6458727B2 (ja) 2012-04-13 2012-12-31 低仕事関数及び高い化学的安定性を備えた電極材料

Country Status (5)

Country Link
US (1) US9812279B2 (enExample)
EP (1) EP2787522B1 (enExample)
JP (1) JP6458727B2 (enExample)
CN (1) CN102629538B (enExample)
WO (1) WO2013152613A1 (enExample)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102629538B (zh) 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料
JP6459135B2 (ja) * 2015-03-02 2019-01-30 国立研究開発法人物質・材料研究機構 エミッタの製造方法
JP2016207319A (ja) * 2015-04-17 2016-12-08 株式会社日立ハイテクノロジーズ 電界放出型電子源及びその製造方法
CN104880579B (zh) * 2015-06-02 2019-02-12 苏州明志金科仪器有限公司 超高真空自旋极化扫描隧道显微镜探针的制备方法和装置
US10083812B1 (en) * 2015-12-04 2018-09-25 Applied Physics Technologies, Inc. Thermionic-enhanced field emission electron source composed of transition metal carbide material with sharp emitter end-form
JP6529920B2 (ja) 2016-03-01 2019-06-12 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置
US10545258B2 (en) * 2016-03-24 2020-01-28 Schlumberger Technology Corporation Charged particle emitter assembly for radiation generator
US9984846B2 (en) * 2016-06-30 2018-05-29 Kla-Tencor Corporation High brightness boron-containing electron beam emitters for use in a vacuum environment
US10784071B2 (en) * 2016-08-08 2020-09-22 Asml Netherlands B.V. Electron emitter and method of fabricating same
KR102374925B1 (ko) * 2016-09-06 2022-03-16 주식회사 히타치하이테크 전자원 및 전자선 조사 장치
JP6694515B2 (ja) 2016-10-13 2020-05-13 株式会社日立ハイテク 電子線装置
CN106783460A (zh) * 2017-01-05 2017-05-31 武汉科技大学 一种低逸出功阴极
WO2019107113A1 (ja) * 2017-11-29 2019-06-06 国立研究開発法人物質・材料研究機構 エミッタ、それを用いた電子銃、それを用いた電子機器、および、その製造方法
CN111048383B (zh) * 2018-10-12 2021-01-15 中国电子科技集团公司第三十八研究所 电子源和电子枪
CN111048372B (zh) * 2018-10-12 2021-04-27 中国电子科技集团公司第三十八研究所 一种电子源工作方法
CN111048373B (zh) * 2018-10-12 2021-04-27 中国电子科技集团公司第三十八研究所 一种电子源再生方法
CN111048382B (zh) * 2018-10-12 2021-03-23 中国电子科技集团公司第三十八研究所 电子源制造方法
EP3948962A4 (en) * 2019-04-05 2023-01-04 Modern Electron, Inc. THERMIONIC ENERGY CONVERTER WITH HEAT CONCENTRATED HOT SLEEV
GB2583359A (en) * 2019-04-25 2020-10-28 Aquasium Tech Limited Electron beam emitting assembly
US12081145B2 (en) 2019-10-09 2024-09-03 Modern Hydrogen, Inc. Time-dependent plasma systems and methods for thermionic conversion
US11948769B2 (en) 2022-01-12 2024-04-02 Applied Physics Technologies, Inc. Monolithic heater for thermionic electron cathode
TWI856768B (zh) * 2023-08-07 2024-09-21 埃爾思科技股份有限公司 半導體製程線上電子束檢測方法及應用於半導體製程線上電子束檢測設備之具有奈米級凸出結構的冷場發電子源發射極及其製法

