JP2015511708A5 - - Google Patents
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- Publication number
- JP2015511708A5 JP2015511708A5 JP2015500553A JP2015500553A JP2015511708A5 JP 2015511708 A5 JP2015511708 A5 JP 2015511708A5 JP 2015500553 A JP2015500553 A JP 2015500553A JP 2015500553 A JP2015500553 A JP 2015500553A JP 2015511708 A5 JP2015511708 A5 JP 2015511708A5
- Authority
- JP
- Japan
- Prior art keywords
- specific
- species
- gas species
- ion
- specific gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims description 71
- 150000002500 ions Chemical class 0.000 claims description 48
- 230000005284 excitation Effects 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 24
- 238000005040 ion trap Methods 0.000 claims description 18
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 229910000986 non-evaporable getter Inorganic materials 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 10
- 238000001179 sorption measurement Methods 0.000 claims description 10
- 238000003795 desorption Methods 0.000 claims description 5
- 238000005421 electrostatic potential Methods 0.000 claims description 4
- 239000012141 concentrate Substances 0.000 claims description 2
- 150000002431 hydrogen Chemical class 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201261610092P | 2012-03-13 | 2012-03-13 | |
| US61/610,092 | 2012-03-13 | ||
| PCT/US2013/030801 WO2013138446A1 (en) | 2012-03-13 | 2013-03-13 | Trace gas concentration in art ms traps |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018076592A Division JP6667571B2 (ja) | 2012-03-13 | 2018-04-12 | Ａｒｔ・ｍｓトラップにおける微量ガス濃度 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015511708A JP2015511708A (ja) | 2015-04-20 |
| JP2015511708A5 true JP2015511708A5 (enExample) | 2016-04-07 |
| JP6570998B2 JP6570998B2 (ja) | 2019-09-04 |
Family
ID=49161755
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015500553A Expired - Fee Related JP6570998B2 (ja) | 2012-03-13 | 2013-03-13 | Ａｒｔ・ｍｓトラップにおける微量ガス濃度 |
| JP2018076592A Expired - Fee Related JP6667571B2 (ja) | 2012-03-13 | 2018-04-12 | Ａｒｔ・ｍｓトラップにおける微量ガス濃度 |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018076592A Expired - Fee Related JP6667571B2 (ja) | 2012-03-13 | 2018-04-12 | Ａｒｔ・ｍｓトラップにおける微量ガス濃度 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US9714919B2 (enExample) |
| EP (1) | EP2825875B1 (enExample) |
| JP (2) | JP6570998B2 (enExample) |
| KR (2) | KR20140143403A (enExample) |
| CN (1) | CN104380099B (enExample) |
| SG (1) | SG11201405610PA (enExample) |
| WO (1) | WO2013138446A1 (enExample) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102013201499A1 (de) * | 2013-01-30 | 2014-07-31 | Carl Zeiss Microscopy Gmbh | Verfahren zur massenspektrometrischen Untersuchung von Gasgemischen sowie Massenspektrometer hierzu |
| GB2527867B (en) * | 2014-12-01 | 2016-06-29 | Ion Science Ltd | Detection of organics in water |
| WO2017047041A1 (ja) * | 2015-09-18 | 2017-03-23 | パナソニック株式会社 | 化学物質濃縮器および化学物質検出装置 |
| WO2019147748A2 (en) * | 2018-01-24 | 2019-08-01 | Rapiscan Systems, Inc. | Surface layer disruption and ionization utilizing an extreme ultraviolet radiation source |
| GB201802917D0 (en) | 2018-02-22 | 2018-04-11 | Micromass Ltd | Charge detection mass spectrometry |
| CN108479394B (zh) * | 2018-03-14 | 2021-01-08 | 中国科学院近代物理研究所 | 痕量气体同位素富集系统和方法 |
| JP2020088300A (ja) | 2018-11-30 | 2020-06-04 | 株式会社リコー | 酸化物形成用塗布液、酸化物膜の製造方法、及び電界効果型トランジスタの製造方法 |
| GB2592653B (en) * | 2020-03-05 | 2022-12-28 | Edwards Vacuum Llc | Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump |
| WO2021207494A1 (en) | 2020-04-09 | 2021-10-14 | Waters Technologies Corporation | Ion detector |
