CN104380099B - Art ms阱中的痕量气体浓度 - Google Patents

Art ms阱中的痕量气体浓度 Download PDF

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Publication number
CN104380099B
CN104380099B CN201380024283.7A CN201380024283A CN104380099B CN 104380099 B CN104380099 B CN 104380099B CN 201380024283 A CN201380024283 A CN 201380024283A CN 104380099 B CN104380099 B CN 104380099B
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China
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species
specific
ion
gas
gas species
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Chinese (zh)
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CN104380099A (zh
Inventor
G·A·布鲁克尔
T·C·斯文尼
G·J·拉斯邦
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MKS Instruments Inc
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MKS Instruments Inc
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/64—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using wave or particle radiation to ionise a gas, e.g. in an ionisation chamber
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B35/00—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for
    • F04B35/04—Piston pumps specially adapted for elastic fluids and characterised by the driving means to their working members, or by combination with, or adaptation to, specific driving engines or motors, not otherwise provided for the means being electric
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/40—Concentrating samples
    • G01N1/405—Concentrating samples by adsorption or absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/06—Electron- or ion-optical arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/24—Vacuum systems, e.g. maintaining desired pressures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
    • H01J49/4205—Device types
    • H01J49/4245—Electrostatic ion traps
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/02—Details
    • H01J49/10—Ion sources; Ion guns
    • H01J49/16—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission
    • H01J49/161—Ion sources; Ion guns using surface ionisation, e.g. field-, thermionic- or photo-emission using photoionisation, e.g. by laser
    • H01J49/162—Direct photo-ionisation, e.g. single photon or multi-photon ionisation

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
CN201380024283.7A 2012-03-13 2013-03-13 Art ms阱中的痕量气体浓度 Active CN104380099B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261610092P 2012-03-13 2012-03-13
US61/610,092 2012-03-13
PCT/US2013/030801 WO2013138446A1 (en) 2012-03-13 2013-03-13 Trace gas concentration in art ms traps

Publications (2)

Publication Number Publication Date
CN104380099A CN104380099A (zh) 2015-02-25
CN104380099B true CN104380099B (zh) 2017-08-25

Family

ID=49161755

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201380024283.7A Active CN104380099B (zh) 2012-03-13 2013-03-13 Art ms阱中的痕量气体浓度

Country Status (7)

Country Link
US (1) US9714919B2 (enExample)
EP (1) EP2825875B1 (enExample)
JP (2) JP6570998B2 (enExample)
KR (2) KR20180081633A (enExample)
CN (1) CN104380099B (enExample)
SG (1) SG11201405610PA (enExample)
WO (1) WO2013138446A1 (enExample)

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DE102013201499A1 (de) * 2013-01-30 2014-07-31 Carl Zeiss Microscopy Gmbh Verfahren zur massenspektrometrischen Untersuchung von Gasgemischen sowie Massenspektrometer hierzu
GB2527867B (en) * 2014-12-01 2016-06-29 Ion Science Ltd Detection of organics in water
US20180149565A1 (en) * 2015-09-18 2018-05-31 Panasonic Corporation Chemical substance concentrator and chemical substance detection device
US10665446B2 (en) * 2018-01-24 2020-05-26 Rapiscan Systems, Inc. Surface layer disruption and ionization utilizing an extreme ultraviolet radiation source
GB201802917D0 (en) 2018-02-22 2018-04-11 Micromass Ltd Charge detection mass spectrometry
CN108479394B (zh) * 2018-03-14 2021-01-08 中国科学院近代物理研究所 痕量气体同位素富集系统和方法
JP2020088300A (ja) 2018-11-30 2020-06-04 株式会社リコー 酸化物形成用塗布液、酸化物膜の製造方法、及び電界効果型トランジスタの製造方法
GB2592653B (en) * 2020-03-05 2022-12-28 Edwards Vacuum Llc Vacuum module and vacuum apparatus and method for regeneration of a volume getter vacuum pump
WO2021207494A1 (en) 2020-04-09 2021-10-14 Waters Technologies Corporation Ion detector
WO2023111707A1 (en) 2021-12-15 2023-06-22 Waters Technologies Corporation An inductive detector with integrated amplifier

Citations (4)

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US6326615B1 (en) * 1999-08-30 2001-12-04 Syagen Technology Rapid response mass spectrometer system
US20090294661A1 (en) * 2008-05-28 2009-12-03 Hitachi High-Technologies Corporation Mass spectrometer and mass spectrometry method
US20100084549A1 (en) * 2006-11-13 2010-04-08 Alexei Victorovich Ermakov Electrostatic Ion Trap
US20100163724A1 (en) * 2008-12-30 2010-07-01 University Of North Texas Applications of hydrogen gas getters in mass spectrometry

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IT1183682B (it) 1985-05-24 1987-10-22 Getters Spa Compressore chimico e purificatore per isotopi di idrogeno
US4785666A (en) * 1986-12-19 1988-11-22 Martin Marietta Corporation Method of increasing the sensitivity of a leak detector in the probe mode
US5142143A (en) * 1990-10-31 1992-08-25 Extrel Corporation Method and apparatus for preconcentration for analysis purposes of trace constitutes in gases
US5426300A (en) 1993-09-17 1995-06-20 Leybold Inficon, Inc. Portable GCMS system using getter pump
US6211516B1 (en) 1999-02-09 2001-04-03 Syagen Technology Photoionization mass spectrometer
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EP1291651A4 (en) * 2000-06-14 2009-03-25 Mitsubishi Heavy Ind Ltd DEVICE FOR DETECTING CHEMICAL SUBSTANCE AND METHOD FOR MEASURING THE CONCENTRATION OF THIS CHEMICAL SUBSTANCE
DE60140314D1 (de) * 2000-12-14 2009-12-10 Mks Instr Inc Ionenspeicher
JP3572256B2 (ja) * 2000-12-19 2004-09-29 三菱重工業株式会社 化学物質検出装置
US7034292B1 (en) 2002-05-31 2006-04-25 Analytica Of Branford, Inc. Mass spectrometry with segmented RF multiple ion guides in various pressure regions
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CN1811408B (zh) 2005-01-28 2010-04-28 方向 内部光电离离子阱质量分析装置及其方法
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US6326615B1 (en) * 1999-08-30 2001-12-04 Syagen Technology Rapid response mass spectrometer system
US20100084549A1 (en) * 2006-11-13 2010-04-08 Alexei Victorovich Ermakov Electrostatic Ion Trap
US20090294661A1 (en) * 2008-05-28 2009-12-03 Hitachi High-Technologies Corporation Mass spectrometer and mass spectrometry method
US20100163724A1 (en) * 2008-12-30 2010-07-01 University Of North Texas Applications of hydrogen gas getters in mass spectrometry

Also Published As

Publication number Publication date
EP2825875A1 (en) 2015-01-21
CN104380099A (zh) 2015-02-25
US9714919B2 (en) 2017-07-25
EP2825875A4 (en) 2016-05-04
JP2015511708A (ja) 2015-04-20
KR20180081633A (ko) 2018-07-16
SG11201405610PA (en) 2014-11-27
WO2013138446A1 (en) 2013-09-19
KR20140143403A (ko) 2014-12-16
JP6570998B2 (ja) 2019-09-04
JP6667571B2 (ja) 2020-03-18
JP2018136335A (ja) 2018-08-30
US20150028882A1 (en) 2015-01-29
EP2825875B1 (en) 2019-05-08

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