JP2015513813A5 - - Google Patents
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- JP2015513813A5 JP2015513813A5 JP2014555729A JP2014555729A JP2015513813A5 JP 2015513813 A5 JP2015513813 A5 JP 2015513813A5 JP 2014555729 A JP2014555729 A JP 2014555729A JP 2014555729 A JP2014555729 A JP 2014555729A JP 2015513813 A5 JP2015513813 A5 JP 2015513813A5
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- analog
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- signal
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- 238000012545 processing Methods 0.000 claims 11
- 238000012805 post-processing Methods 0.000 claims 8
- 239000003990 capacitor Substances 0.000 claims 7
- 230000001143 conditioned effect Effects 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 238000013144 data compression Methods 0.000 claims 4
- 230000002596 correlated effect Effects 0.000 claims 3
- 230000010354 integration Effects 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 3
- 238000005070 sampling Methods 0.000 claims 3
- 230000001360 synchronised effect Effects 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US13/364,308 US8754972B2 (en) | 2012-02-01 | 2012-02-01 | Integrated multi-channel analog front end and digitizer for high speed imaging applications |
| US13/364,308 | 2012-02-01 | ||
| PCT/US2013/024240 WO2013116579A1 (en) | 2012-02-01 | 2013-02-01 | Integrated multi-channel analog front end and digitizer for high speed imaging applications |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015513813A JP2015513813A (ja) | 2015-05-14 |
| JP2015513813A5 true JP2015513813A5 (https=) | 2016-03-17 |
| JP6231019B2 JP6231019B2 (ja) | 2017-11-15 |
Family
ID=48869892
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014555729A Active JP6231019B2 (ja) | 2012-02-01 | 2013-02-01 | 高速画像化のための一体化されたマルチチャネルアナログフロントエンド及びデジタイザ |
Country Status (7)
| Country | Link |
|---|---|
| US (2) | US8754972B2 (https=) |
| EP (1) | EP2810244A1 (https=) |
| JP (1) | JP6231019B2 (https=) |
| CN (1) | CN104205160B (https=) |
| IL (1) | IL233867A (https=) |
| TW (1) | TWI562094B (https=) |
| WO (1) | WO2013116579A1 (https=) |
Families Citing this family (55)
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| US9793673B2 (en) | 2011-06-13 | 2017-10-17 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
| US8873596B2 (en) | 2011-07-22 | 2014-10-28 | Kla-Tencor Corporation | Laser with high quality, stable output beam, and long life high conversion efficiency non-linear crystal |
| US8947521B1 (en) * | 2011-08-08 | 2015-02-03 | Kla-Tencor Corporation | Method for reducing aliasing in TDI based imaging |
| US10197501B2 (en) | 2011-12-12 | 2019-02-05 | Kla-Tencor Corporation | Electron-bombarded charge-coupled device and inspection systems using EBCCD detectors |
| US8754972B2 (en) * | 2012-02-01 | 2014-06-17 | Kla-Tencor Corporation | Integrated multi-channel analog front end and digitizer for high speed imaging applications |
| CN102595066B (zh) * | 2012-03-05 | 2013-07-24 | 天津大学 | 低功耗数字域累加cmos-tdi图像传感器 |
| US9496425B2 (en) | 2012-04-10 | 2016-11-15 | Kla-Tencor Corporation | Back-illuminated sensor with boron layer |