| CN118402037A (zh) | 2021-12-15 | 2024-07-26 | 水技术公司 | 具有集成放大器的感应式检测器 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| IT1183682B (it) * | 1985-05-24 | 1987-10-22 | Getters Spa | Compressore chimico e purificatore per isotopi di idrogeno |
| US4785666A (en) | 1986-12-19 | 1988-11-22 | Martin Marietta Corporation | Method of increasing the sensitivity of a leak detector in the probe mode |
| US5142143A (en) | 1990-10-31 | 1992-08-25 | Extrel Corporation | Method and apparatus for preconcentration for analysis purposes of trace constitutes in gases |
| US5426300A (en) | 1993-09-17 | 1995-06-20 | Leybold Inficon, Inc. | Portable GCMS system using getter pump |
| US6211516B1 (en) | 1999-02-09 | 2001-04-03 | Syagen Technology | Photoionization mass spectrometer |
| US6326615B1 (en) * | 1999-08-30 | 2001-12-04 | Syagen Technology | Rapid response mass spectrometer system |
| US6545268B1 (en) | 2000-04-10 | 2003-04-08 | Perseptive Biosystems | Preparation of ion pulse for time-of-flight and for tandem time-of-flight mass analysis |
| CA2381070C (en) * | 2000-06-14 | 2005-04-05 | Mitsubishi Heavy Industries, Ltd. | Detector of chemical substances and concentration-measuring method of chemical substances |
| WO2002049067A2 (en) * | 2000-12-14 | 2002-06-20 | Mks Instruments, Inc. | Ion storage system |
| JP3572256B2 (ja) | 2000-12-19 | 2004-09-29 | 三菱重工業株式会社 | 化学物質検出装置 |
| US7034292B1 (en) | 2002-05-31 | 2006-04-25 | Analytica Of Branford, Inc. | Mass spectrometry with segmented RF multiple ion guides in various pressure regions |
| GB0404285D0 (en) * | 2004-02-26 | 2004-03-31 | Shimadzu Res Lab Europe Ltd | A tandem ion-trap time-of flight mass spectrometer |
| CN1811408B (zh) * | 2005-01-28 | 2010-04-28 | 方向 | 内部光电离离子阱质量分析装置及其方法 |
| US7476852B2 (en) | 2005-05-17 | 2009-01-13 | Honeywell International Inc. | Ionization-based detection |
| GB0526245D0 (en) | 2005-12-22 | 2006-02-01 | Shimadzu Res Lab Europe Ltd | A mass spectrometer using a dynamic pressure ion source |
| GB0607542D0 (en) | 2006-04-13 | 2006-05-24 | Thermo Finnigan Llc | Mass spectrometer |
| TWI484529B (zh) | 2006-11-13 | 2015-05-11 | Mks Instr Inc | 離子阱質譜儀、利用其得到質譜之方法、離子阱、捕捉離子阱內之離子之方法和設備 |
| CN101320016A (zh) | 2008-01-29 | 2008-12-10 | 复旦大学 | 一种用多个离子阱进行串级质谱分析的方法 |
| JP5449701B2 (ja) | 2008-05-28 | 2014-03-19 | 株式会社日立ハイテクノロジーズ | 質量分析計 |
| US20100163724A1 (en) * | 2008-12-30 | 2010-07-01 | University Of North Texas | Applications of hydrogen gas getters in mass spectrometry |
| ITMI20090402A1 (it) | 2009-03-17 | 2010-09-18 | Getters Spa | Sistema di pompaggio combinato comprendente una pompa getter ed una pompa ionica |
| EP2430646B1 (en) * | 2009-05-06 | 2019-02-27 | MKS Instruments, Inc. | Electrostatic ion trap |
| US8481926B2 (en) | 2009-09-04 | 2013-07-09 | Dh Technologies Development Pte. Ltd. | Method, system and apparatus for filtering ions in a mass spectrometer |
-
2013
- 2013-03-13 EP EP13761441.8A patent/EP2825875B1/en active Active
- 2013-03-13 KR KR1020147028692A patent/KR20140143403A/ko not_active Ceased
- 2013-03-13 SG SG11201405610PA patent/SG11201405610PA/en unknown
- 2013-03-13 JP JP2015500553A patent/JP6570998B2/ja not_active Expired - Fee Related
- 2013-03-13 US US14/384,782 patent/US9714919B2/en not_active Expired - Fee Related
- 2013-03-13 KR KR1020187019208A patent/KR20180081633A/ko not_active Ceased
- 2013-03-13 CN CN201380024283.7A patent/CN104380099B/zh active Active
- 2013-03-13 WO PCT/US2013/030801 patent/WO2013138446A1/en not_active Ceased
-
2018
- 2018-04-12 JP JP2018076592A patent/JP6667571B2/ja not_active Expired - Fee Related
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