JP2015517123A - 導波管およびエバネッセント場結合フォトニック検出器を提供する方法および装置 - Google Patents
導波管およびエバネッセント場結合フォトニック検出器を提供する方法および装置 Download PDFInfo
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- G02B6/4287—Optical modules with tapping or launching means through the surface of the waveguide
- G02B6/4291—Optical modules with tapping or launching means through the surface of the waveguide by accessing the evanescent field of the light guide
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4295—Coupling light guides with opto-electronic elements coupling with semiconductor devices activated by light through the light guide, e.g. thyristors, phototransistors
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- G—PHYSICS
- G02—OPTICS
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
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- G02B6/43—Arrangements comprising a plurality of opto-electronic elements and associated optical interconnections
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- G02B6/4201—Packages, e.g. shape, construction, internal or external details
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- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/4208—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms with optical elements reducing the sensitivity to optical feedback using non-reciprocal elements or birefringent plates, i.e. quasi-isolators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
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- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
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- G—PHYSICS
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- G02B6/4289—Optical modules with tapping or launching means through the surface of the waveguide by inducing bending, microbending or macrobending, to the light guide
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0232—Optical elements or arrangements associated with the device
- H01L31/02327—Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/101—Devices sensitive to infrared, visible or ultraviolet radiation
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- Optics & Photonics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Description
Claims (19)
- 光ビームを伝送するように構成された光導波管と、
前記光導波管に動作可能なように接続されたフォトニック検出器と、
を含み、
前記光導波管は、前記光ビームに対応して放射状に伝搬する複数のエバネッセント波を前記フォトニック検出器へと放射するように構成された曲げ部分を含む、
ことを特徴とする光接続。 - 前記フォトニック検出器は、共通点へと前記放射状に伝搬する複数のエバネッセント波を反射するように形成された少なくとも一つの反射端を含む、
ことを特徴とする請求項1に記載の光接続。 - 前記共通点は電極の位置である、
ことを特徴とする請求項2に記載の光接続。 - 前記光導波管は、第一の屈折率を有する材料で構成される内部コアと、第二の屈折率を有する材料で構成される外部クラッドと、を含む、
ことを特徴とする請求項1に記載の光接続。 - 前記第一の屈折率は前記第二の屈折率よりも大きい、
ことを特徴とする請求項4に記載の光接続。 - 前記内部コアは、約300nmから500nmの範囲内の幅を有する、
ことを特徴とする請求項4に記載の光接続。 - 前記光導波管の前記曲げ部分は、約1μmの曲率半径を有する、
ことを特徴とする請求項6に記載の光接続。 - 前記内部コアはシリコンを含み、前記外部クラッドは二酸化シリコンを含む、
ことを特徴とする請求項4に記載の光接続。 - 前記光導波管および前記フォトニック検出器は、共通基板上に集積される、
ことを特徴とする請求項1に記載の光接続。 - 前記光導波管は、
前記共通基板上に形成された第一の材料で構成された外部クラッドと、
前記第一の材料内に形成された第二の材料で構成された内部コアと、
を含む、
ことを特徴とする請求項9に記載の光接続。 - 前記光導波管は、前記フォトニック検出器の部分へと突合せ結合された端子端をさらに含む、
ことを特徴とする請求項2に記載の光接続。 - 前記光導波管の前記端子端に突合せ結合された前記フォトニック検出器の前記部分は、前記共通点へと前記端子端から脱漏した光ビームを反射するように構成された第二の反射端を含む、
ことを特徴とする請求項11に記載の光接続。 - 光エネルギー波を受信するように構成された半導体材料を含み、
前記半導体材料は、複数の受信された光エネルギー波を共通点へと反射するように形成された少なくとも一つの反射端を含む、
ことを特徴とするフォトニック検出器。 - 前記共通点は、前記フォトニック検出器内に位置する少なくとも一つの電極を含む、
ことを特徴とする請求項13に記載のフォトニック検出器。 - 前記フォトニック検出器は、約5μmから15μmの範囲内の幅を有する、
ことを特徴とする請求項13に記載のフォトニック検出器。 - 前記フォトニック検出器は、ゲルマニウム、シリコンゲルマニウム、インジウムガリウム砒素、及びインジウムホスフェイトの材料のうちの少なくとも1つを含む、
ことを特徴とする請求項13に記載のフォトニック検出器。 - 基板上にクラッドの材料を提供することと、
前記クラッドの材料内に、光導波管の内部コアをパターン化することであって、
前記内部コアは、前記内部コアによって伝送される光ビームに対応して放射状に伝播する複数のエバネッセント波を放射するように構成された曲げ部分を含む、ことと、
フォトニック検出器を形成することであって、前記フォトニック検出器は、放射状に伝播された複数のエバネッセント波を共通点に反射するように形成された少なくとも一つの反射端を含む、ことと、
を含む、
ことを特徴とする光接続を形成する方法。 - 前記共通点に電極を形成することをさらに含む、
ことを特徴とする請求項17に記載の方法。 - 前記内部コアをパターン化することは、約300から500nmの範囲内の幅及び約1μm以下の曲率半径を有するシリコン内部コアをパターン化することを含む、
ことを特徴とする請求項17に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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US13/452,064 US8995805B2 (en) | 2012-04-20 | 2012-04-20 | Method and apparatus providing a coupled photonic structure |
US13/452,064 | 2012-04-20 | ||
PCT/US2013/035789 WO2013158414A1 (en) | 2012-04-20 | 2013-04-09 | Method and apparatus providing a waveguide and an evanescent field coupled photonic detector |
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JP2015517123A true JP2015517123A (ja) | 2015-06-18 |
JP6072226B2 JP6072226B2 (ja) | 2017-02-01 |
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US (2) | US8995805B2 (ja) |
EP (1) | EP2839327B1 (ja) |
JP (1) | JP6072226B2 (ja) |
KR (1) | KR101928132B1 (ja) |
CN (2) | CN104380164A (ja) |
TW (1) | TWI475269B (ja) |
WO (1) | WO2013158414A1 (ja) |
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US8995805B2 (en) * | 2012-04-20 | 2015-03-31 | Micron Technology, Inc. | Method and apparatus providing a coupled photonic structure |
KR101677118B1 (ko) * | 2015-03-11 | 2016-11-18 | 주식회사 폴스랩 | 벤딩 손실을 이용한 광 파워 모니터 장치 |
KR102599514B1 (ko) | 2018-04-12 | 2023-11-06 | 삼성전자주식회사 | 광 검출기 구조체 |
CN108447877A (zh) * | 2018-05-16 | 2018-08-24 | 广东省半导体产业技术研究院 | 平面型光敏器件及其制作方法 |
CN108511468A (zh) * | 2018-05-16 | 2018-09-07 | 广东省半导体产业技术研究院 | 光敏器件及其制作方法 |
FI130454B (en) | 2019-05-24 | 2023-09-06 | Exfo Oy | Separation of data traffic from optical communication fiber |
US11067765B2 (en) * | 2019-11-27 | 2021-07-20 | Cisco Technology, Inc. | Evanescent coupling of photodiode with optical waveguide |
CN112349803B (zh) * | 2020-10-30 | 2022-09-09 | 武汉光谷信息光电子创新中心有限公司 | 一种锗硅光电探测器 |
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WO2013158414A1 (en) | 2013-10-24 |
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US9612413B2 (en) | 2017-04-04 |
US20130279848A1 (en) | 2013-10-24 |
CN109991706B (zh) | 2022-11-25 |
CN104380164A (zh) | 2015-02-25 |
EP2839327A1 (en) | 2015-02-25 |
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