| JP5490330B1 (ja) * | 2012-05-24 | 2014-05-14 | オリンパスメディカルシステムズ株式会社 | 画像データ受信装置及び画像データ伝送システム |
| US9601299B2 (en) | 2012-08-03 | 2017-03-21 | Kla-Tencor Corporation | Photocathode including silicon substrate with boron layer |
| JP6053398B2 (ja) * | 2012-09-03 | 2016-12-27 | キヤノン株式会社 | 撮像装置の駆動方法、撮像システムの駆動方法、撮像装置、撮像システム |
| US9151940B2 (en) | 2012-12-05 | 2015-10-06 | Kla-Tencor Corporation | Semiconductor inspection and metrology system using laser pulse multiplier |
| US9426400B2 (en) | 2012-12-10 | 2016-08-23 | Kla-Tencor Corporation | Method and apparatus for high speed acquisition of moving images using pulsed illumination |
| US8929406B2 (en) | 2013-01-24 | 2015-01-06 | Kla-Tencor Corporation | 193NM laser and inspection system |
| US9529182B2 (en) | 2013-02-13 | 2016-12-27 | KLA—Tencor Corporation | 193nm laser and inspection system |
| US9608399B2 (en) | 2013-03-18 | 2017-03-28 | Kla-Tencor Corporation | 193 nm laser and an inspection system using a 193 nm laser |
| US9478402B2 (en) | 2013-04-01 | 2016-10-25 | Kla-Tencor Corporation | Photomultiplier tube, image sensor, and an inspection system using a PMT or image sensor |
| US9347890B2 (en) | 2013-12-19 | 2016-05-24 | Kla-Tencor Corporation | Low-noise sensor and an inspection system using a low-noise sensor |
| US9748294B2 (en) | 2014-01-10 | 2017-08-29 | Hamamatsu Photonics K.K. | Anti-reflection layer for back-illuminated sensor |
| US9410901B2 (en) | 2014-03-17 | 2016-08-09 | Kla-Tencor Corporation | Image sensor, an inspection system and a method of inspecting an article |
| US9804101B2 (en) | 2014-03-20 | 2017-10-31 | Kla-Tencor Corporation | System and method for reducing the bandwidth of a laser and an inspection system and method using a laser |
| JP6192584B2 (ja) * | 2014-04-21 | 2017-09-06 | 三菱電機株式会社 | 撮像装置 |
| US9612993B2 (en) * | 2014-06-28 | 2017-04-04 | Intel Corporation | Dynamically configurable analog frontend circuitry |
| US9767986B2 (en) | 2014-08-29 | 2017-09-19 | Kla-Tencor Corporation | Scanning electron microscope and methods of inspecting and reviewing samples |
| CN104219468B (zh) * | 2014-09-15 | 2017-06-20 | 天津大学 | 高行频cmos‑tdi图像传感器 |
| US9419407B2 (en) | 2014-09-25 | 2016-08-16 | Kla-Tencor Corporation | Laser assembly and inspection system using monolithic bandwidth narrowing apparatus |
| US9748729B2 (en) | 2014-10-03 | 2017-08-29 | Kla-Tencor Corporation | 183NM laser and inspection system |
| WO2016161284A1 (en) * | 2015-04-03 | 2016-10-06 | Thorlabs, Inc. | Simultaneous multi-channel tdi imaging on a multi-tap imager |
| US9554074B2 (en) * | 2015-04-16 | 2017-01-24 | Omnivision Technologies, Inc. | Ramp generator for low noise image sensor |
| US9860466B2 (en) | 2015-05-14 | 2018-01-02 | Kla-Tencor Corporation | Sensor with electrically controllable aperture for inspection and metrology systems |
| US10748730B2 (en) | 2015-05-21 | 2020-08-18 | Kla-Tencor Corporation | Photocathode including field emitter array on a silicon substrate with boron layer |