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3374386A (en) 1964-11-02 1968-03-19 Field Emission Corp Field emission cathode having tungsten miller indices 100 plane coated with zirconium, hafnium or magnesium on oxygen binder
GB1210007A (en) * 1968-07-05 1970-10-28 Mullard Ltd Cathode
US3817592A (en) 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes
JPS5617780B2 (enExample) * 1973-03-26 1981-04-24
JPS53114660A (en) * 1977-03-16 1978-10-06 Jeol Ltd Cathode for thermal electron emission
US4137476A (en) * 1977-05-18 1979-01-30 Denki Kagaku Kogyo Kabushiki Kaisha Thermionic cathode
JPS5588233A (en) * 1978-12-26 1980-07-03 Denki Kagaku Kogyo Kk Hexaboride single crystal cathode
JPS57128436A (en) * 1981-02-02 1982-08-10 Koichi Kanetani Manufacture of lanthanum-boride thermionic emission electrode
US4468586A (en) * 1981-05-26 1984-08-28 International Business Machines Corporation Shaped electron emission from single crystal lanthanum hexaboride with intensity distribution
JPS5971232A (ja) * 1982-10-14 1984-04-21 Natl Inst For Res In Inorg Mater 表面酸化型炭化物フィールドエミッターの製造法
US6190579B1 (en) * 1997-09-08 2001-02-20 Integrated Thermal Sciences, Inc. Electron emission materials and components
JP2000021290A (ja) * 1998-07-03 2000-01-21 Canon Inc 電子放出素子、電子源、画像形成装置及びそれらの製造方法
US6680562B1 (en) 1999-08-20 2004-01-20 Fei Company Schottky emitter having extended life
US6387717B1 (en) * 2000-04-26 2002-05-14 Micron Technology, Inc. Field emission tips and methods for fabricating the same
JP3996774B2 (ja) 2002-01-09 2007-10-24 株式会社日立ハイテクノロジーズ パターン欠陥検査方法及びパターン欠陥検査装置
US7431856B2 (en) 2005-05-18 2008-10-07 National Research Council Of Canada Nano-tip fabrication by spatially controlled etching
CN100372047C (zh) * 2005-09-09 2008-02-27 清华大学 一种薄膜场发射显示器件及其场发射阴极的制备方法
US7888654B2 (en) * 2007-01-24 2011-02-15 Fei Company Cold field emitter
JP2009146705A (ja) * 2007-12-13 2009-07-02 Sumitomo Electric Ind Ltd 電子放出素子、電子源、電子線装置、及び電子放出素子の製造方法
CN102394204B (zh) * 2008-03-19 2014-10-08 清华大学 场发射电子源
JP2010157490A (ja) * 2008-12-02 2010-07-15 Canon Inc 電子放出素子および該電子放出素子を用いた表示パネル
JP5660564B2 (ja) * 2009-04-20 2015-01-28 独立行政法人物質・材料研究機構 希土類六ホウ化物冷陰極電界放出型電子源
CN102629538B (zh) * 2012-04-13 2014-03-19 吴江炀晟阴极材料有限公司 具有低逸出功和高化学稳定性的电极材料

Also Published As

Publication number Publication date
EP2787522A4 (en) 2016-04-27
EP2787522A1 (en) 2014-10-08
US20150054398A1 (en) 2015-02-26
WO2013152613A1 (zh) 2013-10-17
US9812279B2 (en) 2017-11-07
CN102629538B (zh) 2014-03-19
JP2015518245A (ja) 2015-06-25
EP2787522B1 (en) 2020-05-27
CN102629538A (zh) 2012-08-08

Similar Documents

Publication Publication Date Title
JP6458727B2 (ja) 低仕事関数及び高い化学的安定性を備えた電極材料
JP2015518245A5 (enExample)
JP5301168B2 (ja) 冷電界エミッタ
CN109804450B (zh) 电子束装置
JP4783239B2 (ja) 電子エミッタ材料および電子放出応用装置
JP2008181876A5 (enExample)
JP5559431B2 (ja) 粒子源及びその製造方法
JP4210131B2 (ja) 電子源及び電子源の使用方法
JP5363413B2 (ja) 電子源
EP2242084B1 (en) Method of manufacturing an electron source
JP4792404B2 (ja) 電子源の製造方法
JP5102968B2 (ja) 導電性針およびその製造方法
JP2005276720A (ja) 電界放出型電子銃およびそれを用いた電子ビーム応用装置
US8143774B2 (en) Carbon based field emission cathode and method of manufacturing the same
JP4032057B2 (ja) 電子源の製造方法
Barik et al. Cathode Technologies for Terahertz Source
JPWO2004073010A1 (ja) 電子銃
JP2006049293A (ja) 電界放出型電子銃およびそれを用いた電子ビーム応用装置
JP2005332677A (ja) 電子源の製造方法と使用方法
Mousa et al. Field Electron Emission Characteristics of Uncoated Alumel Tips
JP4916221B2 (ja) 冷陰極の製造方法、および、冷陰極を備えた装置の製造方法
Lysenkov Optimization of nanostructures for field emission cathodes
JP2006196186A (ja) 電子放出材料およびその製造方法とそれを用いた電界放出素子および画像描画素子
Kusunoki et al. MONOCROMATICITY OF HAFNIUM CARBIDE EMITTER AT ARIOUS TEMPERATURES

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150929

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20150929

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20151207

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20160720

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20161025

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170116

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170313

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170420

A524 Written submission of copy of amendment under article 19 pct

Free format text: JAPANESE INTERMEDIATE CODE: A524

Effective date: 20170420

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20170313

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20170809

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20180220

A601 Written request for extension of time

Free format text: JAPANESE INTERMEDIATE CODE: A601

Effective date: 20180514

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180709

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20180925

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20181120

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20181210

R150 Certificate of patent or registration of utility model

Ref document number: 6458727

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

LAPS Cancellation because of no payment of annual fees
S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R360 Written notification for declining of transfer of rights

Free format text: JAPANESE INTERMEDIATE CODE: R360

R371 Transfer withdrawn

Free format text: JAPANESE INTERMEDIATE CODE: R371

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313113

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250