| US9843756B2 (en) | 2015-05-27 | 2017-12-12 | Samsung Electronics Co., Ltd. | Imaging devices, arrays of pixels receiving photocharges in bulk of select transistor, and methods |
| US10462391B2 (en) | 2015-08-14 | 2019-10-29 | Kla-Tencor Corporation | Dark-field inspection using a low-noise sensor |
| CN105718850B (zh) * | 2015-10-21 | 2019-06-11 | 深圳芯启航科技有限公司 | 应用于指纹传感器的像素点采样方法和装置 |
| US9588240B1 (en) | 2015-10-27 | 2017-03-07 | General Electric Company | Digital readout architecture for four side buttable digital X-ray detector |
| US10283557B2 (en) | 2015-12-31 | 2019-05-07 | General Electric Company | Radiation detector assembly |
| US10686003B2 (en) | 2015-12-31 | 2020-06-16 | General Electric Company | Radiation detector assembly |
| US10313622B2 (en) | 2016-04-06 | 2019-06-04 | Kla-Tencor Corporation | Dual-column-parallel CCD sensor and inspection systems using a sensor |
| US10778925B2 (en) | 2016-04-06 | 2020-09-15 | Kla-Tencor Corporation | Multiple column per channel CCD sensor architecture for inspection and metrology |
| CN106027924B (zh) * | 2016-05-11 | 2018-10-23 | 吉林大学 | 高性能cmos图像传感器阵列模数转换器的数字校正方法 |
| US10090993B2 (en) * | 2016-08-19 | 2018-10-02 | Ali Corporation | Packaged circuit |
| US10175555B2 (en) | 2017-01-03 | 2019-01-08 | KLA—Tencor Corporation | 183 nm CW laser and inspection system |
| US11237872B2 (en) | 2017-05-23 | 2022-02-01 | Kla-Tencor Corporation | Semiconductor inspection and metrology systems for distributing job among the CPUs or GPUs based on logical image processing boundaries |
| US10509104B1 (en) * | 2018-08-13 | 2019-12-17 | Analog Devices Global Unlimited Company | Apparatus and methods for synchronization of radar chips |
| US11128094B2 (en) * | 2018-09-28 | 2021-09-21 | Maxim Integrated Products, Inc. | Pin encoded mode selection system |
| US10943760B2 (en) | 2018-10-12 | 2021-03-09 | Kla Corporation | Electron gun and electron microscope |
| US10724964B1 (en) | 2019-04-10 | 2020-07-28 | Kla-Tencor Corporation | Multi-sensor tiled camera with flexible electronics for wafer inspection |
| IL282680B2 (en) * | 2018-11-15 | 2025-02-01 | Kla Corp | Multi-sensor tile camera with flexible electronics for silicon wafer inspection |
| US11114491B2 (en) | 2018-12-12 | 2021-09-07 | Kla Corporation | Back-illuminated sensor and a method of manufacturing a sensor |
| US10820410B2 (en) | 2019-03-04 | 2020-10-27 | Quanta Computer Inc. | Loop shaped radiation reduction filter for high speed differential signal trace |
| JP7365823B2 (ja) * | 2019-08-23 | 2023-10-20 | ソニーセミコンダクタソリューションズ株式会社 | 固体撮像素子、撮像装置、および、固体撮像素子の制御方法 |
| US11933717B2 (en) | 2019-09-27 | 2024-03-19 | Kla Corporation | Sensitive optical metrology in scanning and static modes |
| CN111579462B (zh) * | 2020-06-20 | 2024-07-26 | 中国地震局地质研究所 | 室内模拟震后断层渗流愈合过程的多物理量测量系统 |
| CN113298690B (zh) * | 2021-07-28 | 2022-07-26 | 浙江华睿科技股份有限公司 | 一种图像数据处理方法、装置及电子设备 |
| CN113951849B (zh) * | 2021-11-02 | 2024-02-13 | 华润微电子控股有限公司 | 生物信号采集电路及鼠标 |
| CN115459783B (zh) * | 2022-09-05 | 2026-01-16 | 武汉中旗生物医疗电子有限公司 | 数据整序系统及方法 |
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| AU6178398A (en) * | 1997-02-21 | 1998-09-09 | Board Of Regents Of The University And Community College System Of Nevada, The | Method and system for computerized high-rate image processing |
| US6900888B2 (en) | 2001-09-13 | 2005-05-31 | Hitachi High-Technologies Corporation | Method and apparatus for inspecting a pattern formed on a substrate |
| JP4022862B2 (ja) * | 2002-06-11 | 2007-12-19 | ソニー株式会社 | 固体撮像装置及びその制御方法 |
| US7408683B2 (en) * | 2002-07-15 | 2008-08-05 | Brother Kogyo Kabushiki Kaisha | Image sensor for reading image and image reading apparatus including the image sensor |
| US20040012684A1 (en) * | 2002-07-16 | 2004-01-22 | Fairchild Imaging | Image reconstruction techniques for charge coupled devices |
| US6891488B1 (en) * | 2003-10-30 | 2005-05-10 | Intel Corporation | Sigma-delta conversion with analog, nonvolatile trimmed quantized feedback |
| JP4311181B2 (ja) | 2003-12-05 | 2009-08-12 | ソニー株式会社 | 半導体装置の制御方法および信号処理方法並びに半導体装置および電子機器 |
| US7952633B2 (en) | 2004-11-18 | 2011-05-31 | Kla-Tencor Technologies Corporation | Apparatus for continuous clocking of TDI sensors |
| JP2007149837A (ja) * | 2005-11-25 | 2007-06-14 | Tokyo Seimitsu Co Ltd | 画像欠陥検査装置、画像欠陥検査システム及び画像欠陥検査方法 |
| JP4888081B2 (ja) * | 2006-01-23 | 2012-02-29 | セイコーエプソン株式会社 | 撮像装置、撮像方法、撮像システム及び画像処理装置 |
| JP2007221453A (ja) * | 2006-02-16 | 2007-08-30 | Canon Inc | 放射線撮像装置及びその駆動方法 |
| JP2007251463A (ja) * | 2006-03-15 | 2007-09-27 | Renesas Technology Corp | 半導体集積回路装置 |
| JP4172504B2 (ja) * | 2006-06-22 | 2008-10-29 | ソニー株式会社 | 画像処理装置、撮像装置、および方法 |
| US7817197B2 (en) * | 2006-09-21 | 2010-10-19 | Mediatek Singapore Pte Ltd | Optical black calibration |
| DE102007030985B4 (de) | 2007-07-04 | 2009-04-09 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Bildsensor, Verfahren zum Betreiben eines Bildsensors und Computerprogramm |
| JP2009141401A (ja) * | 2007-12-03 | 2009-06-25 | Fujifilm Corp | 固体撮像装置 |
| US8624971B2 (en) | 2009-01-23 | 2014-01-07 | Kla-Tencor Corporation | TDI sensor modules with localized driving and signal processing circuitry for high speed inspection |
| US20110019044A1 (en) | 2009-07-21 | 2011-01-27 | Weng-Lyang Wang | Time Delay Integration Based MOS Photoelectric Pixel Sensing Circuit |
| US8451354B2 (en) | 2010-05-17 | 2013-05-28 | Commissariat A L'energie Atomique Et Aux Energies Alternatives | TDI image sensor in CMOS technology with high video capture rate |
| US8754972B2 (en) * | 2012-02-01 | 2014-06-17 | Kla-Tencor Corporation | Integrated multi-channel analog front end and digitizer for high speed imaging applications |
-
2012
- 2012-02-01 US US13/364,308 patent/US8754972B2/en active Active
-
2013
- 2013-01-30 TW TW102103563A patent/TWI562094B/zh active
- 2013-02-01 CN CN201380014322.5A patent/CN104205160B/zh active Active
- 2013-02-01 JP JP2014555729A patent/JP6231019B2/ja active Active
- 2013-02-01 EP EP13743326.4A patent/EP2810244A1/en not_active Withdrawn
- 2013-02-01 WO PCT/US2013/024240 patent/WO2013116579A1/en not_active Ceased
-
2014
- 2014-05-07 US US14/272,454 patent/US9462206B2/en active Active
- 2014-07-30 IL IL233867A patent/IL233867A/en active IP Right Grant
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